CN103086709B - Preparation method of yttrium-barium-copper-oxidize superconducting film - Google Patents

Preparation method of yttrium-barium-copper-oxidize superconducting film Download PDF

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CN103086709B
CN103086709B CN201310039606.1A CN201310039606A CN103086709B CN 103086709 B CN103086709 B CN 103086709B CN 201310039606 A CN201310039606 A CN 201310039606A CN 103086709 B CN103086709 B CN 103086709B
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yttrium
copper oxide
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barium copper
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CN103086709A (en
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雷黎
赵高扬
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Xian University of Technology
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Abstract

The invention discloses a preparation method of a yttrium-barium-copper-oxidize superconducting film. The method comprises the following steps: preparing a yttrium-barium-copper-oxidize sol without fluorine into a yttrium-barium-copper-oxidize gel film on a monocrystal lanthanum aluminate substrate; after drying the obtained gel film, sequentially carrying out overheating treatment, crystallization treatment and oxygen permeating treatment on the gel film; and cooling the gel film, thereby obtaining the yttrium-barium-copper-oxidize superconducting film. According to the method, carbon dioxide is led into a low-temperature heat treatment process to control the conversion of a barium-contained phase, so that a reversible reaction, namely (Ba(OH)2+CO2=BaCO3+H2O is always performed in the direction at which barium carbonate is generated, so that the problem of rough surface of the yttrium-barium-copper-oxidize superconducting film due to the fact that barium hydroxide is molten at a high temperature is solved. In addition, water vapor is led into a high-temperature heat treatment process, so that the reversible reaction is performed in the direction at which the barium hydroxide is generated, so that the barium carbonate is completely converted into the barium hydroxide; and the barium hydroxide can further react with yttrium oxide and copper oxide to generate a yttrium-barium-copper-oxidize phase, and therefore, the yttrium-barium-copper-oxidize film with the good surface quality and the excellent superconducting performance is obtained.

Description

The preparation method of yttrium barium copper oxide superconducting film
Technical field
The invention belongs to superconducting material technical field, relate to a kind of preparation method of yttrium barium copper oxide superconducting film.
Background technology
Yttrium barium copper oxide (YBa 2cu 3o 7-δ) be called for short YBCO, be a kind of high temperature superconducting materia that can realize in liquid nitrogen temperature supraconductivity application.YBCO superconducting thin film relies on its excellent electric property all to show tempting application prospect at light current (as made superconducting quantum interference device (SQUID), superconducting-coupled antenna, super conductive filter etc.) and forceful electric power field (as preparation s-generation hts band-YBCO coating conductor).
At present preparing the simple and the most cheap method of YBCO superconducting thin film is chemical solution deposition, and it can be divided into fluorine-containing and floride-free two kinds of techniques according to whether containing fluorine element in starting raw material.Wherein, floride-free technique not only can be avoided the release of corrodibility hydrofluoric acid gas in traditional fluorine-containing process heat treating processes; effectively protected environment, and the heat treatment time of film is only about 1/3rd of traditional fluorine-containing technique, when increasing substantially film preparation efficiency, saved the energy.But, in floride-free process heat treating processes, can produce the barium carbonate phase of more difficult decomposition, the superconductivity of YBCO is significantly declined.In addition, the conversion in film thermal treating processes between hydrated barta and barium carbonate is also comparatively complicated, and the hydrated barta of too much molten state can make film surface become coarse.
Summary of the invention
The object of this invention is to provide a kind of preparation method of yttrium barium copper oxide superconducting film, the hydrated barta that has solved the too much molten state existing in the floride-free process heat treating processes of existing chemical solution deposition makes yttrium barium copper oxide superconducting film surface become coarse problem.
The technical solution adopted in the present invention is, the preparation method of yttrium barium copper oxide superconducting film, first on monocrystalline lanthanum aluminate substrate, floride-free yttrium barium copper oxide colloidal sol is made to yttrium barium copper oxide gel-film, then after yttrium barium copper oxide gel-film is dry, successively through Overheating Treatment, crystallization with ooze oxygen processing, obtain yttrium barium copper oxide superconducting film after cooling.
Feature of the present invention is also,
Floride-free yttrium barium copper oxide colloidal sol is by acetic acid yttrium, barium acetate and neutralized verdigris are dissolved in and form three kinds of solution in methyl alcohol with diethylene diamine, lactic acid and vinylformic acid respectively, and then above-mentioned three kinds of solution mix and blends are obtained, in acetic acid yttrium, barium acetate and neutralized verdigris, the mol ratio of yttrium, barium and copper is 1~1.5:2:3~4.
Yttrium barium copper oxide gel-film is dried in air, high pure nitrogen or high-purity argon gas and carries out, and temperature is 80~150 DEG C, and the time is 15~30min.
The thermal treatment of dry yttrium barium copper oxide gel-film is carried out in preset temp is the horizontal quartz tube atmosphere sintering furnace of 100 DEG C, concrete steps are: first in the mixed atmosphere being made up of 0.1~5%vol oxygen, 1~10%vol water vapour and surplus nitrogen, be warming up to 350~420 DEG C, then in the mixed atmosphere being formed by 0.1~5%vol oxygen, 0.1~10%vol carbonic acid gas and surplus nitrogen, be warming up to 450~600 DEG C, then be warming up to 650~700 DEG C in forming mixed atmosphere by 0.1~5%vol oxygen and surplus nitrogen.
The crystallization of the yttrium barium copper oxide gel-film after thermal treatment is to carry out in the mixed atmosphere being made up of 0.01~5%vol oxygen, 1~10%vol water vapour and surplus nitrogen, and temperature is 750~850 DEG C, and the time is 1~3h.
The oxygen processing of oozing of the yttrium barium copper oxide gel-film after crystallization is to carry out in pure oxygen atmosphere, and temperature is 400~500 DEG C, and soaking time is 1~3h.
The invention has the beneficial effects as follows,
1. the preparation method of yttrium barium copper oxide superconducting film of the present invention, controls the conversion of baric phase by introduce appropriate carbon dioxide in low temperature heat treatment, make reversible reaction: Ba (OH) 2+ CO 2=BaCO 3+ H 2o carries out towards the direction that generates barium carbonate all the time, has avoided causing the shaggy problem of yttrium barium copper oxide superconducting film because of hydrated barta high temperature melting; Then introducing enough water vapour by high-temperature heat treatment process makes above-mentioned reversible reaction carry out towards the direction that generates hydrated barta, make barium carbonate change hydrated barta completely into, hydrated barta further reacts and generates yttrium barium copper oxide phase with yttrium oxide, cupric oxide again simultaneously, thereby obtains the yttrium barium copper oxide film that surface quality is good and superconductivity is excellent.
2. the preparation method of yttrium barium copper oxide superconducting film of the present invention is simple, and preparation efficiency is high, and free from environmental pollution, can be used for preparing high quality big area yttrium system or Rare Earth Ba-Cu-O film and high-performance yttrium system or Rare Earth barium copper oxygen coating conductor.
Brief description of the drawings
Fig. 1 is the opticmicroscope scintigram of the yttrium barium copper oxide superconducting film that makes when heat treatment process is not introduced carbon dioxide atmosphere in preparation method of the present invention;
Fig. 2 is the opticmicroscope scintigram of the yttrium barium copper oxide superconducting film that makes of the embodiment of the present invention 1;
Fig. 3 is the J of the yttrium barium copper oxide superconducting film that makes of the embodiment of the present invention 1,2 and 3 c-H curve.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.
The preparation method of yttrium barium copper oxide superconducting film of the present invention, first on monocrystalline lanthanum aluminate substrate, floride-free yttrium barium copper oxide colloidal sol is made to yttrium barium copper oxide gel-film, after yttrium barium copper oxide gel-film is dry, successively through Overheating Treatment, crystallization with ooze oxygen processing, obtain yttrium barium copper oxide superconducting film after cooling.
Concrete steps are as follows:
Step 1, acetic acid yttrium, barium acetate and neutralized verdigris are dissolved in and in methyl alcohol, form three kinds of solution with diethylene diamine, lactic acid and vinylformic acid respectively, and then above-mentioned three kinds of solution mix and blends are obtained to floride-free yttrium barium copper oxide colloidal sol, in acetic acid yttrium, barium acetate and neutralized verdigris, the mol ratio of yttrium, barium and copper is 1~1.5:2:3~4;
Step 2, adopts the floride-free yttrium barium copper oxide colloidal sol that makes of step 1 to make yttrium barium copper oxide gel-film on monocrystalline lanthanum aluminate substrate, then, at air, high pure nitrogen or high-purity argon gas, dry 15~30min at 80~150 DEG C, obtains floride-free yttrium barium copper oxide gel-film;
Step 3, it is to heat-treat in the horizontal quartz tube atmosphere sintering furnace of 100 DEG C that the floride-free yttrium barium copper oxide gel-film that step 2 is obtained moves to preset temp, heat treated concrete steps are: first by 0.1~5%vol oxygen, in the mixed atmosphere of 1~10%vol water vapour and surplus nitrogen composition, be warming up to 350~420 DEG C, then by 0.1~5%vol oxygen, in the mixed atmosphere of 0.1~10%vol carbonic acid gas and surplus nitrogen composition, be warming up to 450~600 DEG C, in the mixed atmosphere being formed by 0.1~5%vol oxygen and surplus nitrogen, be warming up to 650~700 DEG C again, obtain containing barium carbonate, yttrium oxide, the yttrium barium copper oxide precursor thin-film of the phases such as cupric oxide,
Step 4, the yttrium barium copper oxide precursor thin-film that step 3 is obtained is processed 1~3h being made up of 0.01~5%vol oxygen, 1~10%vol water vapour and surplus nitrogen at mixed atmosphere, 750~850 DEG C, then at pure oxygen atmosphere, 400~500 DEG C, be incubated 1~3h, obtain yttrium barium copper oxide superconducting film after cooling.
The preparation method of yttrium barium copper oxide superconducting film of the present invention, controls the conversion of baric phase by introduce appropriate carbon dioxide in low temperature heat treatment, make reversible reaction: Ba (OH) 2+ CO 2=BaCO 3+ H 2o carries out towards the direction that generates barium carbonate all the time, has avoided causing the shaggy problem of yttrium barium copper oxide superconducting film because of hydrated barta high temperature melting; Then introducing enough water vapour by high-temperature heat treatment process makes above-mentioned reversible reaction carry out towards the direction that generates hydrated barta, make barium carbonate change hydrated barta completely into, hydrated barta further reacts and generates yttrium barium copper oxide phase with yttrium oxide, cupric oxide again simultaneously, thereby obtains the yttrium barium copper oxide film that surface quality is good and superconductivity is excellent.
The preparation method of yttrium barium copper oxide superconducting film of the present invention passes through to adopt excessive acetic acid yttrium and neutralized verdigris as raw material, and the one, excessive yttrium forms nano yttrium oxide particle in film, plays the effect of flux pinning; The 2nd, excessive copper can make up the copper loss causing of volatilizing of copper metallorganics in heat treatment process and lose.
The preparation method of yttrium barium copper oxide superconducting film of the present invention is simple, and preparation efficiency is high, and free from environmental pollution, can be used for preparing high quality big area yttrium system or Rare Earth Ba-Cu-O film and high-performance yttrium system or Rare Earth barium copper oxygen coating conductor.
Embodiment 1
Step 1, acetic acid yttrium, barium acetate and neutralized verdigris are dissolved in and in methyl alcohol, form three kinds of solution with diethylene diamine, lactic acid and vinylformic acid respectively, and then above-mentioned three kinds of solution mix and blends are obtained to floride-free yttrium barium copper oxide colloidal sol, wherein in acetic acid yttrium, barium acetate and neutralized verdigris, the mol ratio of yttrium, barium and copper is 1:2:3;
Step 2, adopts the floride-free yttrium barium copper oxide colloidal sol that makes of step 1 to make yttrium barium copper oxide gel-film on monocrystalline lanthanum aluminate substrate, and then dry 30min at air, 80 DEG C, obtains floride-free yttrium barium copper oxide gel-film;
Step 3, it is to heat-treat in the horizontal quartz tube atmosphere sintering furnace of 100 DEG C that the floride-free yttrium barium copper oxide gel-film that step 2 is obtained moves to preset temp, heat treated concrete steps are: first by 0.5%vol oxygen, in the mixed atmosphere of 2%vol water vapour and 97.5%vol nitrogen composition, be warming up to 350 DEG C, then by 0.5%vol oxygen, in the mixed atmosphere of 1%vol carbonic acid gas and 98.5%vol nitrogen composition, be warming up to 480 DEG C, in the mixed atmosphere being formed by 0.5%vol oxygen and 99.5%vol nitrogen, be warming up to 650 DEG C again, obtain containing barium carbonate, yttrium oxide, the yttrium barium copper oxide precursor thin-film of the phases such as cupric oxide,
Step 4, the yttrium barium copper oxide precursor thin-film that step 3 is obtained is processed 1h being made up of 1%vol oxygen, 5%vol water vapour and 94%vol nitrogen at mixed atmosphere, 750 DEG C, then at pure oxygen atmosphere, 430 DEG C, be incubated 1h, obtain yttrium barium copper oxide superconducting film after cooling.
Embodiment 2
Step 1, acetic acid yttrium, barium acetate and neutralized verdigris are dissolved in and in methyl alcohol, form three kinds of solution with diethylene diamine, lactic acid and vinylformic acid respectively, and then above-mentioned three kinds of solution mix and blends are obtained to floride-free yttrium barium copper oxide colloidal sol, wherein in acetic acid yttrium, barium acetate and neutralized verdigris, the mol ratio of yttrium, barium and copper is 1.15:2:3.2;
Step 2, adopts the floride-free yttrium barium copper oxide colloidal sol that makes of step 1 to make yttrium barium copper oxide gel-film on monocrystalline lanthanum aluminate substrate, and then dry 20min at high-purity argon gas, 90 DEG C, obtains floride-free yttrium barium copper oxide gel-film;
Step 3, it is to heat-treat in the horizontal quartz tube atmosphere sintering furnace of 100 DEG C that the floride-free yttrium barium copper oxide gel-film that step 2 is obtained moves to preset temp, heat treated concrete steps are: first by 1%vol oxygen, in the mixed atmosphere of 5%vol water vapour and 94%vol nitrogen composition, be warming up to 400 DEG C, then by 1%vol oxygen, in the mixed atmosphere of 2%vol carbonic acid gas and 97%vol nitrogen composition, be warming up to 500 DEG C, in the mixed atmosphere being formed by 1%vol oxygen and 99%vol nitrogen, be warming up to 680 DEG C again, obtain containing barium carbonate, yttrium oxide, the yttrium barium copper oxide precursor thin-film of the phases such as cupric oxide,
Step 4, the yttrium barium copper oxide precursor thin-film that step 3 is obtained is processed 1.5h being made up of 1%vol oxygen, 8%vol water vapour and 91%vol nitrogen at mixed atmosphere, 800 DEG C, then at pure oxygen atmosphere, 450 DEG C, be incubated 1.5h, obtain yttrium barium copper oxide superconducting film after cooling.
Embodiment 3
Step 1, acetic acid yttrium, barium acetate and neutralized verdigris are dissolved in and in methyl alcohol, form three kinds of solution with diethylene diamine, lactic acid and vinylformic acid respectively, and then above-mentioned three kinds of solution mix and blends are obtained to floride-free yttrium barium copper oxide colloidal sol, wherein in acetic acid yttrium, barium acetate and neutralized verdigris, the mol ratio of yttrium, barium and copper is 1.2:2:3.3;
Step 2, adopts the floride-free yttrium barium copper oxide colloidal sol that makes of step 1 to make yttrium barium copper oxide gel-film on monocrystalline lanthanum aluminate substrate, and then dry 15min at high pure nitrogen, 100 DEG C, obtains floride-free yttrium barium copper oxide gel-film;
Step 3, it is to heat-treat in the horizontal quartz tube atmosphere sintering furnace of 100 DEG C that the floride-free yttrium barium copper oxide gel-film that step 2 is obtained moves to preset temp, heat treated concrete steps are: first by 2%vol oxygen, in the mixed atmosphere of 5%vol water vapour and 93%vol nitrogen composition, be warming up to 410 DEG C, then by 2%vol oxygen, in the mixed atmosphere of 3%vol carbonic acid gas and 95%vol nitrogen composition, be warming up to 550 DEG C, in the mixed atmosphere being formed by 2%vol oxygen and 98%vol nitrogen, be warming up to 700 DEG C again, obtain containing barium carbonate, yttrium oxide, the yttrium barium copper oxide precursor thin-film of the phases such as cupric oxide,
Step 4, the yttrium barium copper oxide precursor thin-film that step 3 is obtained is processed 2h being made up of 3%vol oxygen, 5%vol water vapour and 92%vol nitrogen at mixed atmosphere, 820 DEG C, then at pure oxygen atmosphere, 480 DEG C, be incubated 2h, obtain yttrium barium copper oxide superconducting film after cooling.
Embodiment 4
Step 1, acetic acid yttrium, barium acetate and neutralized verdigris are dissolved in and in methyl alcohol, form three kinds of solution with diethylene diamine, lactic acid and vinylformic acid respectively, and then above-mentioned three kinds of solution mix and blends are obtained to floride-free yttrium barium copper oxide colloidal sol, wherein in acetic acid yttrium, barium acetate and neutralized verdigris, the mol ratio of yttrium, barium and copper is 1.3:2:3.6;
Step 2, adopts the floride-free yttrium barium copper oxide colloidal sol that makes of step 1 to make yttrium barium copper oxide gel-film on monocrystalline lanthanum aluminate substrate, and then dry 20min at high-purity argon gas, 120 DEG C, obtains floride-free yttrium barium copper oxide gel-film;
Step 3, it is to heat-treat in the horizontal quartz tube atmosphere sintering furnace of 100 DEG C that the floride-free yttrium barium copper oxide gel-film that step 2 is obtained moves to preset temp, heat treated concrete steps are: first by 5%vol oxygen, in the mixed atmosphere of 1%vol water vapour and 94%vol nitrogen composition, be warming up to 370 DEG C, then by 5%vol oxygen, in the mixed atmosphere of 10%vol carbonic acid gas and 85%vol nitrogen composition, be warming up to 450 DEG C, in the mixed atmosphere being formed by 5%vol oxygen and 95%vol nitrogen, be warming up to 670 DEG C again, obtain containing barium carbonate, yttrium oxide, the yttrium barium copper oxide precursor thin-film of the phases such as cupric oxide,
Step 4, the yttrium barium copper oxide precursor thin-film that step 3 is obtained is processed 2.5h being made up of 5%vol oxygen, 1%vol water vapour and 94%vol nitrogen at mixed atmosphere, 780 DEG C, then at pure oxygen atmosphere, 500 DEG C, be incubated 2.5h, obtain yttrium barium copper oxide superconducting film after cooling.
Embodiment 5
Step 1, acetic acid yttrium, barium acetate and neutralized verdigris are dissolved in and in methyl alcohol, form three kinds of solution with diethylene diamine, lactic acid and vinylformic acid respectively, and then above-mentioned three kinds of solution mix and blends are obtained to floride-free yttrium barium copper oxide colloidal sol, wherein in acetic acid yttrium, barium acetate and neutralized verdigris, the mol ratio of yttrium, barium and copper is 1.5:2:4;
Step 2, adopts the floride-free yttrium barium copper oxide colloidal sol that makes of step 1 to make yttrium barium copper oxide gel-film on monocrystalline lanthanum aluminate substrate, and then dry 15min at high pure nitrogen, 150 DEG C, obtains floride-free yttrium barium copper oxide gel-film;
Step 3, it is to heat-treat in the horizontal quartz tube atmosphere sintering furnace of 100 DEG C that the floride-free yttrium barium copper oxide gel-film that step 2 is obtained moves to preset temp, heat treated concrete steps are: first by 3%vol oxygen, in the mixed atmosphere of 10%vol water vapour and 87%vol nitrogen composition, be warming up to 420 DEG C, then by 0.1%vol oxygen, in the mixed atmosphere of 5%vol carbonic acid gas and 94.9%vol nitrogen composition, be warming up to 600 DEG C, in the mixed atmosphere being formed by 3%vol oxygen and 97%vol nitrogen, be warming up to 680 DEG C again, obtain containing barium carbonate, yttrium oxide, the yttrium barium copper oxide precursor thin-film of the phases such as cupric oxide,
Step 4, the yttrium barium copper oxide precursor thin-film that step 3 is obtained is processed 3h being made up of 0.1%vol oxygen, 10%vol water vapour and 89.9%vol nitrogen at mixed atmosphere, 850 DEG C, then at pure oxygen atmosphere, 400 DEG C, be incubated 3h, obtain yttrium barium copper oxide superconducting film after cooling.
Fig. 1 is the opticmicroscope scintigram of the yttrium barium copper oxide superconducting film that makes when heat treatment process is not introduced carbon dioxide atmosphere in preparation method of the present invention, Fig. 2 is the opticmicroscope scintigram of the yttrium barium copper oxide superconducting film that makes of the embodiment of the present invention 1, can see by contrast, in Fig. 1, there is the circular gully of some center dispersion shapes not of uniform size, this be other oxide compounds the hydrated barta of molten state mutually in forming core growth cause, and the very smooth densification of yttrium barium copper oxide film surface in Fig. 2, grain size is also comparatively even, the introducing of this explanation carbon dioxide atmosphere can effectively improve the surface quality of yttrium barium copper oxide film.
Fig. 3 is the J of the yttrium barium copper oxide superconducting film that makes of the embodiment of the present invention 1,2 and 3 c-H curve, as seen from Figure 3, outside magnetic field is parallel to three curves that record under the c-axis of yttrium barium copper oxide, condition that temperature is 77K and all has yttrium barium copper oxide superconducting film J cthe characteristic feature of-H curve, along with the critical current density of the increase yttrium barium copper oxide film of externally-applied magnetic field intensity reduces gradually.Wherein, the critical current density of the yttrium barium copper oxide film that inventive embodiments 2,3 makes is equal critical current density higher than the prepared yttrium barium copper oxide film of embodiment 1 under null field or High-Field no matter, this is that the content ratio of yttrium, copper in the forerunner's colloidal sol adopting due to embodiment 2,3 is all excessive to some extent compared with embodiment 1, illustrates and adopts suitably excessive yttrium, the floride-free yttrium barium copper oxide colloidal sol of copper to be more conducive to prepare the yttrium barium copper oxide film of high current carrying capacity.

Claims (5)

1. the preparation method of yttrium barium copper oxide superconducting film, it is characterized in that, first on monocrystalline lanthanum aluminate substrate, floride-free yttrium barium copper oxide colloidal sol is made to yttrium barium copper oxide gel-film, then after yttrium barium copper oxide gel-film is dry, successively through Overheating Treatment, crystallization with ooze oxygen processing, obtain yttrium barium copper oxide superconducting film after cooling;
The thermal treatment of described dried yttrium barium copper oxide gel-film is carried out in preset temp is the horizontal quartz tube atmosphere sintering furnace of 100 DEG C, concrete steps are: first in the mixed atmosphere being made up of 0.1~5%vol oxygen, 1~10%vol water vapour and surplus nitrogen, be warming up to 350~420 DEG C, then in the mixed atmosphere being formed by 0.1~5%vol oxygen, 0.1~10%vol carbonic acid gas and surplus nitrogen, be warming up to 450~600 DEG C, then be warming up to 650~700 DEG C in forming mixed atmosphere by 0.1~5%vol oxygen and surplus nitrogen.
2. the preparation method of yttrium barium copper oxide superconducting film according to claim 1, it is characterized in that, described floride-free yttrium barium copper oxide colloidal sol is by acetic acid yttrium, barium acetate and neutralized verdigris are dissolved in and form three kinds of solution in methyl alcohol with diethylene diamine, lactic acid and vinylformic acid respectively, and then above-mentioned three kinds of solution mix and blends are obtained, in acetic acid yttrium, barium acetate and neutralized verdigris, the mol ratio of yttrium, barium and copper is 1~1.5:2:3~4.
3. the preparation method of yttrium barium copper oxide superconducting film according to claim 1 and 2, is characterized in that, yttrium barium copper oxide gel-film is dried in air, high pure nitrogen or high-purity argon gas and carries out, and temperature is 80~150 DEG C, and the time is 15~30min.
4. the preparation method of yttrium barium copper oxide superconducting film according to claim 3, it is characterized in that, the crystallization of the yttrium barium copper oxide gel-film after described thermal treatment is to carry out in the mixed atmosphere being made up of 0.01~5%vol oxygen, 1~10%vol water vapour and surplus nitrogen, temperature is 750~850 DEG C, and the time is 1~3h.
5. the preparation method of yttrium barium copper oxide superconducting film according to claim 4, is characterized in that, the oxygen processing of oozing of the yttrium barium copper oxide gel-film after described crystallization is to carry out in pure oxygen atmosphere, and temperature is 400~500 DEG C, and soaking time is 1~3h.
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