CN103062317B - Vibration isolator with characteristics of two-dimensional flexible hinge angle decoupling and magnetic levitation plane drive positioning - Google Patents
Vibration isolator with characteristics of two-dimensional flexible hinge angle decoupling and magnetic levitation plane drive positioning Download PDFInfo
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Abstract
The invention provides a vibration isolator with characteristics of two-dimensional flexible hinge angle decoupling and magnetic levitation plane drive positioning and belongs to the technical field of precise vibration isolating technologies. A sleeve of a vibration isolator main body and a lower installing plate are born though magnetic levitation action of a magnetic levitation plane motor, a piston barrel and the sleeve are respectively lubricated and supported through air floating faces, and angle motion freedom between an upper installing plate and the lower installing plate is decoupled through a two-dimensional flexible hinge. A motor, a displacement sensor, a limiting switch, a controller and a driver form a position closed loop feedback control system for accurately controlling opposite positions of the upper installing plate and the lower installing plate. The vibration isolator has the three-dimensional approximate zero stiffness, high positional accuracy and angle decoupling characteristics, can have ultra-low inherent frequency and prominent low-frequency/ultra-low-frequency vibration isolating performance, and accordingly and effectively solves the high-performance vibration isolating problem of a precise measuring instrument, a processing device and especially a step scan photo-etching machine.
Description
Technical field
The invention belongs to accurate vibration isolation technical field, relate generally to the vibration isolator that the decoupling zero of a kind of two-dimension flexible hinge angle and maglev planar drive location.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially the vlsi circuit process unit that step-by-step scanning photo-etching device is representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip positioning precision and alignment precision all reach several nanometers, and more than work stage movement velocity reaches 1m/s, work stage acceleration reaches tens times of gravity accleration, this has proposed new challenge to existing vibration isolation technique.First, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below 1Hz; Secondly, relative position between each parts of lithography machine, the distance of photoetched object lens and silicon chip surface for example, all there is very strict requirement, and under the control in position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the positioning precision of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional to rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factors such as material behavior, structural rigidity, further reduce its rigidity, especially level very difficult to rigidity.For this problem, researcher is incorporated into " pendulum " formula structure in air cushion shock absorber, reaches object (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 that reduces vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator System for Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such A Positioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: 1) be subject to material behavior and structural rigidity restriction vibration isolator vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to positioning precision, cannot meet the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes vibration isolator height excessive, string membrane resonance easily occurs, poor stability.
By visible to the analysis of existing air cushion shock absorber technological scheme, existing air cushion shock absorber is difficult to meet the requirement of lithography machine to ultralow rigidity and high position precision.Germany IDE company has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie Eines Schwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics Engineering GmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration of High-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertically carries out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions with level, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in public technology scheme, vibration isolator cannot be realized accurate location; 2) in patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide the angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because block rubber angular rigidity is very large, cannot effectively carry out angular motion freedom decoupling, between angular motion freedom decoupling mechanism components, there is frictional force and introduce additional stiffness, restriction anti-vibration performance.
Holland ASML company has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM Lithography B.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Provided with Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips Electronics N.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device Manufacturing Method Employing A Supporting Device, and A Position Control System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device Manufacturing Method Employing A Supporting Device and A Position Control System Arranged for Use in A Supporting Device. european patent number: EP1486825A1).In patent US006144442A and WO99/22272, bleed pressure is carried out to closed-loop feedback control, reach and improve the stability of vibration isolator and the object of performance; In patent US007084956B2 and EP1486825A1, on upper mounting plate, be provided with vibration transducer, introduce with reference to vibration system simultaneously, by control algorithm, promote the anti-vibration performance of vibration isolator.But the technological scheme that proposes still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The object of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, provide the decoupling zero of a kind of two-dimension flexible hinge angle and maglev planar to drive the vibration isolator of location, vibration isolator has three-dimensional approximate zero rigidity and extremely low natural frequency, on, between lower installation board, can carry out accurately location and angle decoupling zero, thereby effectively solve ultra precise measurement instrument and process unit, especially the accurate vibration isolation problem in step-by-step scanning photo-etching device.
The object of the present invention is achieved like this:
The decoupling zero of a kind of two-dimension flexible hinge angle and maglev planar drive the vibration isolator of location, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body form, vibration isolator main body is arranged between upper mounting plate and lower installation board, clean compressed gas source is connected with vibration isolator main body by tracheae, the structure of described vibration isolator main body is: the lower surface of sleeve and lower installation board carry by the floating gap of magnetic of the magnetic suspension effect formation of maglev planar motor, piston cylinder back-off is arranged in sleeve, and lubricate and support by radially carrying cylinder air bearing surface with sleeve, two-dimension flexible hinge is arranged between piston cylinder and upper mounting plate, Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are arranged between piston cylinder and sleeve, X-direction displacement transducer, X-direction limit switch and Y-direction displacement transducer, Y-direction limit switch is arranged between sleeve and lower installation board, the driving force direction of Z-direction voice coil motor and the X-direction driving force of maglev planar motor, Y-direction driving force direction is orthogonal between two, Z-direction displacement transducer, the line of action direction of Z-direction limit switch is consistent with the driving force direction of Z-direction voice coil motor, X-direction displacement transducer, the line of action direction of X-direction limit switch is consistent with the X-direction driving force of maglev planar motor, Y-direction displacement transducer, the line of action direction of Y-direction limit switch is consistent with the Y-direction driving force direction of maglev planar motor, X, Y, Z-direction displacement transducer and X, Y, Z-direction limit switch are connected with the signal input part of controller respectively, the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver respectively maglev planar motor, Z-direction voice coil motor connects.
In described piston cylinder, be provided with gas pressure sensor, piston cylinder is provided with suction port and solenoid valve, and gas pressure sensor is connected with the signal input part of controller, and the signal output part of driver is connected with solenoid valve.
The configuration mode of described maglev planar motor is, at sleeve bottom surface sidewall, the maglev planar motor mover connecting without wire is installed, at the relatively equipped maglev planar motor stator of lower installation board upper surface sidewall.
Described Z-direction voice coil motor is cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
In described piston cylinder, gas pressure is 0.1MPa～0.8MPa.
The floating gap of magnetic between described maglev planar motor mover and maglev planar motor stator is 0.01mm～1mm.
The good result of technological innovation of the present invention and generation is:
(1) the present invention has abandoned the vibration isolator technological scheme of tradition based on elastic element/mechanism, adopt maglev planar motor, radially carry cylinder air bearing surface and respectively substantially horizontal and vertical vibration are carried out to decoupling zero and vibration isolation, when magnetic suspension bearing mode is exported without Locating driver power at motor, horizontal rigidity is approximately zero, together with air bearing surface, can make vibration isolator obtain approximate zero stiffness characteristics and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, rigidity is difficult to further reduction, the problem that rigidity and stability can not be taken into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer chi, limit switch, controller, driver and motor to form position closed loop feedback control system, relative position between upper and lower mounting plate is accurately controlled, positioning precision can reach 10 μ m and more than, the problem that can effectively solve that prior art scheme positioning precision is low, positioning precision and rigidity and anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts two-dimension flexible hinge to carry out decoupling zero to the angular motion between upper and lower mounting plate, two-dimension flexible hinge is without friction, without wearing and tearing, the additional angular rigidity of introducing can be ignored, and there is very high bearing capacity, can effectively solve friction and wear that method that existing employing elastomer carries out angle decoupling zero exists, introduce the problems such as larger additional stiffness.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver etc. to form pressure closed loop feedback control system, the gas pressure of accurately controlling in sleeve makes it to keep constant, the thrust load of vibration isolator is carried out to gravitational equilibrium and compensation, radially carrying under the effect of cylinder air bearing surface, the piston cylinder of carry load gravity can freely slide up and down with zero stiffness along sleeve, thus the gravitational equilibrium of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators to carry out ACTIVE CONTROL to the relative position between upper and lower mounting plate and the gas pressure in piston cylinder, vibration isolator parameter can be according to being regulated in real time by vibration isolation features of the object and working environment variation, thereby adapt to different operating modes, there is good flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
Accompanying drawing explanation
Fig. 1 is the structural representation that the decoupling zero of two-dimension flexible hinge angle and maglev planar drive the vibration isolator of location;
Fig. 2 is the cross-sectional view that the decoupling zero of two-dimension flexible hinge angle and maglev planar drive the vibration isolator of location;
Fig. 3 is the structural representation that two one-dimensional flexible hinge orthogonal superpositions form a two-dimension flexible hinge;
Fig. 4 is the structural representation of cylindrical two-dimension flexible hinge;
Fig. 5 is the control structure block diagram that the decoupling zero of two-dimension flexible hinge angle and maglev planar drive the vibration isolator of location;
Fig. 6 is the schematic diagram of cylinder air bearing surface throttle orifice on piston cylinder;
Piece number explanation in figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 piston cylinders, 6 sleeves, 7 two-dimension flexible hinges, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional part, 11X is to displacement transducer, 12Y is to displacement transducer, 12a Y-direction grating reading head transition piece, 12b Y-direction grating reading head, 12c Y-direction glass raster chi, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 15Y is to limit switch, 15a Y-direction limiting stopper, 15b Y-direction Hall switch, 15c Y-direction limit switch transition piece, 15d Y-direction limiting stopper transition piece, 16Z is to limit switch, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 magnetic float gap, 22 radially carry cylinder air bearing surface, 23 suction ports, 24 maglev planar motors, 24a maglev planar motor mover, 24b maglev planar motor stator, 25 cylinder air bearing surface throttle orifices, 26 tracheaes, 27 cylindrical two-dimension flexible hinges.
Embodiment
Below in conjunction with accompanying drawing, provide specific embodiments of the invention.
The decoupling zero of a kind of two-dimension flexible hinge angle and maglev planar drive the vibration isolator of location, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is arranged between upper mounting plate 1 and lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, the structure of described vibration isolator main body 4 is: the lower surface of sleeve 6 and lower installation board 2 carry by the floating gap 21 of magnetic of the magnetic suspension effect formation of maglev planar motor 24, piston cylinder 5 back-offs are arranged in sleeve 6, and lubricate and support by radially carrying cylinder air bearing surface 22 with sleeve 6, two-dimension flexible hinge 7 is arranged between piston cylinder 5 and upper mounting plate 1, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are arranged between piston cylinder 5 and sleeve 6, X-direction displacement transducer 11, X-direction limit switch 14 and Y-direction displacement transducer 12, Y-direction limit switch 15 is arranged between sleeve 6 and lower installation board 2, the driving force direction of Z-direction voice coil motor 10 and the X-direction driving force of maglev planar motor 24, Y-direction driving force direction is orthogonal between two, Z-direction displacement transducer 13, the line of action direction of Z-direction limit switch 16 is consistent with the driving force direction of Z-direction voice coil motor 10, X-direction displacement transducer 11, the line of action direction of X-direction limit switch 14 is consistent with the X-direction driving force of maglev planar motor 24, Y-direction displacement transducer 12, the line of action direction of Y-direction limit switch 15 is consistent with the Y-direction driving force direction of maglev planar motor 24, X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16 are connected with the signal input part of controller 19 respectively, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with maglev planar motor 24, Z-direction voice coil motor 10 respectively.
The displacement of X, Y, 11,12,13 pairs of maglev planar motors 24 of Z-direction displacement transducer and 10 outputs of Z-direction voice coil motor is measured, and the stroke of X, Y, 14,15,16 pairs of maglev planar motors 24 of Z-direction limit switch and 10 motions of Z-direction voice coil motor limits; Controller 19 is according to the feedback signal of X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16, and the relative position of controlling between maglev planar motor 24 and 10 pairs of upper and lower mounting plates 1,2 of Z-direction voice coil motor is accurately controlled.
In described piston cylinder 5, be provided with gas pressure sensor 17, piston cylinder 5 is provided with suction port 23 and solenoid valve 18, and gas pressure sensor 17 is connected with the signal input part of controller 19, and the signal output part of driver 20 is connected with solenoid valve 18.
The configuration mode of described magnetic maglev planar motor 24 is, at sleeve 6 bottom surface sidewalls, the maglev planar motor mover 24a connecting without wire is installed, at the relatively equipped maglev planar motor stator 24b of lower installation board upper surface sidewall.
Described Z-direction voice coil motor 10 is cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
The interior gas pressure of described piston cylinder 5 is 0.1MPa～0.8MPa.
The floating gap 21 of magnetic between described maglev planar motor mover 24a and maglev planar motor stator 24b is 0.01mm～1mm.
Below in conjunction with Fig. 1～Fig. 2, Fig. 5, provide one embodiment of the present of invention.In the present embodiment, in zero stiffness vibration isolator when work,, lower installation board 2 is arranged on the pedestal or basic framework of ground, instrument, upper mounting plate 1 with by the load of vibration isolation, be connected.Z-direction voice coil motor 10 adopts cylinder type voice coil motor, and it mainly comprises the parts such as Z-direction motor iron yoke 10a, Z-direction magnetic steel of motor 10b, Z-direction motor coil skeleton 10c, Z-direction motor coil 10d and Z-direction motor transitional part 10e.Z-direction motor iron yoke 10a and Z-direction motor coil skeleton 10c are cylindrical shape, and Z-direction magnetic steel of motor 10b is cylindrical, and it is upper that Z-direction motor coil 10d is around in Z-direction motor coil skeleton 10c, and Z-direction motor transitional part 10e provides the mounting structure of Z-direction motor coil skeleton 10c.Z-direction motor iron yoke 10a and Z-direction magnetic steel of motor 10b form motor stator, and Z-direction motor coil skeleton 10c, Z-direction motor coil 10d form the mover of motor.Z-direction motor transitional part 10e provides the mounting structure of Z-direction motor coil skeleton 10c.During machine operation, in coil, pass to electric current, according to electromagnetic theory, hot-wire coil can be subject to Lorentz force effect in magnetic field, can control the size and Orientation of motor output drive strength by controlling the size and Orientation of electric current.
X, Y, Z-direction displacement transducer 11,12,13 adopt grating scale.Take Z-direction displacement transducer 13 as example, and it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z-direction limit switch 14,15,16 adopt Hall-type limit switch.Take Z-direction limit switch 16 as example, and it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.During limit switch work, when Z-direction Hall switch 16b approaches Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and sleeve 6, and are arranged on piston cylinder 5 inside.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to the interior conveying clean compressed air of piston cylinder 5.Controller 19 is according to the feedback signal of gas pressure sensor 17, control the aperture of solenoid valve 18, adjusting is input to the gas flow in piston cylinder 5, thereby the pressure of regulating piston cylinder 5 interior clean compressed airs, active force and load, the piston cylinder 5 that clean compressed air makes progress to piston cylinder 5 and the gravity that loads on other component on piston cylinder 5 are balanced each other, the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.
In the present embodiment, the pressure of piston cylinder 5 interior clean compressed airs is made as 0.4MPa, and the effective radius of piston cylinder 5 lower surfaces is 100mm, and the quality of single vibration isolator carrying is: m=p * π r
2/ g ≈ 1282kg, wherein p is gas pressure, p=0.4MPa, r is the effective radius of piston cylinder 5 lower surfaces, r=100mm, g is gravity accleration, g=9.8m/s
2.
Fig. 3 provides an embodiment of two-dimension flexible hinge.In the present embodiment, two-dimension flexible hinge 7 is that two one-dimensional flexible hinge orthogonal superpositions form.
Fig. 4 provides another embodiment of two-dimension flexible hinge.In the present embodiment, thin, the thick cylindrical form in two ends in the middle of cylindrical two-dimension flexible hinge 27 is processed into.
Fig. 6 provides an embodiment of cylinder air bearing surface throttle orifice on piston cylinder.In the present embodiment, on piston cylinder 5 sidewalls, along the circumferential direction uniform two arrange cylinder air bearing surface throttle orifices 25, the quantity of every row's cylinder air bearing surface throttle orifice 25 is 8, and diameter is φ 0.2mm.
Claims (8)
1. two-dimension flexible hinge angle decoupling zero and maglev planar drive the vibration isolator of location, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) form, vibration isolator main body (4) is arranged between upper mounting plate (1) and lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: the structure of described vibration isolator main body (4) is: the lower surface of sleeve (6) and lower installation board (2) carry by the floating gap (21) of magnetic of the magnetic suspension effect formation of maglev planar motor (24), piston cylinder (5) back-off is arranged in sleeve (6), and lubricate and support by radially carrying cylinder air bearing surface (22) with sleeve (6), two-dimension flexible hinge (7) is arranged between piston cylinder (5) and upper mounting plate (1), Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are arranged between piston cylinder (5) and sleeve (6), X-direction displacement transducer (11), X-direction limit switch (14) and Y-direction displacement transducer (12), Y-direction limit switch (15) is arranged between sleeve (6) and lower installation board (2), the X-direction driving force of the driving force direction of Z-direction voice coil motor (10) and maglev planar motor (24), Y-direction driving force direction is orthogonal between two, Z-direction displacement transducer (13), the line of action direction of Z-direction limit switch (16) is consistent with the driving force direction of Z-direction voice coil motor (10), X-direction displacement transducer (11), the line of action direction of X-direction limit switch (14) is consistent with the X-direction driving force of maglev planar motor (24), Y-direction displacement transducer (12), the line of action direction of Y-direction limit switch (15) is consistent with the Y-direction driving force direction of maglev planar motor (24), X, Y, Z-direction displacement transducer (11,12,13) and X, Y, Z-direction limit switch (14,15,16) are connected with the signal input part of controller (19) respectively, the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with maglev planar motor (24), Z-direction voice coil motor (10) respectively.
2. two-dimension flexible hinge angle according to claim 1 decoupling zero and maglev planar drive the vibration isolator of location, it is characterized in that: in described piston cylinder (5), be provided with gas pressure sensor (17), piston cylinder (5) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), and the signal output part of driver (20) is connected with solenoid valve (18).
3. two-dimension flexible hinge angle according to claim 1 decoupling zero and maglev planar drive the vibration isolator of location, it is characterized in that: the configuration mode of described maglev planar motor (24) is that the maglev planar motor mover (24a) connecting without wire is installed in sleeve (6) bottom surface, at the relatively equipped maglev planar motor stator (24b) of lower installation board upper surface.
4. two-dimension flexible hinge angle according to claim 1 decoupling zero and maglev planar drive the vibration isolator of location, it is characterized in that: described Z-direction voice coil motor (10) is cylinder type voice coil motor or plate voice coil motor.
5. two-dimension flexible hinge angle according to claim 1 decoupling zero and maglev planar drive the vibration isolator of location, it is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
6. two-dimension flexible hinge angle according to claim 1 decoupling zero and maglev planar drive the vibration isolator of location, it is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
7. two-dimension flexible hinge angle according to claim 1 decoupling zero and maglev planar drive the vibration isolator of location, it is characterized in that: the interior gas pressure of described piston cylinder (5) is 0.1MPa～0.8MPa.
8. two-dimension flexible hinge angle according to claim 3 decoupling zero and maglev planar drive the vibration isolator of location, it is characterized in that: the floating gap (21) of magnetic between described maglev planar motor mover (24a) and maglev planar motor stator (24b) is 0.01mm～1mm.
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| CN106179933B (en) * | 2016-06-29 | 2018-04-27 | 北京空间飞行器总体设计部 | A kind of angular oscillation driver a little |
| CN109036495B (en) * | 2018-08-23 | 2021-02-19 | 三英精控（天津）科技有限公司 | Z-direction nanometer displacement positioning platform based on flexible hinge |
| CN114660899A (en) * | 2020-12-22 | 2022-06-24 | 上海微电子装备（集团）股份有限公司 | Flexible supporting platform system |
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