CN103124043A - Device for improving stability of deep ultraviolet laser - Google Patents
Device for improving stability of deep ultraviolet laser Download PDFInfo
- Publication number
- CN103124043A CN103124043A CN2011103678200A CN201110367820A CN103124043A CN 103124043 A CN103124043 A CN 103124043A CN 2011103678200 A CN2011103678200 A CN 2011103678200A CN 201110367820 A CN201110367820 A CN 201110367820A CN 103124043 A CN103124043 A CN 103124043A
- Authority
- CN
- China
- Prior art keywords
- deep ultraviolet
- crystal
- changer
- ultraviolet frequency
- shell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims abstract description 103
- 229910052751 metal Inorganic materials 0.000 claims abstract description 31
- 239000002184 metal Substances 0.000 claims abstract description 31
- 239000002826 coolant Substances 0.000 claims abstract description 27
- 238000001816 cooling Methods 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 21
- 229910052790 beryllium Inorganic materials 0.000 claims description 8
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000002253 acid Substances 0.000 claims description 6
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 4
- 239000004327 boric acid Substances 0.000 claims description 4
- 229910052792 caesium Inorganic materials 0.000 claims description 4
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 2
- DZZGYOYRKNDAEP-UHFFFAOYSA-N [Ca+2].[La+3].[O-]B([O-])[O-] Chemical compound [Ca+2].[La+3].[O-]B([O-])[O-] DZZGYOYRKNDAEP-UHFFFAOYSA-N 0.000 claims description 2
- WXSBMDFIEBSSBI-UHFFFAOYSA-N [O-]B([O-])[O-].O.[Al+3].[Ba+2] Chemical compound [O-]B([O-])[O-].O.[Al+3].[Ba+2] WXSBMDFIEBSSBI-UHFFFAOYSA-N 0.000 claims description 2
- RSKQIWJJZRAYHJ-UHFFFAOYSA-N [O-]B([O-])[O-].O.[Gd+3] Chemical compound [O-]B([O-])[O-].O.[Gd+3] RSKQIWJJZRAYHJ-UHFFFAOYSA-N 0.000 claims description 2
- HSBONFIDJMNFJD-UHFFFAOYSA-N aluminum potassium borate Chemical compound B([O-])([O-])[O-].[K+].[Al+3] HSBONFIDJMNFJD-UHFFFAOYSA-N 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 229910052788 barium Inorganic materials 0.000 claims description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 2
- QBLDFAIABQKINO-UHFFFAOYSA-N barium borate Chemical compound [Ba+2].[O-]B=O.[O-]B=O QBLDFAIABQKINO-UHFFFAOYSA-N 0.000 claims description 2
- YZYDPPZYDIRSJT-UHFFFAOYSA-K boron phosphate Chemical compound [B+3].[O-]P([O-])([O-])=O YZYDPPZYDIRSJT-UHFFFAOYSA-K 0.000 claims description 2
- 229910000149 boron phosphate Inorganic materials 0.000 claims description 2
- VCZFPTGOQQOZGI-UHFFFAOYSA-N lithium bis(oxoboranyloxy)borinate Chemical compound [Li+].[O-]B(OB=O)OB=O VCZFPTGOQQOZGI-UHFFFAOYSA-N 0.000 claims description 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 229910000402 monopotassium phosphate Inorganic materials 0.000 claims description 2
- 235000019796 monopotassium phosphate Nutrition 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- PYUBPZNJWXUSID-UHFFFAOYSA-N pentadecapotassium;pentaborate Chemical compound [K+].[K+].[K+].[K+].[K+].[K+].[K+].[K+].[K+].[K+].[K+].[K+].[K+].[K+].[K+].[O-]B([O-])[O-].[O-]B([O-])[O-].[O-]B([O-])[O-].[O-]B([O-])[O-].[O-]B([O-])[O-] PYUBPZNJWXUSID-UHFFFAOYSA-N 0.000 claims description 2
- PJNZPQUBCPKICU-UHFFFAOYSA-N phosphoric acid;potassium Chemical compound [K].OP(O)(O)=O PJNZPQUBCPKICU-UHFFFAOYSA-N 0.000 claims description 2
- 229910052700 potassium Inorganic materials 0.000 claims description 2
- 239000011591 potassium Substances 0.000 claims description 2
- 229910052701 rubidium Inorganic materials 0.000 claims description 2
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 229910052712 strontium Inorganic materials 0.000 claims description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 2
- PGZVYLZFSKEWSE-UHFFFAOYSA-N yttrium(3+) borate hydrate Chemical compound O.B([O-])([O-])[O-].[Y+3] PGZVYLZFSKEWSE-UHFFFAOYSA-N 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 abstract description 10
- 230000000694 effects Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000005350 fused silica glass Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 108090000623 proteins and genes Proteins 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000032696 parturition Effects 0.000 description 1
- 238000006552 photochemical reaction Methods 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
Images
Landscapes
- Lasers (AREA)
Abstract
The invention relates to a device for improving the output stability of a deep ultraviolet laser, which comprises a deep ultraviolet variable frequency crystal device, a metal device shell, a cooling medium and a temperature controller, wherein the deep ultraviolet variable frequency crystal device is arranged on the metal device shell; the deep ultraviolet frequency conversion crystal device is formed by clamping a deep ultraviolet frequency conversion crystal between two right-angle prisms and combining the deep ultraviolet frequency conversion crystal, the two right-angle prisms together through a metal device shell, the right-angle prisms are cut according to the matching angle of the deep ultraviolet frequency conversion crystal and the refractive indexes of materials of the deep ultraviolet frequency conversion crystal and the right-angle prisms, incident light is incident perpendicular to the right-angle end face of a right-angle prism, and the phase matching condition is met when the incident light is incident on the deep ultraviolet frequency conversion crystal; hollow flow channels are respectively arranged in the upper shell wall and the lower shell wall of the metal device shell, cooling media are filled in the hollow flow channels, the cooling media in the hollow flow channels are communicated with a temperature controller, and the temperature controller is used for controlling the working temperature of the deep ultraviolet variable frequency crystal to be kept unchanged; the device has simple structure, stable performance and more practicability.
Description
Technical field
The present invention relates to a kind of device of stable laser output, specially refer to the device that improves the following deep ultraviolet lasers output stability of wavelength 200nm.
Background technology
present ultraviolet laser, the following deep ultraviolet lasers of wavelength 200nm particularly, at physics, chemistry, material, information, life, resource, the ambits such as geology all have great using value, and will promote the multi-field new development of cross discipline, some great Scientific research equipments are badly in need of exploitation, as: the deep ultraviolet laser photoelectron spectrograph, the deep ultraviolet laser spectrometer, the deep ultraviolet laser microscope, deep ultraviolet laser photochemical reaction instrument, the deep ultraviolet laser interferometer, Ultra-Violet Laser (photoetching) is directly write machine, nano-photoetching (193nm) deep ultraviolet laser calibration system etc., also has in addition many-sided demand direction, as: the deep ultraviolet aerosol mass spectrometry, DNA, RNA, the protein molecule deep ultraviolet laser is controlled, biology sample detection and ultra microstructure processing are modified, the deep ultraviolet laser fluidic cell detects, the foreign gene that deep ultraviolet laser is induced is directed to be imported, deep ultraviolet laser in-situ micro area trace geological sample analysis etc.These are used and all to need deep ultraviolet lasers particularly the following deep ultraviolet lasers of wavelength 200nm is as research tool, but this class laser output stability is poor at present, is difficult to accomplish practical.
The deep ultraviolet lasers output power stability is poor, it is many to be difficult to practical influencing factor, as the stability of incident laser, and the stability of mechanical structure, deep ultraviolet frequency-changer crystal thermic phase mismatch etc.wherein deep ultraviolet frequency-changer crystal thermic phase mismatch is very large on the impact of power output, the unsteadiness that causes for deep ultraviolet frequency-changer crystal thermic phase mismatch, Chinese invention patent 200810104866.1 discloses a kind of " improving the device of stability of deep ultraviolet lasers ", its technical scheme is: a cover heat abstractor respectively is set on the metal shell two sides of deep ultraviolet frequency-changer crystal device (upper and lower surface), contact by the metal shell of heat-conducting medium with deep ultraviolet frequency-changer crystal device, be fixed together by screw or bonding agent, thereby deep ultraviolet frequency-changer crystal device is carried out cooling or temperature control.Heat abstractor is air-cooled, water-cooled or heat-pipe radiator, or the heat abstractor that is comprised of refrigerator and air-cooled, water-cooled or heat-pipe radiator, and refrigerator is electrically connected to temperature controller again.There is following weak point in this scheme:
1, complex structure, cumbersome in force: need to install several devices additional outside deep ultraviolet frequency-changer crystal device, and need to flow heat-conducting medium-gas or water, also need be electrically connected to during temperature control, and deep ultraviolet frequency-changer crystal device need to be worked under vacuum or inert gas environment usually, to eliminate air to the absorption of deep ultraviolet laser, therefore the deep ultraviolet frequency-changer crystal is normally worked in the vacuum plant that seals or sealing device, introduce flowing gas, water, electricity in this device, complicated structure;
2, cooling or the temperature control effect is undesirable: as in the metal shell outside, heat abstractor to be set, heat abstractor can dispel the heat or freeze, hot conducting energy is transferred on metal shell by the heat-conducting medium between heat abstractor and metal shell, be transferred on the deep ultraviolet frequency-changer crystal and right-angle prism of housings by metal shell again, so cooling or temperature control effect can be desirable;
Summary of the invention
The object of the invention is to the defective for the device existence of above-mentioned raising stability of deep ultraviolet lasers, and provide another kind to improve the device of stability of deep ultraviolet lasers, this device directly arranges hollow flow passage in shell wall up and down, installs coolant additional at deep ultraviolet frequency-changer crystal device metal shell, and use the temperature of thermostat or recirculated water, running water temperature control coolant, to realize the stability of the deep ultraviolet lasers output below output wavelength 200nm, this apparatus structure is simple, stable performance, has more practical.
Technical scheme of the present invention is as follows:
The device of raising deep ultraviolet lasers output stability provided by the invention comprises: deep ultraviolet frequency-changer crystal device, metal device shell, coolant and temperature controlling machine; Described deep ultraviolet frequency-changer crystal device is clipped in the centre of two right-angle prisms by a deep ultraviolet frequency-changer crystal, by the metal device shell composition that makes the three together, wherein right-angle prism is pressed the matching angle of deep ultraviolet frequency-changer crystal and the refractive index cutting of deep ultraviolet frequency-changer crystal and right-angle prism material, incident light satisfies phase-matching condition perpendicular to the right angle surface feeding sputtering of right-angle prism when inciding on the deep ultraviolet frequency-changer crystal; It is characterized in that, shell wall up and down inside at described metal device shell is respectively equipped with hollow flow passage, in described hollow flow passage, coolant is housed, coolant in described hollow flow passage is connected with described temperature controlling machine, and described temperature controlling machine remains unchanged for the working temperature of controlling described deep ultraviolet frequency-changer crystal.
Described temperature controlling machine is circulation or running water pipe, is used for taking away heat, and cooling deep ultraviolet frequency-changer crystal is so that the working temperature of described deep ultraviolet frequency-changer crystal remains unchanged.
Described right-angle prism is quartzy material prism, calcirm-fluoride material prism or magnesium fluoride material prism.
Described deep ultraviolet frequency-changer crystal is fluoboric acid beryllium potassium crystal, fluoboric acid beryllium rubidium crystal, fluoboric acid beryllium caesium crystal, Lanthanum Calcium Borate Crystal, boron phosphate crystal, strontium boroberyllate crystal, caesium-lithium borate crystal, potassium aluminum borate crystal, boric acid caesium crystal, lithium triborate crystal, boric acid beryllium oxygen crystal of barium, three line borate oxygen yttrium crystal, line borate oxygen Gadolinium crystal, potassium pentaborate crystal, β phase barium metaborate crystal, potassium dihydrogen phosphate crystal or aluminium-oxygen-barium borate crystal.
Described metal device shell is aluminium shell, copper shell or stainless steel casing.
Described coolant is water.
The device of raising deep ultraviolet lasers output stability of the present invention is to adopt coolant to carry out cooling or temperature control to deep ultraviolet frequency-changer crystal metal shell, make its temperature stabilization at a certain numerical value, and then reach and weaken or eliminate the phase mismatch that the deep ultraviolet frequency-changer crystal causes because giving birth to thermal conductance, and guarantee the stability of laser output; Its advantage is: because the heat that the deep ultraviolet frequency-changer crystal produces in conversion process can not in time be taken away, cause the accumulation of heat in crystal, crystal temperature effect raises, and refractive index changes, thereby causes phase mismatch, and power output is reduced; The device of raising deep ultraviolet lasers output stability of the present invention directly carries out cooling or temperature control to the deep ultraviolet frequency-changer crystal, the coolant direct effect is to the shell of deep ultraviolet frequency-changer crystal device, coolant keeps steady temperature, thereby make deep ultraviolet frequency-changer crystal temperature constant, to keep its phase matched, effectively solve the thermal instability problem of deep ultraviolet frequency conversion laser device; This device makes deep ultraviolet frequency conversion laser device more practical.Compare with existing solution, have simple in structure, implement characteristics easily, and because coolant acts directly on deep ultraviolet frequency-changer crystal device outer case, its cooling or temperature control better effects if.
Description of drawings
Accompanying drawing 1 is the structural representation of the device (embodiment 1) of raising deep ultraviolet lasers output stability of the present invention.
Accompanying drawing 2 is the structural representation of embodiment 2 of the device of raising deep ultraviolet lasers output stability of the present invention.
Embodiment
Further describe the present invention below in conjunction with drawings and Examples.
As shown in Figure 1, the device of raising deep ultraviolet lasers output stability provided by the invention comprises deep ultraviolet frequency-changer crystal device, metal device shell 4, coolant 7 and temperature controlling machine 8; Described deep ultraviolet frequency-changer crystal device is comprised of the centre that a deep ultraviolet frequency-changer crystal 1 is clipped in the first right-angle prism 2 and the second right-angle prism 3, make the three together by metal device shell 4, wherein the first right-angle prism 2 and the second right-angle prism 3 are by the matching angle of deep ultraviolet frequency-changer crystal and the refractive index cutting of deep ultraviolet frequency-changer crystal and right-angle prism material, incident light satisfies phase-matching condition perpendicular to the right angle surface feeding sputtering of the first right-angle prism when inciding on the deep ultraviolet frequency-changer crystal; Be characterised in that, shell wall up and down inside at described metal device shell is respectively equipped with hollow flow passage, coolant 7 is housed in described hollow flow passage, coolant in described hollow flow passage is connected with temperature controlling machine 8, and temperature controlling machine is controlled and is used for the working temperature of described deep ultraviolet frequency-changer crystal is remained unchanged.
In Fig. 2, its structure and Fig. 1 difference are: temperature controlling machine 8 is changed to cooling water system or running water pipe 9, is used for taking away heat, and cooling deep ultraviolet frequency-changer crystal is controlled for the working temperature of described deep ultraviolet frequency-changer crystal is remained unchanged.
Embodiment 1: what the present embodiment was made is the device that a cover improves 193nm deep ultraviolet lasers output stability.With reference to figure 1, deep ultraviolet frequency-changer crystal 1 is RBBF, and the first prism 2 and the second prism 3 are the right angle fused quartz prism, and this three consists of RBBF deep ultraviolet frequency-changer crystal device; The wavelength of incident light 5 is 386nm, and deep ultraviolet laser 6 wavelength of generation are 193nm; The drift angle of the first prism 2 is according to the first prism 2 material fused quartz refractive indexes, deep ultraviolet frequency-changer crystal 1RBBF refractive index and deep ultraviolet frequency-changer crystal 1RBBF, the phase matching angle of incident light 5 to be designed and produced, make incident light 5 perpendicular to the right angle surface feeding sputtering of the first prism 2, incide in deep ultraviolet frequency-changer crystal 1RBBF and reach phase matching angle, thereby realize phase matched, frequency conversion produces deep ultraviolet laser 6; RBBF deep ultraviolet frequency-changer crystal device has metal device shell 4 outward, metal device shell 4 is made by metallic aluminium, the shell wall up and down inside of metal device shell 4 is respectively equipped with hollow flow passage, be full of coolant 7 water in hollow flow passage, the temperature controlling machine 8 that can buy on coolant 7 and market is connected, and controls the temperature of coolant 7 water by temperature controlling machine 8.Absorbed when RBBF deep ultraviolet frequency-changer crystal produce heat after the incident light of part 386nm, temperature raises, the heat that produces is transmitted on metal device shell 4, coolant 7 is taken away heat immediately, the controlled refrigeration of temperature controlling machine is the temperature of medium 7 but, make it to keep steady temperature, thereby keep the temperature constant of deep ultraviolet frequency-changer crystal 1RBBF constant, realize that phase matched remains unchanged, thereby improve the stability of 193nm deep ultraviolet laser output.
Embodiment 2: according to Fig. 1, make the device of a cover raising stability of deep ultraviolet lasers of the present invention.
What the present embodiment was made is the device that a cover improves 170～190nm deep ultraviolet lasers output stability.With reference to figure 1, deep ultraviolet frequency-changer crystal 1 is KBBF, and the first prism 2 is the right angle fused quartz prism, and the second prism 3 is right angle calcirm-fluoride prism, and this three consists of KBBF deep ultraviolet frequency-changer crystal device.The wavelength of incident light 5 is the Tunable Ultraviolet of 340～380nm, and the wavelength of the deep ultraviolet laser 6 of generation is 170～190nm.KBBF deep ultraviolet frequency-changer crystal device has metal device shell 4 outward, metal device shell 4 is made by metallic copper, the shell wall up and down inside of metal device shell 4 is respectively equipped with hollow flow passage, be full of coolant 7 water in hollow flow passage, the common circulation 9 in coolant 7 and running water pipe or laboratory is connected, and when coolant 7 was connected with running water pipe, water inlet connected running water pipe, delivery port connects sewer, controls the temperature of coolant 7 (water) by recirculated water or running water.Absorbed when KBBF deep ultraviolet frequency-changer crystal produce heat after the incident light of part 340～380nm, temperature raises, the heat that produces is transmitted on metal device shell 4, coolant 7 is taken away heat immediately, finally take away heat by recirculated water or running water, realization is cooling to deep ultraviolet frequency-changer crystal device, thereby can keep its phase matched, improve the stability of 170～190nm deep ultraviolet tuning laser of output.
Claims (6)
1. a device that improves the deep ultraviolet lasers output stability, comprising: deep ultraviolet frequency-changer crystal device, metal device shell, coolant and temperature controlling machine; Described deep ultraviolet frequency-changer crystal device is clipped in the centre of two right-angle prisms by a deep ultraviolet frequency-changer crystal, by the metal device shell composition that makes the three together, wherein right-angle prism is pressed the matching angle of deep ultraviolet frequency-changer crystal and the refractive index cutting of deep ultraviolet frequency-changer crystal and right-angle prism material, incident light satisfies phase-matching condition perpendicular to the right angle surface feeding sputtering of right-angle prism when inciding on the deep ultraviolet frequency-changer crystal; It is characterized in that, shell wall up and down inside at described metal device shell is respectively equipped with hollow flow passage, in described hollow flow passage, coolant is housed, coolant in described hollow flow passage is connected with described temperature controlling machine, and described temperature controlling machine remains unchanged for the working temperature of controlling described deep ultraviolet frequency-changer crystal.
2. press the device of raising deep ultraviolet lasers output stability claimed in claim 1, it is characterized in that, described temperature controlling machine is circulation or running water pipe, is used for taking away heat, cooling deep ultraviolet frequency-changer crystal is so that the working temperature of described deep ultraviolet frequency-changer crystal remains unchanged.
3. by the device of raising deep ultraviolet lasers output stability claimed in claim 1, it is characterized in that, described right-angle prism is quartzy material prism, calcirm-fluoride material prism or magnesium fluoride material prism.
4. press the device of raising deep ultraviolet lasers output stability claimed in claim 1, it is characterized in that, described deep ultraviolet frequency-changer crystal is fluoboric acid beryllium potassium crystal, fluoboric acid beryllium rubidium crystal, fluoboric acid beryllium caesium crystal, Lanthanum Calcium Borate Crystal, boron phosphate crystal, strontium boroberyllate crystal, caesium-lithium borate crystal, potassium aluminum borate crystal, boric acid caesium crystal, lithium triborate crystal, boric acid beryllium oxygen crystal of barium, three line borate oxygen yttrium crystal, line borate oxygen Gadolinium crystal, potassium pentaborate crystal, β phase barium metaborate crystal, potassium dihydrogen phosphate crystal or aluminium-oxygen-barium borate crystal.
5. by the device of raising deep ultraviolet lasers output stability claimed in claim 1, it is characterized in that, described metal device shell is aluminium shell, copper shell or stainless steel casing.
6. by the device of raising deep ultraviolet lasers output stability claimed in claim 1, it is characterized in that, described coolant is water.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103678200A CN103124043A (en) | 2011-11-18 | 2011-11-18 | Device for improving stability of deep ultraviolet laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103678200A CN103124043A (en) | 2011-11-18 | 2011-11-18 | Device for improving stability of deep ultraviolet laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103124043A true CN103124043A (en) | 2013-05-29 |
Family
ID=48454952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011103678200A Pending CN103124043A (en) | 2011-11-18 | 2011-11-18 | Device for improving stability of deep ultraviolet laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103124043A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105071216A (en) * | 2015-09-10 | 2015-11-18 | 中国科学院理化技术研究所 | Frequency doubling crystal coupler for improving output efficiency of short-wave deep ultraviolet laser |
| CN105161966A (en) * | 2015-10-12 | 2015-12-16 | 哈尔滨工业大学 | Large-aperture crystal frequency-doubling conversion device realizing crystal temperature regulation and control under forced convection |
| CN105226497A (en) * | 2015-10-12 | 2016-01-06 | 哈尔滨工业大学 | A kind of heavy caliber crystal double frequency conversion equipment of controllable crystal temperature effect |
| CN105244750A (en) * | 2015-10-12 | 2016-01-13 | 哈尔滨工业大学 | Frequency multiplication conversion apparatus for realizing temperature regulation of large-caliber crystals in vacuum environment |
| CN105244751A (en) * | 2015-10-12 | 2016-01-13 | 哈尔滨工业大学 | Frequency multiplication conversion apparatus for realizing temperature regulation of large-caliber crystals with double temperature control modes |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1794521A (en) * | 2005-12-22 | 2006-06-28 | 天津大学 | Phase miss match compensation heater of high power internal cavity freguency multiplier laser and its method |
| CN201071404Y (en) * | 2007-06-21 | 2008-06-11 | 天津市浩波激光电子技术开发有限公司 | High-temperature constant-temperature heating mechanism for nonlinear optical crystal of laser |
| CN101567515A (en) * | 2008-04-24 | 2009-10-28 | 中国科学院理化技术研究所 | Device for improving stability of deep ultraviolet laser |
-
2011
- 2011-11-18 CN CN2011103678200A patent/CN103124043A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1794521A (en) * | 2005-12-22 | 2006-06-28 | 天津大学 | Phase miss match compensation heater of high power internal cavity freguency multiplier laser and its method |
| CN201071404Y (en) * | 2007-06-21 | 2008-06-11 | 天津市浩波激光电子技术开发有限公司 | High-temperature constant-temperature heating mechanism for nonlinear optical crystal of laser |
| CN101567515A (en) * | 2008-04-24 | 2009-10-28 | 中国科学院理化技术研究所 | Device for improving stability of deep ultraviolet laser |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105071216A (en) * | 2015-09-10 | 2015-11-18 | 中国科学院理化技术研究所 | Frequency doubling crystal coupler for improving output efficiency of short-wave deep ultraviolet laser |
| CN105071216B (en) * | 2015-09-10 | 2018-04-06 | 中国科学院理化技术研究所 | Frequency doubling crystal coupler for improving output efficiency of short-wave deep ultraviolet laser |
| CN105161966A (en) * | 2015-10-12 | 2015-12-16 | 哈尔滨工业大学 | Large-aperture crystal frequency-doubling conversion device realizing crystal temperature regulation and control under forced convection |
| CN105226497A (en) * | 2015-10-12 | 2016-01-06 | 哈尔滨工业大学 | A kind of heavy caliber crystal double frequency conversion equipment of controllable crystal temperature effect |
| CN105244750A (en) * | 2015-10-12 | 2016-01-13 | 哈尔滨工业大学 | Frequency multiplication conversion apparatus for realizing temperature regulation of large-caliber crystals in vacuum environment |
| CN105244751A (en) * | 2015-10-12 | 2016-01-13 | 哈尔滨工业大学 | Frequency multiplication conversion apparatus for realizing temperature regulation of large-caliber crystals with double temperature control modes |
| CN105244751B (en) * | 2015-10-12 | 2018-09-07 | 哈尔滨工业大学 | Realize double temperature control mode heavy caliber crystal double frequency conversion equipments of crystal temperature effect regulation and control |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101567515B (en) | Device for improving stability of deep ultraviolet laser | |
| CN103124043A (en) | Device for improving stability of deep ultraviolet laser | |
| Rettner et al. | Pulsed free jets: novel nonlinear media for generation of vacuum ultraviolet and extreme ultraviolet radiation | |
| Hulkko et al. | Effect of molecular Stokes shift on polariton dynamics | |
| Lim et al. | Numerical analysis of flow distribution behavior in a proton exchange membrane fuel cell | |
| CN103760138A (en) | Portable DBD (dielectric barrier discharge) plasma spectrometer | |
| JP2019503592A (en) | Planar waveguide with enhanced support and / or cooling mechanism for high power laser systems | |
| CN104772305B (en) | Direct current cascade arcs plasma torch cleans the device of the mirror of tokamak first | |
| Mahamud et al. | Theory and practices of Li-ion battery thermal management for electric and hybrid electric vehicles | |
| Zuo et al. | Effects of flow direction in mini U-channel cold plates on thermal performance of a prismatic LiMn2O4 battery | |
| CN109411997A (en) | The cooling stacked repetition rate disk amplifier of xenon flash lamp pumping liquid | |
| Li et al. | Entropy generation analysis in supercapacitor modules based on a three-dimensional coupled thermal model | |
| CN107328846B (en) | Mass spectrum sampling system and cooling device | |
| CN110658250A (en) | Cold and hot corrosion pool device capable of accurately controlling temperature for LA-ICP-MS | |
| Malacarne et al. | Analytical solution for mode-mismatched thermal lens spectroscopy with sample-fluid heat coupling | |
| Du et al. | Impurity effects on short wavelength ion temperature gradient mode in elongated tokamak plasmas | |
| CN208621557U (en) | Capillary electrophoresis | |
| CN211426367U (en) | Cold and hot corrosion pool device capable of accurately controlling temperature for LA-ICP-MS | |
| Venzie et al. | Micro-scale analytical plasmas for liquid chromatography detection | |
| Ping et al. | Design and Construction of the Plugged-in 22 Na Based Slow Positron Beam Facility | |
| CN207067509U (en) | Cooling device for the reflecting optics of laser transmission | |
| Wu et al. | Research to improve the efficiency of double stereo PCR microfluidic chip by passivating the Inner Surface of Steel Capillary with NOA61 | |
| Schultz et al. | Low-stress, coolable sample mount for ultrahigh vacuum studies of fragile semiconductors | |
| Shetty et al. | Computational flow analysis of different streamline cooling plates for thermal management of lithium-ion battery | |
| Shadloo et al. | High-performance computing and machine learning applied in thermal systems analysis. |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130529 |