CN102996418A

CN102996418A - Ultra-acoustic streaming micro-pump capable of realizing bidirectional flow

Info

Publication number: CN102996418A
Application number: CN201210488815XA
Authority: CN
Inventors: 魏守水; 魏长智
Original assignee: Shandong University
Current assignee: Shandong University
Priority date: 2012-11-26
Filing date: 2012-11-26
Publication date: 2013-03-27
Anticipated expiration: 2032-11-26
Also published as: CN102996418B

Abstract

The invention relates to an ultra-acoustic streaming micro-pump capable of realizing bidirectional flow. The ultra-acoustic streaming micro-pump consists of a plurality of acoustic streaming micro-pump units which are connected in series; a fluid cavity of each acoustic streaming micro-pump unit comprises four parts, namely an inlet cavity, an outlet cavity, an acoustic streaming cavity and a backflow cavity, so as to form an H-shaped cavity structure; the inlet cavity and the backflow cavity are connected in a horizontal direction; the acoustic streaming cavity is vertically connected at the connection part between the inlet cavity and the backflow cavity; the outlet cavity is vertically connected with the top end of the acoustic streaming cavity; the acoustic streaming cavity of each acoustic streaming micro-pump unit is over against one piezoelectric sheet; the piezoelectric sheet is arranged at the position over against the bottom side of a pipeline of the acoustic streaming cavity; the piezoelectric sheet is connected with a piezoelectric driver; and the fluid cavities of the multiple acoustic streaming micro-pump units are communicated. The micro-pump provided by the invention has the advantages of no need of a pressure cavity, no movable components, high reliability, easiness in manufacturing, small damages on suspension particles, low working voltage, low heat, and no limitation to the type of transmitted liquid/gas. The micro-pump provided by the invention can be used for transmitting the liquid containing DNA (Deoxyribose Nucleic Acid) and other biological test samples and the like.

Description

A kind of ultrasonic current Micropump that can realize two-way flow

Technical field

The present invention relates to a kind of Micropump, particularly a kind of ultrasonic current Micropump that can realize two-way flow.

Background technique

Micropump is the crucial power unit of microfluid system, uses very extensive.Test and medical aspect, Micropump can be used for DNA and detects analysis and the transmission of medicine in human body; Aerospace field, Micropump can be used for the fuel of miniature aerospace vehicle and micro detector and supply with; At microelectronic, Micropump can be used the conveying with microelectronic liquid-cooling system cooling liquid; At chemical field, Micropump can be used for the conveying of chemical products and the accurate configuration of valuable drug.

Have the valve Micropump usually to adopt mechanical part to realize rectification, rectification effect is better, but has movable member wearing and tearing and fatigue ruption, and miniaturization and working life are restricted.

The research of valve free pump starts from 1993, and the people such as Sweden E.Stemme design expansion/contraction cast Micropump, utilizes the difference of the resistance that the nonsymmetry convection cell of port structure produces to realize rectification.After this, numerous scholars to the Micropump of this type from processing method, driving mode, pump housing material and packaging method etc. not ipsilateral carried out comprehensive research, be the most active field of present valve free pump research.The performance of this class Micropump depends critically upon the structural design of gateway, and flow loss is larger usually, and efficient is on the low side.

Summary of the invention

The objective of the invention is to overcome above-mentioned deficiency and a kind of ultrasonic current Micropump that can realize two-way flow is provided, this Micropump can be realized the two-way flow of fluid.

The technological scheme that the present invention takes is:

A kind of ultrasonic current Micropump that can realize two-way flow, it is formed by a plurality of acoustic streaming Micropumps unit serial connection, the fluid chamber of each acoustic streaming Micropump unit includes the oral cavity, outlet plenum, acoustic streaming chamber and refluxing chamber four parts form H shape cavity body structure, entrance cavity wherein, refluxing chamber joins in the horizontal direction, the connecting part vertically connects the acoustic streaming chamber, vertical connection outlet chamber, top, acoustic streaming chamber, the acoustic streaming chamber of each acoustic streaming Micropump unit is over against a piezo-electric sheet, piezo-electric sheet places the position, pipeline bottom side over against the acoustic streaming chamber, piezo-electric sheet connects piezoelectric actuator, and the fluid chamber of a plurality of acoustic streaming Micropumps unit is connected.

Described entrance cavity, outlet plenum, acoustic streaming chamber and refluxing chamber cross section are preferably square, size 10um * 10um～100um * 100um.

Piezoelectric actuator applies high frequency (1-50MHz, preferred 30-50MHz) during sinusoidal voltage, the bottom piezo-electric sheet produces vibration, the high strength supersonic field has appearred in the acoustic streaming chamber of nearly piezo-electric sheet, because there is viscosity in fluid, can produce decay along the acoustic streaming cavity direction, thereby produce pressure gradient, it impels the liquid in the Ultrasonic field to flow along hyperacoustic direct of travel, forms net flow.

Adopt such structure, can not only improve driving force, increase flow velocity and flow, and apply driving voltage in different positions, can realize the two-way flow of fluid.When the high-amplitude sound wave was propagated in the dissipativeness flowing medium, owing to exist the loss of sound, the portion of energy of loss was learned coupling by Nonlinear hydrodynamic, was applied on the fluid as stablizing momentum, flowed thereby make fluid produce stable acoustic streaming.Acoustic streaming is a kind of preferably driving mode for microfluid, and reason one is can overcome preferably because significant viscous force impact (the viscosity generation acoustic streaming that microsize is brought; The acoustic streaming driving force is volumetric force); The 2nd, size is less, and the acoustic streaming driving force is more obvious.This is because the impact of the less boundary layer of line size acoustic streaming is more obvious.

Micropump of the present invention does not need pressure chamber, no-movable part, and reliability is high; Be easy to make; Little to the suspended particle damage; Operating voltage is low; It is low to generate heat; To the liquid/gas type transmitted without limits, can be used for transmitting liquid that comprises DNA and other Biosample etc.

Description of drawings

Fig. 1 is the structural drawing of acoustic streaming Micropump unit;

Fig. 2 is the ultrasonic current micro-pump structure figure that the present invention can realize two-way flow;

Wherein, 1. entrance cavity, 2. outlet plenum, 3. acoustic streaming chamber, 4. refluxing chamber, 5. piezo-electric sheet.

Embodiment

Further specify below in conjunction with accompanying drawing.

A kind of ultrasonic current Micropump that can realize two-way flow, it is formed by a plurality of acoustic streaming Micropumps unit serial connection, the fluid chamber of each acoustic streaming Micropump unit includes oral cavity 1, outlet plenum 2, acoustic streaming chamber 3 and refluxing chamber 4 four parts form H shape cavity body structure, wherein entrance cavity 1, refluxing chamber 4 joins in the horizontal direction, the connecting part vertically connects acoustic streaming chamber 3, vertical connection outlet chamber, 3 tops, acoustic streaming chamber 2, the acoustic streaming chamber 3 of each acoustic streaming Micropump unit is over against a piezo-electric sheet 5, piezo-electric sheet 5 places the position, pipeline bottom side over against the acoustic streaming chamber, piezo-electric sheet 5 connects piezoelectric actuator, and the fluid chamber of a plurality of acoustic streaming Micropumps unit is connected.

Acoustic streaming Micropump modular construction plan view such as Fig. 1 of design.Including oral cavity 1, outlet plenum 2, acoustic streaming chamber 3 and refluxing chamber 4 four parts forms.Each cavity is of a size of 10um * 10um to the square microchannel of 100um * 100um.

The modular construction of Fig. 1 can be made by micro-processing technology.The matrix adopting silicon materials are coated optical resist at pipeline location, and pipeline depth as required determines etching period.After the pipeline etching is finished, pass through the anode linkage stacked coated glass sheets at upper surface.At last piezo-electric sheet is adhered to over against the position in acoustic streaming chamber.

When piezoelectric actuator applies high frequency (1-50MHz) sinusoidal voltage, the bottom piezo-electric sheet produces vibration, the high strength supersonic field has appearred in the acoustic streaming chamber of nearly piezo-electric sheet, because there is viscosity in fluid, can produce decay along the acoustic streaming cavity direction, thereby the generation pressure gradient, it impels the liquid in the Ultrasonic field to flow along hyperacoustic direct of travel, forms net flow.

Fig. 2 is the multiple-unit acoustic streaming micro-pump structure plan view by some cell formations.Adopt such structure, can not only improve driving force, increase flow velocity and flow, and apply driving voltage in different positions, can realize the two-way flow of fluid.

Claims

1. the ultrasonic current Micropump that can realize two-way flow, it is characterized in that, it is formed by a plurality of acoustic streaming Micropumps unit serial connection, the fluid chamber of each acoustic streaming Micropump unit includes the oral cavity, outlet plenum, acoustic streaming chamber and refluxing chamber four parts form H shape cavity body structure, entrance cavity wherein, refluxing chamber joins in the horizontal direction, the connecting part vertically connects the acoustic streaming chamber, vertical connection outlet chamber, top, acoustic streaming chamber, the acoustic streaming chamber of each acoustic streaming Micropump unit is over against a piezo-electric sheet, piezo-electric sheet places the position, pipeline bottom side over against the acoustic streaming chamber, piezo-electric sheet connects piezoelectric actuator, and the fluid chamber of a plurality of acoustic streaming Micropumps unit is connected.

2. a kind of ultrasonic current Micropump that can realize two-way flow according to claim 1 is characterized in that described entrance cavity, outlet plenum, acoustic streaming chamber and refluxing chamber cross section are square.

3. a kind of ultrasonic current Micropump that can realize two-way flow according to claim 1 is characterized in that piezoelectric actuator applies high frequency 1-50MHz.