CN103073193A - Loading rack for glass substrates - Google Patents
Loading rack for glass substrates Download PDFInfo
- Publication number
- CN103073193A CN103073193A CN2013100356026A CN201310035602A CN103073193A CN 103073193 A CN103073193 A CN 103073193A CN 2013100356026 A CN2013100356026 A CN 2013100356026A CN 201310035602 A CN201310035602 A CN 201310035602A CN 103073193 A CN103073193 A CN 103073193A
- Authority
- CN
- China
- Prior art keywords
- cross rod
- lower clamp
- sheer pole
- glass substrate
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to a loading rack for glass substrates, which comprises a frame, an upper cross rod, upper fixtures, a lower cross rod and lower fixtures, wherein the upper cross rod is fixed on the rear surface of the frame; the lower cross rod is fixed on the front surface of the frame; the upper fixtures are fixed on the upper cross rod; the lower fixtures are fixed on the lower cross rod; the same loading rack for the glass substrates is provided with at least one upper cross rod and at least one lower cross rod; the upper cross rod and the lower cross rod are arranged alternately; the lower cross rod is a square rod; one end of each lower fixture is welded on the upper surface of the lower cross rod; a U-shaped groove for clamping each glass substrate is formed at one end of each lower fixture far from the lower cross rod; and the length direction of each U-shaped groove is identical with that of the lower cross rod. When the loading rack is in use, one end of each glass substrate is clamped in each U-shaped groove of each lower fixture, and the other end thereof is fixed by each upper fixture; even if the lower fixtures deform due to heat, the glass substrates do not fall off; in addition, the lower fixtures are welded on the square cross rod; a contact area is large, so that the lower fixtures are firmer; and the falling probability of the glass substrates is reduced.
Description
Technical field
The present invention relates to field of vacuum coating, specifically relate to a kind of glass substrate loading frame.
Background technology
Loading frame a kind of workpiece that is absolutely necessary in vacuum plating, the lower clamp of present loading frame and cross bar as shown in Figure 1, lower clamp adopts the spring-piece type anchor clamps, is screwed on the cylindrical crossbar, upper anchor clamps have knob, card slot type and spring-piece type etc.Glass substrate one end tightens with lower clamp, and the other end is used anchor clamps and fixed.Lower clamp is very thin, is heated for a long time deformation can occur when vacuum plating, and the glass substrate on the anchor clamps easily comes off like this, thereby affects quality product; In addition, because lower clamp only is fixed on the cylindrical crossbar with a screw, the contact area of lower clamp and cylindrical crossbar is very little, and when loosened screw, lower clamp is easy to shake, and can cause equally glass substrate to come off.
Summary of the invention
Technical problem to be solved by this invention provides that a kind of stationarity is strong, the glass substrate loading frame of glass substrate difficult drop-off.
For solving the problems of the technologies described above, the invention provides a kind of glass substrate loading frame, comprise framework, cross tube, upper anchor clamps, sheer pole and lower clamp, cross tube is fixed on the framework rear surface, sheer pole is square pole, be fixed on the framework front surface, be fixed with anchor clamps on the cross tube, be fixed with lower clamp on the sheer pole, one end of lower clamp is welded on the upper surface of sheer pole, and lower clamp has the U-lag of engaging glass substrate away from an end of sheer pole, and the length direction of U-lag is consistent with the length direction of sheer pole, have a cross tube and a sheer pole on the same glass substrate loading frame at least, cross tube and sheer pole are alternately arranged.
During use, an end of glass substrate is stuck in the U-lag of lower clamp, the other end is used anchor clamps and is fixed, even the lower clamp temperature distortion can not cause glass substrate to come off yet; In addition lower clamp is welded on the square cross tube, contact area is large, makes lower clamp more firm, reduces the probability that glass substrate comes off.
Can weld a plurality of lower clamps on the cross tube, but must guarantee to be clipped on the same straight line under these, namely guarantee the rectilinearity of full wafer glass substrate, can be used for loading the structural glass substrate.
Lower clamp is shaped as cylindrical or tetrahedroid, can not cause gross distortion because being heated for a long time, can prevent further that also glass substrate from coming off.
Description of drawings
Fig. 1 is the lower clamp of glass substrate loading frame of prior art and the combination schematic diagram of cross bar.
Fig. 2 is the schematic diagram of glass substrate loading frame of the present invention.
Fig. 3 is the lower clamp of the embodiment of the invention one glass substrate loading frame and the combination stereogram of cross tube.
Fig. 4 is the lower clamp of the embodiment of the invention one glass substrate loading frame and the combination left view of cross tube.
Fig. 5 is the stereographic map of the lower clamp of the embodiment of the invention two glass substrate loading frames.
Embodiment
Further specify the present invention below in conjunction with accompanying drawing and by embodiment.
Embodiment one:
Such as Fig. 2, Fig. 3 and shown in Figure 4: glass substrate loading frame, comprise framework 1, cross tube 2, upper anchor clamps 3, sheer pole 4 and lower clamp 5, cross tube 2 is fixed on framework 1 rear surface, sheer pole 3 is fixed on framework 1 front surface, be fixed with lower clamp 5 on the cross tube 2, sheer pole 4 is square poles, sheer pole 4 is fixed on framework 1 upper surface, be fixed with anchor clamps 3 on the cross tube 2, be fixed with lower clamp 5 on the sheer pole 4, one end of lower clamp 5 is welded on the upper surface of sheer pole 4, lower clamp 5 has the U-lag 6 of engaging glass substrate away from an end of sheer pole 4, the length direction of U-lag 6 is consistent with the length direction of sheer pole 5, has a cross tube 2 and a sheer pole 4 on the same glass substrate loading frame at least, and cross tube 2 and sheer pole 4 are alternately arranged; The quantity of the lower clamp 5 on any sheer pole 5 has two at least, and lower clamp 5 straight line on same sheer pole 5 guarantee the rectilinearity of full wafer glass substrate 7.
During use, an end of glass substrate 7 is stuck in 6 li of the U-lags of lower clamp 5, it is fixing that the other end is used anchor clamps 3, even lower clamp 5 temperature distortions can not cause glass substrate 7 to come off yet; In addition lower clamp 5 is welded on the square sheer pole 4, contact area is large, makes lower clamp 5 more firm, reduces the probability that glass substrate 7 comes off.
Embodiment two:
Such as Fig. 2, Fig. 4 and shown in Figure 5: glass substrate loading frame, comprise framework 1, cross tube 2, upper anchor clamps 3, sheer pole 4 and lower clamp 5, cross tube 2 is fixed on framework 1 rear surface, sheer pole 3 is fixed on framework 1 front surface, be fixed with lower clamp 5 on the cross tube 2, sheer pole 4 is cylindrical bars, sheer pole 4 is fixed on framework 1 upper surface, be fixed with anchor clamps 3 on the cross tube 2, be fixed with lower clamp 5 on the sheer pole 4, one end of lower clamp 5 is welded on the upper surface of sheer pole 4, lower clamp 5 has the U-lag 6 of engaging glass substrate away from an end of sheer pole 4, the length direction of U-lag 6 is consistent with the length direction of sheer pole 5, has a cross tube 2 and a sheer pole 4 on the same glass substrate loading frame at least, and cross tube 2 and sheer pole 4 are alternately arranged; The quantity of the lower clamp 5 on any sheer pole 5 has two at least, and lower clamp 5 straight line on same sheer pole 5 guarantee the rectilinearity of full wafer glass substrate 7.
Need to prove; just the invention will be further described for embodiment; it or not limitation of the present invention; as above anchor clamps adopt spring-piece type, knob or card slot type etc. can realize the present invention; and do not affect technique effect of the present invention, so these also should be considered as the scope of protection of the invention.
Claims (4)
1. glass substrate loading frame, comprise framework, cross tube, upper anchor clamps, sheer pole and lower clamp, cross tube is fixed on the framework rear surface, sheer pole is fixed on the framework front surface, be fixed with anchor clamps on the cross tube, be fixed with lower clamp on the sheer pole, have a cross tube and a sheer pole on the same glass substrate loading frame at least, described cross tube and sheer pole are alternately arranged, it is characterized in that: described sheer pole is square pole, one end of lower clamp is welded on the upper surface of sheer pole, and lower clamp has the U-lag of engaging glass substrate away from an end of sheer pole, and the length direction of U-lag is consistent with the length direction of sheer pole.
2. glass substrate loading frame according to claim 1, it is characterized in that: the quantity of the lower clamp on described any sheer pole has two at least, the lower clamp straight line on same cross bar.
3. glass substrate loading frame according to claim 1 and 2, it is characterized in that: described lower clamp is cylindrical.
4. glass substrate loading frame according to claim 1 and 2, it is characterized in that: described lower clamp is tetrahedroid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013100356026A CN103073193A (en) | 2013-01-30 | 2013-01-30 | Loading rack for glass substrates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013100356026A CN103073193A (en) | 2013-01-30 | 2013-01-30 | Loading rack for glass substrates |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103073193A true CN103073193A (en) | 2013-05-01 |
Family
ID=48149917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013100356026A Pending CN103073193A (en) | 2013-01-30 | 2013-01-30 | Loading rack for glass substrates |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103073193A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107626681A (en) * | 2017-11-08 | 2018-01-26 | 中国工程物理研究院激光聚变研究中心 | The clamping device that crystal batten member is cleaned by ultrasonic |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009161817A (en) * | 2008-01-08 | 2009-07-23 | Dainippon Printing Co Ltd | Substrate holder part and sputtering apparatus |
| CN201343497Y (en) * | 2009-02-13 | 2009-11-11 | 江苏津通先锋光电显示技术有限公司 | Adjustable glass substrate frame |
| CN102069970A (en) * | 2009-11-19 | 2011-05-25 | 缪建平 | Glass loading frame |
| CN203079844U (en) * | 2013-01-30 | 2013-07-24 | 安徽省蚌埠华益导电膜玻璃有限公司 | Glass substrate loading frame |
-
2013
- 2013-01-30 CN CN2013100356026A patent/CN103073193A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009161817A (en) * | 2008-01-08 | 2009-07-23 | Dainippon Printing Co Ltd | Substrate holder part and sputtering apparatus |
| CN201343497Y (en) * | 2009-02-13 | 2009-11-11 | 江苏津通先锋光电显示技术有限公司 | Adjustable glass substrate frame |
| CN102069970A (en) * | 2009-11-19 | 2011-05-25 | 缪建平 | Glass loading frame |
| CN203079844U (en) * | 2013-01-30 | 2013-07-24 | 安徽省蚌埠华益导电膜玻璃有限公司 | Glass substrate loading frame |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107626681A (en) * | 2017-11-08 | 2018-01-26 | 中国工程物理研究院激光聚变研究中心 | The clamping device that crystal batten member is cleaned by ultrasonic |
| CN107626681B (en) * | 2017-11-08 | 2024-01-19 | 中国工程物理研究院激光聚变研究中心 | Clamping device for ultrasonic cleaning of crystal lath element |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201343497Y (en) | Adjustable glass substrate frame | |
| CN103073193A (en) | Loading rack for glass substrates | |
| CN203079844U (en) | Glass substrate loading frame | |
| CN204074666U (en) | For the cleaning fixture of plate glass | |
| CN104385291A (en) | Self-locking workpiece grabbing mechanism | |
| US20120319343A1 (en) | Adjustable jig for retaining glass plate | |
| CN204550703U (en) | A kind of adjustable film coating jig | |
| TWI572748B (en) | Electroplating rack for tubular structure | |
| CN103287749B (en) | Liquid crystal panel cartridge | |
| CN202401127U (en) | Vacuum coating carrier for small-sized substrates | |
| CN103579940A (en) | Structure capable of allowing vertical copper bars to be connected with plug-in unit in high-low voltage power distribution cabinet | |
| CN205177801U (en) | Quartz boat | |
| CN205290229U (en) | A anchor clamps for being directed at heat collection tube bracket carries out faster welding | |
| CN206308258U (en) | A kind of clamping device of thin coating film on glass processing | |
| CN201843871U (en) | Pulling basket door plate fixing device | |
| CN105256971A (en) | Tile pendant | |
| CN204544926U (en) | Smalt rack for cleaning | |
| CN104677729A (en) | U-shaped bolt bulge test clamp | |
| CN205056878U (en) | Condenser stay tube machine fixing device | |
| CN203918494U (en) | Sawing machine localization tool | |
| CN206575362U (en) | A kind of photovoltaic bracket clump built-in fitting locating module | |
| CN105312826A (en) | Welding tool | |
| CN104858600A (en) | Clamping tool | |
| CN208497659U (en) | Silicon chip flower basket means for correcting | |
| CN203807346U (en) | Clamping device for coating sliver on double sides |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20130501 |
|
| RJ01 | Rejection of invention patent application after publication |