CN103109210A - High gain coatings and methods - Google Patents

Abstract

A halogen incandescent burner comprising a quartz body comprising a light emitting chamber, a filament positioned within the light emitting chamber, and a multilayer optical coating on at least a portion of the chamber. The coating may include a plurality of layers of a low refractive index material and a high refractive index material having a total thickness of at least nine microns, wherein the gain of the burner is at least 1.7. The high refractive index material may comprise tantala and the low refractive index material may comprise silica.

Description

High-gain coating and method

Related application

The application is the U.S. Provisional Patent Application that is entitled as " High Gain Coating and Method " submitted on July 20th, 2010 number 61/366,110 non-provisional application, and common unsettled and require its benefit of priority with it, it is incorporated herein by this reference in full.

Background technology

The embodiment of this theme is usually directed to for multiple use, such as but not limited to the multi-layered reflecting coating of incandescent (HIR) lamp of halogen etc.

The Film Optics coating of the alternating layer that comprises the different material of two or more refractive indexes that is to provide known in the art is with coating reverberator and lamp housing.This type coating or film can be used for selective reflecting or transmission from optical radiation or the energy of the different piece of electromagnetic radiation spectrum, as ultraviolet, visible and infrared (IR) radiation.Term radiation and energy here can Alternates, and this use should not limit the scope of claims.

But a problem relevant with the HIR lamp to incandescent lamp is their relatively low luminous efficacies, and about 10 of the light that tungsten filament sends is launched in visible light to 15%.Dump energy can be launched in the IR energy spectrum, and the form dissipation with heat dissipates by air-loss, end loss and wire loss.Industrial, usually on incandescent lamp deposition IR reflectance coating in order to the IR energy of filament or electric arc emission is reflected back filament, and the visible light part of the electromagnetic spectrum that the transmission filament is launched.Amount of the electric energy that provides for maintenance filament working temperature has been provided for this, and has improved the effect separately of lamp.Therefore, the IR energy that is reflected back filament is more, can be higher by the lumen every watt (LpW) that lamp obtains.Usually, the IR coating typically is made of the stacking of dielectric substance.These materials can comprise high index and low refractive index layer alternately, and can use the multiple technologies deposition, such as but not limited to reactive sputtering, physical vaporous deposition (PVD), Low Pressure Chemical Vapor Deposition (LPCVD), plasma enhanced chemical vapor deposition method (PECVD) and means of electron beam deposition.This type coating can be deposited on all types of incandescent lamps, includes but not limited to single-ended and both-end quartz halogen lamp holder.This type coating can be used for reflecting the shorter wavelength part of the electromagnetic spectrum of filament or electric arc emission, and as ultraviolet and/or visible light part, and the other parts that also can be used for main this spectrum of transmission are to provide the heat radiation that has hardly or do not have visible radiation.

The conventional method of assessment lamp is the output of measuring take lumen (L) as the lamp of unit.Lumen can record by measuring by the power of lamp radiation and weighing this power according to the spectrum sensitivity of eyes.For example, do not have coating, do not have halogen lamp head (burner) and have the about 900L of 60 watts of A-line incandescent lamps of typical case emission of tungsten filament, the effect of every watt of 15 lumen (LpW) is provided.The similarly about 1600L of the A-line lamp of 100W emission, or 16LpW.But the lamp with conventional IR coating and halogen lamp head can use the lumen of less power emission equal number, and higher efficient is provided thus.This type of lamp especially can be used for the purposes such as but not limited to the miscellaneous equipment of torch lamp (torchiere lamp) and the high lumen output of needs.

The Rolf Bergman of General Electric has developed a kind of model to predict that the design of various coatings and lamp is in the effect that turns back to aspect the energy of filament.Be appreciated that the Bergman model, can consider several features of IR reflectance coating.(reflected) of term reflective (reflective), reflection and/or (reflecting) of normal reflection are used interchangeably in this article, and this use should not limit the scope of claims.For example, the mixed type incandescent lamp uses light filter usually in order to the IR energy of launching is reflected back filament or electric arc on the outside of Halogen lamp LED.The IR energy of reflection can be absorbed by filament, and this has reduced the amount that keeps the required electric energy of filament working temperature, the effect of the lamp that improves thus.The lifting of the effect aspect that can obtain by this method is subjected to the restriction of some Consideration, comprise the light filter that has hardly the IR energy of reflection 100%, light filter on lamp housing and the optically-coupled of filament may be imperfect, and filament may not can absorb the IR energy that all are reflected back this filament.

Consider these factors, the Bergman model investigation be positioned at one heart near cylindrical filament the cylindrical shape IR reverberator with reflectivity R (1).Hyperchannel ray tracing model can be used for measuring the amount of the emitted radiation of being reuptaked by filament, and following relationship is provided thus:

$F_{\mathrm{abs}}\left(\mathrm{\λ}\right)={\∫}_{\mathrm{\λ}}\frac{a_{\mathrm{\λ}}\left(\mathrm{\λ}\right)\mathrm{GR}\left(\mathrm{\λ}\right)}{1-(1-a_{\mathrm{\λ}}\left(\mathrm{\λ}\right))\mathrm{GR}\left(\mathrm{\λ}\right)}\mathrm{d\λ}---\left(1\right)$

Wherein G is the geometric factor of optically-coupled between the IR energy of representative reflection and filament, and R represents the reflectivity of IR film or coating, and a (λ) representative is as the filament absorptance of the function of wavelength.The Bergman model can be expanded the effect of explaining that filament is placed in the middle subsequently.For example, when the filament radial deflection of lamp, some reflected radiation can be missed filament, is needing repeatedly to rebound thus before absorbing again.Therefore, radial deflection is due to filament dislocation or all can reduces the amount of the IR energy that filament absorbs due to filament sag, causes thus effect to reduce.Consider the filament skew, equation (1) can be write:

$F_{\mathrm{abs}}\left(\mathrm{\λ}\right)={\∫}_{\mathrm{\λ}}\frac{a_{\mathrm{\λ}}\left(\mathrm{\λ}\right)\mathrm{GR}\left(\mathrm{\λ}\right)S}{1-(1-a_{\mathrm{\λ}}\left(\mathrm{\λ}\right))\mathrm{GR}\left(\mathrm{\λ}\right)S}\mathrm{d\λ}---\left(2\right)$

Wherein S represents the filament skew.Scattering in film can improve this factor effectively by making reflected light miss this filament, has thus with filament and departs from the identical actual effect in center.Therefore can consider by regulating the S factor effect of scattering or scattering.

Manyly attempt by mechanical hook-up or by using various materials to improve equipment and the methods of the effect of lamps industrial the existence.For example, U.S. Patent number 6,281,620,5,675,218,4,728,848 and 6,659,829 and U.S. Patent Application Publication No. 20060163990 provide the whole bag of tricks with the calibration filament with the absorption again of the IR energy that improves reflection or supplying method with this lamp that formalizes, make the IR energy of reflection more concentrated.At U.S. Patent number 4,017, provide additional IR filter design in 758,4,160,929,4,229,066 and 6,239,550.Material is niobium oxide (Nb for example ₂O ₅), titania (TiO ₂) and zirconia (ZrO ₂) be typically used as the high index material in IR reflection interference light filter.U.S. Patent number 4,701,663 have used materials.Tantalum oxide (Ta ₂O ₅) be also known high index material.U.S. Patent number 4,588,923,4,689,519,6,239,550,6,336,837 and 6,992,446 provide the lamp with IR light filter of being made by tantalum oxide and monox.

But, verifiedly in fact be difficult to make optics IR reflection interference film.For example, for making reflectivity higher than the IR film of the IR light filter of this area standing state, this film must be thicker; But, when the thickness of film increases, especially under the higher working temperature of Halogen lamp LED lamp housing (for example 800 ℃), this film can be damaged because of peeling off of mechanical stress and/or cracking or substrate separately.U.S. Patent number 4,701,663 disclose the deposition light filter of being made by titania and monox, and confirm to produce serious membrane stress at the temperature of about 600 ℃, cause film to be peeled off from substrate.U.S. Patent number 4,734,614 also admit, are producing serious stress at higher temperature in tantalum oxide and monox light filter, and suggestion replaces niobium oxide improving membrane stress, but and unresolved mechanical stress problem.U.S. Patent number 4,524,410 and 5,425,532 also are devoted to the mechanical membrane stress problem in multilayer IR film.Another defective relevant to thicker film is that this stress is enough to destroy Halogen lamp LED lamp housing separately.As a result, use the conventional IR light filter of these materials to have limited thickness, mean that the IR reflectivity is lower than the best.The thickness of this type of conventional film is typically about 1.5 microns to about 4 microns.U.S. Patent number 4,558,923,4,949,005 and 6,336,837 provide this type of conventional film.

Another problem relevant to these conventional films is scattering.For example, more by the scattering that film causes, this film is lower with the efficient that the IR energy is reflected back this filament or electric arc, because a large amount of reflected light misses this filament fully.At last, due to larger film thickness, be equal to or greater than the amount of the additional IR that is reflected back filament through the amount of the IR of scattering loss energy.The film of deposition at high temperature as adopting those that the CVD method makes, easily has lower dispersion effect, but has higher stress.The film that makes by sputtering method provides the film that has lower stress but have higher dispersion effect usually.Thus, need in the art to make thicker IR reverberator, it can not suffer unacceptable heavily stressed or unacceptable high scattering.Also need in the art thickness to be suitable for the thin film interference filters that high-caliber IR energy is reflected back filament and low-level stress and scattering still are provided.

Summary of the invention

The embodiment of this theme is usually directed to have the Film Optics interference light filter of the alternating layer of tantalum oxide and monox.The exemplary application of these light filters can be the IR energy to be reflected back the coating of incandescent lamp bulb filament or electric arc.Exemplary coatings can and provide higher gain than the conventional coating more IR energy of reflection aspect lamp efficient.In fact, for at least two reasons, conventional coating or film can not be provided at the raising of the gain that shows in the embodiment of this theme: conventional film is thicker, scattering larger (even can improve reflectivity), therefore gain reduces, and conventional film is thicker, and stress is higher, has increased thus in separately device or the mechanical defect in equipment.

The exemplary of this theme can adopt sputtering method to have tantalum oxide and silicon oxide film or the coating of low stress and low refraction with manufacturing, makes this film or coating can make the double thickness of the conventional state of prior art coating.Utilization is suitable for high-temperature use according to the light filter of this type coating of the embodiment of this theme, as first-class in standard illuminants material, quartz halogen lamp etc.The embodiment of this theme can not run into cracking yet, peel off or high scattering effect.In process of the test, the exemplary sputtering method expection that can make than the low stress film allows to make than the slightly thick film of normal IR reflecting filter, but the film scattering estimates it is the limiting factor that suppresses the large gain in thickness aspect.For the film of the layer that replaces with zirconia and monox or titania and monox, like this is exactly, make any design all unavailable in the thickness caudacoria scattering that reaches about 6 microns thus.But the inteferometer coating with layer that replaces of carbonoxide and monox provides unexpected low scattering effect under greater than the thickness of 4 microns.The scattering and the stress that are shown by the film according to the use tantalum oxide of the embodiment of this theme and silicon oxide film are so low, to such an extent as to can realize the film thickness of the highest 15 microns.Thus, no matter well known to a person skilled in the art how general knowledge is predicted, these exemplary thick films can not ftracture, peel off or destroy the Halogen lamp LED lamp housing.In addition, the optical characteristics that is shown by the film according to the embodiment of this theme is high unexpectedly, and further, has reflected the amount of unexpected high IR energy.As a result, use shows the unexpected high raising of gain (the IR radiant quantity of filament is returned in its measurement) according to the Halogen lamp LED of the film of the embodiment of this theme.This can realize by the following method: measurement makes this filament reach the required power of given resistance when lamp separately is uncoated, repeats this measurement when this lamp of coating, and gets the ratio of twice measurement.

More specifically, gain (P ₂/ P ₁) can be expressed as the power (P that records when this lamp of coating ₂) and make this filament reach the power (P that records of the required uncoated lamp holder of given resistance ₁) between ratio.The effect (recording with every watt of lumen) higher than prediction that lamp with this type of exemplary film also shows for separately film design improves.

Therefore, a kind of embodiment of this theme provides a kind of halogen incandescent lamp head that comprises quartzy body, and this quartz body comprises illuminated chamber, is arranged in filament and the multilayer optical coating at least a portion of this chamber of this illuminated chamber.This coating can comprise gross thickness and be a plurality of low refractive index material of at least 9 microns and the layer of high refractive index material, and wherein the gain of this lamp holder is at least 1.7.

Another embodiment of this theme provides a kind of halogen incandescent lamp head that has the IR reflectance coating on its at least a portion, and this coating comprises the layer that replaces of tantalum oxide and monox and has greater than the gross thickness of 9 microns and at least 1.7 gain.

An embodiment again of this theme can provide a kind of halogen incandescent lamp head that has the IR reflectance coating on its at least a portion, and this coating comprises the layer that replaces of tantalum oxide and monox and has greater than the gross thickness of 9 microns and be at least 97 the average reflectance in 800 nanometer to 1500 nanometer wavelength range.

The additional embodiment of this theme provides a kind of halogen incandescent lamp head that has the IR reflectance coating on its at least a portion, this coating comprise the layer that replaces of tantalum oxide and monox and have greater than the gross thickness of 9 microns and in the work of at least 500 hours the luminescence efficiency of every watt of at least 30 lumen.

A kind of embodiment of this theme provides the method for every watt of the lumen that improves the halogen incandescent lamp head.The multilayer IR reflectance coating sputter that it is the alternating layer with tantalum oxide and monox of at least 9 microns that the method can comprise with gross thickness is coated with at least a portion of this lamp holder.

The additional embodiment of this theme provides a kind of method, comprise the following steps: the lamp holder with quartzy body is provided, described quartzy body consists of the illuminated chamber that holds the incandescent lamp filament, and sputter at least a portion of being coated with this illuminated chamber has the multilayer IR reflectance coating of the gross thickness of the layer of a plurality of tantalum oxide and monox and at least 9 microns with formation.Can be at least 1.7 by the gain that is coated with this lamp holder realization.

Describe in detail by poring over claims, accompanying drawing and following embodiment, the technical staff that the invention relates to the field will be easier to understand these embodiments and many other purposes and advantage.

Summary of drawings

Fig. 1 is that the spectrum property of the embodiment of this theme in the spectral range of 250 nanometer to 3500 nanometers is to the figure demonstration of wavelength.

Fig. 2 is that the spectrum property of the embodiment of this theme in the spectral range of 750 nanometer to 3000 nanometers is to the figure demonstration of wavelength.

Fig. 3 is that comparison is without the figure demonstration of the embodiment of coating (bare) bulb, three material coatings of four microns, six micron three material coating and this theme.

Fig. 4 is the planimetric map of a kind of embodiment of this theme.

Fig. 5 is the skeleton view of exemplary magnetic control sputtering system.

Fig. 6 is the skeleton view with sputtering system of the instrument that allows an above rotational freedom.

Accompanying drawing describes in detail

The various embodiments of high-gain coating and method are described in this article with reference to accompanying drawing (wherein similar elements has identical figure notation so that understand this theme).

The embodiment of this theme is usually directed to deposition materials in the substrate of film coating, and can be used for making wherein the lamp that forms coating at least a portion surface of lamp holder.Although this theme is usually directed to make lamp, with reference to Halogen lamp LED description declaratives hereinafter, claims should be not restricted.

Conventional Halogen lamp LED is made with the coating at least a portion that is deposited on halogen lamp head separately usually.This type of lamp makes by following consecutive steps usually: (i) form lamp shell by the light transmissive material section that is generally tubulose, (ii) with respect to lamp shell, electrical lead and/or electrode are set, (iii) with this lamp shell level Hermetic Package illuminated chamber with seal lamps to the electrical lead, and (iv) form coating at least a portion surface of lamp holder.Exemplary light transmissive material can comprise the material such as but not limited to glass, quartz glass, stupalith etc.

Fig. 1 is that the spectrum property of the embodiment of this theme in the spectral range of 250 nanometer to 3500 nanometers is to the figure demonstration of wavelength.Fig. 2 is that the spectrum property of the embodiment of this theme in the spectral range of 750 nanometer to 3000 nanometers is to the figure demonstration of wavelength.With reference to Fig. 1-2, three material 2.2 micron coatings 10 show 89.3 average reflectance (R) in the 800-1500 nanometer range.This can with 47 layers of Nb of 4 microns ₂O ₅/ SiO ₂The IRR design is compared.4.1 microns designs 20 of 67 layer of three material show 95.4 average R.This is commonly referred to routine or " standard " design thickness.Three material 6.1 micron coatings 30 show 95.6 average R, have usually proved the problem that runs in the thicker IR reflective design of industrial employing.That is to say, coating 30 is thicker 50% than four microns of standard designs, but shows almost aspect the amount of the IR energy that is reflected back filament and improve.As previously discussed, this is the whole deteriorated of the optics of the loss that causes due to the scattering that improves and film and mechanical properties.From three kinds of aforementioned coatings 10,20,30 different, show significantly improving of aspect of performance according to two materials 11 micron membranes 40 of the embodiment of this theme, have 97.9 average R in the 800-1500 nanometer range, although thickness is the twice of standard film.

Fig. 3 is that comparison is without the figure demonstration of the embodiment of coating bulb, four micron three material coating, six micron three material coating and this theme.With reference to Fig. 3, by relatively having proved the impact of scattering on the actual gain of lamp without coating bulb 50 and the bulb with three material four micron coatings 20, the embodiment 40 that has the bulb 30 of three material six micron coatings and have this theme of two material 11 micron coatings or film.As showing, four micron coatings 20 have obtained to have the film of certain scattering, can be to improve the gain of lamp but be small enough to.Six micron coatings 30 provide significantly improving of scattering aspect, prove the effect why coating thickness increase by 50% can not improve lamp, because any may the gain aspect efficient that the reflectivity that improves brings offset by the higher scattering that is caused thus a large amount of reflected light to miss filament fully.Different therewith, 11 micron coatings 40 provide higher reflectivity because of the thickness of its raising, and have the film scattering that can compare with four micron coatings 20, have obtained thus the large gain of lamp efficient.11 micron coatings 40 can provide the scattering that is slightly more than four micron coatings 20, but the thing followed 11 raisings of micron coating 40 aspect reflectivity have exceeded the loss of the little raising of offsetting the self-scattering aspect.Therefore, have according to 60 watts of lamps of 11 micron coatings of the embodiment of this theme and can launch for example 2560L, and have the effect of about 43LpW.By contrast, conventional Philips Halogena 40W=60W and 70W=100W bulb provide respectively the efficient of 20LpW and 23LpW.Following table 1 provides the list of gain of the exemplary of this theme.

Table 1

It should be noted, the value that provides in upper table 1 and embodiment are only exemplary and should not limit the scope of claims, be worth accordingly for example gain, lumen, LpW etc. because can show with the layer of the tantalum oxide with any amount, monox or other material and various exemplary coatings with different-thickness according to the multilayer IR reflectance coating of the embodiment of this theme.

Fig. 4 is the planimetric map of another embodiment of this theme.With reference to Fig. 4, a kind of embodiment of this theme can comprise halogen incandescent lamp head 400, and described lamp holder 400 has the quartzy body 410 that comprises illuminated chamber 412 and be arranged on the filament 414 in this illuminated chamber 412.This lamp holder 400 can be described both-end lamp holder, can be maybe single-ended lamp holder.These lamp holders can be any common wattages, such as but not limited to 50W, 60W etc.

Multilayer optical coating 416 can deposit or sputter at least a portion of this chamber 412, and wherein this coating 416 comprises the layer of a plurality of low refractive index material and high refractive index material, has the gross thickness of at least 9 microns.The gain of this lamp holder 400 can be at least 1.7.In one embodiment, high refractive index material can be tantalum oxide.In one embodiment, low refractive index material can be monox.Certainly, coating 416 can comprise the layer that replaces of tantalum oxide and monox.Usage example coating 416, lamp holder 400 can be in the work of at least one thousand hours with the luminescence efficiency work of every watt of at least 40 lumen.As non-limiting example, lamp holder 400 can also be rated at 60 watts, and in the work of at least one thousand hours with the luminescence efficiency work of about 43LpW.In one embodiment, lamp holder 400 can be less than 1000 hours, in for example work of 500 hours, the work etc. of 700 hours with less than 43LpW, for example luminescence efficiency work of 20LpW, 30LpW.Certainly, can have at least 97 the average reflectance in the wavelength coverage of 800 nanometer to 1500 nanometers according to the exemplary lamp holder 400 of the embodiment of this theme.This type of lamp holder 400 can be used as light source in polytype lamp, described lamp includes but not limited to A-line lamp, general lighting lamp, Spectral modification lamp, reflector lamp, parabolic reflector lamp, ER/BR lamp and torch lamp.Can comprise the layer that replaces of tantalum oxide and monox according to the coating 416 of the additional embodiment of this theme, have the gross thickness of at least 7 microns, wherein the gain of lamp holder 400 is at least 1.85.An embodiment again of this theme can comprise having three reflective stacks and/or surpassing 11 microns tantalum oxide-monox IR reflectance coating of 100 layers on the exemplary both-end that is deposited on any wattage or single-ended lamp holder.It should be noted, each foregoing embodiments with specific efficient, gain, reflectance value etc. is only exemplary, and limits never in any form the scope of claims.

Certainly, it will be apparent for a person skilled in the art that, the scope of claims is included in many variants of reflection or reflector design aspect, and can comprise than 11 microns or 9 microns thinner or thicker coatings, can the vicissitudinous gain of tool, and/or the vicissitudinous average reflectance of tool and luminescence efficiency.For example, the another embodiment of this theme can be included in the halogen incandescent lamp lamp holder that has the IR reflectance coating on its at least a portion.This coating can comprise the layer that replaces of tantalum oxide and monox and has greater than the gross thickness of 9 microns and be at least 97 average reflectance in the wavelength coverage of 800 nanometer to 1500 nanometers.In one embodiment, this coating can comprise the layer that replaces of tantalum oxide and monox and have greater than the gross thickness of 9 microns and at least 1.7 gain.Certainly, these coatings can also have the gross thickness of at least 11 microns.The additional embodiment of this theme can also provide a kind of halogen incandescent lamp lamp holder that has the IR reflectance coating on its at least a portion.This coating can comprise the layer that replaces of tantalum oxide and monox and have greater than the gross thickness of 9 microns and in the work of at least one thousand hours the luminescence efficiency of every watt of at least 40 lumen.Certainly, this coating can also have the gross thickness of at least 11 microns.

Following table 2 provides according to the another kind of exemplary of a kind of embodiment of this theme but nonrestrictive coating.

Table 2

The number of plies	Material	Thickness (nanometer)
			1	Ta 2O 5	109.8
2	SiO 2	169.42
			3	Ta 2O 5	104.5
4	SiO 2	149.84
			5	Ta 2O 5	99.55
6	SiO 2	152.62
			7	Ta 2O 5	99.93
8	SiO 2	152.48
			9	Ta 2O 5	95.65
10	SiO 2	156.46
			11	Ta 2O 5	104.63
12	SiO 2	155.86
			13	Ta 2O 5	110.39
14	SiO 2	177.33
			15	Ta 2O 5	122.15
16	SiO 2	188.25
			17	Ta 2O 5	126.66
18	SiO 2	185.67
			19	Ta 2O 5	124.45
20	SiO 2	188.06
			21	Ta 2O 5	127.8

22	SiO 2	195.88
			23	Ta 2O 5	126.85
24	SiO 2	187.68
			25	Ta 2O 5	124.77
26	SiO 2	203.46
			27	Ta 2O 5	33.89
28	SiO 2	19.56
			29	Ta 2O 5	100.29
30	SiO 2	19.21
			31	Ta 2O 5	29.31
32	SiO 2	196.4
			33	Ta 2O 5	126.51
34	SiO 2	34.3
			35	Ta 2O 5	14.63
36	SiO 2	214.75
			37	Ta 2O 5	15.73
38	SiO 2	26.88
			39	Ta 2O 5	124.62
40	SiO 2	29.66
			41	Ta 2O 5	16.28
42	SiO 2	170.94
			43	Ta 2O 5	8.63
44	SiO 2	35.91
			45	Ta 2O 5	124.27
46	SiO 2	181.28
			47	Ta 2O 5	140.6
48	SiO 2	40.46
			49	Ta 2O 5	22.11
50	SiO 2	214.51

51	Ta 2O 5	116.83
			52	SiO 2	14.42
53	Ta 2O 5	11.41
			54	SiO 2	209.92
55	Ta 2O 5	21.57
			56	SiO 2	35.72
57	Ta 2O 5	137.34
			58	SiO 2	20.94
59	Ta 2O 5	12.67
			60	SiO 2	200.33
61	Ta 2O 5	19.7
			62	SiO 2	31.1
63	Ta 2O 5	147.76
			64	SiO 2	28.05
65	Ta 2O 5	14.9
			66	SiO 2	226.51
67	Ta 2O 5	16.27
			68	SiO 2	32.08
69	Ta 2O 5	133.98
			70	SiO 2	29.39
71	Ta 2O 5	14.5
			72	SiO 2	272.44
73	Ta 2O 5	10.77
			74	SiO 2	40.46
75	Ta 2O 5	122.24
			76	SiO 2	192.37
77	Ta 2O 5	30.67
			78	SiO 2	19.87
79	Ta 2O 5	187.23

80	SiO 2	29.81
			81	Ta 2O 5	21.08
82	SiO 2	259.19
			83	Ta 2O 5	16.99
84	SiO 2	35.91
			85	Ta 2O 5	169.86
86	SiO 2	24.52
			87	Ta 2O 5	29.28
88	SiO 2	216.15
			89	Ta 2O 5	28.79
90	SiO 2	18.36
			91	Ta 2O5	195.43
92	SiO 2	23.95
			93	Ta 2O 5	21.62
94	SiO 2	371.97
			95	Ta 2O 5	23.2
96	SiO 2	22.7
			97	Ta 2O 5	196.3
98	SiO 2	22
			99	Ta 2O 5	24.13
100	SiO 2	211.96
			101	Ta 2O 5	25.64
102	SiO 2	25.31
			103	Ta 2O 5	249.34
104	SiO 2	26.52
			105	Ta 2O 5	21.38
106	SiO 2	198.71
			107	Ta 2O 5	21.56
108	SiO 2	25.27

109	Ta 2O 5	220.75
			110	SiO 2	85.41

It should be noted, the coating of a plurality of layers of representative that provide in table 2 is only exemplary and should not limits the scope of claims, because can comprise the tantalum oxide with different-thickness of any amount or the layer of monox according to the multilayer IR reflectance coating of the embodiment of this theme.In addition, although coating has been described as using tantalum oxide and monox, can also comprise that according to the additional coatings of the embodiment of this theme the layer of a plurality of titania, niobium pentoxide, tantalum oxide, hafnium oxide and/or monox is in order to provide large optics, heat and mechanical advantage in the structure of other exemplary coatings.

Can be by method manufacturing or the production of any amount according to the laminated coating of the embodiment of this theme.For example, can use magnetic control sputtering system sputter exemplary coatings.Fig. 5 is the skeleton view of exemplary magnetic control sputtering system.With reference to Fig. 5, this magnetic control sputtering system can adopt the rotatable drum 502 of the cylindrical shape that is arranged in vacuum chamber 501, and this vacuum chamber 501 has the sputtering target 503 of the wall that is arranged in this vacuum chamber 501.Plasma as known in the art or microwave generator 504 also can be arranged in the wall of this vacuum chamber 501.Substrate 506 is fixed on the plate or substrate chuck 505 of drum 502 movably.

The embodiment of this theme can also be made in having the sputtering system of permission more than the instrument of a rotational freedom.Fig. 6 is the skeleton view of this type of sputtering system.With reference to Fig. 6, exemplary sputtering system can be used the rotatable drum of primary circle tubular or the carrier 602 that is arranged in vacuum chamber 601, and described vacuum chamber 601 has the sputtering target 603 of the wall that is arranged in this vacuum chamber 601.Plasma as known in the art or microwave generator 604 also can be arranged in the wall of this vacuum chamber 601.This carrier 602 can have the xsect that is generally circular, and is suitable for rotating around central shaft.Can provide the driving mechanism (not shown) in order to rotate this carrier 602 around its central shaft.On this carrier 602, a plurality of ratchets (pallet) 650 can be installed in vacuum chamber 670.Each ratchet 650 can comprise rotatable central shaft 652, and one or more disk body 611 is along these central shaft 652 axial array.This disk body 611 can provide near a plurality of axle bearing hole of these disk body 611 peripheries that are positioned at.Axle can be carried in this hole, and each axle can support one or more substrates that are suitable for around its axle rotation separately.The additional detail of this example system and embodiment further describe the common unsettled and related U.S. patent application number 12/155 that is entitled as " Method and Apparatus for Low Cost High Rate Deposition Tooling " of submitting on June 5th, 2008, the common unsettled U. S. application that is entitled as " Thin Film Coating System and Method " of submitting on October 27th, 544 and 2008 number 12/289, in 398, it incorporates this paper separately by reference in full into.Certainly, the embodiment of this theme can also adopt online coating mechanism or sputtering system and/or any conventional chemical gas-phase deposition system to make.In addition, in order to obtain sufficient uniformity coefficient in coating, may need multiple rotary maybe may need a plurality of targets by this target.

A kind of embodiment of this theme can be included in the method for deposited film in substrate.This can use the magnetic control system of describing in Fig. 5 and 6, online coating system (inline systems) or other conventional sputtering system to realize.The method can comprise and is provided at the vacuum chamber that wherein has one or more microwave generators, and the target of silicon or other substrate is set in this vacuum chamber.Can apply power in order to realize thus sputter material from this target to this target subsequently.Oxygen can be introduced this vacuum chamber, close on microwave generator, and apply power to microwave generator, generate thus the plasma that contains antozone.This substrate can move past this target to realize material in this suprabasil deposition, moves past subsequently this microwave generator to realize the reaction of this material and oxygen, in order to form for example tantalum oxide, niobium oxide, monox etc. in this substrate.Certainly, additional material layer can sputtering sedimentation on this substrate or its surface.

In aforementioned job operation and system, a kind of illustrative methods can be used for improving every watt of the lumen of halogen incandescent lamp head, comprises at least with the step of total coating thickness for the part of the multilayer IR reflectance coating sputter coating lamp holder of the alternating layer with tantalum oxide and monox of at least 9 microns.The gain of this type coating can be at least 1.7, and every watt of lumen with lamp holder separately of this coating is at least 40 at least junior one work of thousand hours of this lamp holder.In one embodiment, this lamp holder can be less than 1000 hours, in for example work of 500 hours, the work etc. of 700 hours with less than 43LpW, for example luminescence efficiency work of 20LpW, 30LpW.Certainly, the average reflectance of this coating in the wavelength coverage of 800 nanometer to 1500 nanometers can be at least 97.Another kind of illustrative methods can comprise provides the lamp holder with the quartzy body that consists of the illuminated chamber that holds the incandescent lamp filament and at least a portion that sputter is coated with this illuminated chamber.The multilayer IR reflectance coating that is formed by this method can comprise the layer of a plurality of tantalum oxide and monox and total coating thickness of at least 9 microns is provided, and wherein can be at least 1.7 by the gain that is coated with this lamp holder realization.In one embodiment, this sputter coating can comprise the layer that replaces that forms tantalum oxide and monox.It should be noted, each foregoing embodiments with specific efficient, gain, reflectance value etc. is only exemplary, and limits never in any form the scope of claims.

As shown in the various structures and embodiment described in Fig. 1-6, the various embodiments of high-gain coating and method have been described.

Although described the preferred embodiment of this theme, but should be understood that, described embodiment is only illustrative, and when according to all equivalent scopes, research this paper after those skilled in the art can naturally make many changes and improvements the time, scope of the present invention only is defined by the following claims.

Claims (29)

1. halogen incandescent lamp lamp holder comprises:

The quartzy body that comprises illuminated chamber;

Be arranged on the filament in described illuminated chamber; With

Multilayer optical coating at least a portion of described chamber, described coating comprises the layer of a plurality of low refractive index material and high refractive index material, has the gross thickness of at least 9 microns,

The gain of wherein said lamp holder is at least 1.7.

2. the lamp holder of claim 1, wherein said high refractive index material comprises tantalum oxide.

3. the lamp holder of claim 1, wherein said low refractive index material comprises monox.

4. the lamp holder of claim 1, wherein said coating comprises the layer that replaces of tantalum oxide and monox.

5. the lamp holder of claim 4, wherein said lamp holder in the work of at least one thousand hours with the luminescence efficiency work of every watt of at least 40 lumen.

6. the lamp holder of claim 1, wherein said lamp holder in the work of at least five hundred hours with the luminescence efficiency work of every watt of at least 30 lumen.

7. the lamp holder of claim 6, wherein said lamp holder in the work of at least one thousand hours with the luminescence efficiency work of every watt of at least 30 lumen.

8. the lamp holder of claim 6, wherein said lamp holder be rated at 60 watts and in the work of at least one thousand hours with the luminescence efficiency work of every watt of about 43 lumen.

9. the lamp holder of claim 1 has at least 97 average reflectance in the wavelength coverage of 800 nanometer to 1500 nanometers.

10. the lamp holder of claim 1, be used as light source in polytype lamp, and described polytype lamp is selected from A-line lamp, general lighting lamp, Spectral modification lamp, reflector lamp, parabolic reflector lamp, ER/BR lamp and torch lamp.

11. the lamp holder of claim 1, wherein said coating comprise the layer that replaces of tantalum oxide and monox, have the gross thickness of at least 11 microns, and the gain of wherein said lamp holder is at least 1.85.

12. the lamp holder of claim 1 consists of the both-end lamp holder.

13. the lamp holder of claim 1 consists of single-ended lamp holder.

14. the lamp holder of claim 1, wherein said coating comprise the layer that replaces of tantalum oxide and monox, have the gross thickness of at least 11 microns.

15. a halogen incandescent lamp lamp holder has infrared reflection coating on its at least a portion, described coating comprises the layer that replaces of tantalum oxide and monox, has greater than the gross thickness of 9 microns and at least 1.7 gain.

16. the lamp holder of claim 15, wherein said coating comprise the layer that replaces of tantalum oxide and monox, have the gross thickness of at least 11 microns and at least 1.85 gain.

17. halogen incandescent lamp lamp holder, has infrared reflection coating on its at least a portion, described coating comprises the layer that replaces of tantalum oxide and monox, have greater than the gross thickness of 9 microns and in the wavelength coverage of 800 nanometer to 1500 nanometers at least 97 average reflectance.

18. the lamp holder of claim 17, wherein said coating comprise the layer that replaces of tantalum oxide and monox and have the gross thickness of at least 11 microns.

19. halogen incandescent lamp lamp holder, has infrared reflection coating on its at least a portion, described coating comprises the layer that replaces of tantalum oxide and monox, have greater than the gross thickness of 9 microns and in the work of at least five hundred hours the luminescence efficiency of every watt of at least 30 lumen.

20. the lamp holder of claim 19, wherein said lamp holder in the work of at least one thousand hours with the luminescence efficiency work of every watt of at least 30 lumen.

21. the lamp holder of claim 20, wherein said lamp holder in the work of at least one thousand hours with the luminescence efficiency work of every watt of about 43 lumen.

22. the lamp holder of claim 19, wherein said coating comprise the layer that replaces of tantalum oxide and monox and have the gross thickness of at least 11 microns.

23. improve the method for every watt of the lumen of halogen incandescent lamp lamp holder, comprise being coated with at least a portion of this lamp holder at least for the multilayer infrared refleccting coating sputter of the alternating layer with tantalum oxide and monox of 9 microns with gross thickness.

24. the method for claim 23, wherein this gains and is at least 1.7.

25. the method for claim 23, every watt of the lumen that wherein has the lamp holder of this coating is at least 30 at least the fifth day of a lunar month work of hundred hours of this lamp holder.

26. the method for claim 25, every watt of the lumen that wherein has the lamp holder of this coating is at least 40 at least junior one work of thousand hours of this lamp holder.

27. the method for claim 23, wherein the average reflectance of this coating is at least 97 in the wavelength coverage of 800 nanometer to 1500 nanometers.

28. a method comprises:

Lamp holder with quartzy body is provided, and described quartzy body consists of the illuminated chamber that holds the incandescent lamp filament;

Sputter is coated with at least a portion of this illuminated chamber so that formation has the layer of a plurality of tantalum oxide and monox and the multilayer infrared refleccting coating of the gross thickness of at least 9 microns thus,

The gain that wherein realizes by this lamp holder of coating is at least 1.7.

29. the method for claim 28, wherein said sputter coating comprises the layer that replaces that forms tantalum oxide and monox.

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