CN103203173A - Exhaust gas treatment device - Google Patents
Exhaust gas treatment device Download PDFInfo
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- CN103203173A CN103203173A CN2012100132444A CN201210013244A CN103203173A CN 103203173 A CN103203173 A CN 103203173A CN 2012100132444 A CN2012100132444 A CN 2012100132444A CN 201210013244 A CN201210013244 A CN 201210013244A CN 103203173 A CN103203173 A CN 103203173A
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- scrubbing tower
- waste gas
- tower
- stillpot
- treatment equipment
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Abstract
The invention provides an exhaust gas treatment device used for treating the exhaust gas. The exhaust gas treatment device comprises a sedimentation tank and a washing device installed on the sedimentation tank, wherein the washing device comprises an air inlet washing tower, an air outlet washing tower and at least one washing tower group; the washing tower group further comprises a first washing tower and a second washing tower; the first washing tower and the second washing tower are communicated with each other in part; the sedimentation tank is used for containing a washing liquid and has at least two tank bodies; and the air inlet washing tower and the first washing tower, and the air outlet washing tower and the second washing tower are mutually communicated through different tank bodies in the sedimentation tank respectively. When the exhaust gas is introduced to the exhaust gas treatment device for treatment, the exhaust gas passes through the air inlet washing tower, a space in a corresponding tank body, the first washing tower, the second washing tower, a space in the other tank body in the sedimentation tank and the air outlet washing tower in order; and finally the purified exhaust gas is discharged through the air outlet washing tower.
Description
Technical field
The present invention relates to a kind of waste gas treatment equipment, relate in particular to a kind of waste gas treatment equipment that is constituted by at least four scrubbing towers.
Background technology
The technology waste gas that general industry technology produces generally includes noxious material and has stink, if waste gas then can cause air pollution not through dealing carefully with.In order to remove the pollutant in the waste gas, must utilize prevention and cure of air pollution device processes waste gas, so that the pollutant concentration in the waste gas is lower than the limit value of rules and regulations.General industry prevention and cure of air pollution equipment commonly used is the scrubbing tower exhaust treatment system, and the scrubbing tower exhaust treatment system is removed pollutant in the waste gas with the method for liquid scrubbing.
Fig. 1 is the schematic diagram of scrubbing tower exhaust treatment system 1 of the treatment process waste gas of prior art.Scrubbing tower exhaust treatment system 1 comprises inlet duct 12, cleaning solution feeding mechanism 14, stillpot 16 and scrubbing tower 18 etc.Cleaning solution feeding mechanism 14 comprises circulating pump 141, pipeline 142 again and is located at spray appliance (figure shows) in the scrubbing tower 18.
During 1 operation of scrubbing tower exhaust treatment system, at first, cleaning solution 142 is delivered to scrubbing tower 18 cats head by the road with circulating pump 141, is entered in the scrubbing tower 18 by cat head.Then, cleaning solution and then is delivered to cat head by circulating pump 141 and forms a circulation at the bottom of spray appliance evenly spills down and get back to scrubbing tower 18 towers.On the other hand, waste gas from the bottom of the tower or cat head import in the scrubbing tower 18, flow up or down then and contact with cleaning solution, make the pollutant in the waste gas dissolve in cleaning solution, then discharged by cat head through the gas of purification.
In general, when cleaning solution and waste gas contact area are more big, the waste gas clean result of scrubbing tower 18 can be more good, so scrubbing tower 18 need be designed to have big liquid level area and minimum gas pressure loss usually.In order to achieve the above object, can in scrubbing tower 18, filling fill material usually, to increase the exchange area of liquid gas, to improve the detersive efficiency of waste gas.Filling material commonly used for example draws uncommon ring etc.
Along with the development of scientific and technological industry, semiconductor technology is also constantly upgraded, thereby the waste gas that produces contains more more complicated pollutant compositions, and these pollutants rely on the scrubbing tower exhaust treatment system of prior aries can't deal carefully with.
Summary of the invention
The object of the present invention is to provide a waste gas treatment equipment that is constituted by at least four scrubbing towers, with the waste gas that effective New Process for Treatment was produced.
For achieving the above object, the invention provides a kind of waste gas treatment equipment, in order to handle waste gas, comprise stillpot and be installed in wash mill on the described stillpot that this stillpot has at least two pond bodies, in order to splendid attire one cleaning solution; This wash mill comprises the air inlet scrubbing tower, goes out gas wash tower and at least one scrubbing tower group, this scrubbing tower group further comprises first scrubbing tower and second scrubbing tower, this first scrubbing tower and this second scrubbing tower are that the part interconnects, this air inlet scrubbing tower and this first scrubbing tower are positioned at body top, the same pond of this stillpot, this goes out gas wash tower and this second scrubbing tower then is positioned at another body top, pond of this stillpot, when this this cleaning solution of stillpot splendid attire, forming a space between the liquid level of cleaning solution and this wash mill bottom in each pond body; When in this waste gas enters this waste gas treatment equipment, handling, waste gas will be in regular turn in the corresponding pond intracorporeal space of air inlet scrubbing tower, stillpot, first scrubbing tower, second scrubbing tower, stillpot the space in another pond body, go out gas wash tower, the waste gas after having purified at last goes out gas wash tower by this again and discharges.
Utilize the waste gas treatment equipment of at least four roads of the present invention washing, effectively New Process for Treatment produce waste gas, and corresponding exhausted air quantity increases, and effectively prolong and wash flow path, and equipment size remains unchanged.Waste gas treatment equipment of the present invention can make the dust free room space effectively use, and solves the insurmountable problem of prior art.
Description of drawings
Fig. 1 is the schematic diagram of scrubbing tower exhaust treatment system of the treatment process waste gas of prior art.
Fig. 2 is the structural representation of waste gas treatment equipment of the present invention.
Fig. 3 is the structural representation of the stillpot of waste gas treatment equipment of the present invention.
Fig. 4 is the structural representation of the wash mill of waste gas treatment equipment of the present invention.
Fig. 5 A and Fig. 5 B are the schematic diagram that flows to that waste gas of the present invention enters waste gas treatment equipment.
Fig. 6 is the structural representation of cleaning solution feeding mechanism of the present invention.
Fig. 7 is the structure top cross-sectional view of another embodiment of wash mill of waste gas treatment equipment of the present invention.
Wherein, description of reference numerals is as follows:
1: the scrubbing tower exhaust treatment system
12: inlet duct
14: the cleaning solution feeding mechanism
141: circulating pump
142: pipeline
16: stillpot
18: scrubbing tower
2: waste gas treatment equipment
21: wash mill
21A: air inlet scrubbing tower
21B: first scrubbing tower
21C: second scrubbing tower
21D: go out gas wash tower
21E: the 3rd scrubbing tower
21F: the 4th scrubbing tower
213: hollow tube
214: air inlet pipe
215: escape pipe
23: stillpot
232: the first pond bodies
233: the second pond bodies
25: the cleaning solution feeding mechanism
251: circulating pump
252: pipeline
253: spray unit
The specific embodiment
Following conjunction with figs. is done more detailed description to embodiments of the present invention, so that those skilled in the art can implement after studying this specification carefully according to this.
Waste gas treatment equipment of the present invention is in order to handle the waste gas that semiconductor technology produces.
Fig. 2 is the structure meaning diagram of waste gas treatment equipment 2 of the present invention.Waste gas treatment equipment 2 comprises wash mill 21, stillpot 23 and cleaning solution feeding mechanism 25.Wash mill 21 is located at stillpot 23 tops, and is connected with stillpot 23.And cleaning solution feeding mechanism 25 is located at stillpot 23 1 sides and wash mill 21 inside.
Fig. 3 is the structure chart of the stillpot 23 of waste gas treatment equipment 2 of the present invention.Stillpot 23 has at least two pond bodies 232,233, can be in order to splendid attire cleaning solution (figure does not show).Directly over each pond body 232,233 in order to two scrubbing towers (figure show) to be set.Be connected in this pond body 232,233 and with space in the scrubbing tower that is installed on it.
Fig. 4 is the structural representation of the wash mill 21 of waste gas treatment equipment 2 of the present invention.Wash mill 21 comprises air inlet scrubbing tower 21A, goes out gas wash tower 21D and at least one scrubbing tower group, and this scrubbing tower group further comprises the first scrubbing tower 21B and the second scrubbing tower 21C.Wherein, the first scrubbing tower 21B and the second scrubbing tower 21C are that the part interconnects.In the present embodiment, have a hollow tube 213 between the first scrubbing tower 21B and the second scrubbing tower 21C, be communicated with the first scrubbing tower 21B and the second scrubbing tower 21C, but mode of communicating is not limited with hollow tube 213.Each is washed bar tower inside and all has relevant waste gas filter (not drawing among the figure), for example spray unit, by formed filter course of Raschig ring etc., with the processing that waste gas is correlated with.Owing to the relevance filtering device of washing in the bar tower can be selected different structures or pattern for use at different waste gas, Gu Tuzhong does not draw, and does not therefore limit the present invention yet and washes the interior structure of bar tower.
In addition, wash mill 21 has more and is at least one exhaust inlet pipe 214 and escape pipe 215.Air inlet pipe 214 is arranged at air inlet scrubbing tower 21A top, enters from air inlet scrubbing tower 21A top for waste gas.Escape pipe 215 is arranged at out gas wash tower 21D top, discharges from going out gas wash tower 21D for waste gas.This is not limited in the installation site of this exhaust inlet pipe 214, also can be arranged at air inlet scrubbing tower 21A side, centre position or other position.In like manner this escape pipe 215 position of being installed on out gas wash tower 21D also can change.
In the present invention the air inlet scrubbing tower 21A of this wash mill 21, go out gas wash tower 21D, the first scrubbing tower 21B and the second scrubbing tower 21C, be matrix pattern and be installed on this stillpot 23.
As Fig. 2～shown in Figure 4, air inlet scrubbing tower 21A and the first scrubbing tower 21B are positioned at directly over the same pond body of stillpot 23; The second scrubbing tower 21C and going out directly over another pond body that gas wash tower 21D is positioned at stillpot 23.Therefore in the present embodiment, air inlet scrubbing tower 21A and the first scrubbing tower 21B are positioned at pond body 232 tops, space and be connected with spaces in the pond body 232 in two towers; Go out gas wash tower 21D and the second scrubbing tower 21C is positioned at directly over the pond body 233, the space also is connected with spaces in the pond body 233 in two towers.
Fig. 5 A and Fig. 5 B are the schematic diagram that flows to that waste gas of the present invention enters waste gas treatment equipment.Wherein, for clearly demonstrating, Fig. 5 A only illustrates the pond body 232 of air inlet scrubbing tower 21A, the first scrubbing tower 21B and stillpot 23; Fig. 5 B only illustrates the second scrubbing tower 21C, goes out the pond body 233 of gas wash tower 21D and stillpot 23.
Shown in figure Fig. 5 A and 5B, when utilizing waste gas treatment equipment treatment process waste gas of the present invention, at first, splendid attire cleaning solution in stillpot 23, the liquid level of cleaning solution is positioned at below, wash mill 21 bottoms, so that form a space between the horizontal plane of the liquid level of cleaning solution and wash mill 21 bottoms.Preferably, the liquid level of cleaning solution only is 1/2 to 2/3 of stillpot 23 height.
When waste gas (the arrow place among the figure namely represents the flow direction of waste gas) when entering wash mill 21, waste gas enters from the top of air inlet scrubbing tower 21A, arrive air inlet scrubbing tower 21A below, by the space on the liquid level in the pond body 232, enter first scrubbing tower 21B below, then enter second scrubbing tower 21C top from first scrubbing tower 21B top through hollow tube 213, arrive second scrubbing tower 21C below downwards, by the space on the liquid level in the pond body 233, and enter out below the gas wash tower 21D, then discharge from the top that goes out gas wash tower 21D.
Fig. 6 is the structural representation of cleaning solution feeding mechanism 25 of the present invention.When waste gas treatment equipment 2 of the present invention operates, need the collocation cleaning solution to recycle, reach the purpose that cleaning solution circulates by cleaning solution feeding mechanism 25, this figure only is a kind of embodiment of the present invention, does not therefore limit protection scope of the present invention.Cleaning solution feeding mechanism 25 of the present invention comprises circulating pump 251, pipeline 252 and is located at four spray unit 253 of four scrubbing tower 21A～21D inner and upper respectively, and each spray unit 253 is positioned at filter course (figure does not show) top.Spray unit 253 is in order to spray cleaning solution.Arrow among the figure is the flow direction of cleaning solution in pipeline 252 after circulating pump 251 is pumped.The mode of action of cleaning solution feeding mechanism 25 and principle are all same as the prior art, repeat no more herein.In the present invention, cleaning solution can be running water or condensed water, in addition, also can sulfur acid in the cleaning solution, one of them medicament at least such as hydrochloric acid or liquid caustic soda, with the noxious material in more effective removal waste gas.For example, hydrochloric acid and sulfuric acid can be removed the ammonia in the waste gas.Liquid caustic soda can be handled the ammonium nitrogen of deriving after chlorine in the waste gas and the aforementioned processing.
The number of the scrubbing tower group of waste gas treatment equipment of the present invention is also unrestricted, can also can be more than two groups or two groups for one of above-mentioned group, so scrubbing tower quantity then is at least 4, also can be 6, more than 8 or 8, and unrestricted.
Be another embodiment of the present invention below, in the present embodiment, stillpot has three pond bodies, has two scrubbing towers directly over each pond body, and meaning namely has six scrubbing towers.
Fig. 7 is the structure top cross-sectional view of wash mill 21 another embodiment of waste gas treatment equipment of the present invention.Wash mill 21 is except comprising air inlet scrubbing tower 21A and going out the gas wash tower 21D, also comprise first a scrubbing tower group and second a scrubbing tower group, the first scrubbing tower group comprises the first scrubbing tower 21B and the second scrubbing tower 21C, and the second scrubbing tower group comprises the 3rd a scrubbing tower 21E and the 4th a scrubbing tower 21F.Wherein, the first scrubbing tower 21B and second scrubbing tower 21C top interconnect, and the 3rd scrubbing tower 21E and the 4th scrubbing tower 21F top interconnect.In the present embodiment, has individual hollow tube 213 between the first scrubbing tower 21A and the second scrubbing tower 21C, be communicated with the first scrubbing tower 21A and the second scrubbing tower 21C, also have hollow tube 213 between the 3rd scrubbing tower 21E and the 4th scrubbing tower 21F, be communicated with the 3rd scrubbing tower 21E and the 4th scrubbing tower 21F.
Air inlet scrubbing tower 21A and the first scrubbing tower 21B are positioned at directly over the stillpot same pond body of (figure does not show); The second scrubbing tower 21C and the 3rd scrubbing tower 21E are positioned at directly over the same pond body of stillpot, the 4th scrubbing tower 21F and going out directly over the same pond body that gas wash tower 21D is positioned at stillpot.
When waste gas enters wash mill 21, waste gas enters from air inlet scrubbing tower 21A, arrive air inlet scrubbing tower 21A below, the space that forms between the liquid level by cleaning solution and the horizontal plane of wash mill 21 bottoms, enter first scrubbing tower 21B below, then enter second scrubbing tower 21C top from first scrubbing tower 21B top, arrive second scrubbing tower 21C below downwards, by this space, and enter below the 3rd scrubbing tower 21E, then arrive the 3rd scrubbing tower 21E top and enter the 4th scrubbing tower 21F top, arrive the 4th scrubbing tower 21F below, by this space, and enter out below the gas wash tower 21D, then discharge from going out gas wash tower 21D top.So as can be known, the waste gas of present embodiment flows to above-described embodiment identical, the twice washing procedure of present embodiment the 3rd scrubbing tower 21E that only has been many and the 4th scrubbing tower 21F.
In addition; the air inlet scrubbing tower of wash mill of the present invention, first scrubbing tower, second scrubbing tower, the 3rd scrubbing tower, the 4th scrubbing tower and go out also can respectively comprise in the gas wash tower filter course (figure show); it can be detained cleaning solution; to increase the action time of waste gas and cleaning solution; wherein more comprise at least one in the filter course and draw uncommon ring, can increase the contact area of waste gas and cleaning solution.Structure and the function of filter course are same as the prior art, and this paper repeats no more.
Pond body quantity that it should be noted that sedimentation basin of the present invention can be Duoed 1 than the quantity of scrubbing tower group.
Utilize the waste gas treatment equipment of the present invention at least four roads washings, the effectively waste gas that produces of New Process for Treatment, and corresponding exhausted air quantity increase can effectively prolong the washing flow path, and equipment size remains unchanged.Waste gas treatment equipment of the present invention can make the dust free room space effectively use.Waste gas treatment equipment of the present invention can solve the insurmountable problem of prior art, so creative.
The above is for only in order to explain preferred embodiment of the present invention; be not that attempt is done any pro forma restriction to the present invention according to this; be with, all have in that identical invention spirit is following do relevant any modification of the present invention or change, all must be included within the protection domain of the present invention.
Claims (10)
1. waste gas treatment equipment in order to handle waste gas, comprises:
One stillpot has at least two pond bodies, and this stillpot is in order to the splendid attire cleaning solution;
One wash mill, be installed on this stillpot, comprise the air inlet scrubbing tower, go out gas wash tower and at least one scrubbing tower group, this scrubbing tower group further comprises first scrubbing tower and second scrubbing tower, this first scrubbing tower and this second scrubbing tower part interconnect, this air inlet scrubbing tower and this first scrubbing tower are positioned at body top, the same pond of this stillpot, this goes out gas wash tower and this second scrubbing tower then is positioned at another body top, pond of this stillpot, when this this cleaning solution of stillpot splendid attire, form a space between the liquid level of cleaning solution and this wash mill bottom in each pond body;
When in this waste gas enters this waste gas treatment equipment, handling, waste gas will be in regular turn in air inlet scrubbing tower, corresponding pond intracorporeal space, first scrubbing tower, second scrubbing tower, stillpot the space in another pond body, go out gas wash tower, the waste gas after having purified at last goes out gas wash tower by this again and discharges.
2. waste gas treatment equipment as claimed in claim 1 wherein has a hollow tube between this first scrubbing tower and this second scrubbing tower, is communicated with this first scrubbing tower and this second scrubbing tower.
3. waste gas treatment equipment as claimed in claim 1 wherein has waste gas filter in this each scrubbing tower.
4. waste gas treatment equipment as claimed in claim 1, wherein this waste gas enters from this air inlet scrubbing tower top or side, and this give vent to anger scrubbing tower top or side are discharged certainly.
5. waste gas treatment equipment as claimed in claim 1, wherein the quantity of this pond body Duos 1 than the quantity of this scrubbing tower group.
6. waste gas treatment equipment as claimed in claim 1, wherein the liquid level of this cleaning solution only is 1/2 to 2/3 of this stillpot height.
7. waste gas treatment equipment as claimed in claim 1, wherein this cleaning solution is running water or condensed water.
8. waste gas treatment equipment as claimed in claim 1, this cleaning solution more comprises a medicament, and one of them forms this medicament at least by sulfuric acid, hydrochloric acid and liquid caustic soda.
9. waste gas treatment equipment as claimed in claim 1, wherein the air inlet scrubbing tower of this wash mill, first scrubbing tower that goes out gas wash tower and this scrubbing tower group and second scrubbing tower are matrix pattern and are installed on this stillpot.
10. waste gas treatment equipment as claimed in claim 1, wherein this stillpot has three pond bodies, and this wash mill further comprises the first scrubbing tower group and the second scrubbing tower group, this first scrubbing tower group comprises this first scrubbing tower and this second scrubbing tower, this second scrubbing tower group comprises the 3rd scrubbing tower and the 4th scrubbing tower, wherein, first scrubbing tower and second scrubbing tower top interconnect, the 3rd scrubbing tower and the 4th scrubbing tower top interconnect this air inlet scrubbing tower and first scrubbing tower, this second scrubbing tower and the 3rd scrubbing tower, and the 4th scrubbing tower and go out three groups of gas wash towers etc. be positioned at respectively this stillpot three pond bodies directly over.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100132444A CN103203173A (en) | 2012-01-13 | 2012-01-13 | Exhaust gas treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100132444A CN103203173A (en) | 2012-01-13 | 2012-01-13 | Exhaust gas treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103203173A true CN103203173A (en) | 2013-07-17 |
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ID=48750704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012100132444A Pending CN103203173A (en) | 2012-01-13 | 2012-01-13 | Exhaust gas treatment device |
Country Status (1)
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| CN (1) | CN103203173A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1141820A (en) * | 1995-05-08 | 1997-02-05 | 泰尔莫塞莱克特股份公司 | Device for cleaning gases, such as exhaust gases and/or synthesis gases |
| CN2339290Y (en) * | 1998-06-10 | 1999-09-22 | 郑清根 | Waste-gas treatment apparatus |
| CN1511613A (en) * | 2002-12-31 | 2004-07-14 | 余承烈 | Gas composite purifying method and its compositing device |
| JP2004358294A (en) * | 2003-06-02 | 2004-12-24 | Kawasaki Heavy Ind Ltd | Wet type flue gas desulfurizing method and wet type flue gas desulfurization apparatus |
| JP2006009761A (en) * | 2004-06-29 | 2006-01-12 | Denso Corp | Exhaust emission control device |
| CN2759573Y (en) * | 2005-01-06 | 2006-02-22 | 陈翊扬 | Exhaust gas cleaning system |
| TW200831178A (en) * | 2006-12-01 | 2008-08-01 | Kanken Techno Co Ltd | Device for detoxicating semiconductor production exhaust gas |
| CN201179423Y (en) * | 2008-03-07 | 2009-01-14 | 朱保中 | Smoke abatement, dust separation and desulfurization multi-stage purification tower |
| CN101653694A (en) * | 2008-08-22 | 2010-02-24 | 邱吉康 | High-efficiency desulfurizing and dedusting device and desulfurizing and dedusting method thereof |
| EP2258462A1 (en) * | 2009-06-05 | 2010-12-08 | AE & E Lentjes GmbH | Washer tower and accompanying exhaust gas purification device |
-
2012
- 2012-01-13 CN CN2012100132444A patent/CN103203173A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1141820A (en) * | 1995-05-08 | 1997-02-05 | 泰尔莫塞莱克特股份公司 | Device for cleaning gases, such as exhaust gases and/or synthesis gases |
| CN2339290Y (en) * | 1998-06-10 | 1999-09-22 | 郑清根 | Waste-gas treatment apparatus |
| CN1511613A (en) * | 2002-12-31 | 2004-07-14 | 余承烈 | Gas composite purifying method and its compositing device |
| JP2004358294A (en) * | 2003-06-02 | 2004-12-24 | Kawasaki Heavy Ind Ltd | Wet type flue gas desulfurizing method and wet type flue gas desulfurization apparatus |
| JP2006009761A (en) * | 2004-06-29 | 2006-01-12 | Denso Corp | Exhaust emission control device |
| CN2759573Y (en) * | 2005-01-06 | 2006-02-22 | 陈翊扬 | Exhaust gas cleaning system |
| TW200831178A (en) * | 2006-12-01 | 2008-08-01 | Kanken Techno Co Ltd | Device for detoxicating semiconductor production exhaust gas |
| CN201179423Y (en) * | 2008-03-07 | 2009-01-14 | 朱保中 | Smoke abatement, dust separation and desulfurization multi-stage purification tower |
| CN101653694A (en) * | 2008-08-22 | 2010-02-24 | 邱吉康 | High-efficiency desulfurizing and dedusting device and desulfurizing and dedusting method thereof |
| EP2258462A1 (en) * | 2009-06-05 | 2010-12-08 | AE & E Lentjes GmbH | Washer tower and accompanying exhaust gas purification device |
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Application publication date: 20130717 |