CN103085180A - Wire saw control system and wire saw - Google Patents
Wire saw control system and wire saw Download PDFInfo
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- CN103085180A CN103085180A CN2011104591168A CN201110459116A CN103085180A CN 103085180 A CN103085180 A CN 103085180A CN 2011104591168 A CN2011104591168 A CN 2011104591168A CN 201110459116 A CN201110459116 A CN 201110459116A CN 103085180 A CN103085180 A CN 103085180A
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- scroll saw
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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Abstract
A wire saw control system (1) for operating a wire saw (100) is provided. The wire saw is adapted for cutting a wafer (302, 304, 306, 308). The wire saw control system is configured to control the temperature of a wire (230) of a wire saw and includes a temperature sensor (20) for measuring the temperature of the wire; and a controller (25) for controlling at least one operating parameter of the wire saw based on the measured temperature. Measuring the temperature particularly includes measuring the temperature distribution. Furthermore, a method for controlling the temperature and for operating a wire saw is provided.
Description
Technical field
Embodiments of the invention relate to the temperature of the line (wire) that is specifically used for controlling scroll saw, more specifically are used for the scroll saw control system of the Temperature Distribution of control gauze (wire web); Scroll saw; Be used for to control the method for temperature of the line of scroll saw; And the method that is used for the operation scroll saw.Existing scroll saw can utilize scroll saw control system according to the present invention to be renovated.The present invention relates to multi-wire saw particularly.Scroll saw of the present invention is applicable to cut or the stiff materials of sawing such as silicon or quartzy block etc. particularly, such as being applicable to cutting silicon, being used for butting machine (squarer), cutter etc.
Background technology
Scroll saw is used for cutting out blocks or brick shape body, thin slice (such as semiconductor wafer) etc. from a stiff materials such as silicon etc.In such equipment, from the bobbin feed line, and line is by the guiding of line guiding tube and tensioning.The line that is used for sawing usually is provided with grinding-material.As a kind of selection, grinding-material can provide in the mode of slurry.This completes before can contacting online the material that will be cut at short notice.Therefore, grinding agent is carried to cutting position for cutting material by line.Select as another kind, grinding agent can utilize to apply and arrange on line, and for example diamond wire is such.For example, diamond particles can be arranged on metal wire by coating, and wherein diamond particles embeds in online coating.Thereby grinding agent firmly is connected with line.
Line is by the guiding of line guide and/or tensioning.These line guides usually are coated with one deck synthetic resin, and portray the groove with point-device geometry and size.Wire-wound line guide is reeled and is formed net or gauze.During sawing, line moves with sizable speed.Gauze has produced will be by the opposite power of advancing of the brace summer of the workpiece of sawing or support member with maintenance.During sawing, be by the workpiece movable of sawing by gauze, wherein should mobile speed determine cutting speed and/or can be by effective cutting area of sawing in given time quantum.
Usually, thus for the thickness that reduces otch and the material that cuts the waste, tend to use thinner line.Also diamond wire is used in expectation.These fine rules and diamond wire are usually easier to be impaired, and under higher strain, line more easily ruptures.In addition, expectation improves cutting speed to improve the output of scroll saw.Be used for making workpiece movable to be subject to the restriction of some factors by the maximal rate of net and the maximum effectively cutting area in given time quantum, these factors comprise linear velocity, will be by the precision of the material hardness of sawing, interference effect, expectation etc.When speed increased, strain on line usually also can increase.Therefore, under higher saw cutting speed, avoid the problems referred to above of the damage of line, unnecessary wearing and tearing, inefficacy or fracture even more crucial.
Such as the advantage of the diamond wire that can realize higher saw cutting speed etc., can be attended by such as to the lower resistance of fracture and per unit length price more high aspect.When adopting diamond wire, can measure to guarantee that the higher tendentiousness for fracture can be owing to causing yield reducation downtime.
It is very important operating scroll saw in the mode of the vibration of Avoids or reduces sawing quality fluctuation, the fluctuation of sawing width, line or the even fracture of line.In the worst case, if fracture, the result that might occur being harmful to.The free end of line can not controlled mode move in machine, may damage other parts of line guidance system or machine.In addition, if thread breakage and continuation are mobile, it to be pulled from the object of wanting sawing.
In addition, sawing process stands to optimize to keep cost low as far as possible.Except the unsuitable sawing quality of avoiding causing due to for example fluctuation of line characteristic, perhaps or even outside the shut-down that causes due to inefficacy or the fracture of line, total feed speed that also must optimization process is to realize maximum productivity.
Known scroll saw generally includes the setting value of following setting: be used for ingot bar by the feed rate of net, and linear velocity, line enters and withdraws from the tension force of net, slurry flow rate, and slurry temperature.In case after cutting beginning, monitoring slurry density and slurry viscosity, slurry temperature and motorization (motorization) parameter alternatively sometimes are to allow end user's follow-up parameter relevant with processing.Yet, fact proved that this can not be provided for the enough information of cutting optimization process.
Summary of the invention
According to foregoing, provide a kind of scroll saw control system for the operation scroll saw.Scroll saw is applicable to cut crystal.The scroll saw control system is configured to control the temperature of the line of scroll saw, and comprises: temperature sensor, and it is used for the temperature of slotted line; And controller, it is used for controlling based on measured temperature at least one operating parameter of scroll saw.
According to an aspect, provide the scroll saw that comprises scroll saw control system described here.Particularly, scroll saw can be multi-wire saw.
According on the other hand, existing scroll saw can utilize scroll saw control system described here to renovate.Disclose the method that is used for the renovation scroll saw, the method comprises scroll saw control system described here is offered scroll saw.
According to another aspect, provide the method for the temperature of the line that is used for the control scroll saw.Scroll saw is applicable to cut crystal.The method comprises the following steps: the temperature of slotted line, and determine at least one operating parameter of scroll saw based on measured temperature, and control scroll saw based on described at least one operating parameter.
According to another aspect, provide the method that is used for the operation scroll saw.The method that is used for the control scroll saw comprises the method for the temperature that is used for control line described here.
It is obvious that other advantage, feature, aspect and details will become from claims, specification and accompanying drawing.
Embodiment also realizes the device of disclosed method for being used for, and comprises for the device feature of carrying out each described method step.These method steps can nextport hardware component NextPort, the computer by suitable software programming, both any combination mode or carry out in any other mode.In addition, according to embodiments of the invention also for the method for operating of described device.It comprises the method step for each function of implement device.
Description of drawings
In order to understand in detail the mode of above-mentioned feature of the present invention, but reference example is carried out the description more specifically of the invention that summarizes above.Accompanying drawing relates to embodiments of the invention and is described to as follows:
Fig. 1 shows according to the scroll saw control system of embodiment described here and the schematic side elevation of scroll saw.
Fig. 2 shows according to the scroll saw control system of embodiment described here and the schematic plan of scroll saw.
Fig. 3 shows the schematic front view according to the summary of the scroll saw control system of embodiment described here and scroll saw.
Fig. 4 shows the schematic front view according to the summary of the scroll saw control system of embodiment described here and scroll saw.
Fig. 5 shows the schematic diagram that illustrates according to the measurement temperature of the line of the first example.
Fig. 6 shows the schematic diagram that illustrates according to the measurement temperature of the line of the second example.
The specific embodiment
To mention in detail each embodiment of the present invention now, one or more examples of each embodiment illustrate in the accompanying drawings.In the following explanation about accompanying drawing, identical Reference numeral refers to identical assembly.Usually, difference with respect to each embodiment is only described.Each example provides in the mode that the present invention is made an explanation, and is not intended to as limitation of the present invention.In addition, can be used on other embodiment or with other embodiment as the explanation of the part of an embodiment or the feature described and be combined to produce another embodiment.This explanation is intended to comprise such modification and variant.
In the following description, " scroll saw control system " or simply " control system " can be regarded as the system of part or all function of controlling scroll saw.Specifically, this can complete by the controller of scroll saw control system.Usually, the scroll saw of understanding here can be cutter, butting machine or wafer cutting line saw.Usually, control system is connected to sensor with the parameter of monitoring machinery operation and sawing process.The scroll saw control system comprises temperature sensor and controller, and this controller is used for controlling based on measured temperature one or more operating parameters of scroll saw.As below describing in more detail, the scroll saw control system also can be connected to the motor that actuator and equipment move line with manipulation.Usually, the scroll saw control system can comprise for ordering and report alternately the equipment of the situation of sawing process with reception with the individual.Controller can also be connected to computer network as described herein, directly or remotely to control by the individual or such as the automatic system of computer etc.
According to embodiment described here, the method of operation scroll saw can realize in the mode of computer program, software, computer software product and relevant controller etc., wherein the relevant controller input/output unit that can usually have CPU, memory, user interface and communicate with the corresponding assembly of scroll saw.These assemblies can be one or more in following assembly: motor, thread breakage detecting unit, line follow-up mechanism etc., the below will describe in more detail.
Usually, scroll saw comprises on online moving direction and to carry and the line guide of guide line.The scroll saw control system also provides the control of line tension.The line that provides forms gauze particularly in the cutting zone of scroll saw.Therefore, term " gauze " is usually directed to by line formed net between two guiding tubes.Should be understood that gauze can comprise more than a working region, the working region is defined as carries out the zone that sawing is processed.Therefore, according to some embodiment described here, gauze can have a plurality of working regions that formed by one or more lines.
For example, describe in further detail as following embodiment with reference to Fig. 1 to Fig. 3, scroll saw can comprise the gauze of two horizontal orientations, and gauze for example comprises the working region of two or four horizontal orientation.In this case, promote ingot bar by limiting the gauze of working region by in the vertical direction, carry out sawing.Usually, and be not limited to any specific embodiment described here, phrase " cut crystal " comprises " ingot bar is cut into wafer " particularly.Can carry out simultaneously sawing in working region, top and working region, bottom.Scroll saw can also comprise two nets of vertically arranging.According to some embodiment, the net of vertically arranging is used for pipeline between the working region of two horizontal orientations.During the conveying between the working region, line can obtain cooling.According to other embodiment, the working region is vertically-oriented.
For modern scroll saws such as harvester, butting machine or multi-wire saw, expect that it can cut the stiff materials such as semi-conducting material (such as silicon, quartz etc.) etc. at high speed.Linear velocity, namely to move through the speed of scroll saw can be for example 10m/s or higher to line.Usually, linear velocity can be in the scope of 10m/s to 15m/s.Yet, also expect such as the higher linear velocity of 20m/s, 25m/s or 30m/s etc.According to some embodiment, the movement of line is only unidirectional, namely always is in direction of advance.According to other embodiment, movement can comprise the movement of direction of retreat, and particularly, movement can be moving forward and backward of that the moving direction of its center line is changed repeatedly, line.
For the linear velocity solution with expectation bursts at the seams, has the feeding bobbin of untapped line to rotate up to thousands of rotating speeds that turn per minute.For example, can arrange 1000 to 2000rpm bursts at the seams for solution.
Can be in embodiment that other embodiment described here are combined, line can have different diameters according to the type of equipment.In belonging to the embodiment of butting machine, linear diameter can be that for example 300 μ m are to 350 μ m from about 250 μ m to about 450 μ m.In the embodiment that belongs to the wafer cutting line saw, linear diameter can be from 80 μ m to 180 μ m, more typically from 120 μ m to 140 μ m.For all embodiment in front, the torsion of line may increase the risk of thread breakage or coating damage, is therefore favourable without twist operation.
By using diamond wire, to compare with traditional steel wire, output can improve 2 times or or higher.To can be called the material feed rate with respect to the translational speed of mobile line by the material of sawing.Here the material feed rate in described embodiment for the situation of wafer cutting line saw at 2 μ m/s in the scope of 15 μ m/s, usually at about 6 μ m/s in the scope of 10 μ m/s, for the embodiment that belongs to butting machine from 20 μ m/s to 40 μ m/s, usually approximately 28 μ m/s in the scope of 36 μ m/s.
According to typical embodiment, use multi-wire saw.Multi-wire saw can obtain for the high yield of the silicon wafer of semiconductor and photovoltaic industry and high quality slices.Multi-wire saw generally includes can unidirectional (that is, only on direction of advance) or two-way (namely moving forward and backward) mobile high strength steel wire with the execution cutting action.
Line can be reeled on online guide, and the line guide is hereinafter also referred to as guiding tube, and it forms groove with constant space usually, forms the horizontal net of parallel lines or gauze.The line guide rotates by driver, and driver makes whole gauze move to the relatively high speed of 20m/s with 5m/s for example.If necessary, some high flow rate nozzles can offer mobile line with slurry (slurry).Here the slurry of understanding refers to the liquid carrier of the abrasion resistant particles (for example, silicon-carbide particle) with suspension.As mentioned above, during cutting action, ingot bar can be pushed through gauze.Perhaps, ingot bar can be fixed and gauze is pushed through ingot bar.Gauze feeding bobbin provides needed new line and wire reel-up bobbin to store the line of using.
Usually, through after whole gauze, line with it initial diameter before sawing process compare the working region that the diameter that has reduced withdraws from gauze.The wearing and tearing of line depend on processing procedure.Particularly, cutting speed is higher, and the temperature of generation is higher, and the line wearing and tearing are more serious.
But expectation especially provides the change number of times of the line feeding bobbin that does not use line by reducing bobbin, by with higher safe speed operation slicing processes and by avoiding the downtime due to the line fault, optimizes the productivity such as the scroll saw of aggregated capacity or feed rate etc.Simultaneously, the not satisfied sawing result that causes due to overheated line is avoided in expectation, and the safe clearance with respect to thread breakage is kept in expectation.
The inventor finds, and is deteriorated in the process of the some wafers of sawing and particularly from a working region of scroll saw to the process of another working region such as the geometric parameter of average wafer thickness and/or wafer thickness fluctuation etc.Also be accompanied by this deteriorated when reversing the moving direction of line.Due to as that discuss, very limited about the useful information of present sawing process, therefore be difficult to find this deteriorated behind reason in background parts of the present disclosure.
Technically, thread path is cut into slices to one or more ingot bars in the working region circularly, and is transported to other working region by guiding tube, perhaps again is transported to identical working region.Usually, gauze is cut into slices to one or more ingot bars in the working region, top, and then is transported to the working region, bottom, and in the working region, bottom, one or more ingot bars is cut into slices.Hereinafter, line usually is transferred and gets back to the working region, top.If changed moving direction during sawing, the working region when line may be transferred loop line and arrives, rather than be transported to next working region.
During sawing, line grinds in the inside of ingot bar the place that occurs, and namely usually is heated in the inside of wafer.Therefore, line heats up when the cutting ingot bar.In the outside of ingot bar, line by with such as the surrounding heat-shift of slurry, air and guiding tube or other line guides etc. and cooling.
When checking the temperature of line, the inventor finds, processes according to known scroll saw, and the temperature of line is not identical between the side (being the side that line arrives from the feeding bobbin) of working region and opposite side (namely line is moved to a side of reel afterwards).From the angle of processing, if the line temperature raises to opposite side from a side of scroll saw, be associated with line so, the temperature correlation effect changes.This has caused the effect do not expected, and some in these effects of not expecting are discussed below.
At first, the rising of temperature causes the thermal stretching of line.Yet the line of the line of elongation, especially non-homogeneous elongation has some shortcomings.Particularly, because elongation has discharged tension force.Yet, expect to avoid or reduce at least interior online different tension force.
Secondly, the temperature of rising also may change the coefficient of friction between line and guiding tube.Can produce a lot of impacts.For example, if surpassing the predetermined angular line, cross section may adhere on guiding tube.For example, the scroll saw according to embodiment described here can comprise four guiding tubes usually.Usually, each guiding tube makes the moving direction of line change 90 °.Due to the adhesion do not expected of line to guiding tube, may occur line with more than 90 ° for example 92 ° adhere to one or more guiding tubes.In case line has lost the adhesion to guiding tube, its from guiding tube rebound back the expectation the path.This " stick-slip (stick-slip) " behavior can cause vibration and oscillation, cause the loss of the tension force in line, and causes in the worst case thread breakage.
The 3rd, described those sawings here obtain in the embodiment of support of slurry, and the surface tension of line and wettable can depend on temperature.Therefore, the temperature when the temperature of line when not raising and when raising, be transported to the slurry of ingot bar, on the amount of the slurry that is transferred, difference may occur particularly by line.This causes different nonferromagnetic substances conversely, and may cause in the worst case inappropriate sawing result.
Therefore, the disclosure provides the temperature sensor that is used for measuring the temperature on scroll saw.Particularly, the disclosure can be measured at least some parts of gauze one or more temperature sensors of the Temperature Distribution of (usually upper in the outlet from the entrance of line to line whole online).Here at least two of being included in that the diverse location place of gauze measures of the Temperature Distribution of understanding, at least five temperature values usually.According to typical embodiment, some temperature sensors are spaced equally from each other by to be opened.
According to embodiment, measure the gauze temperature with the temperature sensor of microminiaturization.According to embodiment, be arranged on horizontal frame the vertical part of the common extend through net of this horizontal frame according to temperature sensor of the present disclosure.Here the frame of understanding generally includes plate, solid shape body or housing, and it can be plastics, metal or other any suitable materials.According to embodiment, measured about the information of temperature, specifically about the information of online Temperature Distribution, be fed back to the controller of scroll saw to control one or more sawing parameters.
The temperature that for example, line may the occur outlet from the entrance of line to line on the net and raising.That is, at least some in the previously discussed effect of not expecting may occur, and cause unsuitable sawing result or even caused operation to stop under worst case.Therefore, any such situation is controlled and/or avoided to the speed that is used for can for example reducing based at least one the controller that measured temperature is controlled the operating parameter of scroll saw line with optimization process.Normally and be not limited to the present embodiment, the speed that reduces line can be accompanied by and reduce feed rate, and namely workbench promotes ingot bar by the speed of gauze.
According to the present embodiment, one or more can find optimal operation parameter at the scene during sawing is processed in.Usually, optimal operation parameter one or more are according to the line temperature of actual measurement and permanently upgrade (for example, with predetermined time interval).Usually, and be not limited to any embodiment, line moves in the mode of closed loop, and wherein one or more operating parameters upgrade based on one or more measured temperature permanently.
For example, can reduce linear velocity based on measured temperature.Thermometric result can be also such, and namely due to the line temperature, the line Temperature Distribution on gauze is gratifying specifically, so operating parameter can remain unchanged.
According to aspect of the present disclosure, provide at least one series of temperatures sensor that usually is arranged on horizontal frames.Usually, frame is oriented perpendicularly to the orientation of line.One or more sensors usually be arranged on thread path each vertically on the one in part.
According to some aspects, can measure the Temperature Distribution of gauze.Particularly, can measure the differentiation of the gauze temperature of line when line moves to the outlet of line from the entrance of line.Usually and be not limited to any specific embodiment, the entrance of the line of understanding here and the outlet of line can refer to place in it scroll saw and carry out the entrance and exit in the space of sawing process.Yet from the viewpoint of broad sense more, the entrance of line refers to the side that untapped line is provided of gauze, and the outlet of line refers to the side after the sawing of gauze.
In other words, exemplary embodiments of the present disclosure provides: the actual line temperature of measuring on whole gauze from the inlet to the outlet develops.This Information Availability comes one or more in the control operation parameter, particularly one or more in the retouching operation parameter.For example, one or more can the choosing from the flow rate of the speed of table, linear velocity, slurry and/or slurry temperature in operating parameter.Scroll saw also can be provided for the entrance such as the refrigerating gas of compression and/or cooling air etc.If gas is used to cooling line, between the phase of expansion of gas, usually utilized Joule-Thomson effect so.Except air, can also utilize other gas.Therefore, another operating parameter can be input quantity and/or the temperature of refrigerating gas.One or more operating parameters are controlled to make whole online gauze temperature keep stationary temperature or follow selected trend usually.
Fig. 1 shows the schematic side elevation that comprises according to the scroll saw 100 of the scroll saw control system 1 of the present embodiment, and Fig. 2 shows the schematic plan that comprises according to the scroll saw 100 of the scroll saw control system 1 of the present embodiment.Scroll saw control system 1 comprises at least one temperature sensor 20 of the temperature of slotted line.Temperature sensor 20 is connected to controller 25 via cable or wireless connections 15 usually.Controller 25 is configured to control sawing process.
Scroll saw 100 has and comprises four line guiding tubes 112,114,116,118 line guiding device.Usually, the line guiding tube is coated with synthetic resin layer, and portrays the groove with point-device geometry and size.Distance between groove, namely the spacing of groove determines the distance B 1 between two or two adjacent lines 230.Distance B 1 deducts the diameter of line and has set the upper limit of being cut the thickness of the sheet that obtains by scroll saw.
For example, when the 3rd medium that used such as slurry etc., sheet can be than the difference between distance B 1 and linear diameter thin approximately 10 μ m to about 40 μ m.Usually, between 140 μ m, and distance B 1 is from 230 μ m to 450 μ m to line thickness at 120 μ m, usually from 330 μ m in the scope of 370 μ m.As example, groove can have less than the spacing of 300 μ m or distance.According to can with some embodiment of other embodiment combinations described here, the spacing of groove or distance cause interval between adjacent lines approximately from 110 μ m to about 350 μ m, normally from 190 μ m to 250 μ m.According to foregoing, embodiment described here can provide larger cutting area and higher cutting speed.
According to can from the different embodiment of other embodiment combinations described here, spacing, be that distance between groove can be at 330 μ m in the scope of 370 μ m, for example less than or equal to 350 μ m; Distance between adjacent line can be at 110 μ m in the scope of 350 μ m, and for example 190 μ m are to 250 μ m or even less than or equal to 220 μ m; And/or the wafer thickness that produces can be at 120 μ m in the scope of 250 μ m, and for example 180 μ m are to 220 μ m or even less than or equal to 200 μ m.Therefore, should be noted that groove pitch and trench geometry are applicable to line thickness and line type usually, and be applicable to wafer thickness.
In addition, each line guiding tube 112,114,116,118 can be connected to motor or driver.In order to reduce the complexity of accompanying drawing, only show motor 126 in Fig. 1, and only show motor 122 and 124 in Fig. 2.Motor is connected to each guiding tube.For example, motor 122 can be connected to guiding tube 112, and motor 124 can be connected to guiding tube 114, and motor 126 can be connected to guiding tube 116.In addition, motor 122,124,126 can be controlled via cable or the wireless connections cause controller 25 of all connectors 16 as shown in Figure 1 etc.
According to some embodiment, each guiding tube is by Motor Drive.According to embodiment, each motor can be suitable for carrying out moving forward and backward of line.The moving direction of line also can as in Fig. 1 utilize as shown in mark 215,225 indicated arrows, do not change during sawing.In an embodiment, those embodiment as depicted in figs. 1 and 2 are the same, and line guiding tube 112,114,116,118 is respectively directly driven by motor.Usually, each line guiding tube can directly be installed on motor reel such as the axle 123 in Fig. 2,125 etc. respective motor.In certain embodiments, one or more in motor are water-cooled.
During cutting action, one or more ingot bars 302,304,306,308 can be pushed through gauze to be cut into sheet.This is respectively by being clipped between ingot bar 302,304 and the arrow that is clipped between ingot bar 306,308 is indicated.Usually, one or more ingot bars are supported by the workbench (not shown), and wherein workbench can move with the speed that is called as " speed of table " here.Perhaps ingot bar 302,304,306,308 can be fixed, and gauze is pushed through ingot bar.According to embodiment, one or more ingot bars are cut into a large amount of wafers, such as at least 500 or even more etc.The typical length of ingot bar particularly in the situation that polysilicon in the scope up to 250mm, and particularly in the situation that monocrystalline silicon in the scope up to 500mm.
According to typical embodiment, line feeding bobbin 134 arranges wired 230 incorporating section.Line feeding bobbin 134 is in the situation that the complete line of usually holding the hundreds of km.In the operating period of scroll saw, line is fed by line feeding bobbin 134 and is sent to the sawing processing.The entrance of line here represents with Reference numeral 281.For example, scroll saw can be placed in biopsy chamber (slicing chamber) and line must pass through locking device (lock).Identical setting represents with Reference numeral 282 here applicable to the outlet of line.
In the operating period of scroll saw, but such as one or more motor drive wire guiding tubes 112,114,116,118 of motor 126 grades, make the line guiding tube around its longitudinal axis rotation.In those embodiment that move with the front and back reciprocating manner online, can move forward during the very first time interval that is equal to or greater than second time interval or second distance or the first distance, carry out moving backward of line during second time interval or second distance.In the situation that larger very first time interval or the first distance, although the seesawing of replacing of carrying out of line, line is transported to wire reel-up bobbin 138 from line feeding bobbin 134 lentamente.
In one embodiment, in motor one, for example motor 126, as main motor, and are connected to other guiding tubes 112,114, all the other motor of 118 as from motor.In other words, main motor 126 can be controlled operation from motor so that follow main motor 126 from motor.Therefore, improved operation synchronous of set motor and can keep the operation of motor synchronous during sawing.
Some embodiment according to making up with other embodiment described here is provided with two or more bobbins to form at least one gauze.For example, can with two, three or even four bobbins line is set.Therefore, according to different embodiment, can provide for example method of the thinner wafer in the 170 μ m scopes at 100 μ m of sawing.Usually, also can come the thinner wafer of sawing with higher speed, for example at 2 μ m/s to 12 μ m/s, the common about material feed speed of 5 μ m/s in the 7 μ m/s scopes.
Compare with single wire system, thereby by having two or more bobbins and having the two or more pieces line, can reduce the load on every line.Usually, compare with the two-wire net, load is because the long-pending increase with respect to the line surface area of wafer surface increases for single gauze.The load that increases will cause lower cutting speed.Therefore, use the two or more pieces line can improve cutting speed, for example, thereby can provide more than or equal to 12m
2Effective cutting area of/h or cutting area speed.
The top view of Fig. 2 can identify the reader, according to embodiment of the present disclosure, a plurality of temperature sensors 20 can be set.For example, at least five or at least ten temperature sensors even can be set.Usually, temperature sensor is in line along frame 222.The frame of support temperature sensor 20 is oriented orthogonal to the direction of line usually.Each temperature sensor can be configured to measure the temperature of a line part.According to other embodiment and be not limited to the embodiment of Fig. 2, each temperature sensor can be configured to measure the temperature of several parallel line parts.
According to typical embodiment, one or more temperature sensors are noncontacting proximity sensors, that is, its be configured in the situation that not contact wire measure temperature.Particularly, temperature sensor can be configured to be recorded in the radiation in infra-red range, and should be called infrared sensor here.For example, infrared sensor can be infrared camera.Temperature sensor such as infrared sensor or camera etc. can be equipped with analytic unit extraly, and to be used for the analysis to measure result, the actual temperature of outlet is inferred in the radiation that is specifically used for sending according to line.Such as, but not limited to this example, can be according to the infrared power of each line part institute radiation that measures, come accounting temperature based on Si Difen-Boltzmann law.
Yet, according to other embodiment, measure transmitting power and one or more just enough based in this output control operating parameter.Suppose the T according to P=σ
4The transmitting power P of (σ is Si Difen-Boltzmann constant) and the relation between temperature T usually should comprise according to phrase of the present disclosure " measurement temperature " and measure transmitting power or any other temperature correlation value.Therefore, the temperature sensor of understanding here can be radiation or the power that can measure temperature, emission, perhaps the physical quantity of any other and temperature correlation." with the physical quantity of temperature correlation " understood in this article should refer to the amount that has known relation such as power (via Si Difen-Boltzmann law) etc. and temperature.
The analysis of sensor measurement can be completed by controller 25.Monitor that at infrared sensor in the embodiment of some line parts, analytic unit (or controller) can be configured to the temperature that each is measured and be assigned to each line part.
According to embodiment, one or more temperature sensors, infrared sensor can be equipped with for such as come the device of clear light passage by air cleaning etc. specifically.Therefore, can be non-maintaining according to embodiment of the present disclosure or mode low maintenance operate scroll saw.
According to embodiment, the collected information about temperature is fed back to controller in continuous loop.According to current understanding, usually can use the intelligent signal processing that comprises particularly Mathematical Modeling, develop to predict further temperature.For example, controller is applicable to adopting linear regression based on measured temperature value, depending on prediction and may further regulate to one or more operating parameters the temperatures that obtains.
For example, but usage ratio-integral-derivative controller (PID controller) is used as general controls circuit feedback mechanism (controller).The PID controller can calculate " error " value as the difference between the set point of measured temperature and expectation.Controller attempts reducing this " error " by adjusting at least one operating parameter.
Fig. 3 shows the front view for the part of the embodiment of the scroll saw control system 1 of scroll saw.For illustrated purpose, in Fig. 3 and Fig. 5, show the line part (dotted line) in the front portion of equipment.Be positioned at the rear of frame 222 due to temperature sensor 20, therefore can not identify temperature sensor 20 in given angle.
Usually, if temperature survey is undesirable, controller 25 starts reaction.For example, thermometric absolute value can not be too high.In addition, online Temperature Distribution can not be too inhomogeneous, for example, in the temperature at outlet side place with the degree that can't make us accepting higher than the temperature at the entrance side place of gauze.Such reaction usually and what be not limited to the present embodiment is the reduction of linear velocity and/or the speed of table.Alternatively or additionally, such reaction can be to provide the reduction to the temperature of the increase of the amount of the slurry of line and/or slurry.Usually, and be not limited to the present embodiment, scroll saw of the present disclosure can have for one or more slurry nozzles that slurry is provided to line.
Temperature sensor usually be placed with should be monitored or the line part of management adjacent.Usually, one or more temperature sensors are placed with the gauze part as the working region is not adjacent.Particularly, make two nets of horizontal orientation be used for sawing and process, temperature sensor is placed on one or two of gauze of vertical layout usually so.According to embodiment, at least one temperature sensor is placed between two working regions.
According to typical embodiment, be provided with a plurality of temperature sensors.Particularly, this is applicable to comprise the scroll saw of two or more pieces line particularly.Under these circumstances, usually be set at least one temperature sensor of every line, every line some (at least two) sensor typically.In operation, every line is by at least one temperature sensor measurement.Usually, and be not limited to comprise the embodiment of two or more pieces line, two or more temperature sensors can be by 25 operations of identical controller.
According to can with the another embodiment of other embodiment combination, can use thinner line, for example have the line of the thickness of maximum 120 μ m or maximum 80 μ m.Thereby, increased the cutting area.Usually, in the situation that carry out sawing by the slurry support, the line rugosity reduces between online operating period.Therefore, if single line is used for larger cutting area, exist line to attenuate rapidly until the risk of thread breakage occurs.Therefore, use two lines to consist of gauze, for example continuous gauze, thereby reduced on the one hand load and the higher cutting speed of permission on line, and on the other hand, allow thinner line, thereby wherein thinner line allows less linear distance to increase the cutting area.
Usually and be not limited to any embodiment, each temperature sensor is applicable to check at least one line part.According to typical embodiment, particularly in the situation that infrared sensor, each sensor can be measured the temperature of some lines parts or such as amount of radiation etc. and physical quantity temperature correlation.Particularly, each temperature sensor can be monitored a plurality of line parts, typically from 4 to 100 parallel line parts, more typically from 20 to 50 line parts.Usually basically discharge delegation such as two, three or more etc. a plurality of temperature sensors.
According to embodiment, Temperature Distribution or the power of net or the information of radiation profiles about net is collected in expectation.Therefore, in this case, at least two temperature sensors are set usually.For example, as shown in Figure 4, temperature sensor 20 can be arranged on entrance side and sentence the information of collecting about the temperature of the line part of (standing in the visual angle of line) before section or during beginning or some lines part.In addition, can place another temperature sensor 20 to collect the information about the temperature of the line after repeatedly cutting in online exit.Then, extra analytical equipment (not shown) as described earlier or controller 25 can assessment of the measurement result, to find that temperature raises from the inlet to the outlet.
Here in described embodiment, the distance between line is from 110 μ m to 350 μ m.Distance between temperature sensor 20 and line 230 depends on a plurality of factors, such as the factor of the type of the type of the temperature sensor that adopts, its technical specification, line and fineness degree etc.Usually, this distance from 0.2mm to 20mm, is from 1mm to 10mm more typically typically.
In an embodiment, in the situation that unsuitable temperature and/or Temperature Distribution, controller make at least one operating parameter of operation change of scroll saw.For abnormal temperature, the camera control unit is sent warning signal extraly in the mode such as buzzer, loudspeaker, loudspeaker or luminaire etc.This unit can also send signal to external equipment via computer network etc.The position of overheated line part or the Temperature Distribution of whole gauze can show graphically via the diagrammatic representation of the gauze that comprises a plurality of line parts.
In an embodiment, controller is applicable to distinguish the different brackets of unsuitable temperature and/or Temperature Distribution.In an embodiment, controller and/or extra analytic unit are applicable to determine whether measured temperature and/or Temperature Distribution should cause the one or more change in the operating parameter of scroll saw.
Usually, reaching at most first threshold with the temperature of expection and/or the deviation of Temperature Distribution can make controller keep operating parameter constant.Can cause first of at least one operating parameter to change with the temperature of expection and/or the deviation of Temperature Distribution greater than first threshold, wherein the first variation is compared little usually.Can cause second of operating parameter to change with the deviation of desired temperature and/or Temperature Distribution greater than Second Threshold, wherein second changes usually than the first variation greatly, etc.
The variation of one or more operating parameters can comprise one or more in following action.At first, according to embodiment, linear velocity, may reduce in combination with the speed of table, be used as reply.Secondly, according to embodiment, another reply can be the amount that increases the slurry that is provided for line.The 3rd, according to embodiment, another reply can be the temperature that reduces the slurry that is provided for line.The 4th, another reply can be to increase to be directed to line to carry out the amount of cooling cooling-air or gas.At last, in the situation that the extreme changes of temperature that common expectation is avoided by foregoing action, can shut-down operation.
Can define threshold value, threshold value can be stored in such as controller etc., as the part of scroll saw control system or with data storage cell that the scroll saw control system is associated in.For example, the controller shown in figure 25 can be provided with such data storage (not shown).The scroll saw control system is applicable to the temperature value of measured line and the threshold of storing.Can come the triggering behavior according to result.
For example, sets of threshold values may be defined as and comprises for example first threshold, Second Threshold and the 3rd threshold value.And first threshold can refer at entrance side or near the temperature sensor location of entrance side, and Second Threshold can refer to the temperature sensor location in the middle of gauze, and the 3rd threshold value can refer at the outlet side of scroll saw or near the temperature sensor location at outlet side place.In case the temperature value of actual measurement has surpassed any one in the threshold value, can trigger the reaction reply of the controller the redefining of operating parameters such as linear velocity and/or the speed of table.Usually, and be not limited to the present embodiment, line and/or the speed of table can reduce at least 3%, typically 5% or more.
According to another embodiment, relatively in the measured temperature in some positions of net, and in case the relative mistake of measured temperature value has surpassed threshold value, can not rely on the absolute value of measured temperature and trigger reply.That is, can analysis temperature distribute, and the control of at least one operating parameter can be based on the difference in Temperature Distribution.
Yet present described embodiment refers to discrete threshold value, usually, can define the function that will interrelate such as at least one operating parameter of the scroll saw of linear velocity etc. and measured temperature or measured Temperature Distribution (or be equal to distribution, for example transmission power distribution).For example, make t (x) for to depend on the measurement temperature of the position x in gauze, and to make v be the speed of scroll saw operation, scroll saw should be with as the speed of the function of temperature funtion t (x), namely operate according to v=f (t (x)) so.
For example, in the situation that the temperature difference in net is larger,, can reduce the speed of line and workbench at namely dt (x)/d (x)＞＞0 o'clock.In the situation that Temperature Distribution is substantially average, namely during dt (x)/d (x) ≈ 0, speed can remain unchanged or even increase.Obviously, but these exemplary replies are usually directed to the situation less than the maximal rate of scroll saw normal operating.In addition, replacement speed can be used other operating parameters described here.
Therefore, the disclosure provides the measurement of the actual line temperature of the result of processing as ongoing sawing.Particularly, usually allow to take instant measure, to be reduced in the larger temperature contrast in gauze.Temperature sensor is applicable to allow real-time fast acquiring system usually.For example, in the situation that infrared camera, it is applicable to move real-time rapid image and obtains system.Then the information of obtaining can be used for keeping operating parameter, reduces or accelerate the speed of table and/or linear velocity.Special-purpose software displays temperature and/or Temperature Distribution and be provided for the device that automation regulates and also be fine.
Fig. 5 illustrates the temperature T according to the line part of the time that the depends on t of the first example.(comprise that two adjacent ingot bars are cut into slices in a working region, as shown in Figure 1) temperature of line part is in the first temperature T 1 before cutting for the first time.Temperature during cutting for the first time is because grinding rises to temperature T 2.When line partly was transported to next working region, line can be cooled to the temperature between T1 and T2.Then, line partly is used for another time cutting (two other ingot bar a working region), makes temperature rise to T3 greater than T2.After this section, line is moved to next working region.At mobile time durations, line can be cooling, yet it can not be cooling fully.Therefore, during cutting (two ingot bars in a working region) next time, the temperature of line rises to the T4 greater than T3.
Described the first example has previous described shortcoming.Particularly, the temperature of line makes temperature distributing disproportionation even in whole online rising.Particularly, the unsuitable modification meeting of the risk of thermal expansion and coefficient of friction is harmful to sawing process.
Therefore, according to embodiment of the present disclosure, in the temperature of each position slotted line.For example, can measure temperature in the position between two working regions, these positions are corresponding to time t_m1, t_m2 and t_m3 in temperature-time diagram of Fig. 5.Because the temperature stabilization ground in these positions increases (t_m3＞t_m2＞t-m1), therefore as reply, controller will be revised at least one operating parameter of scroll saw, for example, it can increase 10% with the amount of the slurry that provides, raises to avoid such temperature.
Fig. 6 shows the second example of the temperature-time diagram of line part during sawing is processed, and has wherein adopted method described here to avoid the situation as shown in the first example.Although this example refers at one time the sawing of two ingot bars in a working region and processes, can be understood as that described embodiment comprises at one time, ingot bar, the especially sawing process of an ingot bar of the arbitrary number in working region.With the same in the first example, line partly has temperature T 1 before cutting occurs for the first time.When line partly was used for section (two ingot bars a working region), its temperature was because grinding rises to temperature T 2.Afterwards, line is transported to next working region and can be cooling during carrying.In this example, it is cooled to temperature T 1 again.Therefore, but cutting heats up line only to rise to temperature T 2 again next time.This processes continuation.As apparent for the technical staff, therefore online online Temperature Distribution keeps constant.With Fig. 6 in the corresponding position, the temperature sensor discussed herein of time t_m1, t_m2 and t_m3 all measured identical or similar temperature largely.
Therefore, the second example refers to such situation, and namely controller remains operating parameter as in the situation that stationary temperature distributes is desired set parameter.In case illustrated curve changes, controller may need to revise one or more operating parameters of scroll saw.
Generally speaking, the disclosure allows that monitoring is from the entrance side to the outlet side, the temperature from a loop to the line of another loop on gauze develops.It allow to adapt to sawing process with the line temperature profile of the regulation of supporting stable thermal balance (that is, stationary temperature) or net.It also allows to come this to improve the cooling effectiveness of gauze by cooling jet and/or such as other cooling capacities of cooled compressed air etc.
Although the description of front is for embodiments of the invention, can designs other and more embodiment of the present invention in the situation that do not break away from base region of the present invention, and the scope of the invention is indicated in the appended claims.
Claims (20)
1. scroll saw control system, it is configured to control the temperature of the line of scroll saw, and described scroll saw is applicable to cut crystal, and described scroll saw control system comprises:
A) temperature sensor, it is used for measuring the temperature of described line;
B) controller, it is used for controlling based on measured temperature at least one operating parameter of described scroll saw.
2. scroll saw control system according to claim 1, wherein said temperature sensor is infrared sensor.
3. scroll saw control system according to claim 1 and 2, comprise a plurality of temperature sensors.
4. scroll saw control system according to claim 3, comprise at least five temperature sensors.
5. scroll saw control system according to claim 3, wherein said a plurality of temperature sensors are installed on frame.
6. scroll saw control system according to claim 5, wherein said frame is arranged to and the line perpendicular direction.
7. scroll saw control system according to claim 1 and 2, wherein said at least one operating parameter is to choose from the group that is made of the following: linear velocity, the speed of table, slurry flow rate, slurry temperature, cooling-air flow rate and cooling air temperature.
8. scroll saw comprises:
A. line, it is applicable to cut crystal;
B. scroll saw control system, it is configured to control the temperature of described line, and described scroll saw control system comprises:
I) temperature sensor, it is used for measuring the temperature of described line; And
Ii) controller, it is used for controlling based on measured temperature at least one operating parameter of described scroll saw.
9. scroll saw according to claim 8, wherein said at least one operating parameter is to choose from the group that is made of the following: linear velocity, the speed of table, slurry flow rate, slurry temperature, cooling-air flow rate and cooling air temperature.
10. according to claim 8 or 9 described scroll saws, wherein said line forms gauze, and described scroll saw control system is configured to measure the Temperature Distribution of described gauze.
11. scroll saw according to claim 10 wherein when the temperature difference in described Temperature Distribution surpasses threshold value, is revised described at least one operating parameter.
12. according to claim 8 or 9 described scroll saws, wherein a plurality of temperature sensors are installed to frame.
13. scroll saw according to claim 12, wherein said frame are arranged to and the line perpendicular direction.
14. a method that is used for the operation scroll saw, described scroll saw comprises the line that is applicable to cut crystal, and described method comprises the step of the temperature of controlling described line, and the step of wherein controlling the temperature of described line comprises the following steps:
A) measure the temperature of described line;
B) determine at least one operating parameter of described scroll saw based on measured temperature; And
C) control described scroll saw based on described at least one operating parameter.
15. method according to claim 14, wherein said operating parameter are to choose from the group that is made of the following: linear velocity, the speed of table, slurry flow rate, slurry temperature, cooling-air flow rate and cooling air temperature.
16. according to claim 14 or 15 described methods are wherein measured described temperature by measuring by the infra-red radiation of described line emission.
17. according to claim 14 or 15 described methods, the step of wherein measuring the temperature of described line comprises the temperature of measuring at the described line of two or more positions.
18. method according to claim 17, the step of wherein measuring the temperature of described line comprise the temperature of measuring at the described line at five or more line positions places.
19. according to claim 14 or 15 described methods, wherein said line forms gauze, and the step of measuring the temperature of described line comprises the Temperature Distribution of measuring described gauze.
20. method according to claim 19 wherein when the temperature difference in described Temperature Distribution surpasses threshold value, is revised described at least one operating parameter.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP11187103.4 | 2011-10-28 | ||
| EP11187103.4A EP2586583A1 (en) | 2011-10-28 | 2011-10-28 | Wire saw control system and wire saw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103085180A true CN103085180A (en) | 2013-05-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201120560628 Expired - Fee Related CN202685115U (en) | 2011-10-28 | 2011-12-23 | Coping saw control system and coping saw |
| CN2011104591168A Pending CN103085180A (en) | 2011-10-28 | 2011-12-23 | Wire saw control system and wire saw |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201120560628 Expired - Fee Related CN202685115U (en) | 2011-10-28 | 2011-12-23 | Coping saw control system and coping saw |
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| Country | Link |
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| EP (1) | EP2586583A1 (en) |
| CN (2) | CN202685115U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113815138A (en) * | 2021-09-29 | 2021-12-21 | 西安奕斯伟材料科技有限公司 | Processing method and system for improving warping degree of nitrogen-doped wafer |
| CN115847639A (en) * | 2022-12-19 | 2023-03-28 | 江苏茂硕新材料科技有限公司 | Temperature measuring device for diamond wire for cutting silicon wafer |
| WO2023226735A1 (en) * | 2022-05-26 | 2023-11-30 | 长沙韵为科技有限公司 | Curved form cutting wire saw machine and cutting method |
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| EP2586583A1 (en) * | 2011-10-28 | 2013-05-01 | Applied Materials Switzerland Sàrl | Wire saw control system and wire saw |
| CN107364025A (en) * | 2017-09-15 | 2017-11-21 | 中国有色桂林矿产地质研究院有限公司 | The unidirectional multitool cutter device of diamond wire single line |
| CN113601741B (en) * | 2021-08-09 | 2023-06-23 | 西安奕斯伟硅片技术有限公司 | Device for supplying mortar to a plurality of cutting lines for cutting silicon rods and silicon rod cutting equipment |
| CN113681738B (en) * | 2021-09-24 | 2022-07-19 | 燕山大学 | A vibration platform cutting auxiliary device for multi-wire saw |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN202685115U (en) | 2013-01-23 |
| EP2586583A1 (en) | 2013-05-01 |
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Application publication date: 20130508 |