CN103244494A - Mass flow high-frequency direct-acting electro-hydraulic servo valve based on great magnetostriction converter - Google Patents

Mass flow high-frequency direct-acting electro-hydraulic servo valve based on great magnetostriction converter Download PDF

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Publication number
CN103244494A
CN103244494A CN2013101492244A CN201310149224A CN103244494A CN 103244494 A CN103244494 A CN 103244494A CN 2013101492244 A CN2013101492244 A CN 2013101492244A CN 201310149224 A CN201310149224 A CN 201310149224A CN 103244494 A CN103244494 A CN 103244494A
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transducer
end cap
precompressed
displacement
ultra
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王传礼
吴晓磊
邓海顺
邱大龙
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Anhui University of Science and Technology
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Anhui University of Science and Technology
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Abstract

The invention discloses a mass flow high-frequency direct-acting electro-hydraulic servo valve based on a great magnetostriction converter, and belongs to the technology field of hydraulic servo control. The mass flow high-frequency direct-acting electro-hydraulic servo valve comprises a valve body (24), a great magnetostriction converter arranged above the valve body (24), a micrometric displacement mechanism, a shell (4), and slide valve resetting and balancing devices. The micrometric displacement mechanism and the shell (4) are arranged on the left sides of the valve body (24) and the great magnetostriction converter, and the slide valve resetting and balancing devices are arranged inside and on the left side of the valve body (24). A pre-compression mechanism, a cooling system and a heat compensation mechanism are arranged on the great magnetostriction converter, amplification and transmission of outputted displacement are realized by utilizing the micrometric displacement mechanism based on a leverage theory, a valve plug is driven to generate displacement, and the servo valve is enabled to output control flow in proportion with drive current. The servo valve has the advantages of quick response, wide bandwidth, big control flow, strong anti-pollution capacity and the like.

Description

Large-flow high-frequency direct drive type electro-hydraulic servo valve based on the ultra-magnetic telescopic transducer
Technical field
The present invention relates to the application of super magnetostriction material, be specifically related to a kind of large-flow high-frequency direct drive type electro-hydraulic servo valve based on the ultra-magnetic telescopic transducer, belong to the Hydraulic Servo Control Technology field.
Background technique
Compare with the multistage electrohydraulic control with traditional two-stage, feature performance benefits such as that direct drive type electro-hydraulic servo valve has is simple in structure, the response fast, contamination resistance is strong, reliability is high, price is low, characteristic is not subjected to that charge oil pressure influences have become one of the research focus in Fluid Transmission and Control field.Traditional direct drive type electro-hydraulic servo valve is with the spool of force motor direct drive servovalve valve, because the frequency range of force motor is low, speed of response, ouput force are little, therefore traditional direct drive type electro-hydraulic servo valve is difficult to satisfy requirements such as the high frequency response that Aero-Space, engineering machinery, war industry etc. propose, big flow, and the frequency response, flow, precision etc. that therefore how to improve direct drive type electro-hydraulic servo valve become an important development direction of electrohydraulic control.
In the Fluid Transmission and Control field, utilize new function material to develop high performance driving and control unit, be one of focus of domestic and international expert's research in this year always, and the application of super magnetostriction material in fluid control elements is particularly noticeable.Super magnetostriction material is the rare earth permanent magnet that continues, another the important new function material after rare earth magneto-optic and the rare earth high temperature superconducting materia.Have that speed of response is fast, frequency range is high, the output displacement is big, structure is simple relatively and be easy to characteristics such as microminiaturization based on the novel transducer of super magnetostriction material, utilize it to replace force motor, can improve frequency response, flow and the precision of whole servovalve.
Summary of the invention
The objective of the invention is the defective at existing traditional direct drive type electro-hydraulic servo valve existence, utilize excellent properties such as the super magnetostriction material speed of response is fast, frequency range is high, ouput force is big, design a kind of ultra-magnetic telescopic transducer of automatic thermal compensation formula and the spool that displacement amplifying mechanism drives servovalve, a kind of large-flow high-frequency direct drive type electro-hydraulic servo valve based on the ultra-magnetic telescopic transducer is proposed, in the hope of the structure of the speed of response, frequency range, precision and the simplification servovalve that improve servovalve etc.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of large-flow high-frequency direct drive type electro-hydraulic servo valve based on the ultra-magnetic telescopic transducer, its structural feature is:
By valve body, be positioned at valve body top the ultra-magnetic telescopic transducer, be positioned at micro displacement magnifying mechanism and shell on the left of valve body and the ultra-magnetic telescopic transducer, the guiding valve that is positioned at valve inner and left side thereof the balancing controls that reset form;
Described ultra-magnetic telescopic transducer comprises left end cap and right end cap, in the middle of the axial position of left end cap and right end cap, locate the precompressed dish spring of installation successively, transducer displacement take-off lever, giant magnetostrictive rod, precompressed swivel nut and adjusting guide rod, be installed in the protection lining between giant magnetostrictive rod and the converter shell successively, coil rack, be around in drive coil and the bias coil in the coil rack outside successively, the left end of described coil rack is fixed in left end cap, the right-hand member of coil rack is supported on the right end cap, and can slide at right end cap, be reserved with the cool cycles oil duct between protection lining and the coil rack;
Described precompressed swivel nut is connected in the left end of coil rack by fine thread, the precompressed swivel nut is provided with four fluid passages, along circumferentially evenly distributing of precompressed swivel nut, precompressed swivel nut center is provided with axial hexagonal guiding groove, regulate guide rod and pass right end cap, its manual tune end is positioned at the right end cap right side, the hexagonal guiding groove that the other end is provided with hexagonal spiral shell head and precompressed swivel nut is slidingly matched, transducer displacement take-off lever is provided with four fluid passages, along circumferentially evenly distributing of transducer displacement take-off lever, left end cap is provided with the transducer oil inlet passage, and right end cap is provided with oil discharge passage;
Described micro displacement magnifying mechanism amplifies bar, strut and spool travel input bar by transducer displacement take-off lever, displacement and forms, realize the amplification of transducer output displacement, two spheric ends that bar is amplified in displacement contact cooperation with transducer displacement take-off lever with spool travel input bar ball, displacement is amplified bar and is provided with ball recess, forms ball with the spherical end surface of strut and contacts cooperation;
The described guiding valve balancing controls that reset are made up of zero adjusting screw, left centralizing spring, spool travel input bar, spool and right centralizing spring, and adjusting screw is connected in shell by fine thread;
Described valve body is provided with oil supply gallery, output oil duct and guiding valve drainback passage, and the guiding valve drainback passage communicates with the transducer oil inlet passage.
Described left end cap, coil rack, precompressed swivel nut, cool cycles oil duct, precompressed dish spring and transducer displacement take-off lever constitute automatic thermal compensation mechanism, compensate the thermal distortion of giant magnetostrictive rod automatically;
Described left end cap, precompressed dish spring, transducer displacement take-off lever, precompressed swivel nut and adjusting guide rod constitute the precompression applying mechanism, can realize applying of giant magnetostrictive rod precompression easily, to increase its magnetostrictive strain, make it be operated in linearity range;
Described left end cap, transducer displacement take-off lever, giant magnetostrictive rod, precompressed swivel nut, adjusting guide rod, right end cap and converter shell constitute closed magnetic circuit, to reduce leakage field, improve the magnetic field utilization ratio;
Fluid passage on fluid passage on described guiding valve drainback passage, transducer oil inlet passage, the transducer displacement take-off lever, cool cycles oil duct, the precompressed swivel nut and oil discharge passage constitute cooling system, take away the heat that coil heating, eddy current etc. produce, transducer is cooled off.
Described left end cap, transducer displacement take-off lever, giant magnetostrictive rod, precompressed swivel nut, adjusting guide rod, right end cap and converter shell employing permeability height, the stainless steel that thermal expansion coefficient is little;
Described displacement take-off lever, displacement are amplified bar, strut and spool travel input bar and are all adopted the big stainless steel of rigidity to make;
Described coil rack adopts thermal conductivity stainless steel good, that permeability is little, thermal expansion coefficient is consistent with giant magnetostrictive rod to make, and the thermal expansion coefficient of coil rack and the product of length equal the thermal expansion coefficient of giant magnetostrictive rod and the product of length;
Described protection lining adopts thermal conductivity good, and permeability is little, and the thermal expansion coefficient material consistent with giant magnetostrictive rod made.
The present invention compares with background technique, and the beneficial effect that has is:
1, provides a kind of novel direct drive type electro-hydraulic servo valve that is driven by the ultra-magnetic telescopic transducer, its drive part adopts novel ultra-magnetic telescopic transducer to replace traditional permanent magnetism force motor, compare with the electrohydraulic control that traditional force motor drives, have the advantages that speed of response is fast, frequency range is high, ouput force is big;
2, provide a kind of novel ultra-magnetic telescopic transducer, this ultra-magnetic telescopic transducer is provided with cooling system, automatic thermal compensation mechanism and precompression applying mechanism, the heat that produces during the work of ultra-magnetic telescopic transducer cools off by cooling system, if not cooling fully, automatically thermal compensation mechanism can be to the thermal distortion compensation automatically in real time of giant magnetostrictive rod, so this transducer has the interval characteristics such as big of control accuracy height, linear work;
3, provide a kind of direct drive type electro-hydraulic servo valve that is driven by the ultra-magnetic telescopic transducer, has micro displacement magnifying mechanism, therefore spool input displacement is bigger, and the minimum through-flow size of valve body is bigger, so the output flow of servovalve is big, contamination resistance strong, the system works reliability is higher;
4, provide a kind of novel micro displacement magnifying mechanism based on lever principle, this micro displacement magnifying mechanism can take full advantage of the characteristics of ultra-magnetic telescopic transducer ouput force, has characteristics such as the displacement magnification factor is big, response is fast, precision height;
Therefore the present invention can be applicable in the high hydraulic servo control system of high frequency response, big flow, control accuracy.
Description of drawings
Fig. 1 is structural principle schematic representation of the present invention.
Fig. 2 is the end-face structure schematic representation of precompressed swivel nut among Fig. 1.
Fig. 3 is the end-face structure schematic representation of transducer displacement take-off lever among Fig. 1.
Among the figure: 1; zero adjusting screw, 2; left side centralizing spring, 3; spool travel input bar; 4; shell, 5; bar, 6 are amplified in displacement; strut; 7; the transducer oil inlet passage, 8; transducer displacement take-off lever, 9; left end cap; 10; precompressed dish spring, 11; coil rack, 12; giant magnetostrictive rod; 13; the protection lining, 14; drive coil, 15; bias coil; 16; converter shell, 17; right end cap, 18; the precompressed swivel nut; 19; oil discharge passage, 20; the cool cycles oil duct, 21; regulate guide rod; 22; the O RunddichtringO, 23; guiding valve guiding valve drainback passage, 24; valve body; 25; spool; 26; right centralizing spring, 27; oil supply gallery, 28; the output oil duct.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in Figure 1, based on the large-flow high-frequency direct drive type electro-hydraulic servo valve of ultra-magnetic telescopic transducer mainly by valve body, be positioned at the valve body top the ultra-magnetic telescopic transducer, be positioned at micro displacement magnifying mechanism and shell on the left of valve body and the ultra-magnetic telescopic transducer, the guiding valve that is positioned at valve inner and left side thereof the balancing controls that reset form.
The effect of described ultra-magnetic telescopic transducer is that the current signal that will import converts the output displacement to; it comprises left end cap; right end cap; loaded spring along left end cap and the installation of right end cap axial position; transducer displacement take-off lever; giant magnetostrictive rod; the precompressed swivel nut; regulate guide rod; be installed in the protection lining between giant magnetostrictive rod and the converter shell; coil rack; the outside of coil rack is wound with drive coil and bias coil; the left end of coil rack is fixed in left end cap; its right-hand member can slide at right end cap; the precompressed swivel nut is connected by fine thread with coil rack; the precompressed swivel nut is provided with four fluid passages; circumferentially evenly distribute along it; the center is provided with axial hexagonal guiding groove (as shown in Figure 2); transducer displacement take-off lever is provided with four fluid passages, circumferentially evenly distributes (as shown in Figure 3) along it.
Described micro displacement magnifying mechanism amplifies bar, strut and spool travel input bar by transducer displacement take-off lever, displacement and forms, realize the amplification of transducer output displacement, two spheric ends that bar is amplified in displacement contact cooperation with transducer displacement take-off lever with spool travel input bar ball, displacement is amplified bar and is provided with ball recess, forms ball with the spherical end surface of supporting frame and contacts cooperation.
The described guiding valve balancing controls that reset are made up of zero adjusting screw, left centralizing spring, spool travel input bar, spool and right centralizing spring, adjusting screw is connected in shell by fine thread, can be easily to the servovalve zeroing by adjusting screw, centralizing spring can be realized the automatic centering of servovalve.
As shown in Figure 1, the new structure of direct drive type electro-hydraulic servo valve is provided based on the large-flow high-frequency direct drive type electro-hydraulic servo valve of ultra-magnetic telescopic transducer, and provide solve servovalve with ultra-magnetic telescopic transducer precompression apply, the new method of key issues such as cooling, thermal compensation and micrometric displacement amplification, specific as follows described:
The precompression applying method of ultra-magnetic telescopic transducer as shown in Figure 1, the precompressed swivel nut is pressed in the right-hand member of giant magnetostrictive rod, precompressed dish spring is pressed in transducer displacement take-off lever the left end of giant magnetostrictive rod.The hexagonal spiral shell head of regulating guide rod is contained in the hexagonal guiding groove of precompressed swivel nut, therefore rotation is regulated guide rod and can be driven the rotation of precompressed swivel nut, and the precompressed swivel nut is connected in the coil rack that left end is fixed on left end cap by fine thread, so the rotation of precompressed swivel nut can make the precompressed swivel nut be moved to the left, with the pressure that axially applies a certain size of precompressed dish spring to giant magnetostrictive rod, reach the purpose that applies precompression, so that it is operated in linearity range, and can increase its magnetostrictive strain.
Ultra-magnetic telescopic transducer cooling means as shown in Figure 1; the fluid that enters from guiding valve oil passage flows by the direction of arrow shown in the accompanying drawing; through the transducer oil inlet passage in the left end cap and the axial fluid passage of transducer displacement take-off lever; arrive the gap between coil rack and the protection lining; by the axial fluid passage arrival right end cap of precompressed swivel nut and the gap between the precompressed swivel nut, flow out through oil discharge passage more then.In this transducer cooling system process, fluid fully contacts with the protection lining with coil rack, therefore can take away the heat that coil heating and giant magnetostrictive rod heat is transmitted, and reaches cooling purpose.
Ultra-magnetic telescopic transducer compensation method for thermal as shown in Figure 1; coil rack and protection lining adopt thermal conductivity good; the stainless steel that thermal expansion coefficient and giant magnetostrictive rod are close is made; its left end is fixed in left end cap; right-hand member is connected by fine thread with the precompressed swivel nut; so when temperature raises; coil rack can only expand to right-hand member; produce gap between giant magnetostrictive rod and the precompressed swivel nut this moment; this gap is very fast to be promoted transducer displacement take-off lever by precompressed dish spring; after moving right, giant magnetostrictive rod integral body eliminates; giant magnetostrictive rod also will produce thermal expansion this moment; because the thermal expansion coefficient of coil rack and length can guarantee that through design its thermal distortion equates with the thermal distortion of giant magnetostrictive rod; the direction of thermal distortion is opposite with the direction of transducer output displacement; therefore can realize the automatic compensation of ultra-magnetic telescopic transducer thermal distortion; its output displacement is not acted upon by temperature changes, improves the output displacement accuracy of transducer.
Ultra-magnetic telescopic transducer closed magnetic circuit as shown in Figure 1; closed magnetic circuit is made of left end cap, transducer displacement take-off lever, giant magnetostrictive rod, precompressed swivel nut, adjusting guide rod, right end cap and converter shell; its material all adopts the high stainless steel of permeability; coil rack and protection lining adopt the low material of permeability; the length of coil is bigger than the length of giant magnetostrictive rod; therefore leakage field be can reduce, magnetic field homogeneity and utilization ratio improved.
The micrometric displacement amplification method as shown in Figure 1, micro displacement magnifying mechanism designs based on lever principle, transducer displacement take-off lever is the displacement input end, the strut that is fixed in left end cap is support end, it is lever that bar is amplified in displacement, spool travel input bar is that output terminal is amplified in displacement, displacement is amplified bar and is sphere with cooperation between transducer displacement take-off lever, strut, the spool travel input end and contact cooperations, thus this displacement amplifying mechanism have the displacement magnification factor greatly, respond soon, characteristics that precision is high.
Based on the working principle of the large-flow high-frequency direct drive type electro-hydraulic servo valve of ultra-magnetic telescopic transducer as shown in Figure 1, at first guide rod is regulated in rotation, apply a certain size precompression to giant magnetostrictive rod by the precompression applying mechanism, so that it is operated in linearity range, and can increase its magnetostrictive strain, improve magnetic machine coupling efficiency; Determine direct current to bias coil input one then, to eliminate the frequency multiplication phenomenon, make the magnetostrictive strain of giant magnetostrictive rod be in the range of linearity, reduce the dead band of transducer response, a certain size elongation is provided to transducer simultaneously.Be not in zero-bit as servovalve, can regulate by the zero adjusting screw that guiding valve resets in the balancing controls, till transferring to zero-bit.
During the servovalve proper functioning, can change the power of giant magnetostrictive rod driving magnetic field by the size of controlling driving current in the ultra-magnetic telescopic transducer drive coil, thereby control the output displacement of ultra-magnetic telescopic transducer.The carry-out bit Mobile Communication of ultra-magnetic telescopic transducer crosses micro displacement magnifying mechanism and passes to spool, and spool has displacement output, so servovalve output control flow.When the direction of driving current and bias current was identical, driving current increased, and driving magnetic field strengthens, and the output displacement of ultra-magnetic telescopic transducer increases, and the spool travel of servovalve increases, and the output flow of servovalve increases; Otherwise driving current reduces, and the servovalve output flow reduces.When the direction of driving current and bias current was opposite, the direction of servovalve output flow was opposite.During outage, servovalve automatic centering under the effect of centralizing spring.In the working procedure, the work fluid of servovalve cools off it by the cooling system that drainback passage enters into the ultra-magnetic telescopic transducer, and the automatic thermal compensation mechanism of ultra-magnetic telescopic transducer compensates automatically to the thermal distortion of giant magnetostrictive rod.

Claims (9)

1. based on the large-flow high-frequency direct drive type electro-hydraulic servo valve of ultra-magnetic telescopic transducer, it is characterized in that:
Comprise valve body (24), be positioned at the ultra-magnetic telescopic transducer of valve body (24) top, the micro displacement magnifying mechanism and the shell (4) that are positioned at valve body (24) and ultra-magnetic telescopic transducer left side, the guiding valve that is positioned at valve body (24) inside and left side reset balancing controls;
Described ultra-magnetic telescopic transducer comprises left end cap (9) and right end cap (17), in the middle of the axial position of left end cap (9) and right end cap (17), locate to be equipped with successively precompressed dish spring (10), transducer displacement take-off lever (8), giant magnetostrictive rod (12), precompressed swivel nut (18) and adjusting guide rod (21), protection lining (13) is housed between giant magnetostrictive rod (12) and the converter shell (16) successively, coil rack (11), be around in drive coil (14) and the bias coil (15) in the coil rack outside successively, the left end of coil rack (11) is fixed in left end cap (9), the right-hand member of coil rack (11) is supported on the right end cap (17), and can slide at right end cap (17), be reserved with cool cycles oil duct (20) between protection lining (13) and the coil rack (11);
Described precompressed swivel nut (18) is connected in the left end of coil rack (11) by fine thread, precompressed swivel nut (18) is provided with four fluid passages, along circumferentially evenly distributing of precompressed swivel nut (18), precompressed swivel nut (18) center is provided with axial hexagonal guiding groove, regulate guide rod (21) and pass right end cap (17), its manual tune end is positioned at right end cap (17) right side, the hexagonal guiding groove that the other end is provided with hexagonal spiral shell head and precompressed swivel nut (18) is slidingly matched, transducer displacement take-off lever (8) is provided with four fluid passages, along circumferentially evenly distributing of transducer displacement take-off lever (8), left end cap (9) is provided with transducer oil inlet passage (7), and right end cap (17) is provided with oil discharge passage (19);
Described micro displacement magnifying mechanism comprises transducer displacement take-off lever (8), displacement amplification bar (5), strut (6) and spool travel input bar (3), two spheric ends that bar (5) is amplified in displacement contact cooperation with transducer displacement take-off lever (8) with spool travel input bar (3) ball, displacement is amplified bar (7) and is provided with ball recess, forms ball with the spherical end surface of strut (6) and contacts cooperation;
The described guiding valve balancing controls that reset comprise zero adjusting screw (1), left centralizing spring (2), spool travel input bar (3), spool (25) and right centralizing spring (26), and zero adjusting screw (1) is connected in shell (4) by fine thread;
Described valve body (24) is provided with oil supply gallery (28), output oil duct (27) and guiding valve drainback passage (23), and guiding valve drainback passage (23) communicates with transducer oil inlet passage (7).
2. the large-flow high-frequency direct drive type electro-hydraulic servo valve based on the ultra-magnetic telescopic transducer according to claim 1 is characterized in that: described left end cap (9), coil rack (11), precompressed swivel nut (18), cool cycles oil duct (20), precompressed dish spring (10) and the automatic thermal compensation of transducer displacement take-off lever (8) formation mechanism.
3. the large-flow high-frequency direct drive type electro-hydraulic servo valve based on the ultra-magnetic telescopic transducer according to claim 1 is characterized in that: described left end cap (9), precompressed dish spring (10), transducer displacement take-off lever (8), precompressed swivel nut (18) and adjusting guide rod (21) formation precompression applying mechanism.
4. the large-flow high-frequency direct drive type electro-hydraulic servo valve based on the ultra-magnetic telescopic transducer according to claim 1 is characterized in that: described left end cap (9), transducer displacement take-off lever (8), giant magnetostrictive rod (12), precompressed swivel nut (18), adjusting guide rod (21), right end cap (17) and converter shell (16) formation closed magnetic circuit.
5. the large-flow high-frequency direct drive type electro-hydraulic servo valve based on the ultra-magnetic telescopic transducer according to claim 1 is characterized in that: the fluid passage on the fluid passage on described guiding valve drainback passage (23), transducer oil inlet passage (7), the transducer displacement take-off lever (8), cool cycles oil duct (20), the precompressed swivel nut (23) and oil discharge passage (19) formation cooling system.
6. the large-flow high-frequency direct drive type electro-hydraulic servo valve based on the ultra-magnetic telescopic transducer according to claim 1 is characterized in that: described left end cap (9), transducer displacement take-off lever (8), giant magnetostrictive rod (12), precompressed swivel nut (18), adjusting guide rod (21), right end cap (17) and converter shell (16) employing permeability height, the stainless steel that thermal expansion coefficient is little.
7. the large-flow high-frequency direct drive type electro-hydraulic servo valve based on the ultra-magnetic telescopic transducer according to claim 1 is characterized in that: described displacement take-off lever (8), displacement are amplified bar (7), strut (6) and spool travel and are imported bar (3) and all adopt the big stainless steel of rigidity.
8. the large-flow high-frequency direct drive type electro-hydraulic servo valve based on the ultra-magnetic telescopic transducer according to claim 1, it is characterized in that: described coil rack (11) adopts thermal conductivity stainless steel good, that permeability is little, thermal expansion coefficient is consistent with giant magnetostrictive rod to make, and the thermal expansion coefficient of coil rack (11) and the product of length equal the thermal expansion coefficient of giant magnetostrictive rod and the product of length.
9. the large-flow high-frequency direct drive type electro-hydraulic servo valve based on the ultra-magnetic telescopic transducer according to claim 1; it is characterized in that: described protection lining (13) adopts thermal conductivity good; permeability is little, and the thermal expansion coefficient material consistent with giant magnetostrictive rod made.
CN2013101492244A 2013-04-26 2013-04-26 Mass flow high-frequency direct-acting electro-hydraulic servo valve based on great magnetostriction converter Pending CN103244494A (en)

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CN106641403A (en) * 2016-11-07 2017-05-10 温州大学 Direct-acting electro-hydraulic proportional valve driven by two-way permanent magnet linear force motor
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CN105904926A (en) * 2016-06-02 2016-08-31 厦门理工学院 Semi-active suspension for passenger car and passenger car
CN106641403A (en) * 2016-11-07 2017-05-10 温州大学 Direct-acting electro-hydraulic proportional valve driven by two-way permanent magnet linear force motor
CN106641403B (en) * 2016-11-07 2019-07-09 温州大学 A kind of direct action type electrohydraulic proportional valve of the linear force motor driving of bidirectional permanent magnetic
CN107883015A (en) * 2017-10-11 2018-04-06 中国航发西安动力控制科技有限公司 A kind of air pressure adaptive servo valve
CN108692925A (en) * 2018-03-28 2018-10-23 中国航发湖南动力机械研究所 Elastic device for measuring rigidity of ring and measurement method
CN108692925B (en) * 2018-03-28 2020-11-17 中国航发湖南动力机械研究所 Elastic ring rigidity measuring device and method
CN111835175A (en) * 2019-04-23 2020-10-27 浙江工业大学 High-frequency direct-acting type power motor
CN111835175B (en) * 2019-04-23 2024-06-11 浙江工业大学 High-frequency direct-acting type power motor
CN113162313A (en) * 2021-04-15 2021-07-23 浙大城市学院 Two-dimensional motor and servo valve

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Application publication date: 20130814