CN103047343B - Electromagnetic damping zero-stiffness vibration isolator with angular decoupling function by aid of sliding joint bearing - Google Patents
Electromagnetic damping zero-stiffness vibration isolator with angular decoupling function by aid of sliding joint bearing Download PDFInfo
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- CN103047343B CN103047343B CN201210574672.4A CN201210574672A CN103047343B CN 103047343 B CN103047343 B CN 103047343B CN 201210574672 A CN201210574672 A CN 201210574672A CN 103047343 B CN103047343 B CN 103047343B
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Abstract
The invention discloses an electromagnetic damping zero-stiffness vibration isolator with an angular decoupling function by the aid of a sliding joint bearing, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate and space between a piston barrel and the sleeve are respectively lubricated and supported by air floatation planes, electromagnetic dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of angular movement between an upper mounting plate and the lower mounting plate is decoupled by the sliding joint bearing, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The electromagnetic damping zero-stiffness vibration isolator has the advantages of zero stiffness in perpendicular and horizontal directions, high positioning precision, the angular decoupling function, capability of acquiring extremely low natural frequency and outstanding low-frequency/ultra-low-frequency vibration isolation performance, and accordingly effectively realizes high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.
Description
Technical field
The invention belongs to accurate vibration isolation technical field, relate generally to the electromagnetic damping Zero-rigidity vibration isolator of a kind of arthrodia bearing angle decoupling zero.
Background technique
Along with improving constantly of Ultra-precision Turning and measuring accuracy, ambient vibration becomes the key factor that restriction Ultra-precision Turning equipment improves with surveying instrument precision and performance.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity high, key technical index all reaches the limit of prior art, represent the highest level of Ultra-precision Turning equipment, precision isolation system becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip positioning precision and alignment precision all reach a few nanometer, and work stage movement velocity reaches more than 1m/s, work stage acceleration reaches tens times of gravity accleration, and this proposes new challenge to existing vibration isolation technique.First, lithography machine needs for metering system and photoetched object lens provide the working environment of " super quiet ", need again to drive simultaneously work stage at full speed with High acceleration motion, this proposes extremely harsh requirement to the anti-vibration performance of vibrating isolation system, and the natural frequency in its three directions all needs to reach below 1Hz; Secondly, relative position between each parts of lithography machine, the distance of such as photoetched object lens and silicon chip surface, all there is very strict requirement, and under the control being in position closed loop feedback control system, require that the relative positional accuracy between the upper and lower mounting plate of vibration isolator reaches 10 μm of magnitudes, the positioning precision of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional to rigidity, be inversely proportional to load quality, therefore, under the prerequisite that load quality is certain, the rigidity reducing vibration isolator is the effective way reducing natural frequency, improve low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air bellows, restrict by the factor such as material behavior, structural rigidity simultaneously, will reduce its rigidity, especially level further very difficult to rigidity.For this problem, " pendulum " formula structure is incorporated in air cushion shock absorber by researcher, reaches object (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 reducing vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator System for Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such A Positioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The method Problems existing is: 1) restrict by material behavior and structural rigidity, the vertical limited extent reduced to rigidity with level of vibration isolator; 2) the vertical and level of air cushion shock absorber is all very poor to positioning precision, cannot meet the requirement of photoetching process; 3) lower horizontal rigidity to be reached and need larger pendulum length, cause vibration isolator height excessive, easily string membrane resonance occurs, poor stability.
By visible to the analysis of existing air cushion shock absorber technological scheme, existing air cushion shock absorber is difficult to meet the requirement of lithography machine to ultralow rigidity and high position precision.IDE company of Germany proposes a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie Eines Schwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics Engineering GmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration of High-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).Program employing is vertical carries out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions with level, can reach extremely low rigidity and natural frequency.Program Problems existing is: 1) in public technology scheme, vibration isolator cannot realize accurate location; 2), in patent EP1803965A2, there is not the angular motion degrees of freedom around horizontal rotational shaft between upper and lower mounting plate, the angular rigidity in this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopts block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because block rubber angular rigidity is very large, effectively cannot carry out angular motion freedom decoupling, there is frictional force between angular motion freedom decoupling mechanism part and introduce additional stiffness, restriction anti-vibration performance.
ASML company of Holland it is also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM Lithography B.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Provided with Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips Electronics N.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device Manufacturing Method Employing A Supporting Device, and A Position Control System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device Manufacturing Method Employing A Supporting Device and A Position Control System Arranged for Use in A Supporting Device. european patent number: EP1486825A1).In patent US006144442A and WO99/22272, closed-loop feedback control is carried out to bleed pressure, reach and improve the stability of vibration isolator and the object of performance; On upper mounting plate, be provided with vibration transducer in patent US007084956B2 and EP1486825A1, introduce with reference to vibration system simultaneously, promoted the anti-vibration performance of vibration isolator by control algorithm.But propose technological scheme and still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The object of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, the electromagnetic damping Zero-rigidity vibration isolator of a kind of arthrodia bearing angle decoupling zero is provided, vibration isolator has the characteristic of three-dimensional approximate zero rigidity and extremely low natural frequency, on, accurately location and angle decoupling zero can be carried out between lower installation board, thus effectively solve ultra precise measurement instrument and process unit, especially the accurate vibration isolation problem in step-by-step scanning photo-etching device.
Technical solution of the present invention is:
The electromagnetic damping Zero-rigidity vibration isolator of a kind of arthrodia bearing angle decoupling zero, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body composition, vibration isolator main body is arranged on upper mounting plate and lower installation board) between, clean compressed gas source is connected with vibration isolator main body by tracheae, in described vibration isolator main body, the lower surface of sleeve and lower installation board are lubricated by axial carrying plane air bearing surface and support, piston cylinder back-off is arranged in sleeve, and lubricate with sleeve by the radial cylinder air bearing surface that carries and support, arthrodia bearing is arranged between piston cylinder and upper mounting plate, Z-direction voice coil motor, Z-direction displacement transducer, Z-direction limit switch is arranged between piston cylinder and sleeve, X is to voice coil motor, X is to displacement transducer, X is to limit switch and Y-direction voice coil motor, Y-direction displacement transducer, Y-direction limit switch is arranged between sleeve and lower installation board, the driving force direction of Z-direction voice coil motor is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor and Y-direction voice coil motor, and X, Y, Z-direction displacement transducer are consistent with the driving force direction of X, Y, Z-direction voice coil motor with the line of action direction of X, Y, Z-direction limit switch, X, Y, Z-direction displacement transducer are connected with the signal input part of controller respectively with X, Y, Z-direction limit switch, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively, along X to voice coil motor driving force direction, X is installed at lower installation board upper surface sidewall and forms X to electromagnetic damper to permanent magnet, along Y-direction voice coil motor driving force direction, Y-direction permanent magnet is installed at lower installation board upper surface sidewall and forms Y-direction electromagnetic damper, along Z-direction voice coil motor driving force direction, Z-direction permanent magnet is installed at piston cylinder external cylindrical surface sidewall and forms Z-direction electromagnetic damper, X, the pole orientation of Y-direction permanent magnet is perpendicular to the upper surface of lower installation board, and N, S pole is alternately arranged, the pole orientation of Z-direction permanent magnet is perpendicular to the external cylindrical surface of piston cylinder, and N, S pole is alternately arranged, piston cylinder and lower installation board adopt ferromagnetic material, sleeve adopts non-magnetic good conductor material.
Gas pressure sensor is provided with in described piston cylinder, piston cylinder is provided with suction port and solenoid valve, gas pressure sensor is connected with the signal input part of controller, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with solenoid valve.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
In described piston cylinder, gas pressure is 0.1MPa ~ 0.8MPa.
The air-film thickness of described axial carrying plane air bearing surface, radial carrying cylinder air bearing surface is 10 μm ~ 20 μm.
The diameter of the cylinder air bearing surface throttle orifice on described piston cylinder and the plane air bearing surface throttle orifice on sleeve is φ 0.1mm ~ φ 1mm.
The good result of technological innovation of the present invention and generation is:
(1) the present invention has abandoned the vibration isolator technological scheme of tradition based on elastic element/mechanism, employing axial carrying plane air bearing surface, radial carrying cylinder air bearing surface carry out decoupling zero and vibration isolation to substantially horizontal and vertical vibration respectively, air bearing surface is approximately zero without friction, rigidity, vibration isolator can be made to obtain approximate zero stiffness characteristic and outstanding superlow frequency vibration isolating performance, solve prior art to limit by structural rigidity, material behavior, rigidity is difficult to further reduction, the problem that rigidity and stability can not be taken into account.This is one of the present invention's innovative point being different from prior art.
(2) the present invention adopts displacement transducer chi, limit switch, controller, driver and voice coil motor etc. to form the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between upper and lower mounting plate is accurately controlled, positioning precision can reach 10 μm and more than, effectively can solve that prior art positioning precision is low, problem that positioning precision and rigidity and anti-vibration performance can not be taken into account.This is the innovative point two that the present invention is different from prior art.
(3) the present invention adopts arthrodia bearing to carry out decoupling zero to the angular motion between upper and lower mounting plate, arthrodia bearing is less at introducing friction, wearing and tearing and additional angular rigidity, there is very high bearing capacity simultaneously, effectively can solve the more additional angular rigidity of method introducing, problem such as restriction natural frequency and low frequency vibration isolation performance etc. that existing employing elastomer carries out angle decoupling zero.This is the innovative point three that the present invention is different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver etc. to form pressure closed loop feedback control system, gas pressure in accurate control sleeve makes it to keep constant, gravitational equilibrium and compensation are carried out to the thrust load of vibration isolator, under the effect of radial direction carrying cylinder air bearing surface, the piston cylinder of carry load gravity freely can slide up and down along sleeve with zero stiffness, thus the gravitational equilibrium of realizing ideal and zero stiffness vibration isolating effect.This is the innovative point four that the present invention is different from prior art.
(5) the present invention adopts active actuators to carry out ACTIVE CONTROL to the relative position between upper and lower mounting plate, vibration isolator parameter can regulate in real time according to being changed by vibration isolation features of the object and working environment, thus adapt to different operating modes, there is good flexibility, adaptability and stability.This is the innovative point five that the present invention is different from prior art.
(6) the present invention adopts the electromagnetic damper replacing permanent magnet array based on magnetic pole, can be integrated in one with vibration isolator well, electromagnetic damper has comparatively ideal linear damping characteristic, can effective attenuation vibrational energy, reduce the overshoot that motor drives location, the stability of vibration isolator is provided.This is the innovative point six that the present invention is different from prior art.
Accompanying drawing explanation
Fig. 1 is the structural representation of the electromagnetic damping Zero-rigidity vibration isolator of arthrodia bearing angle decoupling zero;
Fig. 2 is the D profile structural representation of the electromagnetic damping Zero-rigidity vibration isolator of arthrodia bearing angle decoupling zero;
Fig. 3 is the structural representation of arthrodia bearing;
Fig. 4 is the control structure block diagram of the electromagnetic damping Zero-rigidity vibration isolator of arthrodia bearing angle decoupling zero;
Fig. 5 is the schematic diagram of plane air bearing surface throttle orifice on sleeve;
Fig. 6 is the schematic diagram of cylinder air bearing surface throttle orifice on piston cylinder;
Fig. 7 is the cross-sectional view of Z-direction electromagnetic damper;
Fig. 8 is the part section structural representation of X, Y-direction electromagnetic damper;
Fig. 9 is that the A-A of Z-direction permanent magnet at a kind of mounting type of piston cylinder external cylindrical surface sidewall is to sectional view;
Figure 10 is that the A-A of Z-direction permanent magnet at the another kind of mounting type of piston cylinder external cylindrical surface sidewall is to sectional view;
Figure 11 is that X, Y-direction permanent magnet are at a kind of mounting type schematic diagram of lower installation board upper surface sidewall;
Figure 12 is that X, Y-direction permanent magnet are at the another kind of mounting type schematic diagram of lower installation board upper surface sidewall.
In figure, piece number illustrates: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 piston cylinders, 6 sleeves, 7 arthrodia bearings, 7a bearing support, 7b bearing support, 8 X are to voice coil motor, 9 Y-direction voice coil motors, 9a Y-direction motor iron yoke, 9b Y-direction magnetic steel of motor, 9c Y-direction motor coil framework, 9d Y-direction motor coil, 9e Y-direction motor transitional part, 10 Z-direction voice coil motors, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil framework, 10d Z-direction motor coil, 10e Z-direction motor transitional part, 11 X are to displacement transducer, 12 Y-direction displacement transducers, 12a Y-direction grating reading head transition piece, 12b Y-direction grating reading head, 12c Y-direction glass raster chi, 13 Z-direction displacement transducers, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14 X are to limit switch, 15 Y-direction limit switches, 15a Y-direction limiting stopper, 15b Y-direction Hall switch, 15c Y-direction limit switch transition piece, 15d Y-direction limiting stopper transition piece, 16 Z-direction limit switches, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 axial carrying plane air bearing surface, 22 radial carrying cylinder air bearing surface, 23 suction ports, 24 plane air bearing surface throttle orifices, 25 cylinder air bearing surface throttle orifices, 26 tracheaes, 40X is to electromagnetic damper, 40A X is to permanent magnet, 41 Y-direction electromagnetic dampers, 41A Y-direction permanent magnet, 42 Z-direction electromagnetic dampers, 42A Z-direction permanent magnet.
Embodiment
Specific embodiments of the invention are provided below in conjunction with accompanying drawing.
The electromagnetic damping Zero-rigidity vibration isolator of a kind of arthrodia bearing angle decoupling zero, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is arranged between upper mounting plate 1 and lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, in the structure of described vibration isolator main body 4, the lower surface of sleeve 6 and lower installation board 2 are lubricated by axial carrying plane air bearing surface 21 and support, piston cylinder 5 back-off is arranged in sleeve 6, and lubricate with sleeve 6 by the radial cylinder air bearing surface 22 that carries and support, arthrodia bearing 7 is arranged between piston cylinder 5 and upper mounting plate 1, Z-direction voice coil motor 10, Z-direction displacement transducer 13, Z-direction limit switch 16 is arranged between piston cylinder 5 and sleeve 6, X is to voice coil motor 8, X is to displacement transducer 11, X is to limit switch 14 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 is arranged between sleeve 6 and lower installation board 2, the driving force direction of Z-direction voice coil motor 10 is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor 8 and Y-direction voice coil motor 9, and X, Y, Z-direction displacement transducer 11,12,13 are consistent with the driving force direction of X, Y, Z-direction voice coil motor 8,9,10 with the line of action direction of X, Y, Z-direction limit switch 14,15,16, X, Y, Z-direction displacement transducer 11,12,13 are connected with the signal input part of controller 19 respectively with X, Y, Z-direction limit switch 14,15,16, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively, along X to voice coil motor 8 driving force direction, X is installed at lower installation board 2 upper surface sidewall and forms X to electromagnetic damper 40 to permanent magnet 40A, along Y-direction voice coil motor 9 driving force direction, Y-direction permanent magnet 41A is installed at lower installation board 2 upper surface sidewall and forms Y-direction electromagnetic damper 41, along Z-direction voice coil motor 10 driving force direction, Z-direction permanent magnet 42A is installed at piston cylinder 5 external cylindrical surface sidewall and forms Z-direction electromagnetic damper 42, X, Y-direction permanent magnet 40A, the pole orientation of 41A is perpendicular to the upper surface of lower installation board 2, and N, S pole is alternately arranged, the pole orientation of Z-direction permanent magnet 42A is perpendicular to the external cylindrical surface of piston cylinder 5, and N, S pole is alternately arranged, piston cylinder 5 and lower installation board 2 adopt ferromagnetic material, sleeve 6 adopts non-magnetic good conductor material.
The displacement that X, Y, Z-direction displacement transducer 11,12,13 couples of X, Y, Z-direction voice coil motor 8,9,10 export is measured, and the stroke that X, Y, Z-direction limit switch 14,15,16 couples of X, Y, Z-direction voice coil motor 8,9,10 move limits; Controller 19 is according to the feedback signal of X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16, and control X, Y, Z-direction voice coil motor 8,9,10 accurately control the relative position between upper and lower mounting plate 1,2.
Gas pressure sensor 17 is provided with in described piston cylinder 5, piston cylinder 5 is provided with suction port 23 and solenoid valve 18, gas pressure sensor 17 is connected with the signal input part of controller 19, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with solenoid valve 18.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
In described piston cylinder 5, gas pressure is 0.1MPa ~ 0.8MPa.
The air-film thickness of described axial carrying plane air bearing surface 21, radial carrying cylinder air bearing surface 22 is 10 μm ~ 20 μm.
The diameter of the cylinder air bearing surface throttle orifice 25 on described piston cylinder 5 and the plane air bearing surface throttle orifice 24 on sleeve 6 is φ 0.1mm ~ φ 1mm.
One embodiment of the present of invention are provided below in conjunction with Fig. 1 ~ Fig. 2, Fig. 4.In the present embodiment, during Zero-rigidity vibration isolator work, lower installation board 2 is arranged on ground, the pedestal of instrument or basic framework, and upper mounting plate 1 is connected with by the load of vibration isolation.X, Y, Z-direction voice coil motor 8,9,10 all adopt cylinder type voice coil motor.For Y-direction voice coil motor 9, it mainly comprises the parts such as Y-direction motor iron yoke 9a, Y-direction magnetic steel of motor 9b, Y-direction motor coil framework 9c, Y-direction motor coil 9d and Y-direction motor transitional part 9e.Y-direction motor iron yoke 9a and Y-direction motor coil framework 9c is cylindrical shape, and Y-direction magnetic steel of motor 9b is cylindrical, and Y-direction motor coil 9d is around on Y-direction motor coil framework 9c, and Y-direction motor transitional part 9e provides the mounting structure of Y-direction motor coil framework 9c.Y-direction motor iron yoke 9a and Y-direction magnetic steel of motor 9b forms motor stator, and Y-direction motor coil framework 9c, Y-direction motor coil 9d form the mover of motor.Pass to electric current in coil during machine operation, according to electromagnetic theory, hot-wire coil can be subject to Lorentz force effect in magnetic field, can be controlled the size and Orientation of motor output drive strength by the size and Orientation controlling electric current.
X, Y, Z-direction displacement transducer 11,12,13 adopt grating scale.For Z-direction displacement transducer 13, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.During grating scale work, the relative displacement of itself and Z-direction glass raster chi 13c can detect by Z-direction grating reading head 13b, and gives controller 19 by signal conductor.
X, Y, Z-direction limit switch 14,15,16 adopt Hall-type limit switch.For Z-direction limit switch 16, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, are mounted opposite with the sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.During limit switch work, when Z-direction Hall switch 16b is close to Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and sleeve 6, and it is inner to be arranged on piston cylinder 5.
The carrying of vibration isolator to load realizes in the following way: clean compressed gas source 3 by tracheae 26, carry clean compressed air through solenoid valve 18, suction port 23 in piston cylinder 5.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of Controlling solenoid valve 18, regulate the gas flow be input in piston cylinder 5, thus the pressure of clean compressed air in regulating piston cylinder 5, make clean compressed air to piston cylinder 5 active force upwards and load, piston cylinder 5 and to load and the gravity of other component on piston cylinder 5 balances each other, the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.
In the present embodiment, in piston cylinder 5, the pressure of clean compressed air is 0.4MPa, and the effective radius of piston cylinder 5 lower surface is 100mm, then the quality of single vibration isolator carrying is: m=p × π r
2/ g ≈ 1282kg, wherein p is gas pressure intensity, and p=0.4MPa, r are the effective radius of piston cylinder 5 lower surface, and r=100mm, g are gravity accleration, g=9.8m/s
2.
Fig. 2 provides a kind of mode of execution of arthrodia bearing.Arthrodia bearing 7 forms primarily of bearing support 7a and bearing support 7b, it is secondary that convex spherical on concave spherical surface on bearing support 7b and bearing support 7a forms sliding movement, adopt liquid or solid oiling agent to lubricate, decoupling zero is carried out to the angular motion degrees of freedom between upper and lower mounting plate 1,2.
Fig. 3 provides the another kind of mode of execution of arthrodia bearing.Arthrodia bearing 7 forms primarily of bearing support 7a and bearing support 7b, bearing support 7b has convex spherical, form sliding movement pair with the concave spherical surface on bearing support 7a, adopt liquid or solid oiling agent to lubricate, decoupling zero is carried out to the angular motion degrees of freedom between upper and lower mounting plate 1,2.
Fig. 5 provides an embodiment of plane air bearing surface throttle orifice on sleeve.In the present embodiment, sleeve 6 lower surface is along the circumferential direction uniform 8 plane air bearing surface throttle orifices 24 around the center of circle, and diameter is φ 0.2mm.
Fig. 6 provides an embodiment of cylinder air bearing surface throttle orifice on piston cylinder.In the present embodiment, piston cylinder 5 sidewall along the circumferential direction uniform two arranges cylinder air bearing surface throttle orifices 25, and the quantity of often arranging cylinder air bearing surface throttle orifice 25 is 8, and diameter is φ 0.2mm.
An embodiment of Z-direction electromagnetic damper is given below in conjunction with Fig. 7, Fig. 9.In the present embodiment, vibration isolator has two Z-direction electromagnetic dampers 42, is made up of the Z-direction permanent magnet 42A array being arranged on piston cylinder 5 external cylindrical surface sidewall, piston cylinder 5 adopts No. 45 Steel materials, have higher permeability, sleeve 6 adopts red copper material, not magnetic conduction and have high conductivity.Z-direction permanent magnet 42A is bar shaped, along the driving force direction of Z-direction voice coil motor 10, namely the axial direction of piston cylinder 5 arrange, pole orientation is perpendicular to the external cylindrical surface of piston cylinder 5, and N, S pole is alternately arranged.When sleeve 6 produces Z-direction relative movement with piston cylinder 5, sleeve 6 cutting magnetic line and produce electric convolution and damping force, Z-direction damping force is directly proportional to the Z-direction speed of related movement of piston cylinder 5 to sleeve 6, direction is consistent with the driving force direction of Z-direction voice coil motor 10, reach consumption vibrational energy, improve the object of position stability.
Fig. 7, Figure 10 give another embodiment of Z electromagnetic damper.In the present embodiment, vibration isolator has four Z-direction electromagnetic dampers 42, is made up of the Z-direction permanent magnet 42A array being arranged on piston cylinder 5 external cylindrical surface sidewall.Z-direction permanent magnet 42A is bar shaped, along the driving force direction of Z-direction voice coil motor 10, namely the axial direction of piston cylinder 5 arrange, pole orientation is perpendicular to the external cylindrical surface of piston cylinder 5, and N, S pole is alternately arranged.
An embodiment of X, Y-direction electromagnetic damper is provided below in conjunction with Fig. 8, Figure 11.In the present embodiment, vibration isolator has two X to electromagnetic damper 40, two Y-direction electromagnetic dampers 41, respectively by being arranged on the X of lower installation board 2 upper surface sidewall, Y-direction permanent magnet 40A, 41A array forms, lower installation board 2 adopts No. 45 Steel materials, have higher permeability, sleeve 6 adopts red copper material, not magnetic conduction and have high conductivity.X, Y-direction permanent magnet 40A, 41A are elongate in shape, and the driving force direction respectively along X, Y-direction voice coil motor 8,9 is arranged, pole orientation is perpendicular to the upper surface of lower installation board 2, and N, S pole is alternately arranged.When sleeve 6 produces relative movement with lower installation board 2, sleeve 6 cutting magnetic line and produce electric convolution and damping force, X, Y-direction damping force are directly proportional to the speed of related movement of lower installation board 2 in X, Y-direction to sleeve 6, direction is consistent with the driving force direction of X, Y-direction voice coil motor 8,9, reach consumption vibrational energy, improve the object of position stability.
Fig. 8, Figure 12 give another embodiment of X, Y-direction electromagnetic damper.In the present embodiment, vibration isolator has an X to electromagnetic damper 40, a Y-direction electromagnetic damper 41, respectively by being arranged on the X of lower installation board 2 upper surface sidewall, Y-direction permanent magnet 40A, 41A array forms.X, Y-direction permanent magnet 40A, 41A are elongate in shape, and the driving force direction respectively along X, Y-direction voice coil motor 8,9 is arranged, pole orientation is perpendicular to the upper surface of lower installation board 2, and N, S pole is alternately arranged.
Claims (8)
1. the electromagnetic damping Zero-rigidity vibration isolator of arthrodia bearing angle decoupling zero, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) composition, vibration isolator main body (4) is arranged between upper mounting plate (1) and lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: in the structure of described vibration isolator main body (4), the lower surface of sleeve (6) and lower installation board (2) are lubricated by axial carrying plane air bearing surface (21) and support, piston cylinder (5) back-off is arranged in sleeve (6), and lubricate with sleeve (6) by the radial cylinder air bearing surface (22) that carries and support, arthrodia bearing (7) is arranged between piston cylinder (5) and upper mounting plate (1), Z-direction voice coil motor (10), Z-direction displacement transducer (13), Z-direction limit switch (16) is arranged between piston cylinder (5) and sleeve (6), X is to voice coil motor (8), X is to displacement transducer (11), X is to limit switch (14) and Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) is arranged between sleeve (6) and lower installation board (2), the driving force direction of Z-direction voice coil motor (10) is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor (8) and Y-direction voice coil motor (9), and X, Y, Z-direction displacement transducer (11,12,13) are consistent with the driving force direction of X, Y, Z-direction voice coil motor (8,9,10) with the line of action direction of X, Y, Z-direction limit switch (14,15,16), X, Y, Z-direction displacement transducer (11,12,13) are connected with the signal input part of controller (19) respectively with X, Y, Z-direction limit switch (14,15,16), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively, along X to voice coil motor (8) driving force direction, X is installed at lower installation board (2) upper surface sidewall and forms X to electromagnetic damper (40) to permanent magnet (40A), along Y-direction voice coil motor (9) driving force direction, Y-direction permanent magnet (41A) is installed at lower installation board (2) upper surface sidewall and forms Y-direction electromagnetic damper (41), along Z-direction voice coil motor (10) driving force direction, Z-direction permanent magnet (42A) is installed at piston cylinder (5) external cylindrical surface sidewall and forms Z-direction electromagnetic damper (42), X, Y-direction permanent magnet (40A, pole orientation 41A) is perpendicular to the upper surface of lower installation board (2), and N, S pole is alternately arranged, the pole orientation of Z-direction permanent magnet (42A) is perpendicular to the external cylindrical surface of piston cylinder (5), and N, S pole is alternately arranged, piston cylinder (5) and lower installation board (2) adopt ferromagnetic material, sleeve (6) adopts non-magnetic good conductor material.
2. the electromagnetic damping Zero-rigidity vibration isolator of arthrodia bearing angle according to claim 1 decoupling zero, it is characterized in that: in described piston cylinder (5), be provided with gas pressure sensor (17), piston cylinder (5) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the electromagnetic damping Zero-rigidity vibration isolator of arthrodia bearing angle according to claim 1 decoupling zero, is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
4. the electromagnetic damping Zero-rigidity vibration isolator of arthrodia bearing angle according to claim 1 decoupling zero, is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
5. the electromagnetic damping Zero-rigidity vibration isolator of arthrodia bearing angle according to claim 1 decoupling zero, is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
6. the electromagnetic damping Zero-rigidity vibration isolator of arthrodia bearing angle according to claim 1 decoupling zero, is characterized in that: described piston cylinder (5) interior gas pressure is 0.1MPa ~ 0.8MPa.
7. the electromagnetic damping Zero-rigidity vibration isolator of arthrodia bearing angle according to claim 1 decoupling zero, is characterized in that: the air-film thickness of described axial carrying plane air bearing surface (21), radial carrying cylinder air bearing surface (22) is 10 μm ~ 20 μm.
8. the electromagnetic damping Zero-rigidity vibration isolator of arthrodia bearing angle according to claim 1 decoupling zero, is characterized in that: the diameter of the cylinder air bearing surface throttle orifice (25) on described piston cylinder (5) and the plane air bearing surface throttle orifice (24) on sleeve (6) is φ 0.1mm ~ φ 1mm.
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| CN201210574672.4A CN103047343B (en) | 2012-12-19 | 2012-12-19 | Electromagnetic damping zero-stiffness vibration isolator with angular decoupling function by aid of sliding joint bearing |
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| CN201210574672.4A CN103047343B (en) | 2012-12-19 | 2012-12-19 | Electromagnetic damping zero-stiffness vibration isolator with angular decoupling function by aid of sliding joint bearing |
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| US5844664A (en) * | 1995-05-30 | 1998-12-01 | U.S. Philips Corporation | Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning device |
| EP1486825A1 (en) * | 2003-06-13 | 2004-12-15 | ASML Netherlands B.V. | Supporting device, lithographic projection apparatus and device manufacturing method using a supporting device and a position control system arranged for use in a supporting device |
| CN101818777A (en) * | 2010-05-07 | 2010-09-01 | 华中科技大学 | Self-adaptive damping variable ultra-precise vibration absorber |
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| US6953109B2 (en) * | 2002-10-08 | 2005-10-11 | Nikon Corporation | Vibration isolator with low lateral stiffness |
| CN201604761U (en) * | 2009-11-27 | 2010-10-13 | 重庆建设摩托车股份有限公司 | Beach vehicle rear shock absorber joint structure |
| CN102543217B (en) * | 2012-01-20 | 2013-10-23 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
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| US5844664A (en) * | 1995-05-30 | 1998-12-01 | U.S. Philips Corporation | Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning device |
| EP1486825A1 (en) * | 2003-06-13 | 2004-12-15 | ASML Netherlands B.V. | Supporting device, lithographic projection apparatus and device manufacturing method using a supporting device and a position control system arranged for use in a supporting device |
| CN101818777A (en) * | 2010-05-07 | 2010-09-01 | 华中科技大学 | Self-adaptive damping variable ultra-precise vibration absorber |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
| CN102720786A (en) * | 2012-07-09 | 2012-10-10 | 哈尔滨工业大学 | Multi-degree of freedom electromagnetic damper |
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