CN103212990B - A kind of car mill compound contouring machine and grooving method thereof - Google Patents
A kind of car mill compound contouring machine and grooving method thereof Download PDFInfo
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- CN103212990B CN103212990B CN201310140891.6A CN201310140891A CN103212990B CN 103212990 B CN103212990 B CN 103212990B CN 201310140891 A CN201310140891 A CN 201310140891A CN 103212990 B CN103212990 B CN 103212990B
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Abstract
The invention provides a kind of car mill compound contouring machine and grooving method thereof, comprise a body, wherein, the profiling mould that bed body upper surface be arranged in parallel and a workpiece, workpiece by be arranged on a tailstock component of body upper surface one end and be arranged on a body upper surface other end workpiece spindle main spindle box clamp, one auxiliary handler is set below workpiece, bed body upper surface is also provided with guide rail, mould feed mechanism and tool feeding organization establishes are on guide rail, mould feed mechanism clamping profiling mould, tool feeding organization establishes is in the outside of tailstock component, be provided with lathe tool cutter tower, according to the present invention, a kind of car is also provided to grind compound contouring machine grooving method, car of the present invention is adopted to grind compound contouring machine and grooving method thereof, can one-shot forming, greatly raising the efficiency, while reducing process time, avoid one by one the plucking phenomenon that turnery processing occurs, and may be provided in line detector, the work of repair-deficiency can be completed without the need to secondary clamping.
Description
Technical field
The present invention relates to a kind of car mill compound contouring machine, be applied to the processing of multi-wire cutting machine home roll one-shot forming profile copy grinding, be particularly applied to the multi-wire cutting machine home roll grooving techniques of silicon rod cutting.
Background technology
At present, grinding technique is very ripe, and be widely used in precision optical machinery processing, but contour grinder, particularly large scale, micro-structural contour grinder are not yet applied, especially in multi-wire saw field, the home roll groove of cutting steel wire still needs to process one by one.Multi-wire saw technology is widely used in the fields such as photovoltaic, LED, semiconductor manufacturing, is the best approach of cutting the non-conducting materials such as solar silicon wafers, LED Sapphire Substrate, semi-conductor silicon chip (wafer), magnetite, pottery at present.Especially manufacturing field at semiconductor and photovoltaic, multi-wire saw technology has replaced inner circle cutting technique becomes mainstream technology in wafer and solar silicon wafers large-scale production, the advantages such as it has, and efficiency is high, otch is little, product quality human factor is few.
Home roll with metallic channel is one of multi-line cutting machine vital part, and its quality directly determines the cut quality of wafer.Home roll applies polyurethane material, polyurethane material is processed the mainstream technology that metallic channel is multi-wire saw home roll, metallic channel can make line of cut evenly, stably be distributed on home roll, and then ensures the thickness uniformity of silicon chip or wafer.Under normal circumstances, the line of cut groove depth of multi-line cutting machine home roll is shallow, interval is little, required precision is high, in addition the polyurethane material being coated in home roll surface is rapid wear material, in multi-wire saw process, under the friction and dissection of line of cut, home roll surfacing weares and teares and causes metallic channel to be out of shape, and turning is difficult to ensure required precision.Meanwhile, the particles of silicon carbide embedding colloid surface can accelerate lathe tool wearing and tearing, even causes point of a knife to rupture; In addition, to wire casing turnery processing one by one, length consuming time, efficiency are low, uncontrollable in process, ignorance factor is many, the lateral compression particularly in tool wear and working angles.Cannot cut off material rapidly during tool wear, form galling defect, there is salient point in flute surfaces, may cause wire jumper in multi-wire saw bumps, and cause wafer became uneven, even silicon rod is scrapped, and lateral compression power may cause the adjacent wire casing distortion of having processed.For ensureing the uniformity of multi-wire saw, must again process metallic channel to home roll and namely slotting after using certain number of times.
Grinding is also commonly use one of main roller slotting mode at present one by one, namely on Digit Control Machine Tool, is cutter, processes metallic channel one by one with grinding wheel.After home roll uses the regular hour, colloid surface can embed particles of silicon carbide, adopts grinding method to add man-hour, consuming time longer, and the wearing and tearing of grinding wheel are large.
Therefore, current employing turning or grinding process grooving techniques one by one, there is the inevitable defects such as technical difficulty is comparatively large, cost is quite high, inefficiency, especially when cutting edge roundness weares and teares, easily occur that the defects such as error transfinites, plucking cause defective products.Further, after home roll machines, cannot to workpiece on-line checkingi, offline inspection is consuming time more, and needs secondary clamping after finding defect.
In view of this, how to overcome above-mentioned defect, to become in this area an important research topic.
Summary of the invention
Large for prior art operation easier, cost is high, efficiency is lower, easily occurs that error transfinites, the defect of plucking, and finds defect length consuming time, cannot to deficiencies such as workpiece on-line checkingi, the invention provides a kind of car mill compound contouring machine and grooving method thereof.
The invention provides a kind of car mill compound contouring machine and grooving method thereof, for workpiece copying, slot especially for home roll one-shot forming, comprise a body, wherein, bed body upper surface is arranged with a profiling mould and a workpiece in parallel, workpiece by be arranged on a tailstock component of body upper surface one end and be arranged on a body upper surface other end workpiece spindle main spindle box clamp, one auxiliary handler is set below workpiece, bed body upper surface is also provided with guide rail, mould feed mechanism and tool feeding organization establishes are on guide rail, mould feed mechanism clamping profiling mould, tool feeding organization establishes is in the outside of tailstock component, be provided with lathe tool cutter tower.
Preferably, the profiling mould of car mill compound contouring machine and the axle center of workpiece are in same level;
Preferably, the auxiliary handler of car mill compound contouring machine comprises two retractility lifting apparatus, and two retractility lifting apparatus support workpiece;
Preferably, the lathe tool cutter tower of car mill compound contouring machine is driven by tool feeding mechanism, and lathe tool cutter tower comprises lathe tool cutter tower seat and is arranged on the lathe tool on lathe tool cutter tower seat;
Preferably, the mould feed mechanism of car mill compound contouring machine, tool feeding mechanism, tailstock component and lathe tool cutter tower move to adjust position along guide rail;
Preferably, the tool feeding mechanism of car mill compound contouring machine has two groups of feed units, often organize feed unit all to comprise precise ball screw rod and be arranged on the feeding motor of precise ball screw rod one end, the moving direction that two groups of feed units realize in feeding process is mutually vertical;
Preferably, the mould feed mechanism of car mill compound contouring machine comprises and is separately positioned on profiling both mold ends to clamp mould main spindle box and the mould shaft assembly tailstock of mould, mould main spindle box and mould shaft assembly tailstock are fixedly installed on mould feeding base plate, mould feeding base plate is slidably arranged in mould feeding guide rail, is also provided with precise ball screw rod and is arranged on the feeding motor of precise ball screw rod one end below mould feeding base plate;
Preferably, the car mill compound contouring machine of car mill compound contouring machine has two CCD checkout gears;
According to the present invention, provide a kind of car to grind compound contouring machine grooving method, comprise the following steps:
1) mould loads, and cutter tool setting detects: according to workpiece demand assembling corresponding specification mould, after vision tool setting, mould and cutter are returned safe zero-bit;
2) clamping workpiece: be placed on by workpiece on the auxiliary handler of jack-up, drops to clamping position after assisting the lifting apparatus of handler to accept workpiece, and after completing clamping by tailstock component, auxiliary handler declines, until be hidden in a body;
3) turnery processing: turning of work piece axle main shaft, turning workpiece excircle, removes surface impurity;
4) grinding: after excircle of workpiece turning completes, rotates mould shaft main shaft, essence thick by feeding motor be incorporated into, complete simultaneous manufacturing, in grinding process, spray cooling fluid simultaneously and join in region to mould and workpiece;
5) workpiece dismounting: after grinding completes, zero-bit return by mould and cutter, and auxiliary handler is raised up to clamping position, takes workpiece away.
Preferably, step 4 in car mill compound contouring machine grooving method) processing grooved be U-shaped or V-type, opening angle is 0 ~ 135 °.
Car of the present invention is adopted to grind compound contouring machine and grooving method thereof, can one-shot forming, while greatly raising the efficiency, reducing process time, avoid one by one the plucking phenomenon that turnery processing occurs.And be provided in line detector, to processing grooved on-line checkingi, the work of repair-deficiency can be completed without the need to secondary clamping.
Accompanying drawing explanation
Fig. 1 shows according to the present invention, the schematic diagram 1 of car mill compound contouring machine;
Fig. 2 shows according to the present invention, the schematic diagram 2 of car mill compound contouring machine;
Fig. 3 shows according to the present invention, the schematic diagram 3 of car mill compound contouring machine;
Fig. 4 shows according to the present invention, profiling mould repair schematic diagram;
Fig. 5 shows according to the present invention, workpiece fluting one-shaping technique operational flowchart.
Detailed description of the invention
With reference to the accompanying drawings, embodiments of the present invention are described in further detail.
Fig. 1, Fig. 2, Fig. 3 respectively illustrate the schematic diagram of car of the present invention mill compound contouring machine different angles, with reference to diagram, car mill compound contouring machine of the present invention comprises a body 1, be arranged on the workpiece spindle main spindle box 2 on a body 1, mould feed mechanism 3, profiling mould 4, workpiece 5, auxiliary handler 6, tailstock component 7, lathe tool cutter tower 8, tool feeding mechanism 9, and the guide rail 10 being laid on a body 1 upper surface, mould feed mechanism 3, tool feeding mechanism 9, tailstock component 7 and lathe tool cutter tower 8 can move to adjust position along guide rail 10.Wherein, machine tool body 1 is the foundation of whole lathe, at its one end erector's part main shaft drives module workpiece axle main spindle box 2, the guide rail that bed body 1 upper surface is laid is provided with moveable tailstock component 7, and tailstock component 7 is arranged on an other end that body upper surface is relative with workpiece spindle main spindle box 2.Tailstock component 7 can according to the size of workpiece 5 along adjustment position, machine tool guideway direction, tailstock component 7 also comprises the tailstock 702 be connected with workpiece 5 and the hydraulic cylinder 701 being arranged on tailstock 702 outer end, during work, tailstock component 7 is fixed on a body 1, hydraulic cylinder 701 action and workpiece spindle main spindle box 2 holding workpiece 5.Auxiliary handler 6 is arranged on a body 1, is positioned at the below of workpiece 5, can be used for clamping and the dismounting of workpiece 5.
Auxiliary handler 6 has two lifting apparatus 601, and it possesses synchronization telescope function, in workpiece 5 clamping or unloading process, realizes the adjustment of workpiece 5 center with easy to setup or dismounting by lifting.
Mould feed mechanism 3 is arranged on the guide rail 10 of machine tool body, and clamping profiling mould 4, ensure profiling mould 4 and workpiece 5 axis being parallel, Parallel errors is not more than 0.005mm.Mould feed mechanism 3 comprises and is separately positioned on profiling mould 4 two ends to clamp mould main spindle box 301 and the mould shaft assembly tailstock 305 of mould, the two is all fixedly installed on mould feeding base plate 302, mould feeding base plate 302 is slidably arranged in mould feeding guide rail 303, also be provided with precise ball screw rod 12 below tool feeding base plate and be arranged on the feeding motor 11 of precise ball screw rod 12 one end, i.e. servomotor.It is radial at workpiece that mould feed mechanism 3 adopts the combination of precise ball screw rod 12 and feeding motor 11 to realize mould shaft, namely X to precision feeding, use precision linear guide rail mould feeding guide rail 303 to lead, use absolute grating ruler (not illustrating) to do closed loop feedback.During installation, profiling mould 4 axle center and workpiece 5 axle center are in same level, ensure the accuracy of the surperficial grooved of workpiece 5.According to the replacing profiling mould 4 of workpiece 5 size, and then the compatibility of different size workpiece can be realized.Lathe is maximum processing work axis length can be not less than 2000mm.
Tool feeding mechanism 9 is arranged on guide rail 10, is positioned at the outside of tailstock component 7, is provided with lathe tool cutter tower 8, and the lathe tool 802 comprising lathe tool cutter tower seat 801 and be arranged on lathe tool cutter tower seat 801, lathe tool cutter tower 8 is driven by tool feeding mechanism 9.Tool feeding mechanism 9 has two groups of feed units, comprise along the X of workpiece 5 radial feed to feed unit and the Z-direction feed unit along workpiece 5 axial feed, each feed unit comprises precise ball screw rod and feeding motor, namely the Z-direction tool feeding screw rod 905 axially arranged along workpiece 5 as shown in Figure 3 and the Z-direction tool feeding motor 904 being arranged on its one end, the X arranged along workpiece 5 radial direction to tool feeding screw rod 903 and be arranged on its one end X to tool feeding motor 902.X, Z-direction feeding all adopt feeding motor and servomotor and accurate screw combinations mode to realize feeding, and the moving direction that two groups of feed units realize in feeding process is mutually vertical.
The present invention is provided with two CCD checkout gears, is respectively inspection tool setting CCD1001 and grooved detection CCD1002.As shown in Figure 3, inspection tool setting CCD1001 is arranged on a body 1, grooved detect X that CCD1002 is arranged on tool feeding mechanism 9 to.
X below tool feeding screw rod 903 is on slide plate 901, and the former is for vision tool setting, and the latter is used for Workpiece shaping and detects.When not clamping workpiece, profiling mould mould shaft is fed into X negative sense extreme position, tool feeding mechanism 9 drives lathe tool cutter tower 8, lathe tool 802 pairs of profiling moulds 4 are utilized to repair, now profiling mould shaft main shaft is rotary main shaft, there is provided cutting power, tool feeding mechanism 9 is in X, Z-direction interpolation feeding.Grooved detects the on-line monitoring of CCD1002 to processing grooved, and the secondary clamping eliminating workpiece can complete the work of repair-deficiency.
Fig. 4 shows according to the present invention, the profiling mould repair schematic diagram of car mill compound contouring machine.With reference to Fig. 4, lathe tool 802 can along the radial direction of workpiece in Fig. 35 and axial feed, namely to X to Z-direction feeding, realize the turning to workpiece, profiling mould 4 along workpiece 5 radial feed, can realize cylindricalo grinding function.Simultaneously, profiling mould shaft and workpiece spindle axially all have good rigidity along workpiece 5, ensure the accuracy of grinding, profiling mould main shaft and work spindle all have higher speed, diaxon rotating Vortex, tangent bus obtains higher speed of related movement, and then obtains desirable surface of the work.
Further, according to car mill compound contouring machine of the present invention, provide a kind of car to grind compound contouring machine grooving method, comprise mould and load, cutter tool setting detects, clamping workpiece, turnery processing, grinding, and workpiece is dismantled, concrete technology simultaneously
Step is as follows:
First, according to the demand assembling corresponding specification profiling mould 5 of workpiece 5, inspection tool setting CCD1001 is utilized to carry out vision tool setting, accurate workpiece and mould " loaded " position, to numerical control mould input cutter initial parameter after vision tool setting, and profiling mould 4 and cutter are returned safe zero-bit.(S1～S2)
If profiling mould and cutter are detected not on home, then need again to make zero.Then, auxiliary handler 6 jack-up, workpiece 5 is placed on it, clamping position is dropped to after assisting the lifting apparatus 601 of handler to accept workpiece 5, namely clamped by tailstock component 7 and workpiece spindle main spindle box 2, after tailstock 702 completes clamping, auxiliary handler 6 declines, until be hidden in a body, avoid the operation (S3 ~ S7) interfering tool feeding mechanism 9.
Turning of work piece axle main shaft, the cylindrical of turner 5, removes surface impurity.(S8)
After completing turning, rotate profiling mould shaft main shaft, open cooling fluid, wherein, profiling mould shaft main shaft requires to reach the rotating speed being more than or equal to 800r/min, to improve the fineness on workpiece 5 surface.Under the drive of feeding motor and servomotor, profiling mould 4 adopts coarse feed and to progress greatly to the mode combined to workpiece 5 grinding-shaping, to ensure grinding accuracy, completes simultaneous manufacturing.Profiling mould 4 surface has the contrary groove that to cut line groove with workpiece, two ends have been slightly less than channel bottom diameter without groove place diameter, the U-type groove processing being applicable to diamond wire can be realized, and be applicable to the V-type slot machining of mortar steel wire, separation error is all better than 0.003mm, and grooved angular range can cover 0 ~ 135 °.In grinding process, spray cooling fluid and join in region to mould and workpiece, cooling fluid can adopt micro-emulsion cutting fluid, narrow water-base cutting fluid or the oil base cutting fluids such as shaping cutting fluid, Totally synthesized cutting fluid.(S9～S13)
After grinding completes, zero-bit return by profiling mould 4 and cutter, and auxiliary handler 6 is raised up to clamping position, and hydraulic cylinder 701 and tailstock 702 are return, and take workpiece 5 away, complete operation.(S14～S19)
Therefore, by car mill compound contouring machine provided by the invention and grooving method thereof, can effectively avoid the deficiencies such as prior art operation easier is large, cost is high, efficiency is low, especially the defects such as the error occurred when cutting edge roundness weares and teares transfinites are avoided, technical operation one-shot forming, while greatly raising the efficiency, reducing process time, avoid one by one the plucking phenomenon that turnery processing occurs, and be provided in line detector, to processing grooved on-line checkingi, the work of repair-deficiency can be completed without the need to secondary clamping.
Be described above the specific embodiment of the present invention.But those of ordinary skill in the art can be understood, when without departing from the spirit and scope of the present invention, various change and replacement can also be done to the specific embodiment of the present invention.These change and replacement all drops in the scope of claims of the present invention restriction.
Claims (8)
1. a car mill compound contouring machine, comprise a body, it is characterized in that, described bed body upper surface is arranged with a profiling mould and a workpiece in parallel, described workpiece is by being arranged on the tailstock component of described bed body upper surface one end and being arranged on the workpiece spindle main spindle box clamping of the described bed body upper surface other end, one auxiliary handler is set below described workpiece, described bed body upper surface is also provided with guide rail, mould feed mechanism and tool feeding organization establishes are on described guide rail, wherein, described mould feed mechanism clamps described profiling mould, described tool feeding organization establishes is in the outside of described tailstock component, be provided with lathe tool cutter tower, described car mill compound contouring machine has two CCD checkout gears, described mould feed mechanism, described tool feeding mechanism, described tailstock component and described lathe tool cutter tower move to adjust position along described guide rail.
2. car mill compound contouring machine as claimed in claim 1, it is characterized in that, the axle center of described profiling mould and described workpiece is in same level.
3. car mill compound contouring machine as claimed in claim 1, it is characterized in that, described auxiliary handler comprises two retractility lifting apparatus, and described two retractility lifting apparatus support described workpiece.
4. car mill compound contouring machine as claimed in claim 1, it is characterized in that, described lathe tool cutter tower is driven by described tool feeding mechanism, and described lathe tool cutter tower comprises lathe tool cutter tower seat and is arranged on the lathe tool on described lathe tool cutter tower seat.
5. car mill compound contouring machine as claimed in claim 1, it is characterized in that, described tool feeding mechanism has two groups of feed units, often organize the feeding motor that described feed unit all comprises precise ball screw rod and is arranged on described precise ball screw rod one end, the moving direction that feed unit described in two groups realizes in feeding process is mutually vertical.
6. car mill compound contouring machine as claimed in claim 1, it is characterized in that, described mould feed mechanism comprises and is separately positioned on described profiling both mold ends to clamp mould main spindle box and the mould shaft assembly tailstock of mould, described mould main spindle box and mould shaft assembly tailstock are fixedly installed on mould feeding base plate, described mould feeding base plate is slidably arranged in mould feeding guide rail, is also provided with precise ball screw rod and is arranged on the feeding motor of described precise ball screw rod one end below described mould feeding base plate.
7. a car mill compound contouring machine grooving method, is characterized in that, comprise the following steps:
1) mould loads, and cutter tool setting detects: according to workpiece demand assembling corresponding specification mould, after vision tool setting, described mould and cutter are returned safe zero-bit;
2) clamping workpiece: be placed on by workpiece on the auxiliary handler of jack-up, drops to clamping position after assisting the lifting apparatus of handler to accept described workpiece, and after completing clamping by tailstock component, described auxiliary handler declines, until be hidden in a body;
3) turnery processing: turning of work piece axle main shaft, turning workpiece excircle, removes surface impurity;
4) grinding: after described excircle of workpiece turning completes, rotates mould shaft main shaft, essence thick by feeding motor be incorporated into, complete simultaneous manufacturing, in grinding process, spray cooling fluid simultaneously and join in region to mould and workpiece;
5) workpiece dismounting: after grinding completes, zero-bit return by described mould and cutter, and described auxiliary handler is raised up to clamping position, takes workpiece away.
8. car mill compound contouring machine grooving method as claimed in claim 7, is characterized in that, described step 4) in the grooved that processes be U-shaped or V-type, opening angle is 0 ~ 135 °.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310140891.6A CN103212990B (en) | 2013-04-22 | 2013-04-22 | A kind of car mill compound contouring machine and grooving method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310140891.6A CN103212990B (en) | 2013-04-22 | 2013-04-22 | A kind of car mill compound contouring machine and grooving method thereof |
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| Publication Number | Publication Date |
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| CN103212990A CN103212990A (en) | 2013-07-24 |
| CN103212990B true CN103212990B (en) | 2015-11-18 |
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| CN201310140891.6A Expired - Fee Related CN103212990B (en) | 2013-04-22 | 2013-04-22 | A kind of car mill compound contouring machine and grooving method thereof |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105081913B (en) * | 2015-08-25 | 2018-05-11 | 泉州市佳能机械制造有限公司 | A kind of grinding and polishing apparatus and polished machine |
| CN115958709B (en) * | 2022-12-28 | 2023-06-20 | 宁波合盛新材料有限公司 | Multi-line cutting method for silicon carbide wafer |
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| US3508534A (en) * | 1966-10-05 | 1970-04-28 | Photocircuits Corp | Machines for sawing samples of brittle materials |
| EP0610705B1 (en) * | 1993-02-08 | 1998-06-03 | Xian Hua Xu | Combined grinding machine for internal spline |
| CN2700095Y (en) * | 2004-06-30 | 2005-05-18 | 邢洪章 | Device for processing and forming die shaft |
| JP2005161477A (en) * | 2003-12-03 | 2005-06-23 | Daido Steel Co Ltd | Roller polishing tool and roller polishing method |
| CN102166791A (en) * | 2011-01-25 | 2011-08-31 | 林敏华 | Silicon rod multi-wire cutting machine guide wheel slotting one-time molding combined machine tool and application thereof |
| CN102658510A (en) * | 2012-05-03 | 2012-09-12 | 上海欣展橡胶有限公司 | Manufacturing process of toothed rubber roller |
| CN102773498A (en) * | 2012-08-16 | 2012-11-14 | 保定天威英利新能源有限公司 | Method of slotting guide wheel of multiline cutting machine |
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2013
- 2013-04-22 CN CN201310140891.6A patent/CN103212990B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3508534A (en) * | 1966-10-05 | 1970-04-28 | Photocircuits Corp | Machines for sawing samples of brittle materials |
| EP0610705B1 (en) * | 1993-02-08 | 1998-06-03 | Xian Hua Xu | Combined grinding machine for internal spline |
| JP2005161477A (en) * | 2003-12-03 | 2005-06-23 | Daido Steel Co Ltd | Roller polishing tool and roller polishing method |
| CN2700095Y (en) * | 2004-06-30 | 2005-05-18 | 邢洪章 | Device for processing and forming die shaft |
| CN102166791A (en) * | 2011-01-25 | 2011-08-31 | 林敏华 | Silicon rod multi-wire cutting machine guide wheel slotting one-time molding combined machine tool and application thereof |
| CN102658510A (en) * | 2012-05-03 | 2012-09-12 | 上海欣展橡胶有限公司 | Manufacturing process of toothed rubber roller |
| CN102773498A (en) * | 2012-08-16 | 2012-11-14 | 保定天威英利新能源有限公司 | Method of slotting guide wheel of multiline cutting machine |
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