CN103176270B - Two-degree-of-freedom high-speed parallel scanning platform and perpendicularity error calibration method thereof - Google Patents
Two-degree-of-freedom high-speed parallel scanning platform and perpendicularity error calibration method thereof Download PDFInfo
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- CN103176270B CN103176270B CN201310092386.9A CN201310092386A CN103176270B CN 103176270 B CN103176270 B CN 103176270B CN 201310092386 A CN201310092386 A CN 201310092386A CN 103176270 B CN103176270 B CN 103176270B
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Abstract
The invention relates to a two-degree-of-freedom high-speed parallel scanning platform and a perpendicularity error calibration method thereof. The two-degree-of-freedom high-speed parallel scanning platform comprises a shell, and a linear driving mechanism, a reflector shaft mechanism, a joint bearing and a phase-sensitive detector (PSD) position sensor which are arranged in the shell. The two-degree-of-freedom high-speed parallel scanning platform provided by the embodiment has a single reflector structure, the scanning operation can be finished through one-step reflection only, and the error amplification effect brought by the double-mirror reflection is avoided; meanwhile, by adoption of a two-input two-output structure, the two-degree-of-freedom high-speed parallel scanning platform is easily controlled compared with the prior art; by adoption of a joint bearing structure, the scanning platform can have high rigidity and a large deflection angle; and because the two-dimensional PSD position sensor serves as a feedback device of the normal position of a reflector, a full closed loop is realized, and the high precision can be achieved. The two-degree-of-freedom high-speed parallel scanning platform has the characteristics of high precision, high rigidity and high bearing capacity.
Description
Technical field
The present invention relates to precision optics scanning instrument field, be specifically related to the calibration steps of a kind of two-freedom high speed parallel scan platform and the error of perpendicularity thereof.
Background technology
Optical scanning mechanism is the servo actuator of advanced field of laser processing, is one of critical component of laser projection.
In recent years, minority carrier generation lifetime, especially 3-freedom parallel mechanism, as 3RPS type parallel institution, be more and more subject to attention and the favor of researcher in optical scanning field.The existing adjustment of the optical scan angle based on parallel institution platform, driven three movement branched chain be connected between moving platform and pedestal by three drivers simultaneously, thus realize the motion of moving platform three rotational freedom directions, or two rotational freedoms and an additional translational degree of freedom motion.
But under normal circumstances, optical scanning mechanism only needs two rotational freedoms, and unnecessary degree of freedom can increase the difficulty of kinematics analysis, make system architecture and control more complicated.Secondly, if movement branched chain structure is too complicated, the links such as processing and assembling just may cause larger systematic error.The cascaded structure form (gimbal form) that current most of optical scanning mechanism all adopts, this technology is very ripe, but due to the design feature (all quality of pitch axis are placed on azimuth axis completely, make kinoplaszm amount relatively large) of self, high-velocity scanning campaign cannot be realized.Also has a kind of plateform system combined by two groups of single shafts, be mainly used in laser projection or increment manufacturing technology (as 3D printer), because its kinoplaszm amount almost only has catoptron, inertia is very little so dynamic property is fine, there is very high bandwidth, but owing to adopting bimirror reflection can bring certain deviation accumulation and the harmful effect of amplification, load-bearing capacity is very low simultaneously.Mostly be applied in fast mirror structure for two rotary freedom parallel institutions, very high sweep velocity can be had but sweep limit is very little.The major mechanical structure of fast mirror divides two kinds, and one is X-Y axle frame-type, and also referred to as there being axis structure, its internal and external frame around two mutually orthogonal axis rotation, realizes the two-dimensional deflection of plane mirror respectively; Another kind is flexible shaftless structure, mainly utilizes the flexibility work of flexible member.The advantage of the first structure is that the rigidity of structure is good, load-bearing capacity strong, and angle range is large; Its shortcoming is that the accuracy requirement of shaft is higher, and moment of inertia and the moment of friction of system are bigger than normal, are unfavorable for the raising of resonance frequency, and the volume of this structure is bigger than normal, serious by space constraint.The second structural advantage is: structure is simple, without frictional resistance moment, and fast response time; But its shortcoming is, high to the requirement of flexible member, namely require that flexible member has enough flexibilities on desired motion direction, and there is enough rigidity on the direction of constrained motion, when this causes system works, the forms of motion of plane mirror comparatively complicated (can produce the displacement of the lines of trace while producing rotating angle movement), is unsuitable for using under the condition of work that vibration, impact, revolution etc. are severe.In addition, above-mentioned two kinds of structures, in order to make structural design symmetrical, all have employed the motor of four groups of pairwise orthogonal distributions, namely have employed four input controls two output, and this just makes control more complicated, and cost is higher.
Summary of the invention
In view of this, being necessary the defect for existing in prior art, providing a kind of two-freedom high speed parallel connection with high-speed, high precision feature to clear off scanning platform, and designing a kind of error of perpendicularity calibration steps for the special construction of this scanning platform; Relative to fast mirror, realize catoptron compared with large deflection angle while, reduce the complexity of scanning platform control gear, and continue to keep original reaction velocity and precision.
For achieving the above object, the present invention is by the following technical solutions:
A kind of two-freedom high speed parallel scan platform, comprises casing and the straight line driving mechanism be installed in casing, mirror axis mechanism, oscillating bearing and PSD position transducer;
Described mirror axis mechanism comprises main shaft, catoptron, mirror support, levelling bolt and generating laser, described main shaft is the multidiameter that one end diameter larger one end diameter is less, its axle center place has the through hole of an axis, described catoptron is fixed on mirror support, mirror support is fixed on the end face of the large axle head of main shaft by multiple levelling bolt, described generating laser is fixed in the through hole at spindle axis place, through hole is passed along the axle center of main shaft in its Laser emission direction, points to the little axle head of main shaft;
The large axle head of described main shaft is fixed on the inner ring of oscillating bearing, and the outer ring of oscillating bearing is fixed on casing;
Described PSD position transducer is fixed on bottom of shell, is oppositely arranged with the little axle head of main shaft;
Two straight line driving mechanisms are movably installed in casing, be respectively the first straight line driving mechanism and the second straight line driving mechanism, described first straight line driving mechanism is connected with main shaft respectively with the movement output end of the second straight line driving mechanism, and drive shaft swings around the rotation center of oscillating bearing on oscillating bearing.
Described straight line driving mechanism comprises voice coil motor, movable frame and guide rail; Described movable frame is rotatably connected on casing, and described guide rail is rotatably connected on movable frame, and described voice coil motor is fixed in guide rail.
Described straight line driving mechanism also comprises the grating scale sensor, the photoelectric limit switch that are fixed in guide rail, and the movement output end of described grating scale sensor and photoelectric limit switch and voice coil motor is oppositely arranged.
The movement output end of described voice coil motor is connected by ball pivot with main shaft.
Rubber sheet gasket is provided with between described mirror support and main shaft.
The minute surface of described catoptron is perpendicular to the axle center of main shaft.
The rotation center of described oscillating bearing is positioned on the minute surface of catoptron.
Described mirror support is fixed on the end face of the large axle head of main shaft by four levelling bolts, and described four screws are uniformly distributed in the edge of mirror support.
Described main shaft is convexly equipped with a junction, and described connecting portion is connected with the outer ring elasticity of casing or oscillating bearing by a Flexible Connector.
Described Flexible Connector is elastic threads or the soft spring that elasticity coefficient is greater than 300N/m and is less than 500N/m.
A calibration steps for the error of perpendicularity of two-freedom high speed parallel scan platform as above, comprises the following steps:
S1, set gradually projecting plane, adjusting pole and adjustment platform along a straight line, main shaft is fixed on adjusting pole, generating laser is fixed on adjustment platform, the end face of the large axle head of laser beam directive main shaft that laser transmitter projects is gone out;
S2, by adjusting pole and adjustment platform, the adjustment axial direction of main shaft and the position of generating laser, the laser beam that laser transmitter projects is gone out, through the through hole of spindle axis, projects on projecting plane;
S3, be arranged on main shaft by catoptron and mirror support by multiple levelling bolt, by screwing or loosening levelling bolt, finely tune the minute surface direction of catoptron, the laser beam that laser transmitter projects is gone out returns along former road.
Described S2 is also comprised and being finely tuned by the axial direction of adjusting pole to main shaft, makes laser beam projection brightness on the projection surface reach maximum.
A kind of two-freedom high speed parallel scan platform that the embodiment of the present invention provides adopts simple reflector structure, only needs primary event to complete scanning work, avoids bimirror and reflect the error enlarge-effect brought.Meanwhile, the present invention adopts two input two export structures, and in control, comparatively prior art is easily a lot; Additionally use oscillating bearing structure, larger rigidity and deflection angle can be had; Realize closed-loop owing to have employed Two-dimensional PSD position transducer as the feedback assembly of catoptron normal direction position again, very high precision can be reached.A kind of two-freedom high speed parallel scan platform provided by the invention has that precision is high, rigidity is large, the feature that load-bearing capacity is strong.
Accompanying drawing explanation
The structural representation of the two-freedom high speed parallel scan platform that Fig. 1 provides for the embodiment of the present invention.
The inner structure schematic diagram of the two-freedom high speed parallel scan platform that Fig. 2 provides for the embodiment of the present invention.
The structural representation of the mirror axis mechanism in the two-freedom high speed parallel scan platform that Fig. 3 provides for the embodiment of the present invention.
Fig. 4 is the sectional view of the mirror axis mechanism shown in Fig. 3.
The structural representation of the straight line driving mechanism in the two-freedom high speed parallel scan platform that Fig. 5 provides for the embodiment of the present invention.
A side structure schematic diagram in the two-freedom high speed parallel scan platform that Fig. 6 provides for the embodiment of the present invention.
The another kind of connected mode schematic diagram of the two-freedom high speed parallel scan platform that Fig. 7 provides for the embodiment of the present invention.
The inner bottom surface structural representation of the two-freedom high speed parallel scan platform that Fig. 8 provides for the embodiment of the present invention.
The error of perpendicularity calibration steps of the two-freedom high speed parallel scan platform that Fig. 9 provides for the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in instructions of the present invention, clear, complete description is carried out to the technical scheme of the embodiment of the present invention.
Only reason for convenience, in the following description, employ specific direction term, such as " on ", D score, "left", "right" etc., be reference with the accompanying drawing of correspondence, can not think limitation of the present invention, when the definition direction of drawing changes, the direction that these words represent should be interpreted as corresponding different directions.
As depicted in figs. 1 and 2, a kind of two-freedom high speed parallel scan platform that the embodiment of the present invention provides comprises casing 1 and the straight line driving mechanism be installed in casing 1, mirror axis mechanism 3, oscillating bearing 4 and PSD position transducer 5.
Particularly, as shown in Figure 3 and Figure 4, described mirror axis mechanism 3 comprises main shaft 31, catoptron 33, mirror support 32, levelling bolt 35 and generating laser 34.Described main shaft 31 is the multidiameter that one end diameter larger one end diameter is less, its axle center place has the through hole 310 of an axis, described catoptron 33 is fixed on mirror support 32, the edge of mirror support 32 has four circumferentially equally distributed fixed claws 320, and mirror support 32 is fixed on the end face of the large axle head of main shaft 31 by the levelling bolt of four on fixed claw 320 35.Described generating laser 34 is fixed in the through hole 310 at main shaft 31 axle center place, and it is inner to be encapsulated in main shaft 31 by mirror support 32, and through hole 310 is passed along the axle center of main shaft 31 in its Laser emission direction, points to the little axle head of main shaft 31.
As improvement, rubber sheet gasket 36 is also provided with between mirror support 32 and main shaft 31, for providing resiliency supported for mirror support 32, by adjusting the tightness of four levelling bolts 35 respectively, can to the minute surface of mirror support 32 upper reflector 33 towards carrying out meticulous fine setting and calibration, make the axis perpendicular of itself and main shaft 31, to meet the request for utilization of the two-freedom high speed parallel scan platform of the embodiment of the present invention.
As shown in Figure 1, described oscillating bearing 4 comprises inner ring 42 and outer ring 41, and the upper cover plate (for ease of understanding inner structure, the upper cover plate in Fig. 1 is removed) of casing 1 is fixed in described outer ring 41, and the large axle head of main shaft 31 is fixed on the inner ring 42 of oscillating bearing 4.
As shown in Figure 2, described PSD position transducer 5 is fixed on casing 1 by a flange base 51, is arranged at the below of oscillating bearing 4, relative with the little axle head of main shaft 31, for receiving the laser beam signal that generating laser 34 penetrates from little axle head through hole 310.
Described straight line driving mechanism has two, be respectively the first straight line driving mechanism 21 and the second straight line driving mechanism 22, described first straight line driving mechanism 21 and the second straight line driving mechanism 22 are movably installed in casing 1 respectively by a pivot assembly 20, can rotate around the axis of a vertical direction respectively.
Particularly, as shown in Figure 5, each straight line driving mechanism comprises voice coil motor 23, movable frame 24, guide rail 25, grating scale sensor 26 and photoelectric limit switch 27, and described movable frame 24 is rotatably connected on casing 1 by pivot assembly 20, can rotate around the axis of a vertical direction.Described guide rail 25 is pivotally connected on movable frame 24, can rotate around the axis of a horizontal direction.Described voice coil motor 23, grating scale sensor 26 and photoelectric limit switch 27 are fixed on guide rail 25, and wherein, voice coil motor 23 is arranged along guide rail 25 bearing of trend, is fixed on bottom guide rail 25; Grating scale sensor 26 and photoelectric limit switch 27 are fixed on the sidewall of guide rail 25, are oppositely arranged with the movement output end (i.e. mover 230) of voice coil motor 23.Wherein, grating scale sensor 26, for feeding back the displacement of voice coil motor 23 movement output end and velocity information, is convenient to the elongation of control system to voice coil motor 23 movement output end and is controlled; Photoelectric limit switch 27 is for limiting the minimum and maximum movement travel of voice coil motor 23.
The movement output end of voice coil motor 23 is the movement output end of straight line driving mechanism.Movement output end two orthogonal directions from surface level of the first straight line driving mechanism 21 and the second straight line driving mechanism 22, be connected with the little axle head of main shaft 31 respectively, drive shaft 31 swings around the rotation center of oscillating bearing 4 on oscillating bearing 4.Particularly, the movement output end of the first straight line driving mechanism 21 and the second straight line driving mechanism 22 is flexibly connected with the little axle head of main shaft 31 by ball pivot.In actual applications, both can, by the movement output end of the first straight line driving mechanism 21 and the second straight line driving mechanism 22 respectively by a ball pivot joint, be connected on main shaft 31 one on the other, as shown in Figure 6; Also the movement output end of the first straight line driving mechanism 21 and the second straight line driving mechanism 22 can be connected to the same plane on main shaft 31, as shown in Figure 7.
In the process that drive shaft 31 swings, it is restriction mutually between the movement output end of two straight line driving mechanisms, when the movement output end of one of them straight line driving mechanism extends or shrinks, because the movement output end being subject to another straight line driving mechanism extends quantitative limitation, the kinetic energy of sideshake can be produced, make self to swing around the vertical axis of movable frame 24, also make another straight line driving mechanism swing simultaneously.Therefore, in the swing process of main shaft 31, the first straight line driving mechanism 21 and the second straight line driving mechanism 22 all can swing in the horizontal plane, and the movement output end of two straight line driving mechanisms is not keep vertical.But due to the restriction by oscillating bearing 4, main shaft 31 can only carry out three-dimensional rotation swing around the rotation center of oscillating bearing 4.
Owing to have employed the rotary supporting part of oscillating bearing 4 as main shaft 31, main shaft 31 also has single-degree-of-freedom in the sense of rotation along oscillating bearing 4.Again because the power circuit of generating laser 34 needs from the access of main shaft 31 outside, carry out in the process swung in two straight line driving mechanism drive shaft 31, main shaft 31 can have influence on the layout of power circuit at this single-degree-of-freedom of sense of rotation; Therefore, be necessary to limit the sense of rotation degree of freedom of main shaft 31 on oscillating bearing 4.As shown in Figure 6 and Figure 8, in embodiments of the present invention, the rotary freedom of a Flexible Connector 8 pairs of main shafts 31 is adopted to limit.Particularly, described main shaft 31 has the column connecting portion 310 of a projection, the outer ring 41(of described oscillating bearing 4 or the upper cover plate of casing 1) on be also correspondingly convexly equipped with fixed leg 40, described Flexible Connector 8 one end is fixedly connected on column connecting portion 310, the other end is fixedly connected on fixed leg 40, make main shaft 31 set up axial elasticity with the outer ring 41 of oscillating bearing 4 to be connected, to limit main shaft 31 degree of freedom in a rotational direction.Further, for meeting user demand, the Flexible Connector 8 that elasticity coefficient is suitable should be selected; In embodiments of the present invention, described Flexible Connector 8 is greater than elastic threads or the soft spring that 300N/m is less than 500N/m for elasticity coefficient.
Especially, in embodiments of the present invention, the rotation center of described oscillating bearing 4 is positioned on the minute surface of catoptron 33, and namely the rotation center of mirror axis mechanism 3 is positioned on minute surface.Therefore, no matter mirror axis mechanism 3 swings to any position, and the locus being positioned at the rotation center on the minute surface of catoptron 33 is all changeless.
In motion process, each group elongation data of first straight line driving mechanism 21 and the second straight line driving mechanism 22, the equal correspondence three-dimensional oscillating position in main shaft 31 axle center, namely a corresponding normal angles of catoptron 33, correspondingly, the position of laser beam on PSD position transducer 5 that also corresponding generating laser 34 is launched.Therefore, the PSD position transducer 5 be positioned at below mirror axis mechanism 3 can directly feed back the three-dimensional normal orientation of catoptron 33.
A kind of two-freedom high speed parallel scan platform that the embodiment of the present invention provides is two input two output systems, by controlling the elongation of two linear voice coil motors 23 respectively, and then controls the normal orientation of catoptron 33.Because voice coil motor 23 has very high acceleration, so the sweep velocity of catoptron 33 can be very fast.In some scanning platform systems in the prior art, because the motion of two motors and the motion of catoptron normal direction are not linear corresponding relation, there is coupling between the two simultaneously; Again due to the rotation center that catoptron is not fixed, rotation center cannot overlap with reflection spot, causes the equation of motion being difficult to be solved two motors by the equation of motion of given reflection ray.
But in embodiments of the present invention, the rotation center of mirror axis mechanism 3 is fixing, and is positioned on the minute surface of catoptron 33, and namely reflection spot overlaps with rotation center, relevant mathematical model can be simple a lot.On motion control method, the information of discretize PSD position transducer 5, makes the elongation that corresponding two voice coil motors 23 of each discrete point on PSD position transducer 5 are unique, and sets up tables of data.In working control, find the often group extended length of two voice coil motors 23 corresponding with it by the equation of motion of the given reflection ray of discretize, the equation of motion of two voice coil motors 23 corresponding with the reflection ray equation of motion can be simulated by the discrete point of correspondence.In a kind of two-freedom high speed parallel scan platform that the embodiment of the present invention provides, scanning accuracy depends primarily on the verticality of through hole 310 of the precision of PSD position transducer 5 and grating scale sensor 26, the reflecting surface of catoptron 33 and main shaft 31 and the distance error between the reflecting surface of catoptron 33 and catoptron rotation center (i.e. the rotation center of oscillating bearing 4).
Because PSD position transducer 5 can realize improvement by selecting different product types with the precision of grating scale sensor 26, distance error between the reflecting surface of catoptron 33 and rotation center can overcome by improving mounting process, therefore does not repeat them here.In prior art, the error of PSD position transducer 5 can reach several microns, and the precision of grating scale sensor 26 can reach Nano grade.
As shown in Figure 8, present invention also offers a kind of method of calibrating the error of perpendicularity of described two-freedom high speed parallel scan platform, particularly, described verticality refers to the verticality of the reflecting surface of catoptron 33 and the through hole 310 of main shaft 31.
Described error of perpendicularity calibration steps specifically comprises the following steps:
S1, along a straight line set gradually projecting plane 61, adjusting pole 62 and adjustment platform 63, main shaft 31 is fixed on adjusting pole 62, one generating laser 7 is fixed on adjustment platform 63, the end face of the large axle head of laser beam directive main shaft 31 that generating laser 7 is launched; Wherein, described adjusting pole 62 has the adjustment degree of freedom of two sense of rotation, is respectively used to the horizontal and vertical direction adjusting main shaft 31 axle center; Described adjustment platform 63 has the adjustment degree of freedom of three translation directions, is respectively used to adjust the displacement of generating laser 7 in X-axis, Y-axis and Z-direction.
S2, by adjusting pole 62 and adjustment platform 63, adjust the axial direction of main shaft 31 and the position of generating laser 7 respectively, the laser beam that generating laser 7 is launched, through the through hole 310 in main shaft 31 axle center, projects on projecting plane 61; By tentatively fixing for the position of main shaft 31 and generating laser 7; Further, finely tuned by the axial direction of adjusting pole 62 pairs of main shafts 31, make the subpoint P brightness of laser beam on projecting plane 61 reach maximum, now show that the through hole 310 direction registration in laser beam direction and main shaft 31 axle center is the highest; After adjustment, main shaft 31 is locked on adjusting pole 62.
S3, be arranged on main shaft 31 by catoptron 33 and mirror support 32 by described four levelling bolts 35, now laser beam can be reflected by catoptron 33; By screwing or loosening levelling bolt 35, finely tune the minute surface direction of catoptron 33, the laser beam that generating laser 7 is launched returns along former road.
Adopt said method to correct, the through hole 310 of the minute surface of catoptron 33 and main shaft 31 can be made to have very high verticality.Wherein, in trimming process, the distance L between the minute surface of catoptron 33 and laser reflector 7 is larger, and Adjustment precision is higher, and the verticality that correction of a final proof goes out is also higher.
A kind of two-freedom high speed parallel scan platform that the embodiment of the present invention provides adopts simple reflector structure, only needs primary event to complete scanning work, avoids bimirror and reflect the error enlarge-effect brought.Meanwhile, the present invention adopts two input two export structures, and in control, comparatively prior art is easily a lot; Additionally use oscillating bearing structure, larger rigidity and deflection angle can be had; Realize closed-loop owing to have employed Two-dimensional PSD position transducer as the feedback assembly of catoptron normal direction position again, very high precision can be reached.A kind of two-freedom high speed parallel scan platform provided by the invention has that precision is high, rigidity is large, the feature that load-bearing capacity is strong.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (10)
1. a two-freedom high speed parallel scan platform, is characterized in that, comprises casing and the straight line driving mechanism be installed in casing, mirror axis mechanism, oscillating bearing and PSD position transducer;
Described mirror axis mechanism comprises main shaft, catoptron, mirror support, levelling bolt and generating laser, described main shaft is the multidiameter that one end diameter larger one end diameter is less, its axle center place has the through hole of an axis, described catoptron is fixed on mirror support, mirror support is fixed on the end face of the large axle head of main shaft by multiple levelling bolt, described generating laser is fixed in the through hole at spindle axis place, through hole is passed along the axle center of main shaft in its Laser emission direction, points to the little axle head of main shaft;
The minute surface of described catoptron is perpendicular to the axle center of main shaft; The rotation center of described oscillating bearing is positioned on the minute surface of catoptron;
The large axle head of described main shaft is fixed on the inner ring of oscillating bearing, and the outer ring of oscillating bearing is fixed on casing;
Described PSD position transducer is fixed on casing, is oppositely arranged with the little axle head of main shaft;
Two straight line driving mechanisms are movably installed in casing, be respectively the first straight line driving mechanism and the second straight line driving mechanism, described first straight line driving mechanism is connected with main shaft respectively with the movement output end of the second straight line driving mechanism, and drive shaft swings around the rotation center of oscillating bearing on oscillating bearing.
2. two-freedom high speed parallel scan platform according to claim 1, it is characterized in that, described straight line driving mechanism comprises voice coil motor, movable frame and guide rail; Described movable frame is rotatably connected on casing, and described guide rail is rotatably connected on movable frame, and described voice coil motor is fixed in guide rail.
3. two-freedom high speed parallel scan platform according to claim 2, it is characterized in that, described straight line driving mechanism also comprises the grating scale sensor, the photoelectric limit switch that are fixed in guide rail, and the movement output end of described grating scale sensor and photoelectric limit switch and voice coil motor is oppositely arranged.
4. two-freedom high speed parallel scan platform according to claim 2, it is characterized in that, the movement output end of described voice coil motor is connected by ball pivot with main shaft.
5. two-freedom high speed parallel scan platform according to claim 1, is characterized in that, be provided with rubber sheet gasket between described mirror support and main shaft.
6. two-freedom high speed parallel scan platform according to claim 1, it is characterized in that, described mirror support is fixed on the end face of the large axle head of main shaft by four levelling bolts, and described four screws are uniformly distributed in the edge of mirror support.
7. two-freedom high speed parallel scan platform according to claim 1, is characterized in that, described main shaft is convexly equipped with a junction, and described connecting portion is connected with the outer ring elasticity of casing or oscillating bearing by a Flexible Connector.
8. two-freedom high speed parallel scan platform according to claim 7, is characterized in that, described Flexible Connector is elastic threads or the soft spring that elasticity coefficient is greater than 300N/m and is less than 500N/m.
9. a calibration steps for the error of perpendicularity of two-freedom high speed parallel scan platform as claimed in claim 1, is characterized in that, comprise the following steps:
S1, set gradually projecting plane, adjusting pole and adjustment platform along a straight line, main shaft is fixed on adjusting pole, generating laser is fixed on adjustment platform, the end face of the large axle head of laser beam directive main shaft that laser transmitter projects is gone out;
S2, by adjusting pole and adjustment platform, the adjustment axial direction of main shaft and the position of generating laser, the laser beam that laser transmitter projects is gone out, through the through hole of spindle axis, projects on projecting plane;
S3, be arranged on main shaft by catoptron and mirror support by multiple levelling bolt, by screwing or loosening levelling bolt, finely tune the minute surface direction of catoptron, the laser beam that laser transmitter projects is gone out returns along former road.
10. method according to claim 9, is characterized in that, described S2 is also comprised and being finely tuned by the axial direction of adjusting pole to main shaft, makes laser beam projection brightness on the projection surface reach maximum.
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| ES2649265T3 (en) * | 2014-12-18 | 2018-01-11 | Iveco Magirus Ag | Method for controlling a lifting device, and lifting device with controller that implements said method |
| CN105095821B (en) * | 2015-08-11 | 2017-12-29 | 深圳市合杰电子有限公司 | A kind of optical mask scanner |
| CN106525100B (en) * | 2016-12-10 | 2018-10-23 | 中国科学院长春光学精密机械与物理研究所 | A kind of attitude measuring |
| CN107894661B (en) * | 2017-12-19 | 2024-02-13 | 曾林旺 | Three-dimensional laser scanning head |
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| JP2008203434A (en) * | 2007-02-19 | 2008-09-04 | Fujitsu Ltd | Scanning mechanism, method of machining material to be machined and machining apparatus |
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| CN2531408Y (en) * | 2001-11-19 | 2003-01-15 | 力捷电脑股份有限公司 | Optical module load bearing and line spacer of vertical scanner |
| CN2577304Y (en) * | 2002-10-29 | 2003-10-01 | 力捷电脑股份有限公司 | Guide mechanism with light-conducting effect |
| CN1499240A (en) * | 2002-11-06 | 2004-05-26 | 力捷电脑股份有限公司 | Beam condensing unit for light source in scanner |
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