CN103022254A - 一种渐变折射率减反膜太阳能电池及其制备方法 - Google Patents
一种渐变折射率减反膜太阳能电池及其制备方法 Download PDFInfo
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- CN103022254A CN103022254A CN2012105629909A CN201210562990A CN103022254A CN 103022254 A CN103022254 A CN 103022254A CN 2012105629909 A CN2012105629909 A CN 2012105629909A CN 201210562990 A CN201210562990 A CN 201210562990A CN 103022254 A CN103022254 A CN 103022254A
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103208564A (zh) * | 2013-04-11 | 2013-07-17 | 浙江正泰太阳能科技有限公司 | 一种晶体硅太阳能电池的制备方法 |
CN104051570A (zh) * | 2014-06-09 | 2014-09-17 | 山东力诺太阳能电力股份有限公司 | 一种太阳能电池的制作方法 |
CN104505429A (zh) * | 2014-11-21 | 2015-04-08 | 广东爱康太阳能科技有限公司 | 一种应用于晶硅太阳能电池的光刻工艺 |
CN106684158A (zh) * | 2015-11-10 | 2017-05-17 | 北京卫星环境工程研究所 | 高发电效率空间太阳电池结构 |
CN107275190A (zh) * | 2017-06-30 | 2017-10-20 | 韩华新能源(启东)有限公司 | 一种在半导体衬底上制备双层氮化硅薄膜的方法 |
CN109243969A (zh) * | 2018-08-31 | 2019-01-18 | 常州亿晶光电科技有限公司 | 管式pecvd氮化硅渐变膜工艺 |
CN109545710A (zh) * | 2018-09-29 | 2019-03-29 | 东方日升新能源股份有限公司 | 一种降低折射率的镀膜方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101022135A (zh) * | 2007-02-09 | 2007-08-22 | 江苏艾德太阳能科技有限公司 | 硅太阳能电池减反射薄膜 |
CN102534547A (zh) * | 2011-12-16 | 2012-07-04 | 合肥晶澳太阳能科技有限公司 | 一种晶体硅太阳电池的渐变减反射氮化硅薄膜的制备工艺 |
CN202616239U (zh) * | 2012-02-28 | 2012-12-19 | 常州天合光能有限公司 | 一种低损伤高钝化的太阳能电池 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101022135A (zh) * | 2007-02-09 | 2007-08-22 | 江苏艾德太阳能科技有限公司 | 硅太阳能电池减反射薄膜 |
CN102534547A (zh) * | 2011-12-16 | 2012-07-04 | 合肥晶澳太阳能科技有限公司 | 一种晶体硅太阳电池的渐变减反射氮化硅薄膜的制备工艺 |
CN202616239U (zh) * | 2012-02-28 | 2012-12-19 | 常州天合光能有限公司 | 一种低损伤高钝化的太阳能电池 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103208564A (zh) * | 2013-04-11 | 2013-07-17 | 浙江正泰太阳能科技有限公司 | 一种晶体硅太阳能电池的制备方法 |
CN103208564B (zh) * | 2013-04-11 | 2016-01-20 | 浙江正泰太阳能科技有限公司 | 一种晶体硅太阳能电池的制备方法 |
CN104051570A (zh) * | 2014-06-09 | 2014-09-17 | 山东力诺太阳能电力股份有限公司 | 一种太阳能电池的制作方法 |
CN104505429A (zh) * | 2014-11-21 | 2015-04-08 | 广东爱康太阳能科技有限公司 | 一种应用于晶硅太阳能电池的光刻工艺 |
CN106684158A (zh) * | 2015-11-10 | 2017-05-17 | 北京卫星环境工程研究所 | 高发电效率空间太阳电池结构 |
CN107275190A (zh) * | 2017-06-30 | 2017-10-20 | 韩华新能源(启东)有限公司 | 一种在半导体衬底上制备双层氮化硅薄膜的方法 |
CN109243969A (zh) * | 2018-08-31 | 2019-01-18 | 常州亿晶光电科技有限公司 | 管式pecvd氮化硅渐变膜工艺 |
CN109545710A (zh) * | 2018-09-29 | 2019-03-29 | 东方日升新能源股份有限公司 | 一种降低折射率的镀膜方法 |
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