CN103155410B - Piezoelectric vibrating device - Google Patents
Piezoelectric vibrating device Download PDFInfo
- Publication number
- CN103155410B CN103155410B CN201180048646.1A CN201180048646A CN103155410B CN 103155410 B CN103155410 B CN 103155410B CN 201180048646 A CN201180048646 A CN 201180048646A CN 103155410 B CN103155410 B CN 103155410B
- Authority
- CN
- China
- Prior art keywords
- piezoelectric element
- supporting member
- piezoelectrics
- piezoelectric
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004744 fabric Substances 0.000 claims abstract description 57
- 239000000203 mixture Substances 0.000 claims abstract description 29
- 239000010410 layer Substances 0.000 claims description 51
- 239000011241 protective layer Substances 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 17
- 230000006378 damage Effects 0.000 abstract description 4
- 238000006073 displacement reaction Methods 0.000 description 17
- 239000000758 substrate Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000004593 Epoxy Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000012141 concentrate Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 239000012190 activator Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000003292 diminished effect Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02133—Means for compensation or elimination of undesirable effects of stress
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0509—Holders; Supports for bulk acoustic wave devices consisting of adhesive elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
- H03H9/0552—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement the device and the other elements being mounted on opposite sides of a common substrate
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
Abstract
The invention provides a kind of piezoelectric vibrating device, be difficult to the destruction by the concentrated generation of stress of the piezoelectric element, the supporting member etc. that produce electrical connection section office, reliability excellence. piezoelectric vibrating device (1) has engaged piezoelectric element (7) on the piezoelectric element composition surface of supporting member (2) (2a), piezoelectric element (7) has the 1st drive electrode (9) that is formed on the 1st interarea (8a), with the 2nd drive electrode (10) that is formed on the 2nd interarea (8b), by the 1st fastener layer (5), the 1st drive electrode (9) is electrically connected with the 1st cloth line electrode (3) on the piezoelectric element composition surface (2a) that is formed on supporting member (2), and piezoelectric element (7) is engaged in supporting member (2).
Description
Technical field
The present invention relates to for example piezoelectric vibrating device for piezo-activator, piezoelectric sounding body etc., more specifically,Relate to the piezoelectric vibrating device that makes piezoelectric element engage and utilize beam mode with supporting member.
Background technology
In the past, piezoelectric vibrating device was for piezo-activator, piezoelectric sounding body or haptic apparatus (Haptics) etc. DoFor piezoelectric sounding body, for example, there is piezoelectric speaker.
In following patent documentation 1, a kind of piezoelectric vibrating device for piezoelectric sounding body is disclosed. Shake at this piezoelectricityIn moving device, multiple piezoelectric vibrators in housing, are held. Figure 17 represents that multiple piezoelectric vibrators 1001,1002 are contained in housingThe part amplification view of the major part of the part in 1003. Here only illustrate a part for housing 1003. Be arranged onIn accommodation section 1003a in housing 1003, hold piezoelectric vibrator 1001,1002. Piezoelectric vibrator 1001,1002 is across sept1004 and stacked. And, according to the mode of piezoelectric vibrator 1001,1002 that clips the both sides that are layered in sept 1004, installThere is the clamp portion 1005 being formed by metal. By clamp portion 1005, clamping piezoelectric vibrator 1001,1002, and by clamp portion1005 have realized and being electrically connected of the electrode of the lateral surface of piezoelectric vibrator 1001,1002. The opposite side of piezoelectric vibrator 1001,1002End also supported by same structure.
Formerly technical literature
Patent documentation
Patent documentation 1:JP JP 2006-324893 communique
Summary of the invention
The problem that invention will solve
In the piezoelectric vibrating device of recording at patent documentation 1, for piezoelectric vibrator 1001,1002 is electrically connectedUse above-mentioned clamp portion 1005. Therefore, can omit joint based on closing line etc.
But, in piezoelectric vibrating device, in the case of making the thickness attenuation of piezoelectric vibrator 1001,1002, by clampThereby portion 1005 clips the piezoelectric vibrator 1001,1002 being supported, there are the following problems: owing to making piezoelectric vibrating device when vibrationThe vibration producing, stress concentrates on the part of supporting piezoelectric vibrator 1001,1002, thereby produces piezoelectric vibrator 1001,1002Breakage, distortion.
On the other hand, also adopted the method that closing line is electrically connected with the drive electrode of piezoelectric vibrator in the past, but companionWith the vibration of piezoelectric vibrator, can produce closing line in the office, junction surface of closing line and come off. In addition, if improve the joint of closing lineThe intensity of part, due to the difference of the rigidity of the rigidity of fastener and the drive electrode of piezoelectric vibrator, can be because stress be concentratedAnd cause piezoelectric vibrator breakage. And, also can produce peeling off of drive electrode, cloth line electrode.
The object of the present invention is to provide a kind of piezoelectric vibrating device, used at two interareas of piezoelectric board and be formed with drivingThe piezoelectric element of electrode, and be difficult to the poor flow of the electric connection part office that produces drive electrode, be difficult to produce piezoelectricity unitThe destruction of part etc., and be difficult to produce peeling off of electrode, reliability excellence.
For solving the means of problem
Piezoelectric vibrating device involved in the present invention possesses piezoelectric element, and it has: piezoelectrics, it has mutually opposedThe 1st interarea and the 2nd interarea; The 1st drive electrode is formed on the 1st interarea side of piezoelectrics itself and the 1st main surface parallel; With the 2ndDrive electrode is formed on the 2nd interarea side of piezoelectrics itself and the 2nd main surface parallel, and opposed with the 1st drive electrode, and the 1st drivesMoving electrode, the 2nd drive electrode opposed region on the thickness direction of piezoelectrics are made as active region, the 1st drive electrode and the 2ndThe not opposed region of drive electrode is made as non-active region; And supporting member, it has the piezoelectric element that engages piezoelectric elementComposition surface.
In the present invention, supporting member has the 1st cloth line electrode, and the 1st cloth line electrode is formed on piezoelectric element composition surface,And be electrically connected with the 1st drive electrode of piezoelectric element.
In addition, in the present invention, piezoelectric vibrating device also possesses the 1st fastener layer, and the 1st fastener layer is by piezoelectric elementThe 1st drive electrode be electrically connected with the 1st cloth line electrode of supporting member, and by the 1st interarea and supporting member of piezoelectric elementPiezoelectric element composition surface engage.
In certain particular aspects of piezoelectric vibrating device involved in the present invention, piezoelectric element also has connecting electrode, and this connectsReceiving electrode is formed on the 1st interarea of piezoelectrics in the non-active region of piezoelectrics, and with the 2nd driving of being formed on the 2nd interareaMoving electrode electrical connection. In addition, supporting member also has the 2nd cloth line electrode, and the 2nd cloth line electrode is formed on piezoelectric element and engagesFace, and be electrically connected with the 2nd drive electrode. And then piezoelectric vibrating device also possesses the 2nd fastener layer, the 2nd fastener layer willConnecting electrode is electrically connected with the 2nd cloth line electrode, and by the 1st interarea of piezoelectric element and the piezoelectric element composition surface of supporting memberEngage. In this case, not only utilize the 1st fastener layer, also utilize the 2nd fastener layer to join securely piezoelectric element to pressureElectric device composition surface. Meanwhile, the 1st, the 2nd drive electrode is electrically connected with the 1st, the 2nd cloth line electrode that is arranged on supporting member.
In certain particular aspects of piezoelectric vibrating device involved in the present invention, supporting member exists for being somebody's turn to do from external supportThe beam mode support of supporting member, when piezoelectric element is vibrated with beam mode, supporting member and this piezoelectricity unitPart vibrates with the beam mode of same frequency together. In this case, only by beam mode support from outside as aboveSupporting member is supported describedly, just can make piezoelectric element and supporting member vibrate with beam mode. Preferably, bendingPattern supporting portion is in periphery, and this periphery is positioned at the outside in the region that has engaged piezoelectric element, and the 1st cloth line electrode arrives weekLimit portion. In this case, can easily the 1st cloth line electrode be electrically connected with outside.
In addition, preferably, the node of at least 1 beam mode in supporting member is positioned at beam mode support. In these feelingsUnder condition, the vibration based on beam mode is difficult to be hindered.
In another particular aspects of piezoelectric vibrating device involved in the present invention, piezoelectric element also has protective layer, this guarantorSheath is formed on the 1st interarea of piezoelectrics, and is made up of insulating properties material. The piezoelectric element of described protective layer and supporting memberComposition surface engages. In this case, can prevent reliably that in the 1st interarea side of piezoelectric element the 1st drives electricity by protective layerThe short circuit of the utmost point and the 2nd drive electrode. In addition,, by protective layer, piezoelectric element can be joined securely to the pressure of supporting memberElectric device composition surface.
In another particular aspects of piezoelectric vibrating device involved in the present invention, piezoelectric element also has according to covering the 2ndThe mode of drive electrode is formed on the 2nd interarea of piezoelectrics and the protective layer being made up of insulating properties material. In this case,2 drive electrodes are covered by protective layer, so can prevent that the 2nd drive electrode from directly contacting with finger. Therefore, can prevent from touchingElectricity.
In another particular aspects of piezoelectric vibrating device involved in the present invention, protective layer is by the material identical with piezoelectricsForm. In this case, can provide a kind of does not increase the kind of material and is provided with the piezoelectric vibrating device of protective layer.
In another particular aspects of piezoelectric vibrating device involved in the present invention, supporting member has the opposed the 1st and pressesElectric device composition surface, the 2nd piezoelectric element composition surface, on the 1st piezoelectric element composition surface, the 2nd piezoelectric element composition surface engages respectivelyPiezoelectric element. In this case, because engaged piezoelectric element on the two sides of supporting member, so can obtain larger positionThe amount of moving, and can improve acoustic pressure.
In another particular aspects of piezoelectric vibrating device involved in the present invention, piezoelectrics and supporting member have rectangleFlat shape, this rectangle has minor face and long limit. The length of the minor face of the rectangle of supporting member and the rectangle of piezoelectrics shortLimit equal in length. The 1st drive electrode, the 2nd drive electrode are formed as the short side direction total length across piezoelectrics. In this case,By female duplexer that stacked female piezoelectrics and female supporting member are formed with the minor face of the rectangle of above-mentioned supporting memberLength and the interval equal in length of the minor face of the rectangle of piezoelectrics cut off, shake thereby can easily obtain piezoelectricityMoving device. Therefore, can improve the production of piezoelectric vibrating device.
In another particular aspects of piezoelectric vibrating device involved in the present invention, the 1st drive electrode is formed on piezoelectricsThe 1st interarea, the 2nd drive electrode is formed on whole of the 2nd interarea of piezoelectrics. Piezoelectric element also has the non-work at piezoelectricsIn property region, be formed on the 1st interarea of piezoelectrics and the connecting electrode being electrically connected with the 2nd drive electrode. This connecting electrode shapeBecome the side that arrives piezoelectrics from the 1st interarea of piezoelectrics, and the crest line place forming at side and the 2nd interarea of piezoelectricsBe connected with the 2nd drive electrode. In this case, can not reduce the drive efficiency ground of piezoelectric element, easily at supporting memberPiezoelectric element composition surface make the 1st drive electrode and the 2nd wiring electrode engagement.
In another particular aspects of piezoelectric vibrating device involved in the present invention, the length on the long limit of the rectangle of supporting memberLength than the long limit of the rectangle of piezoelectric element is long, the 1st cloth line electrode arrive supporting member joint the part of piezoelectric elementRegion, side. In this case, can easily the 1st cloth line electrode be electrically connected with outside.
In another particular aspects of piezoelectric vibrating device involved in the present invention, by the length on the long limit of the rectangle of supporting memberDegree is made as L1, when the length of the long side direction of the rectangle along supporting member of the active region in piezoelectrics is made as to L2, and (L2/L1) × 100% is more than 75%. In this case, can not reduce the displacement of the piezoelectric element vibrating with beam modeThe mode of amount, makes piezoelectric element engage and realize the electrical connection of piezoelectric member with supporting member.
Invention effect
Piezoelectric vibrating device involved in the present invention because the 1st drive electrode of piezoelectric element by the 1st fastener layer withThe 1st cloth line electrode electrical connection of supporting member, and by the 1st fastener layer, piezoelectric element is bonded on the piezoelectricity of supporting memberElement composition surface, so piezoelectric element is engaged in supporting member securely. Therefore, piezoelectric vibrating device is entered with beam modeGo in the situation of vibration, be difficult to produce the peeling off of destruction, electrode of electrical connections, can effectively improve piezoelectric vibration dressThe reliability of putting.
Brief description of the drawings
(a) of Fig. 1 and (b) be for the vertical of the related piezoelectric vibrating device of the 1st embodiment of the present invention is describedBody figure and exploded perspective view.
Fig. 2 is the active region that represents piezoelectric element in the related piezoelectric vibrating device of the 1st embodiment of the present inventionThe figure of length L 2 and the ratio (L2/L1) × 100% of the length L 1 on the long limit of supporting member and the relation of displacement.
Fig. 3 is the active region that represents piezoelectric element in the related piezoelectric vibrating device of the 1st embodiment of the present inventionThe ratio (L2/L1) × 100% of length L 2 and the length L 1 on the long limit of supporting member and the figure of the relation of the power of generation.
Fig. 4 is the stereogram of the related piezoelectric vibrating device of the 2nd embodiment of the present invention.
Fig. 5 is the exploded perspective view of the related piezoelectric vibrating device of the 2nd embodiment of the present invention.
Fig. 6 is the front section view that represents the 1st variation of the piezoelectric element being used by piezoelectric vibrating device of the present invention.
Fig. 7 is the front section view that represents the 2nd variation of the piezoelectric element being used by piezoelectric vibrating device of the present invention.
Fig. 8 is the front section view that represents the 3rd variation of the piezoelectric element being used by piezoelectric vibrating device of the present invention.
Fig. 9 is the stereogram of the related piezoelectric vibrating device of the 3rd embodiment of the present invention.
Figure 10 is the front section view of the related piezoelectric vibrating device of the 4th embodiment of the present invention.
Figure 11 is the schematic, exploded, isometric illustration that is provided with the vibration module of multiple piezoelectric vibrating devices of the present invention.
Figure 12 is the solid of the variation for the related piezoelectric vibrating device of the 1st embodiment of the present invention is describedFigure.
Figure 13 is the exploded perspective view of the related piezoelectric vibrating device of the variation shown in Figure 12.
Figure 14 is that other variation for the piezoelectric vibrating device related by the 1st embodiment of the present invention is described makeWith the stereogram of supporting member.
Figure 15 is the vertical of another variation for the related piezoelectric vibrating device of the 1st embodiment of the present invention is describedBody figure.
Figure 16 is the exploded perspective view of the related piezoelectric vibrating device of the variation shown in Figure 15.
Figure 17 is the part amplification view that represents the major part of existing piezoelectric vibrating device.
Detailed description of the invention
Below, with reference to accompanying drawing, concrete embodiment of the present invention is described, makes thus the present invention become clear.
Fig. 1 (a) and (b) be the related piezoelectric vibrating device 1 of the 1st embodiment of the present invention stereogram and pointSeparate stereogram. Piezoelectric vibrating device 1 is the piezoelectric vibrating device of single piezoelectric chip type. Piezoelectric vibrating device 1 has performance vibrationThe supporting member 2 of the rectangular plate shape of the function of plate.
In the present embodiment, supporting member 2 consists of the substrate of the rectangular plate shape that is made up of insulating properties material. AsThis substrate being made up of insulating properties material, in the present embodiment, has used glass epoxy substrate. Glass epoxy substrate hasExcellent machinability. Therefore, as described later, can easily and exactly cut out from female matrix. Therefore, can measure accuratelyProduce piezoelectric vibrating device 1.
Certainly, can form supporting member 2 by the suitable insulating properties material of realizing larger displacement. In addition supporting,Member 2 also can be made up of metallic plate, in this case, in order to prevent the interelectrode short circuit of the 1st, the 2nd wiring described later, canUpper surface at metallic plate arranges insulating barrier.
Above-mentioned supporting member 2 has the shape of rectangular plate shape, and the lengthwise dimension of the flat shape of this rectangle is made asL1, is made as W by width size.
The upper surface of supporting member 2 is piezoelectric element composition surface 2a. Be formed with the 1st wiring at the upper surface of supporting member 2Electrode 3 and the 2nd cloth line electrode 4. 1st, the 2nd cloth line electrode 3,4 electrically insulated from one another, opposed across gap.
Engage piezoelectric element 7 at above-mentioned the 1st, the 2nd cloth line electrode 3,4 by the 1st, the 2nd fastener layer 5,6. 1st, the 2ndFastener layer 5,6 is made up of the suitable conductive adhesive that contains electroconductive stuffing. Certainly, do not contain electric conductivity even if useThe adhesive of filler, if electrode each other part directly contact can guarantee conducting. Therefore, also can use insulating properties bondingAgent. Or, at the 1st, the 2nd fastener layer 5,6, have and can transmit and can drive if impose on the AC field of piezoelectric element 7The AC impedance value of the electric energy of piezoelectric element 7, can may not directly contact by electrode each other mutually, also can utilize capacitor thatThe electromagnetic field couples of sample.
Above-mentioned piezoelectric element 7 has the flat shape of rectangular plate shape. The width size of piezoelectric element 7 is made as and supportsThe width size W of member 2 equates. More specifically, piezoelectric element 7 has the piezoelectrics 8 of rectangular plate shape. Piezoelectrics 8 toolsHave as the lower surface 8a of the 1st interarea with as the upper surface 8b of the 2nd interarea.
Piezoelectrics 8 are by the piezoelectrics structure of lead zirconate titanate (PZT) or such as potassium-sodium niobate of not leaded piezoelectrics (KNN system) etc.Become, in the 1st embodiment of the present invention, be made up of piezoelectric ceramics, processing is polarized on thickness direction.
On the lower surface 8a of piezoelectrics 8, form the 1st drive electrode 9. On the whole surface of the upper surface 8b of piezoelectrics 8Form the 2nd drive electrode 10. The 1st drive electrode 9 and the 2nd drive electrode 10 across the opposed piezoelectrics part of piezoelectrics 8 areDriven active region by piezoelectric effect. Part beyond the active region of piezoelectrics 8 is non-active region.
In the present embodiment, the 1st drive electrode 9 be not formed on whole of lower surface 8a upper, so at piezoelectrics 8There is above-mentioned active region and non-active region.
On lower surface 8a according to having formed connecting electrode 10a across gap and the opposed mode of the 1st drive electrode 9. ConnectThe crest line that receiving electrode 10a forms through arrival side, side and upper surface 8b from the lower surface 8a of piezoelectrics 8. On this crest line,Connecting electrode 10a is connected in the 2nd drive electrode 10.
Above-mentioned the 1st, the 2nd drive electrode 9,10 and connecting electrode 10a can be formed by suitable conductive material. ,Can, by 1 the above conductive layer being formed by Ag, Cu, Ni, Cr, Pd or their alloy etc., form the 1st, the 2nd and driveElectrode 9,10 and connecting electrode 10a.
In piezoelectric element 7, the 1st, the 2nd drive electrode 9,10 is opposed across piezoelectrics 8, so by driving from the 1st, the 2ndMoving electrode 9,10 applies and exchanges or the voltage of random waveform, can make piezoelectric element 7 and supporting member 2 as oscillating plateDuplexer vibrates with beam mode.
On the other hand, the 1st drive electrode 9 engages with the 1st cloth line electrode 3 by the 1st fastener layer 5. Similarly, connect electricityUtmost point 10a engages with the 2nd cloth line electrode 4 by the 2nd fastener layer 6.
Carry out based on the 1st fastener layer 5 and the 2nd at the upper surface of the supporting member 2 as piezoelectric element composition surface 2aThe joint of fastener layer 6. Therefore, can piezoelectric element 7 be fixed firmly to the 1st, the 2nd by the 1st, the 2nd fastener layer 5,6Cloth line electrode 3,4.
And the 1st, the 2nd fastener layer 5,6 is made up of conductive adhesive as mentioned above. Therefore, can make the 1st to driveElectrode 9 is electrically connected on the 1st cloth line electrode 3 reliably, and can make connecting electrode 10a and the 2nd drive electrode 10 reliablyBe electrically connected on the 2nd cloth line electrode 4.
In the existing piezoelectric vibrating device shown in Figure 17, because realize electrical connection with clamp portion 1005, so depositProducing the breakage of piezoelectric vibrator 1001,1002, the problem of distortion.
On the other hand, in the present embodiment, by the 1st, the 2nd fastener layer 5,6, piezoelectric element 7 connects with supporting member 2Close, and realized electrical connection. Therefore, in piezoelectric element 7 vibration be difficult to interrupted, so be difficult to produce the reduction of displacementDeng, can obtain good vibration characteristics. In addition, concentrate because be difficult to produce the stress being caused by clamp portion etc., so also difficultTo produce destruction of the peeling off of the 1st, the 2nd drive electrode 9,10, piezoelectrics 8 and supporting member 2 etc.
In addition, by print process, can high accuracy and form at an easy rate the 1st, the 2nd drive electrode 9,10.
In addition, need to be in the 1st of piezoelectric element 7, the 2nd drive electrode 9,10 welds etc., so can realize pressureThe slimming of electric device 7.
And then, because above-mentioned supporting member 2 is made up of insulating properties material, so be difficult to produce electric leakage, be also difficult to produce behaviourCarry the people's of the electronic equipment of piezoelectric vibrating device 1 electric shock. In addition, in existing piezoelectric vibrating device, as propping upHold member and used the oscillating plate being formed by metal, thus insulating barrier need to be formed, and in the present embodiment, because supporting structurePart 2 is made up of insulating properties material, so do not need to form this insulating barrier.
In above-mentioned supporting member 2, preferably there is beam mode support, carry out with beam mode at piezoelectric element 7When vibration, according to together with piezoelectric element 7 in the mode of beam mode vibration from external support supporting member 2. From outside toHolding the structure that member 2 supports is arbitrarily, for example: overarm or two overarms etc. No matter which kind of mode, by utilizing bendingPattern support supports supporting member 2, thus supporting member 2 together with piezoelectric element 7 to there is the curved of same frequencyBent pattern is vibrated.
In the present embodiment, above-mentioned beam mode support is present in extension 2b, 2c, is positioned at and has engaged piezoelectricity unitThe periphery in the outside in the region of part 7. And the 1st, the 2nd cloth line electrode 3,4 arrives extension 2b, 2c.
In addition, in the present embodiment, preferably the node (node) of the beam mode at least one times in supporting member 2 is positioned atAbove-mentioned beam mode support. Accordingly, be at least difficult to hinder the vibration of first order buckling pattern.
Next, one example of the manufacture method of the piezoelectric vibrating device 1 of present embodiment is described.
In the time manufacturing piezoelectric vibrating device 1, prepare female supporting member and female piezoelectric element. , prepare multiple supporting structuresPart 2 and piezoelectric element 7 set are rectangular female supporting member and female piezoelectric element. In this mother's supporting member, upperSurface is formed for forming the 1st, the 2nd female cloth line electrode of the 1st, the 2nd cloth line electrode 3,4. This mother's the 1st, the 2nd cloth line electrodeFormation, can be undertaken by following suitable method, that is: prepare the glass epoxy substrate with Copper Foil, Copper Foil is carried out to figureThe method that case forms; On glass epoxy substrate, form female the 1st, the 2nd cloth line electrode by serigraphy, film-shaped established lawMethod etc.
Similarly, in the time obtaining female piezoelectric element, also can use same at the upper surface of female piezoelectrics and lower surfaceThe method of sample forms the 1st, the 2nd drive electrode of parent.
Then, by sticky by the electric conductivity for forming the 1st, the 2nd fastener layer 5,6 to female piezoelectric element and female supporting memberMixture bonds. Obtain by this method female duplexer. Through-thickness cuts off this mother's duplexer. Then, at piezoelectricityThe side of body 8 forms the lateral parts of connecting electrode 10a. By this method, volume production piezoelectric vibrating device 1 easily.
That is, in the present embodiment, because make the size of length direction of the minor face of the supporting member 2 of rectangular plate shape wideSpend direction size W and equate with the width size of piezoelectric element 7, so as mentioned above by cutting off from female duplexer,Can be easily and many piezoelectric vibrating devices 1 of volume production accurately.
The lengthwise dimension L1 of above-mentioned supporting member 2 is set as longer than the lengthwise dimension of piezoelectric element 7. And,As shown in Fig. 1 (a), in the 2a of the piezoelectric element composition surface of supporting member 2, supporting member 2 extends to piezoelectric element 7 stackedThe side of part. Form respectively the 1st, the 2nd cloth line electrode 3,4, wherein this extension according to the mode that arrives extension 2b, 2c2b, 2c arrive this side. Therefore, extension 2b, 2c are supported and conducting from outside, are not thus because of the place being supportedPiezoelectric element 7, especially because be not the active region of piezoelectric element 7, so can not make to be applied by electric field the piezoelectrics of generationThereby stress is added in damaged or distortion such as piezoelectric element 7 crack with the stress of the vibration that concentrates on support, andCan not concentrate at the local stress that produces of the local electrical connection of the active region of piezoelectric element 7, can be easily by the 1st, the 2nd clothLine electrode 3,4 is electrically connected on outside terminal. For example, can use metal clip (clip) as outside terminal. If metal clip is by shapeBecome each clamping at the 1st, the 2nd cloth line electrode 3,4 of extension 2b, 2c, by the 1st, the 2nd cloth line electrode 3,4, canEasily the 1st, the 2nd drive electrode 9,10 is electrically connected on to outside terminal. In this case, because metal clip clamping extension2b, 2c and support, thus piezoelectric element 7 due to the stress of the vibration based on metal clip concentrate produces damaged, be out of shapeProblem is enhanced, and in addition, the generation being caused by the difference of the rigidity of the rigidity of metal clip and the drive electrode of piezoelectric vibrator drivesThe problem of peeling off of electrode, cloth line electrode is enhanced.
Above-mentioned active region lengthwise dimension in above-mentioned piezoelectric element 7 is made as to L2. , drive electricity by the 1st, the 2ndThe size of the long side direction of the above-mentioned rectangle of the utmost point 9,10 opposed active regions is made as L2.
Ratio (the L2/ of the lengthwise dimension L1 of the lengthwise dimension L2 that makes above-mentioned active region to above-mentioned supporting member 2L1) × 100 (%) carry out various variations, have made the piezoelectric vibrating device 1 of many above-mentioned embodiments, and have measured its positionThe amount of moving and generation power.
In addition, here, by clipping two of supporting member 2 according to the member that utilizes edge (edge) shape on thickness directionThereby the equidistant mode of end from the end face of supporting member 2 to 2 extension 2b, 2c of the end face of piezoelectric element 7,The fixing piezoelectric element 7 of central portion of supporting member 2, is not subjected to displacement on thickness direction thereby be constrained to this part, by memberBetween interval be made as L1, apply given voltage (200V), and utilize laser displacement gauge to measure to the thickness of central portion between memberThe displacement of direction, is made as displacement by this value. In addition, so-called generation power, refers to and applies electricity identical when measuring displacementPress, and the mode that is zero according to displacement presses the member of edge shape to the thickness direction of supporting member at member central portion,And utilize the value of recommending this power of instrument measurement and obtain. For this measurement, as an example of embodiment, use at L1 to be53mm, W are that to be 0.2mm rectangular-shaped by carrying on the supporting member 2 forming with the glass epoxy substrate of Copper Foil for 5mm, thicknessThe piezoelectric vibrating device 1 of piezoelectric element 7, it is that 50mm, W are the rectangle that 5mm, thickness are 0.2mm that this piezoelectric element 7 has at L2The the 1st, the 2nd drive electrode 9,10 that the piezoelectrics that are made up of PZT 8 of shape utilize sputtering method to form.
At Fig. 2 and Fig. 3, result is shown.
In addition, the displacement of Fig. 2 and Fig. 3 and generation power are relative values, and (L2/L1) × 100 (%) equaled to 100%Situation be made as 100% and obtain.
From Fig. 2 and Fig. 3, if (L2/L1) × 100 (%) are more than 75%, displacement and generation power canEnough obtain more than 90%, and compared with less than 75%, the value of displacement and the power of generation is with respect to the ratio of L2/L1 greatlyChange also more stable. Therefore, even due to the variation in the production process of piezoelectric vibrating device 1, and the length of supporting member 2The ratio change of direction size L1 and the lengthwise dimension L2 of active region, the value also with displacement and the power of generation is steadyFix on the effect of enough large value, so (L2/L1) × 100 (%) are preferably more than 75%.
Fig. 4 and Fig. 5 are stereogram and the decomposition of the related piezoelectric vibrating device 21 of the 2nd embodiment of the present inventionStereogram.
The piezoelectric vibrating device 21 of the 2nd embodiment also engages as piezoelectric element except the lower surface 2d of supporting member 2Face is also outside the 1st, the 2nd fastener layer 5,6 laminated piezoelectric element 7, identical with the 1st embodiment on this lower surface 2d.Therefore, for a part, mark same Ref. No., quote thus the explanation in the 1st embodiment.
In the piezoelectric vibrating device 21 of the 2nd embodiment because on the two sides of supporting member 2 stacked piezoelectric element 7,7, thus not only can obtain the effect same with the 1st embodiment, and with piezoelectric vibrating device 1 phase of the 1st embodimentRatio, can obtain larger displacement, larger acoustic pressure. So, in the present invention, can be using the two sides of supporting member as pressureElectric device composition surface.
In addition, respectively can stacked more than 2 piezoelectric element 7 on a piezoelectric element composition surface.
The piezoelectric element using at piezoelectric vibrating device of the present invention is not limited to piezoelectric element 7.
Fig. 6 is illustrated in the 1st variation of the piezoelectric element of piezoelectric vibrating device use of the present invention. Piezoelektrisches mehrschichtelement31 have piezoelectrics 32. Piezoelectrics 32 have opposed the 1st, the 2nd interarea 32a, 32b. Piezoelectrics 32 have multiple piezoelectricsLayer. On the 1st interarea 32a of piezoelectrics 32, be formed with the 1st drive electrode 33, on the 2nd interarea 32b, be formed with the 2nd and drive electricityThe utmost point 34. And then, in piezoelectrics 32, be formed with in the multiple the 1st of the public connection of end face of the 1st drive electrode 33 and piezoelectrics 32Internal drive electrode 35. In addition, according to overlapping across piezoelectric body layer and the 1st drive electrode 33 or the 1st internal drive electrode 35Mode, formed multiple the 2nd internal drive electrodes 36. Multiple the 2nd internal drive electrodes 36 on the end face of piezoelectrics 32 withThe public connection of the 2nd drive electrode 34. So, in the present invention, can use the cascade type with multiple internal drive electrodes to pressElectric device 31.
By using Piezoelektrisches mehrschichtelement 31, can obtain larger displacement with lower driving voltage. , based onThe displacement of piezoelectric effect is proportional with the electric-field intensity applying. In Piezoelektrisches mehrschichtelement 31, be connected in because can makeThe thickness attenuation of the piezoelectric body layer between the drive electrode of different current potentials, so can obtain larger displacement with lower voltageAmount.
In addition, Fig. 7 is illustrated in the 2nd variation of the piezoelectric element that piezoelectric vibrating device of the present invention uses. In Fig. 7 instituteIn the piezoelectric element 41 showing, there are piezoelectrics 42. Piezoelectrics 42 have opposed the 1st, the 2nd interarea 42a, 42b. Piezoelectrics 42There are multiple piezoelectric body layers. In piezoelectrics 42 according to formed the 1st, the 2nd drive electrode across the opposed mode of piezoelectric body layer43,44. The 1st drive electrode 43 forms abreast at the 1st interarea 42a side and the 1st interarea 42a of piezoelectrics 42. Similarly, the 2ndDrive electrode 44 forms abreast at the 2nd interarea 42b side and the 2nd interarea 42b of piezoelectrics 42. That is, in the present invention, the 1st,2 drive electrodes also can not be formed directly on the 1st, the 2nd interarea of piezoelectrics. In the outside of the 1st, the 2nd drive electrode 43,44Be formed with inert layer 42c, 42d. So, can use the piezoelectric element 41 with inert layer 42c, 42d.
In the piezoelectric element 41 shown in Fig. 7, because be provided with inert layer 42c, 42d, can suppress piezoelectricsThe clamp portion of the active region of 42 inside. In addition, in piezoelectric element 41, because being covers the 1st, the 2nd by inert layer 42c, 42dDrive electrode 43,44, so be difficult to be exposed in outside moisture. Therefore, can extend the life-span of product. In addition, be difficult to produceRaw electric leakage, the electric shock that can also be difficult to produce the people who operates the electronic equipment that has carried piezoelectric vibrating device.
And then Fig. 8 is illustrated in the 3rd variation of the piezoelectric element that piezoelectric vibrating device of the present invention uses. Shown in Fig. 8Piezoelektrisches mehrschichtelement 51 there are piezoelectrics 52. Piezoelectrics 52 have opposed the 1st, the 2nd interarea 52a, 52b. Piezoelectrics52 have multiple piezoelectric body layers. In piezoelectrics 52, according to across piezoelectric body layer and opposed mode formed the 1st, the 2nd driveElectrode 53,54. The 1st drive electrode 53 forms abreast at the 1st interarea 52a side and the 1st interarea 52a of piezoelectrics 52. Similarly,The 2nd drive electrode 54 forms abreast at the 2nd interarea 52b side and the 2nd interarea 52b of piezoelectrics 52. In addition, as shown in Figure 7Piezoelectric element 41 is such, and Piezoelektrisches mehrschichtelement 51 has inert layer in the 1st, the 2nd interarea 52a, the 52b side of piezoelectrics 5252c, 52d. And, form multiple internal drive electrodes 55 53,54 of the 1st, the 2nd drive electrodes.
As shown in Figure 6 to 8, the piezoelectric element using in piezoelectric vibrating device of the present invention can be both to drive the 1stThe outside of moving electrode and the 2nd drive electrode has the element of inert layer, can be also between the 1st, the 2nd drive electrode, to go back shapeBecome to have the Piezoelektrisches mehrschichtelement of other drive electrodes.
Fig. 9 is the stereogram of the related piezoelectric vibrating device of the 3rd embodiment of the present invention. At the 3rd embodimentIn piezoelectric vibrating device 61, on piezoelectric element 7, form the protective layer 62 being formed by insulating properties material. Other places, piezoelectricityVibrating device 61 is identical with the piezoelectric vibrating device 1 of the 1st embodiment. Therefore, for marking same Ref. No. with a part,Thereby quote the explanation of piezoelectric vibrating device 1.
Protective layer 62 is made up of insulating properties material, arranges according to the mode of the whole upper surface that covers the 2nd drive electrode 10.Therefore, can prevent that the people who operates the electronic equipment that has carried piezoelectric vibrating device from producing the electric shock based on the 2nd drive electrode 10.In addition, the insulating properties material that forms above-mentioned protective layer 62 is not particularly limited, and can use synthetic resin, insulating ceramics etc.Certainly,, in order not suppress the displacement of piezoelectric element 7, preferably use the insulating properties material of elasticity excellence.
Certainly, protective layer 62 also can be formed by the piezoelectric identical with piezoelectrics 8. In this case, need not increaseBe used to form the kind of the material of piezoelectric vibrating device 61, and need not cause the numerous and diverse of manufacturing process, just can form protectionLayer 62.
Figure 10 is the front section view that represents the related piezoelectric vibrating device of the 4th embodiment of the present invention. Real the 4thExecute in the piezoelectric vibrating device 71 of mode, replace the protective layer 62 of the 3rd embodiment, form in the lower face side of piezoelectric element 7Protective layer 72. And above-mentioned protective layer 72 is made up of the fastener of insulating properties. In addition, piezoelectric vibrating device 71 has and followsThe the 1st, the 2nd fastener layer 5A, the 6A that have formed protective layer 72 and form compared with heavy back than the 1st, the 2nd fastener layer 5,6.
Therefore, as shown in figure 10, by above-mentioned protective layer 72, also piezoelectric element 7 and the piezoelectric element of supporting member 2 are connectClosing face 2a engages. Therefore, the area of the 1st fastener layer 5A is diminished. So, in the situation that being provided with protective layer 72, even ifThe area of the 1st fastener layer 5A is diminished, also can join securely piezoelectric element 7 to supporting member 2.
In the situation that being provided with protective layer 72, by using the insulating properties of excellent moisture resistance bonding as protective layer 72Agent, thus can suppress to be entered and the deterioration in characteristics that causes by the moisture of the lower face side from piezoelectric element 7. As protective layer72, can make the member of the 1st drive electrode 9 and connecting electrode 10a electric insulation using, the adhesive of for example insulating properties, respectively toIn the situation of opposite sex conductive adhesive etc., can be between supporting member 2 and piezoelectric element 7 ground very close to each other configuration protection layer72。
In addition, also can form the both sides of the protective layer 72 shown in the protective layer 62 shown in Fig. 9 and Figure 10. In this situationUnder, at the upper surface of piezoelectric element 7 and the either side of lower surface, can both realize protection by protective layer 62,72.
Piezoelectric vibrating device involved in the present invention can be used as the piezoelectricity of various piezo-activators, piezoelectric speaker etc. and send outSound body. In addition, in recent years, as a kind of input unit of portable electric appts, touch panel formula input unit is extensively madeWith. In this touch panel formula input unit, the counter-force relative with people's input gives the haptic apparatus that is called as of click feelDevice receives publicity. Piezoelectric vibrating device of the present invention can be suitable for use as the actuator that gives counter-force in this haptic apparatus.
Figure 12 is for the piezoelectric vibrating device 1A as the variation of the piezoelectric vibrating device 1 of the 1st embodiment is describedStereogram, Figure 13 is its exploded perspective view. The piezoelectric vibrating device 1A of this variation has supporting member 2A and replaces the 1st in factExecute the supporting member 2 of mode. In this variation, use the piezoelectric element 7 identical with the 1st embodiment. Certainly supporting structure,The width of part 2A is set to wider than the width of piezoelectric element 7. As shown in figure 13, form at the upper surface of this supporting member 2AThe 1st cloth line electrode 3A and the 2nd cloth line electrode 4A. 1st, the 2nd cloth line electrode 3A, 4A electrically insulated from one another, opposed across gap. PressElectric device 7 engages with the 1st, the 2nd cloth line electrode 3A, 4A by the 1st, the 2nd fastener layer 5,6. The 1st cloth line electrode 3A has jointThe 3a of portion, portion of terminal 3b and linking part 3c. At stacked the 1st fastener layer 5 of junction surface 3a. Junction surface 3a spreads all over the whole of supporting member 2AIndividual width. Portion of terminal 3b is arranged on the 2nd cloth line electrode 4A side. Portion of terminal 3b on the width of supporting member 2A acrossGap and the 2nd cloth line electrode 4A are opposed. In addition, with the 2nd cloth line electrode 4A similarly, portion of terminal 3b is formed on by supporting member 2AOne distolateral. Junction surface 3a is connected by linking part 3c with portion of terminal 3b. And, as shown in figure 12, portion of terminal 3b andThe 2nd cloth line electrode 4A is in distolateral exposing of this supporting member 2A. Therefore, can easily carry out and outside being electrically connected.
Figure 14 is other variation institutes for the piezoelectric vibrating device related at the 1st embodiment of the present invention is describedThe stereogram of the supporting member 2B using. In the piezoelectric vibrating device 1A shown in Figure 13, in order to prevent portion of terminal 3b and the 2nd clothThe short circuit of line electrode 4A, the width of supporting member 2A is set to wider than the width of piezoelectric element 7. Certainly, as shown in figure 14,Also can there is the 1st cloth line electrode 3B, and the supporting member 2B of the width same widths of use and piezoelectric element 7. In these feelingsUnder condition, the 1st cloth line electrode 3B has junction surface 3d, portion of terminal 3e and linking part 3f. At stacked the 1st fastener layer 5 of junction surface 3d.Junction surface 3d spreads all over the whole width of supporting member 2B. Portion of terminal 3e is arranged on the 2nd cloth line electrode 4A side. Portion of terminal 3e existsOpposed across gap and the 2nd cloth line electrode 4A on the width of supporting member 2B. In addition, with the 2nd cloth line electrode 4A similarly,Portion of terminal 3e is formed as distolateral by supporting member 2A. Junction surface 3d and portion of terminal 3e are by an end from supporting member 2BFace connects to the linking part 3e of another end face through lower surface.
In addition, in the supporting member 2B shown in Figure 14, its fabric width also can be larger than the width of piezoelectric element 7.
Figure 15 is that the variation of the piezoelectric vibrating device 1 for the 1st embodiment is described is the vertical of piezoelectric vibrating device 1BBody figure, Figure 16 is its exploded perspective view. Piezoelectric vibrating device 1B props up by the Piezoelektrisches mehrschichtelement shown in Fig. 8 51 is laminated toHold member 2A and form. Supporting member 2A is substantially identical with the supporting member 2A shown in Figure 13. Certainly, although make to support structure hereThe width of part 2A is the size identical with the width of Piezoelektrisches mehrschichtelement 51, but with the situation of Figure 13 similarly, also canUse the width supporting member 2A wider than Piezoelektrisches mehrschichtelement 51.
In the variation shown in Figure 15 and Figure 16, the portion of terminal 3b of the 1st cloth line electrode 3A and the 2nd cloth line electrode 4A establishBe set to by the length direction one of supporting member 2A distolateral. Therefore, the length direction one of supporting member 2A is distolateral can be easilyCarry out and outside being electrically connected. In addition, as shown in figure 15, because portion of terminal 3b and the 2nd cloth line electrode 4A are at supporting member 2ADistolateral exposing, so can further easily carry out and outside being connected.
Figure 11 is the schematic, exploded, isometric illustration that has used the vibration module 81 of piezoelectric vibrating device of the present invention. Shake at thisIn dynamic model piece 81, multiple piezoelectric vibrating devices 1,1 of the 1st embodiment are arranged on the upper of substrate 82 by fastener layer 83,84Surface. And, above multiple piezoelectric vibrating devices 1,1, the pliability base that configuration is used by touch panel formula input unitPlate 85. This vibration module can be suitable for use in haptic apparatus.
In addition, in the piezoelectric vibrating device 1 of above-mentioned embodiment, use the piezoelectrics of rectangular plate shape, but thisThe piezoelectrics of bright piezoelectric vibrating device can be also the shapes beyond rectangular plate shape, such as discoideus other shapes such as grade. EquallyGround, for supporting member, is also not limited to the oscillating plate performance function as single piezoelectric chip vibrating device, is not limited to rectangular slabShape, also can have the shape of discoideus grade.
Symbol description
1,1A, 1B ... piezoelectric vibrating device
2,2A, 2B ... supporting member
2a ... piezoelectric element composition surface
2b, 2c ... extension
2d ... lower surface
3,3A, 3B ... the 1st cloth line electrode
3a ... junction surface
3b ... portion of terminal
3c ... linking part
3d ... junction surface
3e ... portion of terminal
3f ... linking part
4,4A ... the 2nd cloth line electrode
5 ... the 1st fastener layer
5A ... the 1st fastener layer
6 ... the 2nd fastener layer
7 ... piezoelectric element
8 ... piezoelectrics
8a ... the 1st interarea
8b ... the 2nd interarea
9 ... the 1st drive electrode
10 ... the 2nd drive electrode
10a ... connecting electrode
21 ... piezoelectric vibrating device
31 ... piezoelectric element
32 ... piezoelectrics
32a ... the 1st interarea
32b ... the 2nd interarea
33 ... the 1st drive electrode
34 ... the 2nd drive electrode
35 ... the 1st internal drive electrode
36 ... the 2nd internal drive electrode
41 ... piezoelectric element
42 ... piezoelectrics
42a ... the 1st interarea
42b ... the 2nd interarea
42c, 42d ... inert layer
43 ... the 1st drive electrode
44 ... the 2nd drive electrode
51 ... piezoelectric element
52 ... piezoelectrics
52a ... the 1st interarea
52b ... the 2nd interarea
52c, 52d ... inert layer
53 ... the 1st drive electrode
54 ... the 2nd drive electrode
55 ... internal drive electrode
61 ... piezoelectric vibrating device
62 ... protective layer
71 ... piezoelectric vibrating device
72 ... protective layer
81 ... vibration module
82 ... substrate
83,84 ... fastener layer
85 ... flexible base plate
Claims (12)
1. a piezoelectric vibrating device, possesses:
Piezoelectric element, it has: piezoelectrics, it has opposed the 1st interarea and the 2nd interarea mutually; The 1st drive electrode, itsWith the 1st main surface parallel be formed on described the 1st interarea side of described piezoelectrics; With the 2nd drive electrode, itself and the 2nd main surface parallelBe formed on described the 2nd interarea side of described piezoelectrics, and opposed with described the 1st drive electrode, described the 1st drive electrode,The 2nd drive electrode opposed region on the thickness direction of described piezoelectrics is made as active region, described the 1st drive electrode and instituteState the 2nd not opposed region of drive electrode and be made as non-active region; And
Supporting member, it has the piezoelectric element composition surface that engages described piezoelectric element,
Described supporting member has the 1st cloth line electrode, and the 1st cloth line electrode is formed on described piezoelectric element composition surface, and withThe 1st drive electrode electrical connection of described piezoelectric element,
Described piezoelectric vibrating device also possesses the 1st fastener layer, and the 1st fastener layer drives the described the 1st of described piezoelectric element theMoving electrode is electrically connected with described the 1st cloth line electrode of described supporting member, and by the 1st interarea of described piezoelectric element with described inThe piezoelectric element composition surface of supporting member engages,
Described piezoelectric element also has connecting electrode, and this connecting electrode is formed in the described non-active region of described piezoelectricsThe 1st interarea of described piezoelectrics, and be electrically connected with the 2nd drive electrode that is formed on described the 2nd interarea,
Described supporting member also has the 2nd cloth line electrode, and the 2nd cloth line electrode is formed on described piezoelectric element composition surface, andBe electrically connected with described the 2nd drive electrode,
Described piezoelectric vibrating device also possesses the 2nd fastener layer, and the 2nd fastener layer is by described connecting electrode and described the 2nd clothLine electrode electrical connection, and the 1st interarea of described piezoelectric element is engaged with the piezoelectric element composition surface of described supporting member,
Described supporting member exists for the beam mode support from supporting member described in external support, so that: described piezoelectricityWhen element vibrates with beam mode, described supporting member beam mode with same frequency together with this piezoelectric element carries outVibration,
Described beam mode supporting portion is in periphery, and this periphery is positioned at the outside in the region that has engaged described piezoelectric element,Described the 1st cloth line electrode arrives described periphery.
2. piezoelectric vibrating device according to claim 1, wherein,
The node of at least 1 beam mode in described supporting member is positioned at described beam mode support.
3. piezoelectric vibrating device according to claim 1, wherein,
Described piezoelectric element also has protective layer, and this protective layer is formed on the 1st interarea of described piezoelectrics, and by insulating properties materialMaterial forms, and described protective layer engages with the piezoelectric element composition surface of described supporting member.
4. piezoelectric vibrating device according to claim 2, wherein,
Described piezoelectric element also has protective layer, and this protective layer is formed on the 1st interarea of described piezoelectrics, and by insulating properties materialMaterial forms, and described protective layer engages with the piezoelectric element composition surface of described supporting member.
5. according to the piezoelectric vibrating device described in any one in claim 1～4, wherein,
Described piezoelectric element also has the 2nd interarea that is formed on described piezoelectrics according to the mode that covers described the 2nd drive electrodeAnd the protective layer being formed by insulating properties material.
6. according to the piezoelectric vibrating device described in claim 3 or 4, wherein,
Described protective layer is made up of the material identical with described piezoelectrics.
7. piezoelectric vibrating device according to claim 5, wherein,
Described protective layer is made up of the material identical with described piezoelectrics.
8. according to the piezoelectric vibrating device described in any one in claim 1～4, wherein,
Described supporting member has opposed the 1st piezoelectric element composition surface, the 2nd piezoelectric element composition surface, at the 1st piezoelectric elementComposition surface, the 2nd piezoelectric element composition surface have engaged respectively described piezoelectric element.
9. according to the piezoelectric vibrating device described in any one in claim 1～4, wherein,
Described piezoelectrics and described supporting member have the flat shape of rectangle, and this rectangle has minor face and long limit, and instituteState the equal in length of the length of minor face of the rectangle of supporting member and the minor face of the rectangle of described piezoelectrics,
Described the 1st drive electrode, the 2nd drive electrode are formed as crossing over the described short side direction total length of described piezoelectrics.
10. piezoelectric vibrating device according to claim 9, wherein,
Described the 1st drive electrode is formed on the 1st interarea of described piezoelectrics,
It is upper that described the 2nd drive electrode is formed on whole of the 2nd interarea of described piezoelectrics,
Described piezoelectric element also has the 1st interarea that is formed on described piezoelectrics in the described non-active region of described piezoelectricsUpper and be electrically connected with described the 2nd drive electrode connecting electrode,
This connecting electrode is formed as arriving from described the 1st interarea of described piezoelectrics the side of described piezoelectrics, and describedThe side of piezoelectrics is connected with described the 2nd drive electrode with the crest line place that the 2nd interarea forms.
11. piezoelectric vibrating devices according to claim 10, wherein,
Described in the Length Ratio on the long limit of the described rectangle of described supporting member, the length on the long limit of the described rectangle of piezoelectric element is long,Described the 1st cloth line electrode arrive described supporting member joint the region, side of part of described piezoelectric element.
12. piezoelectric vibrating devices according to claim 11, wherein,
The length on the described long limit of the described rectangle of described supporting member is made as to L1, by the active region in described piezoelectricsWhile being made as L2 along the length of the long side direction of the described rectangle of described supporting member, (L2/L1) × 100% is more than 75%.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-245130 | 2010-11-01 | ||
| JP2010245130 | 2010-11-01 | ||
| PCT/JP2011/074390 WO2012060235A1 (en) | 2010-11-01 | 2011-10-24 | Piezoelectric vibration device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103155410A CN103155410A (en) | 2013-06-12 |
| CN103155410B true CN103155410B (en) | 2016-05-25 |
Family
ID=46024352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180048646.1A Expired - Fee Related CN103155410B (en) | 2010-11-01 | 2011-10-24 | Piezoelectric vibrating device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5605433B2 (en) |
| CN (1) | CN103155410B (en) |
| WO (1) | WO2012060235A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11977683B2 (en) | 2021-03-12 | 2024-05-07 | Apple Inc. | Modular systems configured to provide localized haptic feedback using inertial actuators |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8487759B2 (en) | 2009-09-30 | 2013-07-16 | Apple Inc. | Self adapting haptic device |
| JP5664203B2 (en) * | 2010-12-15 | 2015-02-04 | 株式会社村田製作所 | Electronic components |
| WO2014007088A1 (en) * | 2012-07-04 | 2014-01-09 | 株式会社村田製作所 | Piezoelectric fan |
| JP5966829B2 (en) * | 2012-09-28 | 2016-08-10 | ブラザー工業株式会社 | Ink jet head and manufacturing method thereof |
| JP6286119B2 (en) * | 2012-10-01 | 2018-02-28 | 京セラ株式会社 | Sound generator, piezoelectric vibrator for sound generator, and sound generation system |
| KR102151292B1 (en) * | 2013-01-31 | 2020-09-02 | 가부시키가이샤 무라타 세이사쿠쇼 | Piezoelectric vibrating body |
| JP6101521B2 (en) * | 2013-03-14 | 2017-03-22 | 日本碍子株式会社 | Piezoelectric device and method of using the same |
| CN105683865B (en) | 2013-09-30 | 2018-11-09 | 苹果公司 | Magnetic actuator for haptic response |
| AU2016100399B4 (en) | 2015-04-17 | 2017-02-02 | Apple Inc. | Contracting and elongating materials for providing input and output for an electronic device |
| WO2017057091A1 (en) * | 2015-09-28 | 2017-04-06 | 株式会社村田製作所 | Crystal part and crystal oscillator |
| US10039080B2 (en) | 2016-03-04 | 2018-07-31 | Apple Inc. | Situationally-aware alerts |
| US10268272B2 (en) | 2016-03-31 | 2019-04-23 | Apple Inc. | Dampening mechanical modes of a haptic actuator using a delay |
| US20170364158A1 (en) * | 2016-06-20 | 2017-12-21 | Apple Inc. | Localized and/or Encapsulated Haptic Actuators and Elements |
| JP6717222B2 (en) * | 2016-09-01 | 2020-07-01 | Tdk株式会社 | Vibrating device |
| US10707832B2 (en) | 2016-09-01 | 2020-07-07 | Tdk Corporation | Vibrating device |
| CN108140373B (en) * | 2016-09-28 | 2021-10-26 | 株式会社村田制作所 | Piezoelectric sound producing component and method for manufacturing same |
| US10897005B2 (en) * | 2017-02-09 | 2021-01-19 | Tdk Corporation | Vibrating device |
| US10622538B2 (en) | 2017-07-18 | 2020-04-14 | Apple Inc. | Techniques for providing a haptic output and sensing a haptic input using a piezoelectric body |
| JP7013767B2 (en) * | 2017-09-25 | 2022-02-01 | Tdk株式会社 | Vibration unit |
| JP6822380B2 (en) * | 2017-11-02 | 2021-01-27 | Tdk株式会社 | Vibration device |
| CN116208895A (en) * | 2017-11-21 | 2023-06-02 | 日东电工株式会社 | Piezoelectric loudspeaker |
| JP6720959B2 (en) * | 2017-12-27 | 2020-07-08 | Tdk株式会社 | Vibrating device |
| JP2020145514A (en) * | 2019-03-04 | 2020-09-10 | 株式会社東芝 | Microactuator, head suspension assembly, and disk device |
| US11380470B2 (en) | 2019-09-24 | 2022-07-05 | Apple Inc. | Methods to control force in reluctance actuators based on flux related parameters |
| US11809631B2 (en) | 2021-09-21 | 2023-11-07 | Apple Inc. | Reluctance haptic engine for an electronic device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1211105A (en) * | 1997-07-17 | 1999-03-17 | 株式会社村田制作所 | Piezoelectric vibration device |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4730434Y1 (en) * | 1968-09-13 | 1972-09-12 | ||
| JPS5345951A (en) * | 1976-10-06 | 1978-04-25 | Fujitsu Ltd | Crooking vibration convertor |
| JPS5575324A (en) * | 1978-12-01 | 1980-06-06 | Seiko Instr & Electronics Ltd | Thickness shear oscillator |
| JPH0641707U (en) * | 1992-03-30 | 1994-06-03 | テルモ株式会社 | Ultrasonic probe |
| JP3077551B2 (en) * | 1995-03-03 | 2000-08-14 | 株式会社村田製作所 | Piezoelectric resonance components |
| JP3860299B2 (en) * | 1997-07-11 | 2006-12-20 | 株式会社産機 | Piezoelectric vibrator |
| JPH11341598A (en) * | 1998-05-27 | 1999-12-10 | Daishinku:Kk | Lead wire mounting structure of piezoelectric element |
| JP3514222B2 (en) * | 1999-11-17 | 2004-03-31 | 株式会社村田製作所 | Piezoelectric resonator, electronic components and electronic equipment |
| JP4571264B2 (en) * | 2000-02-25 | 2010-10-27 | 京セラキンセキ株式会社 | Piezoelectric vibrator |
| JP4691782B2 (en) * | 2001-01-09 | 2011-06-01 | 株式会社村田製作所 | Defect detection method for piezoelectric resonance element |
| WO2004065954A1 (en) * | 2003-01-17 | 2004-08-05 | The Tokyo Electric Power Company, Incorporated | Ultrasonic probe |
| JP4078555B2 (en) * | 2004-03-17 | 2008-04-23 | セイコーエプソン株式会社 | Method for producing potassium niobate deposits |
| JP2007243521A (en) * | 2006-03-08 | 2007-09-20 | Ngk Insulators Ltd | Piezoelectric thin-film device |
| JP2008172713A (en) * | 2007-01-15 | 2008-07-24 | Hitachi Media Electoronics Co Ltd | Piezoelectric thin film resonator, piezoelectric thin film resonator filter, and its manufacturing method |
-
2011
- 2011-10-24 CN CN201180048646.1A patent/CN103155410B/en not_active Expired - Fee Related
- 2011-10-24 JP JP2012541806A patent/JP5605433B2/en not_active Expired - Fee Related
- 2011-10-24 WO PCT/JP2011/074390 patent/WO2012060235A1/en active Application Filing
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1211105A (en) * | 1997-07-17 | 1999-03-17 | 株式会社村田制作所 | Piezoelectric vibration device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11977683B2 (en) | 2021-03-12 | 2024-05-07 | Apple Inc. | Modular systems configured to provide localized haptic feedback using inertial actuators |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103155410A (en) | 2013-06-12 |
| JP5605433B2 (en) | 2014-10-15 |
| WO2012060235A1 (en) | 2012-05-10 |
| JPWO2012060235A1 (en) | 2014-05-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103155410B (en) | Piezoelectric vibrating device | |
| TWI229876B (en) | Electronic component and interposer substrate | |
| JP6059300B2 (en) | Piezoelectric vibration element, piezoelectric vibration device, and portable terminal | |
| CN104137286B (en) | Piezo-vibration and portable terminal device | |
| JP2018152541A (en) | Vibrating device | |
| US8256292B2 (en) | Acceleration sensor with surface protection | |
| JP2017196211A (en) | Vibration waveform sensor | |
| JP6741609B2 (en) | Piezoelectric actuator, piezoelectric vibration device, and electronic device | |
| JP6585821B2 (en) | SOUND GENERATOR AND ELECTRONIC DEVICE HAVING THE SAME | |
| KR20140089031A (en) | Piezoelectric actuator, piezoelectric vibration apparatus and portable terminal | |
| JP5225518B1 (en) | Piezoelectric vibration element, piezoelectric vibration device, and portable terminal | |
| JP2019147122A (en) | Vibration generator and electronic equipment | |
| JP6923476B2 (en) | Piezoelectric vibrating device and electronic equipment equipped with it | |
| JP7268477B2 (en) | acoustic device | |
| JP5805471B2 (en) | Piezoelectric device | |
| JP5932458B2 (en) | Piezoelectric vibration element, piezoelectric vibration device using the same, and portable terminal | |
| JPWO2016158730A1 (en) | Piezoelectric generator and piezoelectric generator | |
| JP5940947B2 (en) | Piezoelectric vibration element, piezoelectric vibration device using the same, and portable terminal | |
| JP5272869B2 (en) | Vibrator | |
| JP2007221313A (en) | Flexural vibration type exciter and manufacturing method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160525 Termination date: 20211024 |