CN103137408B - 具有精密功率检测器的射频电源 - Google Patents
具有精密功率检测器的射频电源 Download PDFInfo
- Publication number
- CN103137408B CN103137408B CN201110389185.6A CN201110389185A CN103137408B CN 103137408 B CN103137408 B CN 103137408B CN 201110389185 A CN201110389185 A CN 201110389185A CN 103137408 B CN103137408 B CN 103137408B
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- CN
- China
- Prior art keywords
- circuit
- radio
- power supply
- frequency power
- rectification
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001514 detection method Methods 0.000 claims abstract description 41
- 230000003321 amplification Effects 0.000 claims abstract description 29
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 29
- 238000001914 filtration Methods 0.000 claims abstract description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 210000002381 plasma Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
- H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
- H02M7/06—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode
- H02M7/066—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode particular circuits having a special characteristic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/189—High-frequency amplifiers, e.g. radio frequency amplifiers
- H03F3/19—High-frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only
- H03F3/195—High-frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only in integrated circuits
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/45—Differential amplifiers
- H03F3/45071—Differential amplifiers with semiconductor devices only
- H03F3/45076—Differential amplifiers with semiconductor devices only characterised by the way of implementation of the active amplifying circuit in the differential amplifier
- H03F3/45475—Differential amplifiers with semiconductor devices only characterised by the way of implementation of the active amplifying circuit in the differential amplifier using IC blocks as the active amplifying circuit
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B17/00—Monitoring; Testing
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
- H03F2203/45—Indexing scheme relating to differential amplifiers
- H03F2203/45138—Two or more differential amplifiers in IC-block form are combined, e.g. measuring amplifiers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
- H03F2203/45—Indexing scheme relating to differential amplifiers
- H03F2203/45518—Indexing scheme relating to differential amplifiers the FBC comprising one or more diodes and being coupled between the LC and the IC
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
- H03F2203/45—Indexing scheme relating to differential amplifiers
- H03F2203/45528—Indexing scheme relating to differential amplifiers the FBC comprising one or more passive resistors and being coupled between the LC and the IC
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Signal Processing (AREA)
- Computer Networks & Wireless Communication (AREA)
- Electromagnetism (AREA)
- Amplifiers (AREA)
- Measurement Of Current Or Voltage (AREA)
Abstract
Description
Claims (10)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110389185.6A CN103137408B (zh) | 2011-11-30 | 2011-11-30 | 具有精密功率检测器的射频电源 |
US14/361,613 US9515567B2 (en) | 2011-11-30 | 2012-09-27 | Radio frequency power source having precise power detector |
PCT/CN2012/082209 WO2013078909A1 (zh) | 2011-11-30 | 2012-09-27 | 具有精密功率检测器的射频电源 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110389185.6A CN103137408B (zh) | 2011-11-30 | 2011-11-30 | 具有精密功率检测器的射频电源 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103137408A CN103137408A (zh) | 2013-06-05 |
CN103137408B true CN103137408B (zh) | 2015-07-29 |
Family
ID=48497069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110389185.6A Active CN103137408B (zh) | 2011-11-30 | 2011-11-30 | 具有精密功率检测器的射频电源 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9515567B2 (zh) |
CN (1) | CN103137408B (zh) |
WO (1) | WO2013078909A1 (zh) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103457572B (zh) * | 2013-09-10 | 2016-06-08 | 昆山新金福精密电子有限公司 | 一种二阶有源滤波电路 |
CN103529288B (zh) * | 2013-10-31 | 2016-10-05 | 深圳市云海通讯股份有限公司 | 一种读取多路射频信号功率值的方法及检波电路 |
CN104849543A (zh) * | 2014-02-18 | 2015-08-19 | 中国科学院微电子研究所 | 一种射频功率检测电路 |
CN105372483B (zh) * | 2015-12-10 | 2017-04-05 | 华中科技大学 | 一种射频电压电流检测装置 |
CN105978567B (zh) * | 2016-05-04 | 2019-04-19 | 哈尔滨工程大学 | 一种具有滤波和模拟/数字转换功能的电路 |
CN109428505A (zh) * | 2017-09-04 | 2019-03-05 | 北京泰龙电子技术有限公司 | 一种可调带宽的射频电源 |
CN109428504A (zh) * | 2017-09-04 | 2019-03-05 | 北京泰龙电子技术有限公司 | 一种具有可调滤波线圈的射频电源 |
CN109425782A (zh) * | 2017-09-04 | 2019-03-05 | 北京泰龙电子技术有限公司 | 一种射频电源功率放大器功率检测装置 |
CN110380694A (zh) * | 2018-04-13 | 2019-10-25 | 中国科学院微电子研究所 | 具有精密功率检测器的自激式全固态射频电源 |
CN110380695A (zh) * | 2018-04-13 | 2019-10-25 | 中国科学院微电子研究所 | 自激式全固态射频电源 |
US11784028B2 (en) * | 2020-12-24 | 2023-10-10 | Applied Materials, Inc. | Performing radio frequency matching control using a model-based digital twin |
CN115656864B (zh) * | 2022-09-09 | 2024-03-26 | 北京北方华创微电子装备有限公司 | 一种射频电源信号采集电路和半导体工艺设备 |
CN116455359B (zh) * | 2023-06-15 | 2023-09-01 | 成都明夷电子科技有限公司 | 一种宽带数控延时线 |
CN117233458B (zh) * | 2023-11-10 | 2024-03-19 | 成都明夷电子科技股份有限公司 | 功率检测电路及功率检测*** |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5543689A (en) * | 1993-12-27 | 1996-08-06 | Fujitsu Limited | High frequency power source having corrected power output |
CN101529551A (zh) * | 2006-10-31 | 2009-09-09 | Mks仪器股份有限公司 | 防止射频等离子体处理中的不稳定性的方法和装置 |
CN101933225A (zh) * | 2008-02-01 | 2010-12-29 | Mks仪器股份有限公司 | 射频功率输送*** |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4041395A (en) * | 1976-08-02 | 1977-08-09 | Integral Engineering & Manufacturing Corporation | Transmitter performance monitor and antenna matching system |
US5287555A (en) * | 1991-07-22 | 1994-02-15 | Motorola, Inc. | Power control circuitry for a TDMA radio frequency transmitter |
US5770922A (en) * | 1996-07-22 | 1998-06-23 | Eni Technologies, Inc. | Baseband V-I probe |
US6449568B1 (en) * | 1998-02-27 | 2002-09-10 | Eni Technology, Inc. | Voltage-current sensor with high matching directivity |
US6819096B2 (en) * | 2003-01-31 | 2004-11-16 | Advanced Energy Industries, Inc. | Power measurement mechanism for a transformer coupled plasma source |
US7078925B2 (en) * | 2003-03-11 | 2006-07-18 | Square D Company | Method and apparatus for detecting and correcting wiring errors in power monitoring applications |
JP4799947B2 (ja) * | 2005-02-25 | 2011-10-26 | 株式会社ダイヘン | 高周波電源装置および高周波電源の制御方法 |
CN102255606B (zh) * | 2011-07-25 | 2014-01-01 | 中国科学院微电子研究所 | 基于e类功率放大电路的固态射频电源 |
-
2011
- 2011-11-30 CN CN201110389185.6A patent/CN103137408B/zh active Active
-
2012
- 2012-09-27 US US14/361,613 patent/US9515567B2/en active Active
- 2012-09-27 WO PCT/CN2012/082209 patent/WO2013078909A1/zh active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5543689A (en) * | 1993-12-27 | 1996-08-06 | Fujitsu Limited | High frequency power source having corrected power output |
CN101529551A (zh) * | 2006-10-31 | 2009-09-09 | Mks仪器股份有限公司 | 防止射频等离子体处理中的不稳定性的方法和装置 |
CN101933225A (zh) * | 2008-02-01 | 2010-12-29 | Mks仪器股份有限公司 | 射频功率输送*** |
Also Published As
Publication number | Publication date |
---|---|
WO2013078909A1 (zh) | 2013-06-06 |
CN103137408A (zh) | 2013-06-05 |
US20140334209A1 (en) | 2014-11-13 |
US9515567B2 (en) | 2016-12-06 |
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TR01 | Transfer of patent right |
Effective date of registration: 20201223 Address after: 510000 601, building a, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Patentee after: AoXin integrated circuit technology (Guangdong) Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics of the Chinese Academy of Sciences |
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TR01 | Transfer of patent right | ||
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Effective date of registration: 20220424 Address after: 510000 room 710, Jianshe building, No. 348, Kaifa Avenue, Huangpu District, Guangzhou, Guangdong Patentee after: Ruili flat core Microelectronics (Guangzhou) Co.,Ltd. Address before: 510000 601, building a, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Patentee before: AoXin integrated circuit technology (Guangdong) Co.,Ltd. |
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TR01 | Transfer of patent right |