CN103149251A - Method for enhancing oxygen gas sensitivity of zinc oxide (ZnO) through ethanol saturated vapor - Google Patents
Method for enhancing oxygen gas sensitivity of zinc oxide (ZnO) through ethanol saturated vapor Download PDFInfo
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- CN103149251A CN103149251A CN2013100640569A CN201310064056A CN103149251A CN 103149251 A CN103149251 A CN 103149251A CN 2013100640569 A CN2013100640569 A CN 2013100640569A CN 201310064056 A CN201310064056 A CN 201310064056A CN 103149251 A CN103149251 A CN 103149251A
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Abstract
The invention relates to a method for enhancing oxygen gas sensitivity of zinc oxide (ZnO) through ethanol saturated vapor, and the method is characterized in that a ZnO nanorod array film is used as a gas-sensitive material to prepare a gas-sensitive element, the ZnO nanorod array film gas-sensitive element is placed in the ethanol saturated vapor under the temperature of 10 DEG C to 30 DEG C, the gas sensitivity of the gas-sensitive element on the oxygen with conventional concentration is enhanced by utilizing the auxiliary oxidation reaction of the ethanol saturated vapor, the working temperature of the gas-sensitive element is 150 DEG C to 400 DEG C, the gas-sensitive element is sensitive to the oxygen with the percent by volume of 10 to 35 percent, the response time is less than 110s, and the gas-sensitive element is responded in a linear way within the oxygen concentration range. The method has the advantages that the method is simple to operate and easy to realize, the interference of reducing gas on the oxygen response of the ZnO gas-sensitive element is overcome, the oxygen response speed is fast, the stability is good, the flexibility and the oxygen concentration are in a good linear relationship, and an important application value on the aspect of the detection of oxygen concentration in the air can be realized.
Description
Technical field
The present invention relates to the semiconductor gas sensor technical field, particularly a kind of method that strengthens the quick performance of ZnO oxygen by the ethanol saturated vapor.
Background technology
Along with the growing interest of people to the healthy air environment, the gas sensor of developing oxygen content in sensing chamber also more and more comes into one's own in recent years.Zinc paste is a kind of widely used semiconductor material, and zinc oxide material is the characteristics such as preparation technology is simple, cost is low, applied range because having, and in the gas sensor field, important using value is arranged.Yet relevant zinc oxide material is at O so far
2The research of air-sensitive aspect be mostly under vacuum environment, the oxygen of low concentration, seldom relate to the air-sensitive that forms the oxygen concentration that is complementary with air.
The Zinc oxide-base gas sensor uses its nano-stick array membrane as gas sensitive mostly, but the present Zinc oxide-base oxygen sensor of studying is all very long to response and the release time of oxygen, many reducibility gas are easy to produce interference to the response of oxygen, have hindered its application.
Summary of the invention
The objective of the invention is for above-mentioned existing problems, a kind of method that strengthens the quick performance of ZnO oxygen by the ethanol saturated vapor be provided, be subject to overcome its response to normal concentration oxygen that reducibility gas disturbs, response speed reach slowly can't linear response etc. deficiency.
Technical scheme of the present invention:
a kind of method that strengthens the quick performance of ZnO oxygen by the ethanol saturated vapor, prepare gas sensor with the ZnO nano-rod array film as gas sensitive, ZnO nano-rod array film gas sensor is in the 10-30 ℃ of ethanol saturated vapor at temperature, utilize the assisted oxidation of ethanol saturated vapor to react to strengthen gas sensor to the air-sensitive performance of normal concentration oxygen, the working temperature of gas sensor is 150-400 ℃, gas sensor is the oxygen sensitivity of 10-35% to concentration of volume percent, response time was less than 110 seconds, gas sensor is linear response in this oxygen concentration scope.
The thickness of described ZnO nano-rod array film is the 0.5-2 micron; Nanometer rods is (001) high preferred orientation, and its diameter is the 20-130 nanometer.
The air pressure of described ethanol saturated vapor is 3-10kPa, and this ethanol saturated vapor is by the at room temperature volatilization generation naturally of absolute ethyl alcohol liquid.
Principle of work of the present invention:
Research has at present confirmed zinc oxide surface energy adsorption of oxygen, oxygen absorbs electronics from zinc paste and becomes oxonium ion, and zinc oxide surface loses electronics formation depletion layer, it is large that ZnO resistors becomes, and the oxonium ion that the reducibility gas such as ethanol can and adsorb reacts, the reduction of the oxonium ion of absorption, again discharge electronics to zinc oxide surface, its reaction equation is:
CH
3CH
2OH(adsorbed)+6O
-(adsorbed）→2CO
2+3H
2O+6e
-。
Can accelerate in zinc oxide surface absorption at the auxiliary lower oxygen of ethanol steam, can reach very soon adsorption equilibrium.When zinc paste is in saturated ethanol steam, can be saturated to Ethanol Adsorption, if when this moment, denseization of zinc oxide surface oxygen degree became large, zinc paste adsorb oxygen amount can change, this reaction can reach balance very soon under ethanol is auxiliary, greatly shortened the quick response time of oxygen.
Advantage of the present invention is:
The present invention strengthens the method for the quick performance of ZnO oxygen by the ethanol saturated vapor, easy realization simple to operate, the method has overcome the interference of reducibility gas to the oxygen response of zinc paste gas sensor, and oxygen response speed is fast, good stability, sensitivity and oxygen concentration that this method of while draws have good linear relationship.
Description of drawings
Fig. 1 be the zinc paste that obtains of embodiment 1 sample to the air-sensitive response curve of variable concentrations oxygen, wherein:
Fig. 1 a is to the air-sensitive response curve lower than the oxygen of oxygen concentration in air, and Fig. 1 b is to the air-sensitive response curve higher than the oxygen of oxygen concentration in air.
Fig. 2 is that zinc paste that in embodiment 2, sample obtains is to the air-sensitive response curve of variable concentrations oxygen.
Fig. 3 a is that the zinc paste that obtains of embodiment 1 and 2 two samples of embodiment is to the Sensitivity comparison lower than air concentration oxygen; Fig. 3 b is that the zinc paste that obtains of embodiment 1 and 2 two samples of embodiment is to the Sensitivity comparison higher than air concentration oxygen.
Fig. 4 is the SEM figure of sample in embodiment 1 and embodiment 2, and wherein: Fig. 4 a is the SEM figure of embodiment 1 sample, and Fig. 4 b is the SEM figure of embodiment 2 samples.
Specific implementation method
Embodiment 1:
a kind of method that strengthens the quick performance of ZnO oxygen by the ethanol saturated vapor, ZnO nano-rod array film with mean diameter 80nm prepares gas sensor as gas sensitive, the thickness of this gas sensor array film is 1 micron, nanometer rods is (001) high preferred orientation, ZnO nano-rod array film gas sensor is in 19 ℃ of ethanol saturated vapors at temperature, the ethanol saturated vapour pressure is 5kPa, this ethanol saturated vapour pressure is the volatilization generation naturally under this room temperature of absolute ethyl alcohol liquid, utilize the assisted oxidation of ethanol saturated vapor to react to strengthen gas sensor to the air-sensitive performance of normal concentration oxygen, the working temperature of gas sensor is 200 ℃, take the sensitivity of air Plays oxygen concentration as 0 point, gas sensor is the oxygen sensitivity of 10-35% to concentration of volume percent, response time was less than 105 seconds, gas sensor is linear response in this oxygen concentration scope.
Fig. 1 is that the zinc paste that obtains of embodiment 1 sample is to the air-sensitive response curve of variable concentrations oxygen, wherein: Fig. 1 a is respectively the quick response curve of air-sensitive of 10%, 15%, 18% oxygen to the oxygen percent by volume lower than oxygen concentration in air, Fig. 1 b is to the quick response curve of oxygen higher than the 22%-35% of oxygen concentration in air, show in figure: zinc paste has response faster to the oxygen of 10%-35% in this way, and response also can reach one than stabilised platform.
Embodiment 2:
a kind of method that strengthens the quick performance of ZnO oxygen by the ethanol saturated vapor, ZnO nano-rod array film with mean diameter 120nm prepares gas sensor as gas sensitive, the thickness of this gas sensor array film is 1.3 microns, nanometer rods is (001) high preferred orientation, ZnO nano-rod array film gas sensor is in 20 ℃ of ethanol saturated vapors at temperature, the ethanol saturated vapour pressure is 5.5kPa, , this ethanol saturated vapour pressure is the volatilization generation naturally under this room temperature of absolute ethyl alcohol liquid, utilize the assisted oxidation of ethanol saturated vapor to react to strengthen gas sensor to the air-sensitive performance of normal concentration oxygen, the working temperature of gas sensor is 200 ℃, take the sensitivity of air Plays oxygen concentration as 0 point, gas sensor is the oxygen sensitivity of 15-35% to concentration of volume percent, response time was less than 90 seconds, gas sensor is linear response in this oxygen concentration scope.
Fig. 2 be zinc paste that in embodiment 2, sample obtains to the air-sensitive response curve of variable concentrations oxygen, show in figure: zinc paste has response faster to the oxygen of 15%-35% in this way, and response also can reach one than stabilised platform.
Fig. 3 a is that the zinc paste that obtains of embodiment 1 and 2 two samples of embodiment is to the Sensitivity comparison lower than air concentration oxygen, Fig. 3 b is that the zinc paste that obtains of embodiment 1 and 2 two samples of embodiment is to the Sensitivity comparison higher than air concentration oxygen, show in figure: two embodiment results are basically identical, and sensitivity and oxygen concentration have good linear relationship.
Fig. 4 is the SEM figure of sample in embodiment 1 and embodiment 2, wherein: Fig. 4 a is the SEM figure of embodiment 1 sample, Fig. 4 b is the SEM figure of embodiment 2 samples, as we can see from the figure: in embodiment 1, the nanometic zinc oxide rod array diameter is on average 80nm, nanometic zinc oxide rod array diameter average out to 120nm in embodiment 2.
Claims (3)
1. one kind is passed through the method that the ethanol saturated vapor strengthens the quick performance of ZnO oxygen, it is characterized in that: prepare gas sensor with the ZnO nano-rod array film as gas sensitive, ZnO nano-rod array film gas sensor is in the 10-30 ℃ of ethanol saturated vapor at temperature, utilize the assisted oxidation of ethanol saturated vapor to react to strengthen gas sensor to the air-sensitive performance of normal concentration oxygen, the working temperature of gas sensor is 150-400 ℃, gas sensor is the oxygen sensitivity of 10-35% to concentration of volume percent, response time was less than 110 seconds, gas sensor is linear response in this oxygen concentration scope.
2. strengthen according to claim 1 the method for the quick performance of ZnO oxygen by the ethanol saturated vapor, it is characterized in that: the thickness of described ZnO nano-rod array film is the 0.5-2 micron; Nanometer rods is (001) high preferred orientation, and its diameter is the 20-130 nanometer.
3. strengthen according to claim 1 the method for the quick performance of ZnO oxygen by the ethanol saturated vapor, it is characterized in that: the air pressure of described ethanol saturated vapor is 3-10kPa, and this ethanol saturated vapor is by the at room temperature volatilization generation naturally of absolute ethyl alcohol liquid.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103880064A (en) * | 2014-03-24 | 2014-06-25 | 济南大学 | Method for in-situ growth of two-dimensional lamellar structured nano-zinc oxide on ceramic tube |
| CN108226233A (en) * | 2018-01-08 | 2018-06-29 | 中国工程物理研究院化工材料研究所 | Hierarchical Z nO@ZnO nano composite air-sensitive materials and preparation method thereof |
-
2013
- 2013-02-28 CN CN2013100640569A patent/CN103149251A/en active Pending
Non-Patent Citations (1)
| Title |
|---|
| 陈伟良等: "金修饰ZnO纳米棒阵列制备及对甲醛气敏性能", 《无机化学学报》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103880064A (en) * | 2014-03-24 | 2014-06-25 | 济南大学 | Method for in-situ growth of two-dimensional lamellar structured nano-zinc oxide on ceramic tube |
| CN103880064B (en) * | 2014-03-24 | 2015-07-08 | 济南大学 | Method for in-situ growth of two-dimensional lamellar structured nano-zinc oxide on ceramic tube |
| CN108226233A (en) * | 2018-01-08 | 2018-06-29 | 中国工程物理研究院化工材料研究所 | Hierarchical Z nO@ZnO nano composite air-sensitive materials and preparation method thereof |
| CN108226233B (en) * | 2018-01-08 | 2020-01-31 | 中国工程物理研究院化工材料研究所 | Hierarchical ZnO @ ZnO nanocomposite gas-sensitive material and preparation method thereof |
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Application publication date: 20130612 |