Summary of the invention
The invention provides a kind of fluid jetting head and drive control method, be conducive to realize the miniaturization of fluid jetting head.
The invention provides a kind of fluid jetting head, comprising:
Silicon substrate, and the driving pulse that forms at silicon substrate produces circuit, Drive and Control Circuit and a plurality of printhead;
Described a plurality of print head matrix is arranged; Arbitrary described printhead comprises: a liquid chamber and a piezo-electric device; The bottom of described liquid chamber is formed on the described silicon substrate and is formed with ink-feed channel with described liquid chamber conducting, and the top is formed with the ink passage that goes out with described liquid chamber conducting; The sidewall of at least one end of described piezo-electric device and described liquid chamber is affixed, controls that described liquid chamber outwards sprays ink or to described liquid chamber infusing ink by the vibration of described piezo-electric device;
Described driving pulse produces circuit and is connected with the first electrode of each described piezo-electric device respectively, is used for applying driving pulse voltage to the first electrode of each described piezo-electric device;
Described Drive and Control Circuit comprises: be used for the data wire of transferring printing data signal and a plurality of driving control unit that connect one to one with the second electrode of each described piezo-electric device; Arbitrary described driving control unit also is connected with described data wire, be used for obtaining the rank addresses enable signal of the corresponding described piezo-electric device that connects, and according to the described rank addresses enable signal and the described print data signal that obtain, determine to be applied to the voltage of the second electrode of the corresponding described piezo-electric device that connects, with the voltage difference at the two poles of the earth of changing the corresponding described piezo-electric device that connects.
The present invention also provides a kind of driving control method of fluid jetting head, comprising:
The first electrode of the piezo-electric device of each printhead in a plurality of printheads that the matrix that comprises to fluid jetting head is arranged applies respectively the driving pulse voltage that driving pulse produces circuit output;
Data wire in Drive and Control Circuit transmits print data signal;
In described a plurality of printheads, determine the target printhead according to the printing target area that obtains in advance, and obtain the rank addresses of the target piezo-electric device of described target printhead; According to the rank addresses of described target piezo-electric device, in the described Drive and Control Circuit with the target drives control module line of input column address enable signal of the corresponding connection of described target piezo-electric device;
Described target drives control module receives described print data signal by described data wire, and according to described rank addresses enable signal and described print data signal, determine to be applied to the voltage of the second electrode of described target piezo-electric device, to produce voltage difference at described target piezo-electric device the two poles of the earth;
Described target piezo-electric device is vibration-generating under described voltage difference effect, to control that described target printhead outwards sprays ink by the target liq chamber or to described target liq chamber infusing ink.
In fluid jetting head provided by the invention and the driving control method thereof, a plurality of print head matrix that fluid jetting head comprises are arranged, and comprise the driving control unit that the piezo-electric device with each printhead connects one to one by Drive and Control Circuit, can realize piezo-electric device is realized the two-dimension addressing of ranks, thereby a plurality of printheads of arranging for matrix provide the driving implementation.Because the mode that a plurality of print head matrix are arranged with respect to prior art linear pattern arrangement mode, can be utilized the space in the shower nozzle more flexibly, so that the fluid jetting head structure is more compact, is conducive to realize the miniaturization of fluid jetting head.In addition, driving pulse of the present invention produces circuit and Drive and Control Circuit all is formed on the silicon substrate, has therefore saved the required space that takies of additional configuration drive circuit in the shower nozzle, and then also has been conducive to realize the miniaturization of fluid jetting head.
The specific embodiment
For the purpose, technical scheme and the advantage that make the embodiment of the invention clearer, below in conjunction with the accompanying drawing in the embodiment of the invention, technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to the scope of protection of the invention not making the every other embodiment that obtains under the creative work prerequisite.
The structural representation of the fluid jetting head that Fig. 1 provides for the embodiment of the invention one.Fluid jetting head as shown in Figure 1 comprises: silicon substrate 1, drive circuit 3 and a plurality of printhead; Drive circuit 3 and printhead are respectively formed on the silicon substrate 1.
A plurality of printheads are matrix and arrange.Arbitrary printhead comprises: a liquid chamber 21 and a piezo-electric device 22; The bottom of liquid chamber 21 is formed on the silicon substrate 1 and is formed with ink-feed channel 23 with liquid chamber 21 conductings, the top be formed with liquid chamber 21 conductings go out ink passage 24; Piezo-electric device 22 is arranged in the liquid chamber 21, wherein, at least one end of piezo-electric device 22 and the sidewall of liquid chamber 21 are affixed, by the vibration of piezo-electric device 22, control liquid chamber 21 through go out ink passage 24 and outwards spray inks or through ink-feed channel 23 to liquid chamber 21 infusing inks.Piezo-electric device 22 can further comprise piezoelectric element 22a; Piezoelectric element 22a comprises: the first electrode 221 that stacks gradually, piezoelectric layer 222 and the second electrode 223; When applying voltage to the first electrode 221 and the second electrode 223, the voltage difference that forms between the first electrode 221 and the second electrode 223 drives piezoelectric element 22a vibration-generating.
Drive circuit 3 comprises: driving pulse produces circuit and Drive and Control Circuit, wherein:
Driving pulse produces circuit and is connected with the first electrode 221 of the piezo-electric device 22 of each printhead respectively, applies driving pulse voltage for the first electrode 221 to each piezo-electric device 22.
The structural representation of Drive and Control Circuit 32 specifically comprises as shown in Figure 2: be used for the data wire 321 of transferring printing data signal and a plurality of driving control unit 322 that connect one to one with the second electrode 223 of each described piezo-electric device 22.Arbitrary driving control unit 322 also is connected with data wire 321, be used for obtaining the rank addresses enable signal of the corresponding piezo-electric device 22 that connects, and according to the described rank addresses enable signal and the described print data signal that obtain, determine to be applied to the voltage of the second electrode 223 of the corresponding piezo-electric device 22 that connects, with the voltage difference at the two poles of the earth of changing the corresponding piezo-electric device 22 that connects.
A plurality of print head matrix that the fluid jetting head that the present embodiment provides comprises are arranged, and comprise the driving control unit that the piezo-electric device with each printhead connects one to one by Drive and Control Circuit, can realize piezo-electric device is realized the two-dimension addressing of ranks, thereby a plurality of printheads of arranging for matrix provide the driving implementation.Because the mode that a plurality of print head matrix are arranged with respect to prior art linear pattern arrangement mode, can be utilized the space in the shower nozzle more flexibly, so that the fluid jetting head structure is more compact, is conducive to realize the miniaturization of fluid jetting head.In addition, the driving pulse of the present embodiment produces circuit and Drive and Control Circuit all is formed on the silicon substrate, has therefore saved the required space that takies of additional configuration drive circuit in the shower nozzle, and then also has been conducive to realize the miniaturization of fluid jetting head.
On the basis of technique scheme, a plurality of printheads of fluid jetting head can be divided into groups, concrete packet mode is unrestricted, for example: can adopt and divide equally or non-all modes of grading are divided into groups.Can be to the divide into groups driving control of printhead of fluid jetting head, to improve the flexibility of addressing speed and control under this situation.Concrete, the Drive and Control Circuit in the drive circuit 3 also can comprise: line is selected in many zones that are used for transfer printing head enable signal; The grouping printhead shares a zone and selects line to come transfer printing head enable signal, and namely corresponding each driving control unit that connects of each piezo-electric device of every group of printhead selects line to link to each other with same zone.
On the basis of technique scheme, in order to protect exposed drive circuit 3, can be formed with circuit insulating protective layer 25 at drive circuit 3, piezo-electric device 22 is formed on the circuit insulating protective layer 25; Also be formed with electrical connection via hole 26 on the circuit insulating protective layer 25, drive circuit 3 is connected with the electrode of piezo-electric device 22 by being electrically connected via hole 26.Concrete, being formed with first on the circuit insulating protective layer 25 and being electrically connected via hole and the second electrical connection via hole, driving pulse generation circuit is electrically connected via hole by first and is connected with the first electrode 221 of each piezo-electric device 22 respectively; Driving control unit is electrically connected via hole by second and is connected with the second electrode 223 of corresponding piezo-electric device 22.
Optionally, in order to protect piezoelectric element, piezo-electric device 22 also comprises the vibration isolation protective layer 22b that is coated on piezoelectric element 22a outer surface; Vibration isolation protective layer 22b plays a role as oscillating plate, and is concrete, when the piezoelectric layer 222 of piezoelectric element 22a in the vibration-generating, drives vibration isolation protective layer 22b and vibrates together under the voltage difference effect that the two poles of the earth apply.Under this situation; the first electrical connection via hole and second is electrically connected via hole and penetrates vibration isolation protective layer 22b; second is electrically connected via hole can be opened in circuit insulating protective layer 25 and the first electrode 221 nonoverlapping zones; can be connected with the first electrode 221 of piezo-electric device 22 by the first electrical connection via hole so that the driving pulse in the drive circuit 3 produces circuit, the connecting line of the Drive and Control Circuit in the drive circuit 3 can pass the second electrical connection via hole and be connected with the second electrode 223 of piezo-electric device 22.
Optionally, piezo-electric device 22 can be set to cantilever beam structure.For example: an end of piezo-electric device 22 and a sidewall that is fixedly connected on liquid chamber 21, the other end stretches into and is unsettled in liquid chamber 21; Be that an end is stiff end in the two ends of piezo-electric device 22, the other end is movable end.So the benefit of design is, when the two poles of the earth of piezo-electric device are formed with voltage difference, the Oscillation Amplitude of piezo-electric device movable end of the present invention, relatively to be the Oscillation Amplitude of piezo-electric device of stiff end larger at two ends in the prior art, therefore when obtaining identical Oscillation Amplitude, the required power consumption of piezo-electric device of the present invention is less.
The driving pulse that Fig. 3 provides for the invention process two produces the schematic diagram of circuit.As shown in Figure 3, driving pulse generation circuit 31 comprises: input IN, capacitor C, charging control circuit, charge/discharge control circuit and output OUT.
Input IN is used for receiving outside print signal.The print signal of outside input can be specially periodic square wave signal, and as shown in Figure 4, pulse width is Tc.Capacitor C is used for hocketing discharging and recharging.Charging control circuit is used for when the rising edge of print signal arrives, and control capacitance C charges.Charge/discharge control circuit is used for when the trailing edge of print signal arrives, and control capacitance C discharges.Output OUT is used for to the first electrode output of each piezo-electric device or amplifies the voltage at output capacitance C two ends.Concrete:
Charging control circuit can comprise: the first triode Q1, the second triode Q2, the 3rd triode Q3, the first resistance R 1 and the 3rd resistance R 3.Wherein: the base stage of the first triode Q1 is connected with input IN, and colelctor electrode is connected grounded emitter with an end of the 3rd resistance R 3; The other end of the 3rd resistance R 3, with the colelctor electrode of the 3rd triode Q3 be connected the parallel connection point of base stage of address transistor Q2 and be connected; The emitter stage of the second triode Q2 is connected with high pressure reference line VH through the first resistance R 1, and colelctor electrode is connected with an end of capacitor C, the other end ground connection of capacitor C; The base stage of the 3rd triode Q3 and the first resistance R 1 be connected the series connection point of triode Q2 and be connected, emitter stage is connected with high pressure reference line VH;
Charge/discharge control circuit can comprise: the 4th triode Q4, the 5th triode Q5 and the second resistance R 2; Charge/discharge control circuit also can comprise phase inverter 313.Wherein: the input of phase inverter 313 is connected with input IN, and output is connected with the base stage of the 4th triode Q4 and the parallel connection point of the colelctor electrode of the 5th triode Q5; The emitter stage of the 4th triode Q4 is through the second resistance R 2 ground connection, and colelctor electrode is connected with an end of capacitor C, the other end ground connection of capacitor C; The emitter stage of the base electrode of the 5th triode Q5 and the 4th triode Q4 be connected the series connection point of resistance R 2 and be connected grounded emitter;
If output OUT output is the voltage of capacitor C both end voltage after amplifying, then driving pulse generation circuit 31 also can comprise: the 6th triode Q6 and the 7th triode Q7.Wherein, the parallel connection point of the base stage of the 6th triode Q6 and the base stage of the 7th triode Q7 is connected with the end of memory capacitance C, the other end ground connection of memory capacitance; The colelctor electrode of the 6th triode Q6 connects high pressure reference line VH; The grounded collector of the 7th triode Q7; The point in parallel of the emitter stage of the emitter stage of the 6th triode Q6 and the 7th triode Q7, OUT is connected with output.
The course of work that driving pulse as shown in Figure 3 produces circuit is as follows:
From input IN input print signal Tc.
When the rising edge of print signal Tc arrives, charging control circuit work, concrete: the first triode Q1 conducting, the second triode Q2 conducting, electric current flows to capacitor C by the first resistance R 1, make the voltage at the first resistance R 1 two ends equal the base stage of the 3rd triode Q3 and the voltage VBE3 between the emitter stage, the 3rd triode Q3 conducting.Like this, the 3rd triode Q3, the first resistance R 1 and the second triode Q2 just are equivalent to a constant-current circuit, might as well be called the capacitor C that the first constant-current circuit 311, the first constant-current circuits 311 flow to capacitor C and remain on steady state value, and capacitor C begins charging.In the capacitor C charging process, the voltage linear at capacitor C two ends increases, and the voltage at capacitor C two ends outputs to the first electrode of the piezo-electric device of each printhead through output OUT after the 6th triode Q6 and the 7th triode Q7 amplification.If Drive and Control Circuit provides constant low pressure to the second electrode of piezo-electric device, such as ground voltage, then between the two poles of the earth of piezo-electric device, be formed with voltage difference, this voltage difference drives the movable end of piezo-electric device to the liquid chamber top curved; Voltage difference is larger, and the degree of piezo-electric device bending is larger; In the process of liquid chamber top curved, the volume between piezo-electric device and the liquid chamber top reduces at the movable end of piezo-electric device, thereby so that the ink in the liquid chamber from going out the ink passage ejection, is realized inkjet printing; Simultaneously, in the process of liquid chamber top curved, the volume between piezo-electric device and the liquid chamber bottom increases at the movable end of piezo-electric device, thereby so that the ink of outside print cartridge be injected in the liquid chamber by ink-feed channel.
When the trailing edge of print signal Tc arrives, charge/discharge control circuit work, concrete: the 4th triode Q4 conducting, capacitor C is by 2 discharges of the second resistance R, make the voltage at the second resistance R 2 two ends equal the base stage of the 5th triode Q5 and the voltage VBE5 between the emitter stage, the 5th triode Q5 conducting.Like this, the 4th triode Q4, the second resistance R 2 and the 5th triode Q5 just are equivalent to a constant-current circuit, might as well be called the second constant-current circuit 312; The electric current of emitting through the second constant-current circuit 312 from capacitor C remains on steady state value, the voltage linear reduction at capacitor C two ends and the voltage at capacitor C two ends output to the first electrode of the piezo-electric device of each printhead through output OUT after the 6th triode Q6 and the 7th triode Q7 amplification.If Drive and Control Circuit provides constant low pressure to the second electrode of piezo-electric device, such as ground voltage, then along with the continuous reduction of output OUT to the voltage of the first electrode output of piezo-electric device, voltage difference between piezo-electric device the two poles of the earth is corresponding reduction also, the movable end of piezo-electric device moves along the bottom direction of liquid chamber, reduce gradually its degree of crook, until the voltage difference at piezo-electric device the two poles of the earth is zero, piezo-electric device is replied the initial natural extended configuration.
It is simple that the driving pulse that the present embodiment provides produces circuit structure, and cost is low, and public driving pulse voltage can be provided to the piezo-electric device of each printhead.After Drive and Control Circuit was finished the addressing of piezo-electric device, the target piezo-electric device can vibrate under the control of driving pulse voltage, and with liquid chamber periodicity ink-jet and the blotting of moving-target printhead, and then the continous inkjet of realize target printhead is printed.
The circuit diagram of the driving control unit that Fig. 5 provides for the invention process three.As shown in Figure 5, driving control unit 322 comprises: the first address wire 3221, the second address wire 3222, the first address transistor 3223, the second address transistor 3224, data transistor 3225, divider resistance 3226 and driving transistors 3227.Wherein:
The first address wire 3221 is used for transmission piezo-electric device row address enable signal; The second address wire 3222 is used for transmission piezo-electric device column address enable signal; The first address transistor 3223 is used for the signal of response the first address wire 3221 inputs; The second address transistor 3224 is used for the signal of response the second address wire 3222 inputs; Data transistor 3225 is used for the signal of response data line 321 inputs.
Concrete, the grid of the first address transistor 3223 is connected with the first address wire 3221, and the grid of the second address transistor 3224 is connected with the second address wire 3222, and the grid of data transistor 3225 is connected with data wire 321; The drain-source path of the drain-source path of the first address transistor 3223, the second address transistor 3224 is in parallel with the drain-source path of data transistor 3225; Divider resistance 3226 is serially connected between the reference voltage line 324 that is used for the transmission reference voltage in the grid of driving transistors 3227 and the Drive and Control Circuit; The grid of driving transistors 3227 also is connected with the drain-source path point in parallel that the first address transistor 3223, the second address transistor 3224 are connected with data transistor; The drain-source path of driving transistors 3227 is serially connected between second electrode and ground signalling line of piezo-electric device 22.
The grid of driving transistors 3227 forms memory capacitance 3228, and this memory capacitance 3228 works as memory component, and memory node electric capacity 3228 is shown in broken lines, because it is the part of driving transistors 3227.Replacedly, also can be at independent component of serial connection between the grid of driving transistors 3227 and ground signalling line as this memory capacitance 3228.
On the basis of technique scheme, if Drive and Control Circuit divides into groups to drive to a plurality of printheads of fluid jetting head, Drive and Control Circuit comprises that the zone that drives enable signal for the transfer printing head selects line, and then driving control unit also can comprise; Select transistor 3229.Select transistor 3229 to be used for the signal that response region is selected the line transmission.Concrete, select the grid of transistor 3229 to select line 323 to be connected with the zone; Select the drain-source path of transistor 3229, the grid that is serially connected in driving transistors 3227 is with between the drain-source path of the first address transistor 3223, the second address transistor 3224 and data transistor 3225 is in parallel.
The course of work of Drive and Control Circuit as shown in Figure 5 is as follows:
Transmit with reference to high pressure VH at reference voltage line 324; Transmit print data signal at data wire 321; Line 323 transmission printhead enable signals are selected in the zone corresponding with printing the target area in Drive and Control Circuit; In a plurality of printheads, determine the target printhead according to printing the target area, and obtain the rank addresses of the piezo-electric device of this printhead; According to the rank addresses of this piezo-electric device, in the Drive and Control Circuit with the first address wire 3221 and second address wire 3222 of the driving control unit 322 of the corresponding connection of this piezo-electric device, respectively line of input address enable signal and column address enable signal.
When the high-voltage signal of transmission expression printhead enable signal on the line 323 is selected in the zone, select transistor 3229 conductings, illustrate that printhead corresponding to current driving control unit is addressed printhead; When transmission represents the low-voltage signal of row address enable signal on the first address wire 3221,3223 cut-offs of the first address transistor; When transmission represents the low-voltage signal of column address enable signal on the second address wire 3222,3224 cut-offs of the second address transistor; When data wire 324 transmission represent the low-voltage signal of print data signals, data transistor 3225 cut-offs.When the first address transistor 3223 and the second address transistor 3224 all end, the corresponding piezo-electric device that connects of current driving control unit is described, be addressed piezo-electric device; When the data transistor cut-off, illustrate to have data to be printed.
Under the prerequisite of selecting transistor 3229 conductings, if the first address transistor 3224, the second address transistor 3225 and data transistor 3226 all end, memory capacitance 5 chargings, driving transistors 3227 conductings, at this moment, be serially connected in the drain-source path of the second electrode and the driving transistors 3227 between the ground signalling line of piezo-electric device 22, being equivalent to provides constant ground voltage for the second electrode of piezo-electric device 22, if driving pulse produces the output OUT of circuit to the higher driving pulse voltage of the first electrode output of piezo-electric device, then can form voltage difference at the two poles of the earth of this piezo-electric device 22, this voltage difference drives piezo-electric device 22 vibration-generatings, and corresponding printhead carries out inkjet printing.
If the first address transistor 3224, at least one transistor turns in the second address transistor 3225 and the data transistor 3226, and/or select transistor 3229 to end, then memory capacitance 5 discharges, driving transistors 3227 cut-offs, at this moment, be serially connected in the drain-source path of the second electrode and the driving transistors 3227 between the ground signalling line of piezo-electric device 22, being equivalent to provides constant high-order voltage for the second electrode of piezo-electric device 22, if driving pulse produces the output OUT of circuit to the higher driving pulse voltage of the first electrode output of piezo-electric device, then can not form voltage difference at the two poles of the earth of this piezo-electric device 22, this piezo-electric device 22 therefore can vibration-generating, and corresponding printhead does not carry out inkjet printing.
This shows the Drive and Control Circuit that the present embodiment provides easy realization simple in structure; This circuit is only all correct and exist under the condition of print data in regional addressing and piezo-electric device addressing, just can provide low pressure to the second electrode of piezo-electric device 22, produce the driving pulse voltage of circuit output end OUT output with driving pulse, the two poles of the earth at piezo-electric device 22 produce voltage difference, thereby drive corresponding piezo-electric device vibration-generating; Otherwise piezo-electric device is vibration-generating not.Therefore, the present embodiment accurately addressing has improved the accuracy of printing, and the present embodiment prints the grouping control of head by the printhead enable signal, therefore also helps the speed that improves addressing, and then improves print speed.
The driving control method flow chart of the fluid jetting head that Fig. 6 provides for the embodiment of the invention four.Method as shown in Figure 6 comprises:
Step 61: the first electrode of the piezo-electric device of each printhead in a plurality of printheads that the matrix that comprises to fluid jetting head is arranged applies respectively the driving pulse voltage that driving pulse produces circuit output.
Step 62: the data wire in Drive and Control Circuit transmits print data signal.
Step 63: in described a plurality of printheads, determine the target printhead according to the printing target area that obtains in advance, and obtain the rank addresses of the target piezo-electric device of described target printhead; According to the rank addresses of described target piezo-electric device, in the described Drive and Control Circuit with the target drives control module line of input column address enable signal of the corresponding connection of described target piezo-electric device.
Step 64: described target drives control module receives described print data signal by described data wire, and according to described rank addresses enable signal and described print data signal, determine to be applied to the voltage of the second electrode of described target piezo-electric device, to produce voltage difference at described target piezo-electric device the two poles of the earth.
Step 65: described target piezo-electric device is vibration-generating under described voltage difference effect, to control that described target printhead outwards sprays ink by the target liq chamber or to described target liq chamber infusing ink.
On the basis of technique scheme, in order to improve the flexibility of addressing speed and control, the driving control method of fluid jetting head also can comprise: transmission objectives printhead enable signal on the line is selected in target area corresponding with described printing target area in described Drive and Control Circuit; Described target drives control module selects line to receive described target printhead enable signal by described target area.Accordingly, above-mentioned steps 64 specifically can be: when described target drives control module receives described target printhead enable signal, rank addresses enable signal and described print data signal according to described target piezo-electric device, determine to be applied to the voltage of the second electrode of described target piezo-electric device, to produce voltage difference at described target piezo-electric device the two poles of the earth.
The driving control method of the fluid jetting head that the present embodiment provides can be according to printing the target area, a plurality of printhead procession two-dimension addressings to the matrix arrangement, the piezo-electric device of the target printhead that driving is addressed to vibrates to realize inkjet printing, provides attainable type of drive thereby arrange for a plurality of print head matrix in the fluid jetting head.Because the mode that a plurality of print head matrix in the fluid jetting head are arranged can be utilized the space in the shower nozzle more flexibly with respect to prior art linear pattern arrangement mode, so that the fluid jetting head structure is more compact, is conducive to realize the miniaturization of fluid jetting head.The fluid jetting head structure of the driving control method that the present embodiment provides and drive circuit are realized, can referring to the record of the corresponding embodiment of Fig. 1-Fig. 5, not repeat them here.
It should be noted that at last: above embodiment only in order to technical scheme of the present invention to be described, is not intended to limit; Although with reference to previous embodiment the present invention is had been described in detail, those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment puts down in writing, and perhaps part technical characterictic wherein is equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution break away from the scope of various embodiments of the present invention technical scheme.