CN103206924A - Metal mask plate surface shape measuring system and measuring method thereof - Google Patents
Metal mask plate surface shape measuring system and measuring method thereof Download PDFInfo
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- CN103206924A CN103206924A CN2012100068433A CN201210006843A CN103206924A CN 103206924 A CN103206924 A CN 103206924A CN 2012100068433 A CN2012100068433 A CN 2012100068433A CN 201210006843 A CN201210006843 A CN 201210006843A CN 103206924 A CN103206924 A CN 103206924A
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- metal mask
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- plate surface
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Abstract
The invention relates to a metal mask plate surface shape measuring system and a measuring method thereof. The metal mask plate surface shape measuring system comprises a control system, a measuring element, a data processing system and a displayer, wherein the control system automatically finishes measurement of a metal mask plate through software, the measuring element measures the surface of the metal mask plate and feeds measurement data back to the data processing system timely, the data processing system performs simulation according to the measurement data and accordingly obtains a surface shape of the metal mask plate, and the displayer displays a processing result of the data processing system. The metal mask plate surface shape measuring system directly controls the measurement process through the software, increases measured data volume, enables the measured result to really reflect the surface shape of the measured metal mask plate, and a relevant surface shape result can be directly, rapidly and accurately shown to an operator through the displayer by using data processing software, a direct and clear judgment basis is provided for the operator, and operation of the operator is facilitated.
Description
Technical field
The present invention relates to a kind of mechanical hook-up, be specifically related to a kind of metal mask plate surface shape measurement system and measuring method thereof.
Background technology
Characteristics such as autoluminescence, the ultralight of OLED is thin, response speed is fast, wide visual angle, low-power consumption make the mobile phone that carries the OLED screen make us pursuing.At present, OLED has tentatively established the status as third generation display leading nucleus, and along with the maturation of technology and the breakthrough of large scale batch production technique, the OLED product will be to more large scale extension.
The vacuum mask evaporation is the main method of preparation OLED luminescent layer, and the used material of OLED mask is the extremely low invar of thermal expansivity (Invar) alloy, and the thickness of mask has only 40 μ m usually, has millions of small rectangular pixels.Because it is use the color OLED of three-color light-emitting material in manufacture process, to need successively to use several mask plates, thereby very high to the accuracy requirement of mask plate.Therefore, the OLED mask plate is fixed on the mask plate framework and must guarantees that the mask plate that is fixed has face shape preferably before.
At present industry is in later stage of making the OLED mask plate during mask plate surface shape measurement, generally be to choose contact or contactless surveying instrument is measured some groups of test points, data processing software such as the direct analysis of the result that will measure or importing Excel table is handled and is carried out sunykatuib analysis more again, and so operating process comparatively bothers.
Summary of the invention
The purpose of this invention is to provide a kind of metal mask plate surface shape measurement system and measuring method thereof, directly the surface shape measurement data direct modeling of metal mask plate is generated face shape figure in conjunction with software, more traditional data processing method is simpler, and can realize the scan-type measurement by software control, huge data source is the surface topography of reacting metal mask plate more really.
At above problem, the present invention proposes following scheme:
A kind of metal mask plate surface shape measurement system is characterized in that, comprising: control system, finish measurement to described metal mask plate automatically by software; Measuring sensor is measured described metal mask plate plate face, and measurement data is in time fed back to data handling system; Data handling system is simulated according to the data of test, thereby obtains the face shape of metal mask plate.
Preferably, described measuring sensor is the non-contact optical element.
Preferably, described measuring sensor is the laser elevation sensor.
Preferably, described control system is controlled described measuring sensor, described metal mask plate plate face is carried out scan-type measure.
Preferably, described control system is controlled described measuring sensor, and the appointed area of described metal mask plate plate face is measured.
Preferably, described data handling system is simulated according to the data of test in the process that test is carried out, thereby obtains the face shape of metal mask plate.
Preferably, described data handling system is simulated according to the data of test after test finishes, thereby obtains the face shape of metal mask plate.
Preferably, it is characterized in that measuring system also comprises display, be used for showing by data handling system and handle the face shape figure that obtains.
A kind of method of using above-mentioned metal mask plate surface shape measurement system to measure.
The present invention is directly by the software control measuring process, the data volume of measuring is strengthened, make the result who measures more can react the surface topography of tested metal mask plate really, the use of data processing software simultaneously directly can be presented to operating personnel with correlation surface shape result by display fast and accurately, give straightforward basis for estimation of operating personnel, made things convenient for operating personnel's operation.
Description of drawings
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in further detail.
Process flow diagram when Figure 1 shows that system involved in the present invention operation;
Fig. 2 is the overall schematic of metal mask plate kludge involved in the present invention;
Fig. 3 is I part enlarged diagram among Fig. 2;
Fig. 4 is measuring principle synoptic diagram of the present invention.
Wherein: 31 is the laser elevation sensor; 32 is the CCD camera lens; 33 are laser welding system; 4 is metal mask plate; 5 are the net mechanism of stretching tight; 6 is analyzing spot.
Embodiment
Embodiment
The present invention relates to a kind of metal mask plate surface shape measurement system, the process flow diagram when Figure 1 shows that system involved in the present invention operation.
Fig. 2 is the overall schematic of metal mask plate kludge involved in the present invention, in measuring process, measuring sensor is the non-contact optical element in the described measuring system, and Fig. 3 is I part enlarged diagram among Fig. 2, and laser elevation sensor 31 is selected in the surface shape measurement unit in the present embodiment.
Under the software control of control system, measuring sensor carries out scan-type to metal mask plate plate face and measures, also can be to specify area measure, Fig. 4 is measuring principle synoptic diagram of the present invention, the measurement of the enterprising line scanning formula of the horizontal level of height sensor 31 above metal mask plate, at each corresponding analyzing spot, height sensor 31 is measured distance between analyzing spot and the height sensor 31 by optical reflection, and measurement data is in time fed back to data handling system; In the process that height sensor 31 sweep tests are carried out or the test finish after, data handling system is simulated according to the data of test, thereby obtain face shape and other relevant data result of metal mask plate, and by display the 3 dimensional drawing that can reflect the metal mask plate surface topography that the data handling system processing obtains is presented as face shape figure.
After the been scanned, operating personnel judge according to measurement result whether metal mask plate face shape meets the requirements, if the face pictograph closes requirement, detect metal mask plate opening precision by the CCD camera lens 32 among the I, if the opening precision meets the requirements, both can utilize among the I laser welding system 33 that metal mask plate is welded on the fixed frame.
Above embodiment purpose is to illustrate the present invention, and unrestricted protection scope of the present invention, drops in protection scope of the present invention but replace relating among the embodiment cellular construction by the cellular construction of other equivalent action.
Claims (9)
1. a metal mask plate surface shape measurement system is characterized in that, comprising: control system, finish measurement to described metal mask plate automatically by software; Measuring sensor is measured described metal mask plate plate face, and measurement data is in time fed back to data handling system; Data handling system is simulated according to the data of test, thereby obtains the face shape of metal mask plate.
2. metal mask plate surface shape measurement according to claim 1 system is characterized in that described measuring sensor is the non-contact optical element.
3. metal mask plate surface shape measurement according to claim 2 system is characterized in that described measuring sensor is the laser elevation sensor.
4. metal mask plate surface shape measurement according to claim 1 system is characterized in that described control system is controlled described measuring sensor, described metal mask plate plate face is carried out scan-type measure.
5. metal mask plate surface shape measurement according to claim 1 system is characterized in that described control system is controlled described measuring sensor, and the appointed area of described metal mask plate plate face is measured.
6. metal mask plate surface shape measurement according to claim 1 system is characterized in that, described data handling system is simulated according to the data of test in the process that test is carried out, thereby obtains the face shape of metal mask plate.
7. metal mask plate surface shape measurement according to claim 1 system is characterized in that, described data handling system is simulated according to the data of test after test finishes, thereby obtains the face shape of metal mask plate.
8. metal mask plate surface shape measurement according to claim 1 system is characterized in that measuring system also comprises display, is used for showing by data handling system handling the face shape figure that obtains.
9. a right to use requires 1 method of measuring to the described metal mask plate surface shape measurement of claim 8 system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100068433A CN103206924A (en) | 2012-01-11 | 2012-01-11 | Metal mask plate surface shape measuring system and measuring method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100068433A CN103206924A (en) | 2012-01-11 | 2012-01-11 | Metal mask plate surface shape measuring system and measuring method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103206924A true CN103206924A (en) | 2013-07-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN2012100068433A Pending CN103206924A (en) | 2012-01-11 | 2012-01-11 | Metal mask plate surface shape measuring system and measuring method thereof |
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Citations (7)
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| CN1256414A (en) * | 1999-12-29 | 2000-06-14 | 上海宝钢集团公司 | Surface three-dimensional appearance testing method and equipment |
| US20050259248A1 (en) * | 2004-05-18 | 2005-11-24 | Gip Tung S | Nondestructive evaluation of subsurface damage in optical elements |
| US20070188743A1 (en) * | 2006-02-16 | 2007-08-16 | Toshihiko Tanaka | Method and system of defect inspection for mask blank and method of manufacturing semiconductor device using the same |
| CN101819163A (en) * | 2010-06-03 | 2010-09-01 | 成都精密光学工程研究中心 | Detection device of subsurface defect of optical element and method thereof |
| CN101833235A (en) * | 2009-03-13 | 2010-09-15 | 中芯国际集成电路制造(上海)有限公司 | Quality detection system and method for original mask copy |
| CN102023162A (en) * | 2009-09-11 | 2011-04-20 | 三星移动显示器株式会社 | Mask defect testing apparatus |
| CN202432996U (en) * | 2012-01-11 | 2012-09-12 | 昆山允升吉光电科技有限公司 | Metal mask plate face form measuring system |
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2012
- 2012-01-11 CN CN2012100068433A patent/CN103206924A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1256414A (en) * | 1999-12-29 | 2000-06-14 | 上海宝钢集团公司 | Surface three-dimensional appearance testing method and equipment |
| US20050259248A1 (en) * | 2004-05-18 | 2005-11-24 | Gip Tung S | Nondestructive evaluation of subsurface damage in optical elements |
| US20070188743A1 (en) * | 2006-02-16 | 2007-08-16 | Toshihiko Tanaka | Method and system of defect inspection for mask blank and method of manufacturing semiconductor device using the same |
| CN101833235A (en) * | 2009-03-13 | 2010-09-15 | 中芯国际集成电路制造(上海)有限公司 | Quality detection system and method for original mask copy |
| CN102023162A (en) * | 2009-09-11 | 2011-04-20 | 三星移动显示器株式会社 | Mask defect testing apparatus |
| CN101819163A (en) * | 2010-06-03 | 2010-09-01 | 成都精密光学工程研究中心 | Detection device of subsurface defect of optical element and method thereof |
| CN202432996U (en) * | 2012-01-11 | 2012-09-12 | 昆山允升吉光电科技有限公司 | Metal mask plate face form measuring system |
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| 朱万彬: "激光位移传感器在物体表面形状测量中的应用", 《光机电信息》 * |
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Application publication date: 20130717 |
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