CN103189541B - 基于尖晶石结构的NiAl2O4的涂层 - Google Patents
基于尖晶石结构的NiAl2O4的涂层 Download PDFInfo
- Publication number
- CN103189541B CN103189541B CN201180026378.3A CN201180026378A CN103189541B CN 103189541 B CN103189541 B CN 103189541B CN 201180026378 A CN201180026378 A CN 201180026378A CN 103189541 B CN103189541 B CN 103189541B
- Authority
- CN
- China
- Prior art keywords
- layer
- coating
- target
- nial
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/085—Oxides of iron group metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
Claims (19)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US31510610P | 2010-03-18 | 2010-03-18 | |
US61/315106 | 2010-03-18 | ||
EP10173410.1A EP2369031B1 (de) | 2010-03-18 | 2010-08-19 | Beschichtung auf nial2o4 basis in spinellstruktur |
EP10173410.1 | 2010-08-19 | ||
PCT/EP2011/054110 WO2011113927A1 (de) | 2010-03-18 | 2011-03-18 | Beschichtung auf nial2o4 basis in spinellstruktur |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103189541A CN103189541A (zh) | 2013-07-03 |
CN103189541B true CN103189541B (zh) | 2015-09-23 |
Family
ID=42697577
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201180026378.3A Active CN103189541B (zh) | 2010-03-18 | 2011-03-18 | 基于尖晶石结构的NiAl2O4的涂层 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9428826B2 (zh) |
EP (2) | EP2369031B1 (zh) |
JP (1) | JP5771884B2 (zh) |
CN (1) | CN103189541B (zh) |
WO (1) | WO2011113927A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012200378A1 (de) * | 2012-01-12 | 2013-07-18 | Federal-Mogul Burscheid Gmbh | Kolbenring |
WO2015062733A1 (de) | 2013-11-03 | 2015-05-07 | Oerlikon Surface Solutions Ag, Trübbach | Oxidationsbarriereschicht |
EP3056587B1 (de) * | 2015-02-13 | 2020-11-18 | Walter AG | VHM-Schaftfräser mit TiAlN-ZrN-Beschichtung |
JP6533818B2 (ja) | 2017-10-20 | 2019-06-19 | 株式会社リケン | 摺動部材およびピストンリング |
US11167375B2 (en) | 2018-08-10 | 2021-11-09 | The Research Foundation For The State University Of New York | Additive manufacturing processes and additively manufactured products |
CN115058697B (zh) * | 2022-06-27 | 2023-10-13 | 成都工具研究所有限公司 | 稳态刚玉结构钛铝铬铌氧化物涂层及其制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2904449A (en) * | 1955-07-26 | 1959-09-15 | Armour Res Found | Method and compositions for flame spraying |
US5683761A (en) * | 1995-05-25 | 1997-11-04 | General Electric Company | Alpha alumina protective coatings for bond-coated substrates and their preparation |
CN1304457A (zh) * | 1999-05-06 | 2001-07-18 | 桑德维克公司 | Pvd法涂覆的切削刀具及其制备方法 |
CN101522950A (zh) * | 2006-10-10 | 2009-09-02 | 奥尔利康贸易股份公司(特吕巴赫) | 具有至少一层多元氧化物混晶层的层体系 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0769576B1 (en) | 1995-10-18 | 2000-09-20 | Tosoh Corporation | Low hydrogen overvoltage cathode and process for production thereof |
SE522722C2 (sv) * | 2001-03-28 | 2004-03-02 | Seco Tools Ab | Skärverktyg belagt med titandiborid |
US6677061B2 (en) * | 2001-05-23 | 2004-01-13 | Showa Denko Kabushiki Kaisha | Magnetic recording medium, production process thereof, and magnetic recording and reproducing apparatus |
JP2004082013A (ja) * | 2002-08-28 | 2004-03-18 | Hitachi Ltd | パーフルオロコンパウンド分解方法,分解触媒及び処理装置 |
SE524583C2 (sv) * | 2002-12-12 | 2004-08-31 | Erasteel Kloster Ab | Sammansatt metallprodukt och förfarande för framställning av en sådan |
PL1863947T3 (pl) * | 2005-03-24 | 2012-06-29 | Oerlikon Trading Ag | Warstwa z twardego materiału |
WO2006099759A2 (de) | 2005-03-24 | 2006-09-28 | Oerlikon Trading Ag, Trübbach | Vakuumplasmagenerator |
US9997338B2 (en) | 2005-03-24 | 2018-06-12 | Oerlikon Surface Solutions Ag, Pfäffikon | Method for operating a pulsed arc source |
JP4917447B2 (ja) * | 2006-05-25 | 2012-04-18 | 住友電工ハードメタル株式会社 | 表面被覆切削工具 |
TWI411696B (zh) | 2006-07-19 | 2013-10-11 | Oerlikon Trading Ag | 沉積電絕緣層之方法 |
US8129040B2 (en) * | 2007-05-16 | 2012-03-06 | Oerlikon Trading Ag, Truebbach | Cutting tool |
SE533395C2 (sv) * | 2007-06-08 | 2010-09-14 | Sandvik Intellectual Property | Sätt att göra PVD-beläggningar |
CN201304457Y (zh) | 2008-11-17 | 2009-09-09 | 东莞永腾自动化设备有限公司 | 线材折弯成型机 |
-
2010
- 2010-08-19 EP EP10173410.1A patent/EP2369031B1/de active Active
-
2011
- 2011-03-18 WO PCT/EP2011/054110 patent/WO2011113927A1/de active Application Filing
- 2011-03-18 JP JP2012557563A patent/JP5771884B2/ja not_active Expired - Fee Related
- 2011-03-18 CN CN201180026378.3A patent/CN103189541B/zh active Active
- 2011-03-18 US US13/635,710 patent/US9428826B2/en active Active
- 2011-03-18 EP EP11711494A patent/EP2547805A1/de not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2904449A (en) * | 1955-07-26 | 1959-09-15 | Armour Res Found | Method and compositions for flame spraying |
US5683761A (en) * | 1995-05-25 | 1997-11-04 | General Electric Company | Alpha alumina protective coatings for bond-coated substrates and their preparation |
CN1304457A (zh) * | 1999-05-06 | 2001-07-18 | 桑德维克公司 | Pvd法涂覆的切削刀具及其制备方法 |
CN101522950A (zh) * | 2006-10-10 | 2009-09-02 | 奥尔利康贸易股份公司(特吕巴赫) | 具有至少一层多元氧化物混晶层的层体系 |
Also Published As
Publication number | Publication date |
---|---|
EP2369031B1 (de) | 2016-05-04 |
JP5771884B2 (ja) | 2015-09-02 |
US20130036942A1 (en) | 2013-02-14 |
WO2011113927A1 (de) | 2011-09-22 |
EP2547805A1 (de) | 2013-01-23 |
JP2013522058A (ja) | 2013-06-13 |
EP2369031A1 (de) | 2011-09-28 |
EP2369031A9 (de) | 2012-07-18 |
US9428826B2 (en) | 2016-08-30 |
CN103189541A (zh) | 2013-07-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103189541B (zh) | 基于尖晶石结构的NiAl2O4的涂层 | |
JP6000233B2 (ja) | 少なくとも1つの複酸化物混合結晶皮膜を有する皮膜システム | |
Khatibi et al. | Structural and mechanical properties of Cr–Al–O–N thin films grown by cathodic arc deposition | |
CN104789933B (zh) | 一种纳米复合涂层及其沉积方法 | |
CN102666908B (zh) | 用于制备立方氧化锆层的方法 | |
WO2006041366A1 (en) | Cutting tool with wear resistant coating and method of making the same | |
CN106835037A (zh) | 一种高硬度、高弹性模量的多组元氮化物涂层及其制备方法 | |
JP3416938B2 (ja) | 積層体 | |
MX2011003838A (es) | Gamma no - alcro fase cubico. | |
JP2009203489A (ja) | 被覆部材 | |
EP3612655A1 (en) | Superalloy sputtering target | |
JP2009203485A (ja) | 被覆部材 | |
CN101688299B (zh) | Al-Ti-Ru-N-C硬质材料涂层 | |
JP2009197268A (ja) | 被覆部材 | |
JP5697750B2 (ja) | 表面被覆部材 | |
CN114945708B (zh) | 具有改善的涂层粘附力的pvd涂覆硬质合金切削工具 | |
Varela et al. | NbC-Ni coatings deposited by DC reactive magnetron sputtering: Effect of Ni content on mechanical properties, thermal stability and oxidation resistance | |
JP2010188460A (ja) | 表面被覆切削工具 | |
JP2019505396A (ja) | 被覆切削工具及び方法 | |
JP2019501294A (ja) | Pvd層及び被覆切削工具を製造する方法 | |
JP5247377B2 (ja) | 切削工具 | |
JP5094348B2 (ja) | 表面被覆工具 | |
JPWO2020213264A1 (ja) | 切削工具 | |
CN112955581A (zh) | 用于超合金基材的pvd屏障涂层 | |
WO2024126009A1 (en) | A coated cutting tool |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Swiss Te Lui Bach Patentee after: OERLIKON TRADING AG, TRuBBACH Address before: Swiss Te Lui Bach Patentee before: OERLIKON TRADING AG, TRuBBACH Address after: Swiss Te Lui Bach Patentee after: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON Address before: Swiss Te Lui Bach Patentee before: OERLIKON TRADING AG, TRuBBACH |
|
CP02 | Change in the address of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: Swiss hole Patentee after: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON Address before: Swiss Te Lui Bach Patentee before: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON |