CN103094824A - Laser power supply - Google Patents
Laser power supply Download PDFInfo
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- CN103094824A CN103094824A CN2012105787033A CN201210578703A CN103094824A CN 103094824 A CN103094824 A CN 103094824A CN 2012105787033 A CN2012105787033 A CN 2012105787033A CN 201210578703 A CN201210578703 A CN 201210578703A CN 103094824 A CN103094824 A CN 103094824A
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Abstract
The invention discloses a laser power supply which is composed of a direct-current power supply, a silicon-controlled switch, an energy storage capacitor, a pulse transformer and a magnetic switch. The direct-current power supply is connected with a filter capacitor. The energy storage capacitor is charged in a voltage-multiplying mode through a resonant charging circuit. A low voltage broad pulse is formed by discharging through the silicon-controlled switch. The pulse transformer is used for boosting. A high voltage narrow pulse is formed by compressing a high voltage broad pulse through one-level or two-level magnetic pulse compression switch. The high voltage narrow pulse is output to two ends of a laser discharge electrode, and thereby discharge excitation to laser light operation gas is achieved. Supply frequency of the power supply is from 1 hertz to 300 hertz. The laser power supply has the advantages of being capable of widely used in a high-voltage fast discharge excitation gas laser and making no use of high-voltage switch parts such as a thyratron, simple in power supply structure, low in production cost, long in service life, and capable of greatly reducing cost and prolonging the service life due to the fact that controlled silicon is used as a main switch, the price of the controlled silicon is only from 2000 yuan to 3000 yuan and the service life of the controlled silicon is about 10^11.
Description
Technical field
The present invention relates to a kind of power supply, relate in particular to a kind of Laser Power Devices.
Background technology
The fast electric discharge excited gaseous lasers of high pressure such as carbon dioxide laser, excimer laser, nitrogen molecular laser need to be exported the approximately high-voltage pulse power source of 10kV-30kV, and need the high-voltage switch gears such as thyratron, gap as high-voltage discharging switch.This class high-voltage laser power supply uses more high pressure components and parts, and cost is higher, and the high-voltage switch gear component lifes such as thyratron, gap are shorter, and stable work time is limited.
Summary of the invention
The object of the invention is exactly in order to make up the defective of prior art, a kind of low cost, long-life Laser Power Devices to be provided.
The present invention is achieved by the following technical solutions:
a kind of Laser Power Devices, include DC power supply U, the input of described DC power supply U connects civil power, filter capacitor C0, inductance L, miniwatt silicon controlled rectifier switch S 1, diode D1 and capacitor C 1 are composed in series LC resonant charging loop, described filter capacitor C0 is in parallel with DC power supply U, filter capacitor C0 with is connected connection with capacitor C, one end of capacitor C 1 connects an end of the primary side of pulse transformer T, the other end of the primary side of pulse transformer T connects high-power silicon controlled rectifier switch S 2, high-power silicon controlled rectifier switch S 2 is connected with the other end of capacitor C 1, one end of the secondary side of pulse transformer T connects the negative pole of non-return diode D2, the positive pole of non-return diode D2 connects an end of capacitor C 2, the other end of capacitor C 2 connects the other end of the secondary side of pulse transformer T, capacitor C 3 is connected in parallel on the two ends of capacitor C 2, capacitor C d is connected in parallel on the two ends of capacitor C 3, be connected with magnetic switch MS1 between capacitor C 2 and capacitor C 3, be connected with magnetic switch MS2 between capacitor C 3 and capacitor C d, the end ground connection of capacitor C d, the two ends of capacitor C d are high-voltage output end, by controlling the closure of miniwatt silicon controlled rectifier switch S 1, capacitor C 1 is charged to the highest nearly 1400V, 2 conductings of high-power silicon controlled rectifier switch S, capacitor C 1 is charged to capacitor C 2 by pulse transformer T, at capacitor C 2 voltages gradually in elevation process, magnetic switch MS1 is in unsaturated state, be approximately and open circuit, when capacitor C 2 voltages reached the highest, magnetic switch MS1 was just in time saturated, and this moment, MS1 was approximately a hollow small inductor, and capacitor C 2 is fast to capacitor C 3 discharges, through the compression process of magnetic switch MS2, the voltage rising time on capacitor C d reaches approximately 100ns, and the working gas discharge pumped is produced laser.
The modes of emplacement of the iron core of described pulse transformer T be primary coil around the centre, two secondary coils are around both sides, this modes of emplacement can have larger space to place winding coil, is conducive to insulation and heat radiation.Due to pulse transformer energy transfer time 5 about μ s only, the electric current skin effect is remarkable, and peak current is larger in addition, and therefore general wire loss is larger.In the present invention, primary adopts the sheet copper coiling, and the coiling of secondary employing litz wire can effectively reduce the loss that skin effect is brought, and the transformer energy transmission efficiency reaches more than 90%.
The magnetic core of described magnetic switch and skeleton structure are that magnetic core is the nanocrystalline material magnet ring of high squareness ratio, each magnetic switch uses 3 magnet rings stacking, three magnet rings are fixed on fixed mount, the middle plastics pillar that adopts passes, and outside each magnet ring, cover having insulation to protect box, and two makes clamping plate and clamps magnet ring, middle plastic column subcenter is opened an aperture, magnetic core resetting current wire therefrom passes, and such magnetic switch structures is compact, good insulation preformance.
The first order switch leads number of turns of described magnetic switch is at the 30-40 circle, two groups of two groups of coil symmetries around both sides, compare the winding method of single winding, can effectively reduce magnetic switch resistance like this, reduce loss, also be conducive to the even use of magnetic core; The second level switch leads number of turn is at the 4-6 circle, two groups of two groups of coil symmetries around both sides, if the number of turn is less, the words that the space allows, can also improve the mode of 4 groups of parallel connections of title and carry out coiling, so more can reduce magnetic switch resistance, also be more conducive to the even use of core material.
The capacitance of filter capacitor C0 is C0=200uF, the capacitance of capacitor C 1 is C1=2.5uF, and the capacitance of capacitor C 2, C3 is C2=C3=10nF, and the capacitance of capacitor C d is Cd=8nF, the output voltage of DC power supply U is 500-700V, and pulse transformer T is that no-load voltage ratio is the step-up transformer of 1:16.
Advantage of the present invention is: the present invention has designed a kind of low cost, long-life Laser Power Devices, can be widely used in the fast electric discharge excited gaseous laser of high pressure, do not use the high-voltage switch gear parts such as thyratron, power supply architecture is simple, cost of manufacture is low, long service life, use controllable silicon as main switch, price only has thousand yuan of 2-3, and the life-span approximately 10
11, therefore become instinct greatly to reduce, the life-span can also be greatly improved.
Description of drawings
Fig. 1 is laser power supply circuit structural representation of the present invention.
Fig. 2 is capacitor C 1 two ends charge waveforms schematic diagram.
Fig. 3 is the pulse transformer T schematic diagram of placing unshakable in one's determination.
Fig. 4 is the magnetic switch sectional structure chart.
Fig. 5 is first order magnetic switch switch leads schematic diagram.
Fig. 6 is second level magnetic switch switch leads schematic diagram.
Fig. 7 is capacitor C 2, C3, Cd both end voltage waveform.
Embodiment
as shown in Figure 1, a kind of Laser Power Devices, include DC power supply U, the input of described DC power supply U connects civil power, filter capacitor C0, inductance L, miniwatt silicon controlled rectifier switch S 1, diode D1 and capacitor C 1 are composed in series LC resonant charging loop, described filter capacitor C0 is in parallel with DC power supply U, filter capacitor C0 with is connected connection with capacitor C, one end of capacitor C 1 connects an end of the primary side of pulse transformer T, the other end of the primary side of pulse transformer T connects high-power silicon controlled rectifier switch S 2, high-power silicon controlled rectifier switch S 2 is connected with the other end of capacitor C 1, one end of the secondary side of pulse transformer T connects the negative pole of non-return diode D2, the positive pole of non-return diode D2 connects an end of capacitor C 2, the other end of capacitor C 2 connects the other end of the secondary side of pulse transformer T, capacitor C 3 is connected in parallel on the two ends of capacitor C 2, capacitor C d is connected in parallel on the two ends of capacitor C 3, be connected with magnetic switch MS1 between capacitor C 2 and capacitor C 3, be connected with magnetic switch MS2 between capacitor C 3 and capacitor C d, the end ground connection of capacitor C d, the two ends of capacitor C d are high-voltage output end, by controlling the closure of miniwatt silicon controlled rectifier switch S 1, capacitor C 1 is charged to the highest nearly 1400V, 2 conductings of high-power silicon controlled rectifier switch S, capacitor C 1 is charged to capacitor C 2 by pulse transformer T, at capacitor C 2 voltages gradually in elevation process, magnetic switch MS1 is in unsaturated state, be approximately and open circuit, when capacitor C 2 voltages reached the highest, magnetic switch MS1 was just in time saturated, and this moment, MS1 was approximately a hollow small inductor, and capacitor C 2 is fast to capacitor C 3 discharges, through the compression process of magnetic switch MS2, the voltage rising time on capacitor C d reaches approximately 100ns, and the working gas discharge pumped is produced laser.
As shown in Figure 3, the modes of emplacement of the iron core of described pulse transformer T be primary coil 1 around the centre, two secondary coils 2 are around both sides, this modes of emplacement can have larger space to place winding coil, is conducive to insulation and heat radiation.Due to pulse transformer T energy transfer time 5 about μ s only, the electric current skin effect is remarkable, and peak current is larger in addition, and therefore general wire loss is larger.In the present invention, the coiling of the elementary employing sheet copper of pulse transformer T, the coiling of secondary employing litz wire can effectively reduce the loss that skin effect is brought, and the transformer energy transmission efficiency reaches more than 90%.
As shown in Figure 4, the magnetic core of described magnetic switch and skeleton structure are that magnetic core is the nanocrystalline material magnet ring 3 of high squareness ratio, each magnetic switch uses 3 magnet rings 3 stacking, and three magnet rings 3 are fixed on fixed mount 6, and the middle plastics pillar 4 that adopts passes, each magnet ring 3 outside cover has insulation to protect box 7, two makes clamping plate 5 and clamps magnet rings 3, and an aperture is opened at middle plastics pillar 4 centers, and magnetic core resetting current wire therefrom passes, such magnetic switch structures is compact, good insulation preformance.
As shown in Figure 5, first order switch leads 8 number of turns of described magnetic switch are at the 30-40 circle, two groups of two groups of coil symmetries around both sides, compare the winding method of single winding, can effectively reduce magnetic switch resistance like this, reduce loss, also be conducive to the even use of magnetic core; As shown in Figure 6, switch leads 8 numbers of turn in the second level are at the 4-6 circle, two groups of two groups of coil symmetries around both sides, if the number of turn is less, the space allows, and can also improve to claim the mode of 4 groups of parallel connections to carry out coiling, so more can reduce magnetic switch resistance, also be more conducive to the even use of core material.
The capacitance of filter capacitor C0 is C0=200uF, the capacitance of capacitor C 1 is C1=2.5uF, and the capacitance of capacitor C 2, C3 is C2=C3=10nF, and the capacitance of capacitor C d is Cd=8nF, the output voltage of DC power supply U is 500-700V, and pulse transformer T is that no-load voltage ratio is the step-up transformer of 1:16.
As shown in Figure 7, capacitor C 2, C3, Cd both end voltage waveform, after the compression of two-stage magnetic switch, when high-voltage pulse arrived the sparking electrode two ends, the rise time was compressed to approximately 100 ns, and voltage magnitude is 14-17kV approximately.
Claims (5)
1. Laser Power Devices, it is characterized in that: include DC power supply U, the input of described DC power supply U connects civil power, filter capacitor C0, inductance L, miniwatt silicon controlled rectifier switch S 1, diode D1 and capacitor C 1 are composed in series LC resonant charging loop, described filter capacitor C0 is in parallel with DC power supply U, filter capacitor C0 with is connected connection with capacitor C, one end of capacitor C 1 connects an end of the primary side of pulse transformer T, the other end of the primary side of pulse transformer T connects high-power silicon controlled rectifier switch S 2, high-power silicon controlled rectifier switch S 2 is connected with the other end of capacitor C 1, one end of the secondary side of pulse transformer T connects the negative pole of non-return diode D2, the positive pole of non-return diode D2 connects an end of capacitor C 2, the other end of capacitor C 2 connects the other end of the secondary side of pulse transformer T, capacitor C 3 is connected in parallel on the two ends of capacitor C 2, capacitor C d is connected in parallel on the two ends of capacitor C 3, be connected with magnetic switch MS1 between capacitor C 2 and capacitor C 3, be connected with magnetic switch MS2 between capacitor C 3 and capacitor C d, the end ground connection of capacitor C d, the two ends of capacitor C d are high-voltage output end, by controlling the closure of miniwatt silicon controlled rectifier switch S 1, capacitor C 1 is charged to the highest nearly 1400V, 2 conductings of high-power silicon controlled rectifier switch S, capacitor C 1 is charged to capacitor C 2 by pulse transformer T, at capacitor C 2 voltages gradually in elevation process, magnetic switch MS1 is in unsaturated state, be approximately and open circuit, when capacitor C 2 voltages reached the highest, magnetic switch MS1 was just in time saturated, and this moment, MS1 was approximately a hollow small inductor, and capacitor C 2 is fast to capacitor C 3 discharges, through the compression process of magnetic switch MS2, the voltage rising time on capacitor C d reaches approximately 100ns, and the working gas discharge pumped is produced laser.
2. a kind of Laser Power Devices according to claim 1 is characterized in that: the modes of emplacement of the iron core of described pulse transformer T be primary coil around the centre, two secondary coils are around both sides.
3. a kind of Laser Power Devices according to claim 1, it is characterized in that: the magnetic core of described magnetic switch and skeleton structure are that magnetic core is the nanocrystalline material magnet ring of high squareness ratio, each magnetic switch uses 3 magnet rings stacking, three magnet rings are fixed on fixed mount, the middle plastics pillar that adopts passes, and outside each magnet ring, cover having insulation to protect box, and two makes clamping plate and clamps magnet ring, middle plastic column subcenter is opened an aperture, and magnetic core resetting current wire therefrom passes.
4. a kind of Laser Power Devices according to claim 1 is characterized in that: the first order switch leads number of turns of described magnetic switch is at the 30-40 circle, two groups of two groups of coil symmetries around both sides; The second level switch leads number of turn is at the 4-6 circle, two groups of two groups of coil symmetries around both sides.
5. a kind of Laser Power Devices according to claim 1, it is characterized in that: the capacitance of filter capacitor C0 is C0=200uF, the capacitance of capacitor C 1 is C1=2.5uF, the capacitance of capacitor C 2, C3 is C2=C3=10nF, the capacitance of capacitor C d is Cd=8nF, the output voltage of DC power supply U is 500-700V, and pulse transformer T is that no-load voltage ratio is the step-up transformer of 1:16.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012105787033A CN103094824A (en) | 2012-12-27 | 2012-12-27 | Laser power supply |
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| CN2012105787033A CN103094824A (en) | 2012-12-27 | 2012-12-27 | Laser power supply |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104935306A (en) * | 2015-06-02 | 2015-09-23 | 沈阳理工大学 | High-power pulse gas switch trigger |
| CN107069421A (en) * | 2017-02-28 | 2017-08-18 | 中国科学院合肥物质科学研究院 | For high-repetition-rate PRK without the efficient exciting circuit of secondary discharge |
| CN110662337A (en) * | 2019-10-15 | 2020-01-07 | 浙江佳环电子有限公司 | Pulse corona plasma high-voltage power supply |
| CN111416272A (en) * | 2020-04-26 | 2020-07-14 | 中国科学院合肥物质科学研究院 | Trigger and protection circuit of excimer laser high-voltage switch |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102447213A (en) * | 2011-12-09 | 2012-05-09 | 中国科学院安徽光学精密机械研究所 | High-repetition rate all-solid-state high-voltage pulse generator |
| CN102801093A (en) * | 2012-07-04 | 2012-11-28 | 中国科学院安徽光学精密机械研究所 | All-solid-state pulse excitation source for compact structure type excimer laser |
| CN203071393U (en) * | 2012-12-27 | 2013-07-17 | 中国科学院安徽光学精密机械研究所 | Laser power supply |
-
2012
- 2012-12-27 CN CN2012105787033A patent/CN103094824A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102447213A (en) * | 2011-12-09 | 2012-05-09 | 中国科学院安徽光学精密机械研究所 | High-repetition rate all-solid-state high-voltage pulse generator |
| CN102801093A (en) * | 2012-07-04 | 2012-11-28 | 中国科学院安徽光学精密机械研究所 | All-solid-state pulse excitation source for compact structure type excimer laser |
| CN203071393U (en) * | 2012-12-27 | 2013-07-17 | 中国科学院安徽光学精密机械研究所 | Laser power supply |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104935306A (en) * | 2015-06-02 | 2015-09-23 | 沈阳理工大学 | High-power pulse gas switch trigger |
| CN104935306B (en) * | 2015-06-02 | 2018-06-01 | 沈阳理工大学 | A kind of high power pulse gas switch trigger |
| CN107069421A (en) * | 2017-02-28 | 2017-08-18 | 中国科学院合肥物质科学研究院 | For high-repetition-rate PRK without the efficient exciting circuit of secondary discharge |
| CN107069421B (en) * | 2017-02-28 | 2019-03-01 | 中国科学院合肥物质科学研究院 | For high-repetition-rate excimer laser without the efficient exciting circuit of secondary discharge |
| CN110662337A (en) * | 2019-10-15 | 2020-01-07 | 浙江佳环电子有限公司 | Pulse corona plasma high-voltage power supply |
| CN111416272A (en) * | 2020-04-26 | 2020-07-14 | 中国科学院合肥物质科学研究院 | Trigger and protection circuit of excimer laser high-voltage switch |
| CN111416272B (en) * | 2020-04-26 | 2024-04-02 | 中国科学院合肥物质科学研究院 | Trigger and protection circuit of excimer laser high-voltage switch |
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Application publication date: 20130508 |