CN103205717B - 盖体 - Google Patents
盖体 Download PDFInfo
- Publication number
- CN103205717B CN103205717B CN201210009540.7A CN201210009540A CN103205717B CN 103205717 B CN103205717 B CN 103205717B CN 201210009540 A CN201210009540 A CN 201210009540A CN 103205717 B CN103205717 B CN 103205717B
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- Prior art keywords
- lid
- face
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
盖体 | 1 |
第一端面 | 11 |
容置腔 | 110 |
遮挡网 | 112 |
第二端面 | 12 |
第一接头 | 120 |
进口流道 | 122 |
侧面 | 13 |
连接部 | 130 |
第二接头 | 132 |
出口流道 | 134 |
中间孔 | 14 |
分流道 | 15 |
环流道 | 16 |
容器 | 2 |
腔体 | 20 |
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210009540.7A CN103205717B (zh) | 2012-01-13 | 2012-01-13 | 盖体 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210009540.7A CN103205717B (zh) | 2012-01-13 | 2012-01-13 | 盖体 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103205717A CN103205717A (zh) | 2013-07-17 |
CN103205717B true CN103205717B (zh) | 2016-12-21 |
Family
ID=48753119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210009540.7A Expired - Fee Related CN103205717B (zh) | 2012-01-13 | 2012-01-13 | 盖体 |
Country Status (1)
Country | Link |
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CN (1) | CN103205717B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106868455B (zh) * | 2017-03-17 | 2019-04-23 | 武汉华星光电技术有限公司 | 蒸镀坩埚及蒸镀装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201785478U (zh) * | 2010-05-21 | 2011-04-06 | 昆山维信诺显示技术有限公司 | 一种蒸镀设备 |
CN102197156A (zh) * | 2008-11-12 | 2011-09-21 | 朗姆研究公司 | 由液体控制的多区基片支座改进的基片温度控制 |
-
2012
- 2012-01-13 CN CN201210009540.7A patent/CN103205717B/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102197156A (zh) * | 2008-11-12 | 2011-09-21 | 朗姆研究公司 | 由液体控制的多区基片支座改进的基片温度控制 |
CN201785478U (zh) * | 2010-05-21 | 2011-04-06 | 昆山维信诺显示技术有限公司 | 一种蒸镀设备 |
Also Published As
Publication number | Publication date |
---|---|
CN103205717A (zh) | 2013-07-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20171024 Address after: No. 889, Foxconn Road, Yushan Town, Kunshan, Jiangsu Patentee after: Fuyu precise component (Kunshan) Co., Ltd. Address before: 518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Co-patentee before: Hon Hai Precision Industry Co., Ltd. Patentee before: Hongfujin Precise Industry (Shenzhen) Co., Ltd. |
|
TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161221 Termination date: 20210113 |
|
CF01 | Termination of patent right due to non-payment of annual fee |