CN103261106B - The manufacture method of glass plate and device for producing glass sheet - Google Patents

The manufacture method of glass plate and device for producing glass sheet Download PDF

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Publication number
CN103261106B
CN103261106B CN201280003961.7A CN201280003961A CN103261106B CN 103261106 B CN103261106 B CN 103261106B CN 201280003961 A CN201280003961 A CN 201280003961A CN 103261106 B CN103261106 B CN 103261106B
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Prior art keywords
glass
temperature
sheet material
space
air pressure
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CN103261106A (en
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苅谷浩幸
中岛公彦
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Avanstrate Inc
Avanstrate Korea Inc
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Avanstrate Inc
Avanstrate Korea Inc
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06—Forming glass sheets
    • C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06—Forming glass sheets
    • C03B17/067—Forming glass sheets combined with thermal conditioning of the sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

The present invention relates to manufacture method and the device for producing glass sheet of glass plate, wherein, in the time manufacturing glass plate, frit is melted and formation melten glass, and described melten glass is supplied to formed body, described formed body is configured in the molding space being surrounded by the moulding furnace wall of the furnace wall as forming furnace; Use glass tube down-drawing that the melten glass that is supplied to described formed body is shaped to sheet material glass; Afterwards, described sheet material glass is carried out in space coolingly in annealing, described annealing space is the space that is positioned at described molding space below, and it is by the furnace wall of described annealing furnace, the furnace wall of annealing surrounds; Be arranged in described annealing furnace below cut-out space, described sheet material glass after annealing is cut off, thereby formation glass plate, now, carry out air pressure control, make the air pressure of stove space outerpace be greater than the air pressure in the outside of building, described building accommodates described molding space, described annealing space and described cut-out space, and described stove space outerpace is positioned at the top of being divided the described cut-out space in the building space obtaining by the outer surface of the internal face of described building, described moulding furnace wall and the outer surface of described annealing furnace wall.

Description

The manufacture method of glass plate and device for producing glass sheet
Technical field
The present invention relates to manufacture method and the device for producing glass sheet of glass plate.
Background technology
Existed the various methods such as drop-down (downdraw) method of use to manufacture the method for glass plate in the past. For example, as manufacturing in overflow down draw (overflowdowndraw) method of one of method of glass plate, first, melten glass is supplied in the formed body being configured in forming furnace. Then, the melten glass of supply is overflowed from formed body. Then, make the melten glass that overflows be shaped to the glass (sheet material glass) of continuous sheet at the interflow, bottom of formed body. In addition, below the sheet material glass collaborating in the bottom of formed body is further carried to, and anneal in annealing furnace. Then, be desired size cutting off in space by the sheet material severing of glass after annealing, form glass plate.
In the time manufacturing glass plate, require stably to produce the glass plate that meets specified quality. For example, in the disclosed technology of patent documentation 1, in the situation that manufacturing glass plate by overflow downdraw, the air pressure of the outer space to forming furnace and/or annealing furnace pressurizes, reduce thus along the sheet material glass in annealing furnace and the ascending air producing, and suppressed the temperature change in annealing furnace. And, reduce thus plane strain.
Prior art document
Patent documentation
Patent documentation 1: TOHKEMY 2009-173525 communique
Summary of the invention
Invent problem to be solved
But also there are the following problems: in the situation of only outer space of forming furnace and/or annealing furnace being pressurizeed, steady production meets the glass plate of specified quality fully. For example, existence cannot fully suppress particle and adhere to such problem to sheet material glass or glass plate in forming furnace or annealing furnace. If particle is attached on glass plate, exists and glass plate is produced to the problems such as damage. In addition, in recent years, along with the maximization of glass plate, the deflection of the glass plate in the final manufacturing procedure of glass plate (grinding, bale packing etc.) or display manufacturing operation increases. Therefore,, in the final manufacturing procedure or display manufacturing operation of glass plate, the damage of the glass plate being caused by particle can cause the problem of glass plate breakage remarkable.
Therefore, problem of the present invention is to provide a kind of manufacture method of glass plate and the manufacturing installation of glass plate, and the method can solve problem as above, can stably produce the glass plate that meets specified quality.
For solving the method for problem
The 1st mode of the present invention is a kind of manufacture method of glass plate. This manufacture method has: melt operation, wherein, frit is melted and formation melten glass; Supply with operation, wherein, described melten glass is supplied to formed body, described formed body is configured in by the furnace wall of forming furnace, molding space that moulding furnace wall surrounds; Molding procedure, wherein, is used glass tube down-drawing to be shaped to sheet material glass by melten glass in described formed body; Annealing operation, wherein, anneals to described sheet material glass in space in annealing, and described annealing space is the space that is positioned at described molding space below, and it is by the furnace wall of described annealing furnace, the furnace wall of annealing surrounds; Cut off operation, wherein, be arranged in described annealing furnace below cut-out space to annealing after described sheet material glass cut off.
Carry out air pressure control, make the air pressure of stove space outerpace be greater than the air pressure in the outside of building, described building accommodates described molding space, described annealing space and described cut-out space, and described stove space outerpace is positioned at the top of being divided the described cut-out space in the building space obtaining by the outer surface of the internal face of described building, described moulding furnace wall and the outer surface of described annealing furnace wall.
The 2nd mode of the present invention is a kind of manufacturing installation of glass plate. This manufacturing installation comprises: forming furnace, and it is by utilizing moulding furnace wall to surround and form be shaped to the molding space of sheet material glass by melten glass; Annealing furnace, it is positioned at the below of described forming furnace, and this annealing furnace is to form by the utilization annealing space that furnace wall surrounds for described sheet material glass is annealed of annealing; Shearing device, it is configured in the cut-out space of the below that is arranged in described annealing furnace, and this shearing device is for cutting off the described sheet material glass after annealing; Control module, it is for carrying out air pressure control, make the air pressure of stove space outerpace be greater than the air pressure in the outside of building, described building accommodates described molding space, described annealing space and described cut-out space, and described stove space outerpace is positioned at the top of being divided the described cut-out space in the building space obtaining by the outer surface of the internal face of described building, described moulding furnace wall and the outer surface of described annealing furnace wall.
In addition, as preferred the 1st technical scheme, in described air pressure control, the air pressure of stove space outerpace is made as to P1, the air pressure in the outside of building is made as in the situation of P2, the mode of setting up according to the relation of 0 < P1-P2≤40Pa is controlled the air pressure of stove space outerpace.
In addition, as preferred the 2nd technical scheme, in described air pressure control, the air pressure that cuts off space is made as in the situation of P3, the mode of setting up according to the relation of 0 < P3-P2≤40Pa is further controlled the air pressure that cuts off space.
In addition, as preferred the 3rd technical scheme, in air pressure control, the mode that is greater than the air pressure that cuts off space according to the air pressure in annealing space is controlled the air pressure that cuts off space.
In addition, as preferred the 4th technical scheme, in air pressure control, become larger mode according to the air pressure of the upstream wing furnace space outerpace of the flow direction the closer to sheet material glass the air pressure of stove space outerpace is controlled.
In addition, as preferred the 5th technical scheme, in described annealing operation or described annealing space, for the central portion of the width at described sheet material glass, make tension force act on the flow direction of sheet material glass, at least add that from the annealing point temperature of glass strain point temperature that the temperature of 150 DEG C becomes glass deducts the temperature province of the temperature of 200 DEG C in the temperature of the central portion of the width of described sheet material glass, carry out temperature control according to the mode that the cooling velocity of the central portion of the width of described sheet material glass is faster than the cooling velocity at the both ends of described width.
In addition, as preferred the 6th technical scheme, in described molding procedure or described molding space, the region more than softening point temperature that is glass in the temperature of the central portion of the width of described sheet material glass, controls the temperature of described sheet material glass lower than the temperature of the folded central portion in described both ends and the uniform mode of temperature of described central portion according to the temperature at the both ends of the width of described sheet material glass. Further, in described annealing operation or described annealing space, for the tension force of the flow direction of the central portion effect sheet material glass of the width at described sheet material glass, temperature at the described central portion of described sheet material glass is less than in the softening point temperature of glass and the region more than strain point temperature at glass, and the mode reducing to described both ends from described central portion according to the Temperature Distribution of the width of described sheet material glass is controlled the temperature of described sheet material glass. Further, in the temperature province of the strain point temperature that is glass in the temperature of the described central portion of described sheet material glass, according to the temperature of eliminating the described both ends of width of described sheet material glass and the mode of the thermograde of described central portion and control described sheet material glass.
In the 6th technical scheme, can the furnace inner space being formed by described molding space and described annealing space will be arranged on for the thermostat unit of controlling described temperature.
In addition, as preferred the 7th technical scheme, in described annealing operation or described annealing space, for the tension force of the flow direction of the central portion effect sheet material glass of the width at described sheet material glass, temperature at the described central portion of described sheet material glass is less than in the region of strain point temperature of glass, and the mode reducing to described central portion according to the described both ends from described sheet material glass is controlled the temperature of described sheet material glass.
In addition, as preferred the 8th technical scheme, in described annealing operation or described annealing space, in the transfer roller of the described sheet material glass of carrying, the peripheral speed of the transfer roller in the downstream of the position of the annealing point temperature that the temperature that makes to be arranged on described sheet material glass is glass is the peripheral speed fast 0.03%～2% of the transfer roller of the temperature province below the softening point temperature of the above and glass of glass transition temperature than the temperature that is arranged on described sheet material glass.
Described the 1st～8th optimal technical scheme can be applicable to respectively the manufacture method of glass plate of described the 1st mode and the manufacturing installation of the glass plate of the 2nd mode separately, further, the complex technique scheme obtaining even if combine at least 2 technical schemes in described the 1st～8th optimal technical scheme also can be applicable to respectively the manufacture method of glass plate of the 1st mode and the manufacturing installation of the glass plate of the 2nd mode.
The effect of invention
The particle that utilizes the present invention can suppress on glass plate adheres to.
Brief description of the drawings
Fig. 1 is the flow chart of a part for the manufacture method of the glass plate that relates to of present embodiment.
Fig. 2 is the schematic diagram that mainly shows fusing device included in device for producing glass sheet.
Fig. 3 is the schematic diagram that interior of building is shown.
Fig. 4 is the side schematic view roughly of shaped device.
Fig. 5 is the schematic diagram of the expression interior of building for space in building is described.
Fig. 6 is the control module figure of control device.
Fig. 7 is the schematic diagram of the interior of building that illustrates that variation 1A relates to.
Fig. 8 is the schematic diagram of the interior of building that illustrates that variation 1F relates to.
Detailed description of the invention
Following statement in this description provides as follows.
The central portion of sheet material glass refers to the center of sheet material glass width in the width of sheet material glass width.
The end of sheet material glass refers to that 100mm is with interior scope from the edge of sheet material glass width.
Strain point temperature refers to when glass viscosity is made as to η, the temperature of the glass plate that log η is 14.5.
Annealing point temperature refers to that log η is the temperature of 13 glass.
Softening point temperature refers to that log η is the temperature of 7.6 glass.
Glass transition temperature refers to the temperature of glass when cooled liquid changes vitreousness into.
The present inventor finds: only pressurize by the air pressure of the outer space to forming furnace and/or annealing furnace and the reason that cannot realize sufficient steady production is in building and building outside between the magnitude relationship of air pressure. More specifically, found that the reason that the quality of glass plate is declined is, the air pressure that is less than building outside at the air pressure in building, air flows in building from building outside. Therefore, in order to prevent that air is from building in side inflow building, considered to improve the air-tightness of building, but the gap of eliminating building completely, it is very difficult making it completely airtight. Air flows to air pressure lower from air pressure higher position, and therefore the air pressure in building is less than in the situation of air pressure in building outside, and the air in building outside can flow in building by the gap of building. Gap from building outside by this building etc. and leaked-in air can cause that the particle glass plate adheres to or forming furnace or annealing furnace in temperature controlled precise decreasing, therefore cannot steady production meet the glass plate of specified quality. Therefore, the present inventor draws following opinion: the problem of adhering in order to solve the particle of glass plate, as long as by making air pressure in the building air pressure higher than building outside, the air that suppresses thus building outside flows in building. In addition, also draw following opinion: in order to suppress the temperature controlled precise decreasing in forming furnace or annealing furnace, as long as control the difference of the air pressure outside air pressure and the building in building.
Below, the glass plate manufacturing method of with reference to accompanying drawing, the device for producing glass sheet 100 by present embodiment being manufactured to glass plate describes.
(summary of the manufacture method of glass plate)
Fig. 1 is the flow chart of a part for the manufacture method of the glass plate that relates to of present embodiment. Below, use Fig. 1 to describe the manufacture method of glass plate.
Glass plate is manufactured and is obtained via various operations in building B. Particularly, as shown in Figure 1, glass plate melts operation ST1, clarification operation ST2, the operation that homogenizes ST3, supplies with operation ST4, molding procedure ST5, annealing operation ST6 and cuts off the various operations of operation ST7 and manufacture through comprising. Below, these operations are described.
Melting in operation ST1, by being heated, frit make its melting form melten glass. In clarification operation ST2, melten glass is clarified. Homogenizing in operation ST3, melten glass is homogenized.
Supplying with in operation ST4, melten glass is supplied to the shaped device 300 (with reference to Fig. 2) for carrying out moulding. In molding procedure ST5, melten glass is shaped to the sheet material glass SG of sheet. Preferably by glass tube down-drawing, particularly overflow downdraw, melten glass is shaped to the sheet material glass SG of sheet. In annealing operation ST6, the sheet material glass SG of moulding in molding procedure ST5 is annealed. Cutting off in operation ST7, by the sheet material glass SG (with reference to Fig. 3) after annealing thus cut off and form glass plate G (with reference to Fig. 3) every the length of regulation.
It should be noted that, after the glass plate G that has carried out cutting off every the length of regulation, be further cut off, thereby and grind and cut/grind, clean, check formation glass plate (do not mark mark and be only expressed as the glass plate that glass plate means final manufacture).
(summary of device for producing glass sheet 100)
Fig. 2 is the schematic diagram that mainly shows fusing device included in device for producing glass sheet 100 200. Fig. 3 is the schematic diagram (it should be noted that, represent shaped device 300 and forming furnace 40 and annealing furnace 50 etc. in Fig. 3 by schematic schematic cross-section) that holds or be provided with the inside of the building B of various devices contained in device for producing glass sheet 100 etc. Below device for producing glass sheet 100 is described.
Device for producing glass sheet 100 is configured in building B, mainly possesses fusing device 200, shaped device 300 and shearing device 400.
(formation of fusing device 200)
Fusing device 200 is for melting operation ST1, clarification operation ST2, the operation that homogenizes ST3 and supplying with the device of operation ST4. As shown in Figure 2, fusing device 200 has the groove 201 of melting, defecator 202, tank diameter 203.
Melting groove 201 is the grooves for melting frit. In melting groove 201, melt operation ST1. Defecator 202 is for the groove from remove bubble the melten glass that melts groove 201 meltings. In defecator 202, clarify operation ST2. Defecator 203 stirs melten glass. The operation that homogenizes in tank diameter 203 ST3. By comprising that the 1st pipe arrangement 204 is connected with the glass supply pipe of the 2nd pipe arrangement 205 melting between groove 201, defecator 202, tank diameter 203 and shaped device 300.
(formation of shaped device 300)
Fig. 4 is the schematic side view of shaped device 300. Fig. 5 is the schematic diagram of the inside of the expression building B for space S in building is described.
Shaped device 300 is the devices for carrying out molding procedure ST5 and annealing operation ST6.
Shaped device 300 mainly has formed body 310, atmosphere partition member 320, chill roll 330, cooling with temperature adjustment unit 330a, transfer roller 340a～340h and temperature adjustment unit 350a～350g (with reference to Fig. 4).
Below its formation is described.
(formed body 310)
As shown in Figure 3, formed body 310 is positioned at the upper section of shaped device 300, and it has the function that the melten glass flowing out from fusing device 200 (representing with symbol M G) is shaped to the sheet material glass of sheet among Fig. 3, Fig. 4. The cross sectional shape that formed body 310 cuts off in the vertical direction has wedge-type shape, and it is made up of brick.
(atmosphere partition member 320)
As shown in Figure 3 and Figure 4, atmosphere partition member 320 is the plate-shaped members that are configured near of the bottom 313 of formed body 310. Almost horizontal arrangement is in the both sides of the thickness direction of melten glass for atmosphere partition member 320, and then described melten glass flows to the downstream of the 1st direction at 313 interflow, place, bottom of formed body 310. Atmosphere partition member 320 is brought into play function as heat insulating material. , atmosphere partition member 320, by separating its upper and lower space, suppresses the downward side shifting of upside of heat from atmosphere partition member 320 thus.
(chill roll 330)
Chill roll 330 is configured in the below of atmosphere partition member 320. In addition, chill roll 330 is disposed at the both sides of thickness direction of melten glass and near of the two side portions of its width, and then described melten glass flows to the downstream of the 1st direction at 313 interflow, place, bottom of formed body 310. Chill roll 330 contacts with the two side portions of the width of the melten glass at 313 interflow, place, bottom at formed body 310, carries out cooling thus to this melten glass. More specifically, chill roll 330 is pulled down to melten glass in the downstream of the 1st direction, carries out thus cooling in the thickness formed sheet glass SG with desired. It should be noted that, in this description, the mobile direction of sheet material glass SG is called to the 1st direction.
Herein, formed body 310, atmosphere partition member 320 and chill roll 330 are configured in molding space S1 (space representing with left side oblique line of Fig. 5). Molding space S1 be by the furnace wall of forming furnace 40, moulding furnace wall 41 inner face and comprise the plane FS1 above of partition member 42 and the space that surrounds. It should be noted that, partition member 42 is the parts that are separated into forming furnace 40 (downstream of the 1st direction of moulding furnace wall 41) and annealing furnace described later 50 (upstream extremity of the 1st direction of annealing described later furnace wall 51), and it has used the parts of writing board shape. Moulding furnace wall 41 refers to the furnace wall of forming furnace 40, and the cross sectional shape cutting off along the 1st direction has the shape of コ. In forming furnace 40, carry out molding procedure ST5. The space being made up of molding space S1 and annealing space S 2 described later is called to furnace inner space.
(transfer roller 340a～340h)
Transfer roller 340a～340h according to the mode in the 1st direction with predetermined distance be configured in chill roll 330 below. In addition, transfer roller 340a～340h is configured in respectively the both sides of the thickness direction of sheet material glass SG. Transfer roller 340a～340h is the downstream traction to the 1st direction by sheet material glass SG.
(temperature adjustment unit 350a～350g, cooling with temperature adjustment unit 330a)
Temperature adjustment unit 350a～350g is temperature for sheet material glass SG, is accurately that near atmosphere temperature sheet material glass SG is adjusted the machine of (being particularly to heat up), and described temperature adjustment unit 350a～350g disposes more than 2 and on the width of sheet material glass SG and also disposes more than 2 in the 1st direction. The cooling below that is configured in the 1st direction of chill roll 330 with temperature adjustment unit 330a, its for the temperature for sheet material glass SG, be accurately that near atmosphere temperature sheet material glass SG is adjusted. Cooling with temperature adjustment unit 330a according to making the thickness of sheet material glass SG of the moulding condition of high temperature in the near future or mode that warpage reduces carry out cooling.
Cooling be configured in (space representing with left side oblique line in Fig. 5) in molding space S1 with temperature adjustment unit 330a herein.
In addition, transfer roller 340a～340h and temperature adjustment unit 350a～350g are configured in annealing space S 2 (space representing with right side oblique line of Fig. 5). Annealing space S 2 refers to the space being formed by the annealing furnace 50 of below that is configured in forming furnace 40. More specifically, its be by the furnace wall of annealing furnace 50, anneal furnace wall 51 inner face, comprise plane FS2 below partition member 42, comprise the plane FS3 of downstream end face of the 1st direction of the furnace wall 51 of annealing and the space that surrounds.
In annealing space S 2, utilize transfer roller 340a～340h downstream traction to the 1st direction by sheet material glass SG, make thus the annealing operation ST6 of sheet material glass SG annealing (passing to Hookean region from adhesive region through viscoplasticity region). In annealing operation ST6, temperature adjustment unit 350a～350g adjusts to suppress plane strain and the percent thermal shrinkage of sheet material glass SG the temperature of sheet material glass SG. It should be noted that, near separately of temperature adjustment unit 350a～350g, dispose the temperature sensor of the atmosphere temperature detecting unit that more than 2 conducts detects near atmosphere temperature sheet material glass SG along the width of sheet material glass SG. These 2 above temperature sensors are called to temperature sensor unit 380 (with reference to Fig. 6) herein.
(shearing device 400)
In shearing device 400, cut off operation ST7. Shearing device 400 is configured in the cut-out space S 3 (description) of the below that is arranged in annealing furnace 50. Shearing device 400 cuts off the sheet material glass SG in the downstream that flows to the 1st direction shaped device 300 from the vertical direction of the length face with respect to sheet material glass SG. Thus, sheet material glass SG forms 2 above glass plate G with specific length.
(space S in building)
Space S refers to the space of having removed moulding furnace wall 41 and molding space S1 and annealing furnace wall 51 and annealing space S 2 in the space being surrounded by the inner face of building B (with reference to the dash area of the grid of Fig. 5) in building. Space S is by the inner face (internal face) that accommodates molding space S1, annealing space S 2 and cut off the building B of space S 3 in building, the outside of the outside of moulding furnace wall 41 and annealing furnace wall 51 and the space that marks off.
Space S is separated into 2 above spaces because of the plate 411,412,413 being configured in building B in building. Plate 411,412,413 has the effect as the partition member for space S in building being divided into 2 above spaces. Particularly, in building, space S is separated into the outside superjacent air space S5 of forming furnace, below, forming furnace outside space S 6, annealing furnace space outerpace S7 and cuts off space S 3 by plate 411,412,413. But, be not particularly limited for the quantity of plate (the separation number in space in building) and the height and position in the 1st direction that is provided with plate.
The outside superjacent air space S5 of forming furnace be in building in space S by folded space below the top of plate 411 and building B. Plate 411 be configured in its height and position close to the top of formed body 310 and with the position of the almost identical height in top of moulding furnace wall 41.
Below, forming furnace outside space S 6 is formed in than the space in the downstream of more close the 1st direction of the outside superjacent air space S5 of forming furnace. Particularly, forming furnace outside below space S 6 be in building in space S by plate 411 and the folded space of plate 412. The mode that plate 412 is positioned near of the downstream of the 1st direction of moulding furnace wall 41 according to its height and position configures. Below, forming furnace outside space S 6 comprises the region A1 of corresponding with formed body 310 (particularly, the setting position of formed body 310 is identical with height and position).
Annealing furnace space outerpace S7 is formed in than the space in the downstream of more close the 1st direction of forming furnace outside below space S 6. Annealing furnace space outerpace S7 be in building in space S by plate 412 and the folded space of plate 413. Bed 413 is configured in its height and position and is positioned at the position of downstream of the 1st direction that approaches annealing furnace wall 51.
In addition, annealing furnace space outerpace S7 is that to make the atmosphere temperature of glass plate G mobile in the annealing space S 2 of identical with the height and position of annealing furnace space outerpace S7 (be equivalent to slave plate 412 below distance above plate 413) be for example the space of 800 DEG C～110 DEG C; Or annealing furnace space outerpace S7 comprises making mobile glass plate G in annealing space S 2 become the space in the space of (strain point temperature-5 DEG C) from (annealing point temperature+5 DEG C).
Cut-out space S 3 is formed in the space in the downstream of the 1st direction of annealing furnace space outerpace S7. Particularly, cutting off space S 3 is that in space S, above the bottom by plate 413 and building B folded space in building.
Herein, moulding furnace wall 41 and annealing furnace wall 51 are for example made up of refractory material or heat-insulating material etc. In addition, for building B, well-known refractory body using can be suitable for the construction of buildings in general time etc.
(control device 500)
Fig. 6 is the control module figure of control device 500.
Control device 500 is by formations such as CPU (CPU), ROM (read-only storage), RAM (random access memory), hard disks, and it brings into play function as the control part that various machines contained in device for producing glass sheet 100 are controlled.
Particularly, as shown in Figure 6, control device 500 is for carrying out the driving control of the 1st driver element 390 and the driving control of the 2nd driver element 450, described the 1st driver element 390 is for carrying out the temperature adjustment control of temperature adjustment unit 350a～350g, and described the 2nd driver element 450 is for driving chill roll 330, transfer roller 340a～340h, shearing device 400 etc. It should be noted that, near the atmosphere temperature of of the sheet material glass SG of the cooling temperature adjustment control with temperature adjustment unit 330a based on being gone out by the temperature sensor unit inspection that is arranged on molding space S1 carries out. In addition, near the atmosphere temperature sheet material glass SG of the temperature adjustment control of temperature adjustment unit 350a～350g based on being detected by temperature sensor unit 380 carries out.
In addition, control device 500 is further controlled the air pressure of space S in the building being formed by the inner face of building B. To narrate in the back this. In addition, also narrate in the back about the various sensors described in Fig. 6.
(moulding of the sheet material glass SG in shaped device 300)
Below, the process that moulding in shaped device 300 is obtained to sheet material glass SG describes.
First the melten glass that, is supplied to formed body 310 via supply port 311 from fusing device 200 flows to slot part 312 open above formed body 310. Then, make it in slot part 312 overflows. The melten glass of overflow in slot part 312 is flowed to the downstream of the 1st direction along two sides of formed body 310, as shown in Figure 3, at 313 interflow, place, bottom. Melten glass at 313 interflow, place, bottom flows down to the downstream of the 1st direction. In the moment that starts to flow down leaving formed body 310, the viscosity of glass is for example 105.7Pool～107.5Pool.
The melten glass flowing down to the downstream of the 1st direction is drop-down to the downstream of the 1st direction by the mode that is configured in the chill roll of both sides of thickness direction and is held with the both ends of width. Now, melten glass be cooled in being shaped to the sheet material glass SG of sheet (cooling fast). The viscosity of utilizing the quick cooling both ends place that makes sheet material glass based on chill roll 330 is for example 109.0Pool～1010.5Pool. Utilize transfer roller 340a～340h that sheet material glass the SG drop-down roller 330 that is cooled is further pulled down to below, meanwhile anneal.
In addition, be transmitted the drop-down sheet material glass SG of roller 340a～340h and cut off in the mode of the length every regulation by shearing device 400 afterwards, form 2 above glass plate G.
(control of the air pressure of space S in building)
In present embodiment, carry out the air pressure control of stove space outerpace S4. Stove space outerpace S4 is the space being surrounded by the inner face of the outside of the outside of moulding furnace wall 41, annealing furnace wall 51, building B, and be the space that is positioned at the superjacent air space that cuts off space S 3, in other words, it is in building, space S, to remove the space that cuts off space S 3 (space, being made up of the outside superjacent air space S5 of forming furnace, forming furnace outside below space S 6 and annealing furnace space outerpace S7) and form.
The air pressure control operation that the air pressure of stove space outerpace S4 is controlled for example starts in the operation ST3 that homogenizes. , air pressure control operation was carried out before molding procedure ST5 and annealing operation ST6.
In the present embodiment, in order to carry out air pressure control, the outside of space S 6 and annealing furnace space outerpace S7 below the outside superjacent air space S5 of forming furnace, the forming furnace outside outside of the wall of building B (, across) disposes for the pressure fan 421,422,423 to pressurize in space separately. In addition, in order to carry out air pressure control, in space separately, dispose detecting unit that the air pressure of space S 6 and annealing furnace space outerpace S7 below the outside superjacent air space S5 of forming furnace, forming furnace outside is detected, i.e. the 1st pressure sensor the 431, the 2nd pressure sensor 432 and the 3rd pressure sensor 433 (with reference to Fig. 6). It should be noted that, the method for carrying out air pressure control is not limited to blow, also can applicable combination air-supply and the air draft method of carrying out or utilize air-lock (damper) etc. to adjust the method for pressure differential; Etc..
In air pressure control, use the air pressure of 431,432,433 pairs of each space S 5 of various pressure sensors, S6, S7 to detect, be greater than thus the mode of air pressure (atmospheric pressure) P2 in the outside of building B according to the air pressure P1 of stove space outerpace S4, for example, action to the 2nd driver element 450 (engine) for driving pressure fan 421,422,423 (for example, being rotating speed in the situation of engine) thus control the air pressure of stove space outerpace S4.
Particularly, the value that deducts P2 according to P1 be greater than 0 and mode below 40Pa control. The mode of, setting up according to the relation of following formula 1 is controlled the 2nd driver element 450.
(formula 1) 0 < P1-P2≤40Pa
It should be noted that, P1 deducts more preferably 1Pa～40Pa of value of P2, more preferably 2Pa～35Pa, more preferably 3Pa～25Pa, more preferably 4Pa～15Pa.
Further, in air pressure control operation, preferably according to the upstream side of the flow direction the closer to sheet material glass SG the larger mode of air pressure of stove space outerpace S4 control the air pressure of stove space outerpace S4. More specifically, be preferably: the air pressure of the air pressure > annealing furnace space outerpace S7 of below, the air pressure > forming furnace outside space S 6 of the outside superjacent air space S5 of forming furnace.
(the cooling control of sheet material glass SG)
In present embodiment, can in molding space S1 and annealing space S 2, carry out the cooling control of sheet material glass SG. Particularly, can make coolingly to carry out the cooling of sheet material glass SG as described below according to the instruction of control device 500 with temperature adjustment unit 330a, temperature adjustment unit 350a～350g, transfer roller 340a～340h, chill roll 330.
For example, when using chill roll 330 and transfer roller 340a～340h to make sheet material glass SG annealing space S 2 is interior while flowing to downstream, make tension force effectively act on the flow direction (the 1st direction) of sheet material glass SG, can suppress thus the warpage of sheet material glass SG. In addition, also can be suppressed to be adjacent to and be clamped between each roller and the distortion that produces waveform shape in the neighboring region of mobile part.
In order to make tension force effectively act on the flow direction (the 1st direction) of sheet material glass SG, for example, in molding space S1 and in the temperature of the central portion of the width of the sheet material glass SG region that is glass more than softening point temperature, control the temperature of sheet material glass SG lower than the temperature of central portion and the uniform mode of the temperature of central portion according to the both ends (ear) of the width of sheet material glass SG. Further, in annealing space S 2, act on the width central portion of sheet material glass SG in order to make to carry the tensile stress of direction, temperature at the central portion of the width of sheet material glass SG is to be less than in softening point temperature and the region more than strain point temperature, and the mode reducing from central portion to both ends according to the Temperature Distribution of the width of sheet material glass SG is controlled the temperature of sheet material glass SG. Further, in the temperature province of the strain point temperature that is glass in the temperature of the central portion of the width of sheet material glass SG, according to the temperature of eliminating the both ends (ear) of width of sheet material glass SG and the mode of the thermograde of central portion and control sheet material glass SG. Thus, the tensile stress that makes to carry direction acts on the central portion of the width of sheet material glass SG.
For the temperature control of above-mentioned sheet material glass SG, it is that temperature taking the sheet material glass SG region more than softening point temperature is present in molding space S1 as prerequisite. Therefore,, in order to carry out said temperature control, in molding space S1, be provided with cooling with temperature adjustment unit 330a. But the temperature of sheet material glass SG is that region more than softening point temperature is also present in annealing space S 2 sometimes. In this case, in order to carry out said temperature control, be arranged on and anneal in space S 2 with temperature adjustment unit 330a cooling.
In addition, in annealing space S 2, act on the central portion of sheet material glass SG in order to make to carry the tension force of direction, also can be in the temperature of the central portion of the width of sheet material glass SG near the strain point temperature at glass and be less than in the region of strain point temperature, the mode reducing to the central portion of the width of sheet material glass SG according to the both ends (ear) of the width from sheet material glass SG is controlled the temperature of sheet material glass SG. Thus, near the strain point temperature of the central portion of the width of sheet material glass SG and be less than in the region of strain point temperature, can make all the time to carry tensile stress in direction and act on the central portion of the width of sheet material glass SG.
In the present embodiment, as described later, can reduce the inequality of the percent thermal shrinkage of glass plate, but further by adjusting the cooling velocity of the sheet material glass SG after moulding, except can suppressing the inequality of percent thermal shrinkage, can also suppress the distortion of glass plate, suppress warpage, and reduce the absolute value of percent thermal shrinkage.
Particularly, in annealing space S 2, in the time using transfer roller 340a～340h carrying sheet material glass SG to anneal on one side, be defined as from the annealing point temperature of sheet material glass SG add 150 DEG C and temperature till the strain point temperature of sheet material glass SG deduct 200 DEG C and must the temperature province of temperature. Now, preferably, at least in said temperature region, the cooling velocity of the central portion of the width of sheet material glass SG is faster than the cooling velocity at the both ends of sheet material glass SG, makes temperature that sheet material glass SG is central portion from the temperature of the central portion of the width of sheet material glass SG higher than the state variation at the both ends of the sheet material glass SG state lower than both ends. Thus, can be at the central portion of the width of sheet material glass SG, make tensile stress act on the flow direction (the 1st direction) of sheet material glass SG. By making tensile stress act on the flow direction of sheet material glass SG, can further suppress sheet material glass SG, the warpage of glass plate even.
In annealing operation, from and sheet material glass SG be clamped between each roller and the neighboring region of mobile part adjacency, the viewpoint that suppresses the distortion that produces waveform shape is as mentioned above set out, the temperature that preferably makes the middle body that is arranged on sheet material glass SG is that the peripheral speed of the transfer roller in the downstream of the position of annealing point temperature is that the peripheral speed of transfer roller of the above and temperature province below softening point temperature of glass transition temperature is fast than the temperature of middle body that is arranged on sheet material glass SG, for example fast 0.03%～2%. By so the peripheral speed of transfer roller being adjusted, can make thus tensile stress act on the flow direction (the 1st direction) of sheet material glass SG.
(optimal way of glass plate)
The optimal way of manufacturing below the glass plate obtaining to using the device for producing glass sheet of present embodiment and the manufacture method of glass plate describes. It should be noted that, the present invention is not limited to following manner.
Present embodiment is suitable for manufacturing the glass plate that the thickness of glass plate is 0.01mm～1.5mm. The thinner glass of glass plate to possess heat less, therefore be difficult to anneal the sheet material glass in space temperature control (herein, be not only the temperature control of the 1st direction of sheet material glass, also comprise the temperature control on the width of sheet material glass) become difficult. Therefore, can make the advantage of the present invention of molding space S1 and annealing space S 2 stabilisations larger for manufacturing the glass plate that thickness of slab is 0.01mm～0.5mm, being suitable for. In addition, for above-mentioned reasons, the present invention is also suitable for manufacturing the glass-film that glass is possessed 0.01mm～0.1mm that heat is very little.
Glass plate is larger more easily to be produced plane strain and makes the temperature control of carrying out above-mentioned sheet material glass SG become difficult. Therefore, be that 2000mm length above and length direction is glass plate more than 2000mm for the length of width, effect of the present invention is remarkable.
In addition, preferred glass plate is applicable to the strict liquid crystal display of quality requirements, organic EL (OrganicElectro-Luminescence, organic electroluminescent) display. In addition, can also be applicable to the display of cover glass (CoverGlass), mobile terminal etc. or the glass plate of cover glass, contact panel and solar cell for framework. The liquid crystal display of low temperature polycrystalline silicon (LTPS:LowTemperaturePolySilicon)-TFT (ThinFilmTransistor, thin film transistor (TFT)) that has been particularly suitable for the use strict to the requirement of glass plate.
In addition, glass plate is warming up to till 550 DEG C from 50 DEG C with 10 DEG C/point, keep after 1 hour at 550 DEG C, be cooled to till 50 DEG C with 10 DEG C/point, again be warming up to till 550 DEG C with 10 DEG C/point, keep after 1 hour at 550 DEG C, be cooled to till 50 DEG C with 10 DEG C/point, percent thermal shrinkage is now preferably below 100ppm. More preferably 0ppm～60ppm, more preferably 0ppm～40pm, is further preferably 0ppm～20ppm.
It should be noted that, percent thermal shrinkage is with elongation/initial length × 106(ppm) calculate. Assay method as percent thermal shrinkage has following methods. First, use diamond pen (diamondpen) to mark parallel mark line at the two ends of glass plate. Then, according to the mode perpendicular to mark line, glass plate is divided into two and is cut off, to wherein 1 heat-treat (as mentioned above, for repeatedly carrying out 2 times 550 DEG C of heat treatments that keep the processing of 1 hour). Then, the glass plate after heat treatment and another glass plate, to upper, are measured to the side-play amount of mark line thus.
Particularly TFT being formed on glass plate in the making of display, than the height of percent thermal shrinkage, the inequality of percent thermal shrinkage more easily becomes display pannel and shows bad reason. In this, the inequality of inhibition percent thermal shrinkage is important. Inequality by the percent thermal shrinkage of the glass plate of embodiment manufacturing is preferably ± below 2.85%. Herein, the inequality of percent thermal shrinkage refers to, in the time that 3 portion's bit positions (near for example, the positions position of central portion and the both ends of width) of the width of glass plate utilize said method to measure percent thermal shrinkage, the measured value of these positions its mean value and the upper limit (+) and the lower limit (-) that change relatively. The inequality of percent thermal shrinkage be preferably be less than ± 2.80%, below more preferably ± 2.75%, below more preferably ± 2.65%.
In addition, the maximum of the plane strain of glass plate is preferably 0nm～1.7nm. Be preferably 0nm～1.5nm, more preferably 0nm～1.0nm, 0nm～0.7nm more preferably. It should be noted that, the double refraction detection device that plane strain can be manufactured by UNIOPT company is measured.
Here, liquid crystal display and OLED display require high-precision assembling, and the present invention that therefore can reduce the percent thermal shrinkage inequality of the glass plate that liquid crystal display or OLED display use is particularly suitable for manufacturing glass for liquid crystal display plate or OLED display glass plate.
The warpage of glass plate is in the case of measuring by following method, the maximum of warpage is from 0 till the scope of 0.2mm, is preferably 0mm～0.15mm, more preferably 0mm～0.1mm, more preferably 0mm～0.05mm, 0mm～0.05mm more preferably again.
The mensuration of warpage is measured by as described below. First cut out more than 2 platelets (about 400mm is square) from glass plate. Then,, for each platelet, measure respectively the warpage (, measuring the warpage that amounts to 16 positions) at position, 4, angle and 4 positions of central portion at positive and negative. For example, in the case of measuring the warpage of 8 platelets, obtain 16 position × 8 slice, the i.e. determination data of the warpage at totally 128 positions. Then, suppose that the maximum in this determination data is above-mentioned scope. It should be noted that, in the present embodiment, will utilize 2 above platelets to measure the maximum of the warpage obtaining as the warpage of glass plate.
In addition, as the glass plate of flat-panel monitor (liquid crystal display or plasma scope etc.) use, exemplified with quality % and represented the glass plate that glass plate contains following composition.
SiO2: 50 quality %～70 quality %,
Al2O3: 5 quality %～25 quality %,
B2O3: 0～15 quality %,
MgO:0～10 quality %,
CaO:0～20 quality %,
SrO:0～20 quality %,
BaO:0～10 quality %,
ZrO2: 0～10 quality %.
Be formed with α-Si (amorphoussilicon, non-crystalline silicon) glass plate of-TFT compares, and requires percent thermal shrinkage less for the glass plate of OLED display, the glass plate that is formed with the glass plate of LTPS-TFT or is formed with oxide semiconductor. In order to reduce percent thermal shrinkage, can make time of annealing operation of glass plate elongated or the strain point temperature of glass is uprised. But, if make time of annealing operation of glass plate elongated, need to make manufacturing installation to maximize, therefore not preferred. As the less glass plate of percent thermal shrinkage, for example, can enumerate the glass plate with composition described as follows and characteristic.
SiO2: 52 quality %～78 quality %,
Al2O3: 3 quality %～25 quality %,
B2O3: 1 quality %～15 quality %,
RO (wherein, RO is the total amount of the contained total composition of the glass plate in MgO, CaO, SrO and BaO): 3 quality %～20 quality %,
Strain point is more than 680 DEG C, and the percent thermal shrinkage of being measured by said method is the glass plate below 60ppm.
Or, following glass plate:
SiO2: 57 quality %～75 quality %,
Al2O3: 8 quality %～25 quality %,
B2O3: 3 quality %～11 quality % (except 11 quality %),
CaO:0～20 quality %,
MgO:0～15 quality %.
Now, if meet any one in following condition or more than 2, be more suitable for the glass plate in LTPS-TFT.
In order further to improve strain point temperature,
Preferably make (SiO2+Al2O3)/B2O3Be 8～20 and/or make SiO2+Al2O3Be more than 75 quality %.
In addition, preferably make CaO/B2O3Be more than 0.6.
Further, in order further to improve strain point temperature, preferred mass is than (SiO2+Al2O3)/RO is more than 7.5.
Or, for the resistivity that makes glass declines, preferably contain the Fe of 0.01 quality %～1 quality %2O3。
Further, in order to make glass plate realize higher strain point temperature and to prevent the rising of devitrification temperature, it is more than 0.65 preferably making CaO/RO.
In addition, if consideration is applicable to the mobile apparatus as mobile communication terminal etc., from light-weighted viewpoint, preferably the total containing ratio of SrO and BaO is 0～3.3%.
It should be noted that R2O (wherein, R2O is Li2O、Na2O and K2The total amount of the contained total composition of glass plate in O) in fact likely stripping and make TFT deterioration in characteristics from glass, therefore, as glass for liquid crystal display plate in the situation that, preferably do not contain R2O (alkali-free glass). But, make on the contrary the mentioned component that contains specified quantitative in glass, the deteriorated of TFT characteristic can be suppressed thus, and the basicity of glass can be improved, easily make the burning of valence mumber variation, thereby make its performance clarification property. In addition, owing to can also making the resistivity decreased of glass, therefore also can suppress breakage melting the melting groove in operation etc. Therefore, R2O is 0～2.0%, more preferably 0.1%～1.0%, more preferably 0.2%～0.5%. It should be noted that, at R2In O, preferably contain the most difficult stripping from glass and make the K of TFT deterioration in characteristics2O。K2The content of O is 0～2.0%, more preferably 0.1%～1.0%, more preferably 0.2%～0.5%.
In addition, implemented chemical enhanced after, as the glass plate that is applicable to cover glass or solar cell glass plate, for example, can exemplify with quality % and represent the glass plate that contains following composition.
SiO2: 50 quality %～70 quality %,
Al2O3: 5 quality %～20 quality %,
Na2O:6 quality %～30 quality %,
Li2O:0～8 quality %,
B2O3: 0～5 quality %,
K2O:0～10 quality %,
MgO:0～10 quality %,
CaO:0～20 quality %,
ZrO2: 0～10 quality %.
(feature)
It is believed that, the air flowing in building via the gap of building etc. from building outside contains the particles such as dust, if be therefore attached to the sheet material glass in annealing furnace or cut off after glass plate on, can cause producing damage. In addition, it is believed that, if above-mentioned particle flows into the ascending air producing along sheet material glass in annealing furnace, particle is can attached work on glass at sheet material, at sheet material glass surface formation bubble or thrust. Under these circumstances, can cause that the surface quality of glass plate worsens, therefore likely be difficult to stably produce glass plate.
In addition, although utilize heater to control according to the mode that does not produce temperature change in forming furnace or annealing furnace, in forming furnace or annealing furnace, outside the region of cut-out of carrying out sheet material glass, still have gap, it is very difficult eliminating this gap completely. Therefore, if the air in building outside flows in building, the relation of the draught head in stove space outerpace and furnace interior space collapse, the air of stove space outerpace flows in forming furnace or annealing furnace via the gap of forming furnace or annealing furnace, likely causes the precise decreasing of the temperature treatment control in forming furnace or annealing furnace. Now, the temperature of air that flows into forming furnace or annealing furnace is lower than the temperature of having carried out in forming furnace or the annealing furnace of temperature treatment. , in melten glass or sheet material glass, be, only that the region contacting with the air that flows into above-mentioned forming furnace or annealing furnace is cooled rapidly. For example, if certain region of melten glass is by cooling fast partly in forming furnace, only the viscosity in this region raises, be shaped to after sheet material glass, while utilizing roller to stretch in downstream, the region that only viscosity in sheet material glass is high cannot stretch fully, thereby causes the deviation of the thickness of slab that produces glass plate. In addition, as mentioned above, in annealing furnace, in order to reduce warpage, plane strain and percent thermal shrinkage, the Temperature Distribution of the width to sheet material glass is controlled. Therefore, in annealing furnace, if certain region of sheet material glass by cooling fast partly, only the percent thermal shrinkage in this region becomes greatly partly, therefore can cause producing the inequality of percent thermal shrinkage.
In order to address the above problem, preferably make air pressure in the building air pressure higher than building outside, the air that suppresses thus building outside flows in building. But, if make air pressure in building excessively higher than the air pressure in building outside, cause sometimes the air in building to flow in a large number building outside, the air pressure in building or temperature produce variation. Or, if the air pressure in stove space outerpace and/or cut-out space becomes too high, increase to the air influx in furnace interior space from stove space outerpace and/or cut-out space, easily produce the ascending air along sheet material glass. Therefore, the difference of the air pressure in the air pressure in building and building outside is preferably and exceedes 0Pa～40Pa. That is, in the air pressure control of present embodiment, the value that preferably deducts the air pressure P2 in building B outside according to the air pressure P1 of stove space outerpace S4 be greater than 0 and mode below 40Pa control pressure fan.
And, by carrying out control as above, except the quality that can suppress to cause because of particle worsens, the quality that can also suppress the unequal glass plate of warpage, thermal contraction worsens, thereby can stably manufacture the glass plate of the uneven quality that meets particle, warpage and thermal contraction.
In addition, control thickness of slab unequal that can suppress thus glass plate by the variation of the temperature to molding space S1.
In addition, annealing space S 2 is to comprise that the temperature of sheet material glass SG is from becoming near the space in the region of temperature strain point temperature near annealing point temperature, but by the anneal temperature change of space S 2 of inhibition, can reduce the inequality of percent thermal shrinkage. In addition, in annealing space S 2, can suppress near the variation of the atmosphere temperature more than annealing point sheet material glass SG, therefore can suppress distortion or the warpage of glass plate. In addition, in annealing space S 2, can suppress near the variation of atmosphere temperature sheet material glass SG below strain point temperature, therefore can suppress the warpage of glass plate etc. Herein, sheet material glass SG is till to be cut off be the continuous plate of a slice. Therefore, be in the region below strain point temperature in the temperature of sheet material glass, if the warped shapes of sheet material glass changes, also can exert an influence to the sheet material glass in region more than strain point temperature, cause producing the inequality of percent thermal shrinkage. On the other hand, in the present embodiment, the temperature that suppresses sheet material glass SG is the variation of the atmosphere temperature in the region below strain point temperature, can suppress thus the inequality of warpage, plane strain and thermal contraction.
Be difficult to eliminate gap completely from the wall of building. Therefore, consider to utilize chimney effect to make also to produce in stove space outerpace ascending air. It should be noted that, near furnace wall, environment temperature is higher, therefore easily produces ascending air. In addition, by making the lower region of gas flow temperature that temperature is higher also produce thus convection current. It is believed that, this is that atmosphere temperature due to building inwall side is lower than furnace wall side. That is, produce down current along the inwall of building, and produce ascending air along furnace wall, produce thus larger convection current.
Therefore, in the present embodiment, more control pressure fan by the larger mode of upstream side air pressure of the 1st direction according to the air pressure that makes stove space outerpace S4. Thus, in stove space outerpace S4, can suppress along the moulding furnace wall 41 of forming furnace 40 or the outside of the annealing furnace wall 51 of annealing furnace 50 and the air stream that rises. Therefore, can make the temperature stabilization of the outside of moulding furnace wall 41 or annealing furnace wall 51 as far as possible. Therefore, can suppress the temperature change of moulding space S 1 or annealing space S 2.
Stove space outerpace S4 is split into the outside superjacent air space S5 of forming furnace, forming furnace outside below space S 6 and annealing furnace space outerpace S7. Therefore, even if along moulding furnace wall 41 or the outside of annealing furnace wall 51 produce the air stream rising, also can make this air stream at the scope of the 1st direction narrow (, this air stream can be rested on each space S 5～S7 in). ; between the space of the gas pressure distribution that makes stove space outerpace S4 more than 2 and larger the closer to upstream side; therefore can suppress to produce and spread all over multiple spaces (for example, spread all in space S 5～S7 more than at least 2 space) larger air stream that rises.
Thus, the temperature of the outside of moulding furnace wall 41 or annealing furnace wall 51 is more stable. Therefore, can reduce the impact on temperature in moulding space S 1 or annealing space S 2, make the temperature of molding space S1 or annealing space S 2 more stable.
(variation)
Above, based on accompanying drawing, present embodiment is illustrated, but concrete formation is not limited to above-mentioned embodiment, can in the scope of central idea that does not depart from invention, changes.
(variation 1A)
Fig. 7 is the schematic diagram that the inside of the building B of this variation 1A is shown.
The ascending air producing along sheet material glass can kick up the glass smear metal producing in the time cutting off sheet material glass or the dust comprising in the air in side inflow building from building, and can make it be attached to mobile sheet material glass in molding space or the space of annealing. The glass smear metal meeting that is attached to sheet material glass forms bubble or thrust at sheet material glass surface, and the quality of glass pane surface is declined. In addition, dust also can make the quality of glass pane surface decline. In addition, from building, in side inflow building, the air in space can occur to change significantly according to the situation (temperature, wind speed etc.) in building outside, therefore due to air space in side inflow building from building, cause being difficult to control air pressure and the temperature in space in building.
Therefore,, in the air pressure control of air pressure control operation, preferably control according to the mode of cutting off the air pressure P3 of space S 3 and be greater than the air pressure P2 in building B outside. Thus, air side inflow from building that can prevent from containing dust etc. cuts off in space, even can suppress the reduction of the surface quality of glass plate.
In this case, dispose the pressure fan 424 for pressurizeing to cutting off space S 3 in the outside that cuts off space S 3. In addition, in cut-out space S 3, be provided with the 4th pressure sensor (not shown) for detection of the air pressure P3 of cut-out space S 3.
It should be noted that, be more than authorized pressure if cut off the air pressure in space, easily produces to the mobile air stream of stove (forming furnace and annealing furnace), likely the temperature in molding space and annealing space exerted an influence.
Therefore, preferably according to the value of cutting off the air pressure P3 of space S 3 and deduct the air pressure P2 in building B outside be greater than 0 and mode below 40Pa cut off the air pressure control of space S 3. , preferably carry out air pressure control according to the mode that following formula 2 is set up.
(formula 2) 0 < P3-P2≤40Pa
Thus, air be can suppress from the inflow in the building B of building B lateral, space S 3, the gentle pressure-controlled of temperature control of space S in building even therefore can precision be cut off well. In addition, can suppress the inflows such as dust and cut off space S 3, therefore can prevent that the surface quality of glass plate from worsening.
In addition, except above-mentioned embodiment, also can be in air pressure control, control pressure fan 424 (by monitoring the value being detected by the 4th pressure sensor and the 5th pressure sensor (not shown), control and cut off the air pressure of space S 3), the air pressure P4 of the space S 2 that makes thus to anneal is greater than the air pressure P3 that cuts off space S 3. It should be noted that, so-called the 5th pressure sensor refers to the pressure sensor of the air pressure P4 that detects annealing space S 2.
Thus, can suppress from cutting off space S 3 to the mobile air stream of annealing space S 2. In addition, can also carry out air pressure control the closer to the larger mode of the upstream side of the 1st direction according to the air pressure of annealing space S 2. Thus, can suppress the temperature change of moulding space S 1 and annealing space S 2.
(variation 1B)
In the above-described embodiment, dispose the plate 411,412,413 of bringing into play function as physical partition member, thereby be formed with 2 above spaces, but be not limited to this, as long as carry out air pressure control in the larger mode of the upstream side air pressure the closer to the 1st direction, just can bring into play the effect identical with above-mentioned embodiment.
(variation 1C)
In the above-described embodiment, stove space outerpace S4 is pressurizeed. But, may not make the air pressure of stove space outerpace S4 be greater than the air pressure of molding space S1 or annealing space S 2. For example, even if reduce moulding space S 1 or the annealing air pressure of space S 2 and the draught head of stove space outerpace S4, also can reduce the air capacity spilling from molding space S1 or annealing space S 2, and can suppress along the ascending air of glass plate G generation, be therefore effective.
(variation 1D)
Fig. 8 is the schematic diagram that the inside of the building B of this variation 1D is shown. As shown in Figure 8, stove space outerpace S4 also can be split into the forming furnace space outerpace S10, and 3 spaces of annealing furnace space outerpace S7 that comprise the outside superjacent air space S5 of forming furnace and below, forming furnace outside space S 6. Under these circumstances, also can bring into play the effect identical with above-mentioned embodiment.
In addition, might not make the air pressure of stove space outerpace S4 larger the closer to the upstream side air pressure of the 1st direction, by at least making the air pressure of forming furnace space outerpace S10 higher than the air pressure of annealing furnace space outerpace S7, also can be suppressed at the generation of the ascending air that stove space outerpace produces. This is because the temperature of moulding furnace wall 41 is very large with the temperature difference of annealing furnace wall 51, therefore easily produces larger ascending air from annealing furnace wall 51 to moulding furnace wall 41. In addition, be also because: as mentioned above, in order to improve the quality of glass plate, particularly preferably reduce the temperature change in forming furnace 40 and annealing furnace 50.
Embodiment
Below embodiments of the invention are described.
(embodiment 1)
The mode that is 5Pa according to the difference of the air pressure P2 in the air pressure of stove space outerpace S4 and building B outside is controlled the air pressure of stove space outerpace S4. Then, to carry out thickness be 0.7mm, be of a size of the manufacture of the glass for liquid crystal display plate of 2200mm × 2500mm. The containing ratio of each composition of glass plate is as described below.
SiO260 quality %
Al2O319.5 quality %
B2O310 quality %
CaO5 quality %
SrO5 quality %
SnO20.5 quality %
(embodiment 2)
The difference of the air pressure P2 in the air pressure P1 of stove space outerpace S4 and building B outside is 20Pa, in addition, utilizes the method identical with embodiment 1 to carry out the manufacture of glass for liquid crystal display plate.
(embodiment 3)
The difference of the air pressure P2 in the air pressure P1 of stove space outerpace S4 and building B outside is beyond 35Pa, in addition, utilizes the method identical with embodiment 1 to carry out the manufacture of glass for liquid crystal display plate.
(embodiment 4)
The difference of the air pressure P2 in the air pressure P1 of stove space outerpace S4 and building B outside is 50Pa, in addition, utilizes the method identical with embodiment 1 to carry out the manufacture of glass for liquid crystal display plate.
(comparative example 1)
The difference of the air pressure P2 in the air pressure P1 of stove space outerpace S4 and building B outside is-5Pa is (, the air pressure P2 in building B outside is higher than the air pressure of stove space outerpace S4), in addition, utilize the method identical with embodiment 1 to carry out the manufacture of glass for liquid crystal display plate
Then,, under condition as above, utilize said method (method described in the optimal way of (7) glass plate) to measure the inequality of the thermal contraction of manufacturing the glass for liquid crystal display plate obtaining. In addition, the surface of visualization glass for liquid crystal display plate, the situation to damage unconfirmed is OK, the situation that confirms damage is NG, evaluates thus. Embodiment 1～4 shown in following table 1 and comparative example 1 measurement result separately.
[table 1]
As mentioned above, as long as control the air pressure of stove space outerpace S4 according to the mode of 0 < P1-P2, can be suppressed in glass pane surface and produce and damage. In addition, as long as control the air pressure of stove space outerpace S4 according to the mode of 0 < P1-P2≤40Pa, can further suppress the inequality of percent thermal shrinkage. It should be noted that, even if the containing ratio of each composition of glass plate (quality %) is SiO261%、Al2O319.5%、B2O310%、CaO9%、SnO20.3%、R2O0.2%, also can obtain result similar to the above.
The explanation of symbol
40 forming furnaces
50 annealing furnaces
100 device for producing glass sheets
310 formed bodys
B building
MG melten glass

Claims (15)

1. a manufacture method for glass plate, it has:
Melt operation, wherein, frit is melted and formation melten glass;
Supply with operation, wherein, described melten glass is supplied to formed body, described formed body is configured in by forming furnaceFurnace wall is the molding space that moulding furnace wall surrounds;
Molding procedure, wherein, is used glass tube down-drawing to be shaped to sheet material glass by melten glass in described formed body;
Annealing operation wherein, is annealed to described sheet material glass in annealing space, and described annealing space is for being positioned atThe space of described molding space below, it is to be surrounded by the furnace wall of annealing, the furnace wall of annealing furnace; With
Cut off operation, wherein, be arranged in described annealing furnace below cut-out space to annealing after described sheet material glassGlass cuts off,
Carry out air pressure control, make the air pressure of stove space outerpace be greater than the air pressure in the outside of building, described building holdsReceived described molding space, described annealing space and described cut-out space, described stove space outerpace is positioned at by described buildingThe outer surface of the outer surface of the internal face of thing, described moulding furnace wall and described annealing furnace wall is divided in the building obtaining emptyThe top in interior described cut-out space; Wherein,
In described air pressure control operation, the air pressure of described stove space outerpace is made as to P1, by outside described buildingThe air pressure of side is made as in the situation of P2, and the mode of setting up according to the relation of 0 < P1-P2≤40Pa is outside empty to described stoveBetween air pressure control.
2. the manufacture method of glass plate as claimed in claim 1, wherein,
In described air pressure control operation, the air pressure in described cut-out space is made as to P3, by the outside of described buildingAir pressure be made as in the situation of P2, the mode of setting up according to the relation of 0 < P3-P2≤40Pa is further to described cut-outThe air pressure in space is controlled.
3. the manufacture method of glass plate as claimed in claim 2, wherein,
In described air pressure control operation, be greater than the side of the air pressure in described cut-out space according to the air pressure in described annealing spaceFormula is controlled the air pressure in described cut-out space.
4. the manufacture method of glass plate as claimed in claim 2 or claim 3, wherein,
In described air pressure control operation, according to outside stove described in the upstream side of the flow direction of described sheet material glassThe air pressure in portion space becomes larger mode the air pressure of described stove space outerpace is controlled.
5. the manufacture method of glass plate as claimed in claim 1 or 2, wherein,
In described annealing operation,
For making tension force, the central portion of the width at described sheet material glass acts on the flow direction of sheet material glass,
At least add from the annealing point temperature of glass in the temperature of the central portion of the width of described sheet material glassThe temperature of 150 DEG C becomes from the strain point temperature of glass deducts the temperature province of temperature of 200 DEG C,
According to the cooling velocity of the central portion of the width of described sheet material glass than the both ends of described widthThe fast mode of cooling velocity is carried out temperature control.
6. the manufacture method of glass plate as claimed in claim 1 or 2, wherein,
In the region more than softening point temperature that is glass in the temperature of the central portion of the width of described sheet material glass,According to the temperature at the both ends of the width of described sheet material glass lower than the temperature of the folded central portion in described both ends,And the uniform mode of the temperature of described central portion is controlled the temperature of described sheet material glass,
And, for the flow direction of the central portion effect sheet material glass of the width at described sheet material glassPower is to be less than the softening point temperature of glass and the strain point at glass in the temperature of the described central portion of described sheet material glassIn region more than temperature, according to the Temperature Distribution of the width of described sheet material glass from described central portion to described twoThe mode that end reduces is controlled the temperature of described sheet material glass,
In the temperature province of the strain point temperature that is glass in the temperature of the described central portion of described sheet material glass, according to disappearingRemove the described both ends of width of described sheet material glass and the mode of the thermograde of described central portion and control instituteState the temperature of sheet material glass.
7. the manufacture method of glass plate as claimed in claim 1 or 2, wherein,
For the tension force of the flow direction of the central portion effect sheet material glass of the width at described sheet material glass, in instituteThe temperature of stating the described central portion of sheet material glass is less than in the region of strain point temperature of glass, according to from described sheet material glassThe mode that the both ends of glass reduce to described central portion is controlled the temperature of described sheet material glass.
8. the manufacture method of glass plate as claimed in claim 1 or 2, wherein,
In described annealing operation, at the transfer roller for carrying described sheet material glass, make to be arranged on described sheet material glassThe temperature of glass is the peripheral speed of the transfer roller in the downstream of the position of the annealing point temperature of glass, than being arranged on describedThe temperature of material glass is the transfer roller of the temperature province more than glass transition temperature and below the softening point temperature of glassPeripheral speed fast 0.03%～2%.
9. a manufacturing installation for glass plate, it comprises:
Forming furnace, it is by utilizing moulding furnace wall to entering for the molding space that is shaped to sheet material glass by melten glassRow surround and form;
Annealing furnace, it is positioned at the below of described forming furnace, and this annealing furnace is to surround for right by the utilization furnace wall of annealingThe annealing space that described sheet material glass is annealed forms;
Shearing device, it is configured in the cut-out space of the below that is positioned at described annealing furnace, and this shearing device is used for annealingAfter described sheet material glass cut off;
Air pressure control module, it makes the air pressure of stove space outerpace be greater than the outside of building for carrying out air pressure controlAir pressure, described building accommodates described molding space, described annealing space and described cut-out space, outside described stovePortion space is positioned at by the outer surface of the internal face of described building, described moulding furnace wall and the outer surface of described annealing furnace wallThe top in the described cut-out space in the building that division obtains in space; Wherein,
In described air pressure control operation, the air pressure of described stove space outerpace is made as to P1, by outside described buildingThe air pressure of side is made as in the situation of P2, and the mode of setting up according to the relation of 0 < P1-P2≤40Pa is outside empty to described stoveBetween air pressure control.
10. the manufacturing installation of glass plate as claimed in claim 9, wherein, described air pressure control module comprise forAir is fed through to the pressure fan in described stove space outerpace from the outside of described building.
The manufacturing installation of 11. glass plates as claimed in claim 10, wherein, described air pressure control module comprises to be establishedPut the pressure sensor for the air pressure of described stove space outerpace is measured at described stove space outerpace, described gasPressure-controlled unit also comprises control device, and this control device is according to the testing result of described pressure sensor, according to describedThe mode that the air pressure of stove space outerpace is greater than the air pressure in the outside of described building drives described pressure fan.
The manufacturing installation of 12. glass plates as described in claim 9～11 any one, wherein,
Further comprise temperature adjustment unit in described annealing space,
In described temperature adjustment unit, for making tension force, the central portion of the width at described sheet material glass acts on sheetThe flow direction of material glass, at least annealing point from glass in the temperature of the central portion of the width of described sheet material glassTemperature adds that the temperature of 150 DEG C becomes from the strain point temperature of glass deducts the temperature province of temperature of 200 DEG C, pressesAccording to the cooling velocity of the central portion of the width of described sheet material glass than the cooling speed at the both ends of described widthSpend fast mode and carry out temperature control.
The manufacturing installation of 13. glass plates as described in claim 9 or 10, wherein,
In the furnace inner space being formed by described molding space and described annealing space, be provided with temperature adjustment unit,
In described temperature adjustment unit, what be glass in the temperature of the central portion of the width of described sheet material glass is softChange some region more than temperature, according to the temperature at the both ends of the width of described sheet material glass lower than described both endsThe temperature of folded central portion and the uniform mode of the temperature of described central portion are controlled the temperature of described sheet material glass,
For the tension force of the flow direction of the central portion effect sheet material glass of the width at described sheet material glass, in instituteThe temperature of stating the described central portion of sheet material glass be less than the softening point temperature of glass and the strain point temperature of glass withOn region in, fall to described both ends from described central portion according to the Temperature Distribution of the width of described sheet material glassLow mode is controlled the temperature of described sheet material glass,
In the temperature province of the strain point temperature that is glass in the temperature of the described central portion of described sheet material glass, according to disappearingRemove the described both ends of width of described sheet material glass and the mode of the thermograde of described central portion and control instituteState the temperature of sheet material glass.
The manufacturing installation of 14. glass plates as described in claim 9 or 10, wherein,
There is temperature adjustment unit at described annealing spatial placement,
In described temperature adjustment unit, for the central portion effect sheet material glass of the width at described sheet material glassThe tension force of flow direction, is less than the region of the strain point temperature of glass in the temperature of the described central portion of described sheet material glassIn, the mode reducing to described central portion according to the both ends from described sheet material glass is controlled the temperature of described sheet material glassDegree.
The manufacturing installation of 15. glass plates as described in claim 9 or 10, wherein,
In described annealing space, be provided with the transfer roller for carrying described sheet material glass,
Described transfer roller is rotated, and in described transfer roller, what the temperature that is arranged on described sheet material glass was glass moves backThe peripheral speed of the transfer roller in the downstream of the position of fire point temperature is glass than the temperature that is arranged on described sheet material glassThe peripheral speed of the transfer roller of the temperature province more than changing transition temperature and below the softening point temperature of glass is fast0.03％～2％。
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