CN102994954A - 镀膜件及其制备方法 - Google Patents

镀膜件及其制备方法 Download PDF

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CN102994954A
CN102994954A CN2011102670288A CN201110267028A CN102994954A CN 102994954 A CN102994954 A CN 102994954A CN 2011102670288 A CN2011102670288 A CN 2011102670288A CN 201110267028 A CN201110267028 A CN 201110267028A CN 102994954 A CN102994954 A CN 102994954A
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film
holmium
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base material
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陈正士
李聪
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Priority to TW100132932A priority patent/TW201311915A/zh
Priority to US13/247,045 priority patent/US8765268B2/en
Publication of CN102994954A publication Critical patent/CN102994954A/zh
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Abstract

一种镀膜件，其包括基材、形成于基材表面的复合层及形成于复合层表面的铬氧氮层，该复合层包括若干镍铝钬层和若干金属铱层，该镍铝钬层和金属铱层交替排布，其中该复合层中与所述基材直接相结合的是镍铝钬层，与铬氧氮层直接相结合的为金属铱层。所镀膜层使所述镀膜件具有良好的抗高温氧化性能，从而有效提高镀膜件的使用寿命。此外，本发明还提供一种所述镀膜件的制备方法。

Description

镀膜件及其制备方法
技术领域
本发明涉及一种镀膜件及其制备方法。
背景技术
铌基合金具有较高的熔点(＞1700℃)，较低的密度(6.6～7.2g/cm3)，良好的室温断裂韧性(＞20Mpa.m1/2)，良好的高温强度及铸造性能。然而，铌基合金抗氧化性能差，在温度较高的条件下(1200℃～1400℃或更高温度)使用时存在严重的氧化现象。
发明内容
有鉴于此，有必要提供一种提高铌基合金抗高温氧化性能的镀膜件。
另外，还有必要提供一种上述镀膜件的制备方法。
一种镀膜件，其包括基材、形成于基材表面的复合层及形成于复合层表面的铬氧氮层，该复合层包括若干镍铝钬层和若干金属铱层，该镍铝钬层和金属铱层交替排布，其中该复合层中与所述基材直接相结合的是镍铝钬层，与铬氧氮层直接相结合的为金属铱层。
一种镀膜件的制备方法，其包括如下步骤：
提供基材；
在该基材的表面形成镍铝钬层；
在该镍铝钬层的表面形成金属铱层；
交替重复上述形成镍铝钬层和金属铱层的步骤制备所述复合层，且使复合层的最外层为金属铱层；
在该复合层的表面形成铬氧氮层。
本发明复合层包括若干镍铝钬层和若干金属铱层，镍铝钬层具有优异的抗氧化性能；金属铱层在高温条件下氧渗透率低，可以有效阻止氧朝基材内扩散；最外层铬氧氮层膜层致密，可有效延缓氧朝基材的方向扩散，从而进一步保护复合层和基材；因此所镀膜层使所述镀膜件具有良好的抗高温氧化性能，从而有效提高镀膜件的使用寿命。
附图说明
图1为本发明一较佳实施例的镀膜件的剖视图；
图2为本发明一较佳实施例真空镀膜机的俯视示意图。
主要元件符号说明
镀膜件 10
基材 11
复合层 13
镍铝钬层 131
金属铱层 133
铬氧氮层 15
真空镀膜机 20
镀膜室 21
铱靶 23
镍铝钬靶 24
铬靶 26
轨迹 25
真空泵 30
如下具体实施方式将结合上述附图进一步说明本发明。
具体实施方式
请参阅图1，本发明一较佳实施方式的镀膜件10包括基材11、形成于基材11表面的复合层13及形成于复合层13表面的铬氧氮(CrON)层15。该复合层13包括若干镍铝钬(NiAlHo)层131和若干金属铱(Ir)层133，该镍铝钬层131和金属铱层133交替排布，其中与所述基材11直接相结合的是镍铝钬层131，与CrON层15相结合的为金属铱层133。
该基材11可由陶瓷或金属制成，该基材11的材质优选铌合金。
每层镍铝钬层131和每层铱层133的厚度均为15～20nm。所述复合层13的总厚度为1.5～4μm。本实施例中，所述若干镍铝钬层131和若干金属铱层133的层数均分别为50～133层。该镍铝钬层131中Ni的原子百分含量为50～60%，Al的原子百分含量为25～30%，Ho的原子百分含量为10～25%。
该铬氧氮层15中铬的原子百分含量为80～90%，氧的原子百分含量为5～10%，氮的原子百分含量为5～10%。该铬氧氮层15的厚度为3～5μm。
本明一较佳实施方式的镀膜件10的制备方法，其包括如下步骤：
请参阅图2，提供一真空镀膜机20，该真空镀膜机20包括一镀膜室21及连接于镀膜室21的一真空泵30，真空泵30用以对镀膜室21抽真空。该镀膜室21内设有转架(未图示)、铱靶23、镍铝钬合金靶24和铬靶26。转架带动基材11沿圆形的轨迹25公转，且基材11在沿轨迹25公转时亦自转。该镍铝钬合金靶24中Ni的原子百分含量为50～60%，Al的原子百分含量为25～30%，Ho的原子百分含量为10～25%。
提供基材11，该基材11可由陶瓷或金属制成，该基材11的材质优选为铌合金。
对该基材11进行表面预处理。该表面预处理可包括常规的对基材11进行无水乙醇超声波清洗及烘干等步骤。
采用磁控溅射法在经清洗后的基材11的表面溅镀复合层13。溅镀该复合层13在所述真空镀膜机20中进行。将基材11放入镀膜室21内，将该镀膜室21抽真空至8×10-3Pa，并加热所述镀膜室21至温度为100～200℃。
首先溅镀NiAlHo层131，开启NiAlHo合金靶24的电源，设置NiAlHo合金靶24的电源功率为10～15kw，通入工作气体氩气，氩气流量为80～150sccm，对基材11施加-100～-300V的偏压。溅镀NiAlHo层131的时间为45～90s。
接着溅镀Ir层133时，关闭NiAlHo合金靶24，开启Ir靶23，设置Ir靶23的电源功率为8～10kw，保持偏压、镀膜室21的温度及氩气流量不变。溅镀Ir层133的时间为45～90s。
重复上述交替溅镀NiAlHo层131和Ir层133的步骤，溅镀NiAlHo层131和Ir层133的次数均为50～133次。
保持氩气流量、基材11的偏压、镀膜室21的温度等参数不变，继续采用磁控溅射法在复合层13的表面溅镀铬氧氮层15。关闭铱靶23和镍铝钬靶24，开启铬靶26并设置铬靶26的电源功率为8～10kw，并通入反应气体氮气和氧气，氮气流量为10～50sccm，氧气流量为20～80sccm。溅镀铬氧氮层15的时间为50～80min。
下面通过实施例来对本发明进行具体说明。
实施例1
本实施例所使用的真空镀膜机20为中频磁控溅射镀膜机。
本实施例所使用的基材11的材质为铌基合金。
溅镀NiAlHo层131：NiAlHo合金靶24中Ni的原子百分含量为50%，Al的原子百分含量为25%，剩余的为Ho，NiAlHo合金靶24的电源功率为10kw，氩气流量为80sccm，基材11的偏压为-100V，镀膜室21的温度为100℃，溅镀NiAlHo层131的时间为45s。
溅镀Ir层133：Ir靶23的电源功率为8kw，保持偏压、镀膜室21的温度及氩气流量不变，溅镀Ir层133的时间为45s。
重复上述交替溅镀NiAlHo层131和Ir层133的步骤，溅镀NiAlHo层131和Ir层133的次数均为133次；该复合层13的厚度为4μm。
溅镀CrON层15：铬靶26的功率为8kw，氩气流量、偏压、镀膜室21的温度等工艺参数与溅镀复合层13的相同，氮气流量为25sccm，氧气流量为35sccm，镀膜时间为50min；该CrON层15的厚度为3μm。
实施例2
本实施例所使用的真空镀膜机20为中频磁控溅射镀膜机。
本实施例所使用的基材11的材质为铌基合金。
溅镀NiAlHo层131：NiAlHo合金靶24中Ni的原子百分含量为60%，Al的原子百分含量为25%，剩余的为Ho，NiAlHo合金靶24的电源功率为10kw，氩气流量为80sccm，基材11的偏压为-100V，镀膜室21的温度为100℃，溅镀NiAlHo层131的时间为80s。
溅镀Ir层133：Ir靶23的电源功率为9kw，保持偏压、镀膜室21的温度及氩气流量不变，溅镀Ir层133的时间为80s。
重复上述交替溅镀NiAlHo层131和Ir层133的步骤，溅镀Ir层133和NiAlHo层131的次数均为100次；该复合层13的厚度为4μm。
溅镀CrON层15：铬靶26的功率为9kw，氩气流量、偏压、镀膜室21的温度等工艺参数与溅镀复合层13的相同，氮气流量为25sccm，氧气流量为35sccm，镀膜时间为50min；该CrON层15的厚度为3.2μm。
本发明复合层13包括若干镍铝钬层131和若干金属铱层133，镍铝钬层131具有优异的抗氧化性能；金属铱层133在高温条件下氧渗透率低，可以有效阻止氧朝基材11内扩散；最外层铬氧氮层15膜层致密，可有效延缓氧朝基材11的方向扩散，从而进一步保护复合层13和基材11；因此所镀膜层使所述镀膜件10具有良好的抗高温氧化性能，从而有效提高镀膜件10的使用寿命。

Claims (13)

1.一种镀膜件，其包括基材，其特征在于：该镀膜件还包括形成于基材表面的复合层及形成于复合层表面的铬氧氮层，该复合层包括若干镍铝钬层和若干金属铱层，该镍铝钬层和金属铱层交替排布，其中该复合层中与所述基材直接相结合的是镍铝钬层，与铬氧氮层直接相结合的为金属铱层。
2.如权利要求1所述的镀膜件，其特征在于：该镍铝钬层中镍的原子百分含量为50～60%，铝的原子百分含量为25～30%，钬的原子百分含量为10～25%。
3.如权利要求1所述的镀膜件，其特征在于：该铬氧氮层中铬的原子百分含量为80～90%，氧的原子百分含量为5～10%，氮的原子百分含量为5～10%。
4.如权利要求1所述的镀膜件，其特征在于：所述若干金属铱层和若干镍铝钬层的层数均为50～133层。
5.如权利要求1所述的镀膜件，其特征在于：该基材由金属或陶瓷制成。
6.如权利要求1所述的镀膜件，其特征在于：每一金属铱层的厚度为15～20nm。
7.如权利要求1所述的镀膜件，其特征在于：每一镍铝钬层的厚度为15～20nm。
8.如权利要求1所述的镀膜件，其特征在于：该铬氧氮层的厚度为3～5μm。
9.一种镀膜件的制备方法，其包括如下步骤：
提供基材；
在该基材的表面形成镍铝钬层；
在该镍铝钬层的表面形成金属铱层；
交替重复上述形成镍铝钬层和金属铱层的步骤制备所述复合层，且使复合层的最外层为金属铱层；
在该复合层的表面形成铬氧氮层。
10.如权利要求9所述的镀膜件的制备方法，其特征在于：形成所述镍铝钬层的方法为：采用磁控溅射法，使用镍铝钬合金靶，设置镍铝钬合金靶的电源功率为10～15kw，以氩气为工作气体，氩气流量为80～150sccm，对基材施加的偏压为-100～-300V，镀膜温度为100～200℃，溅镀镍铝钬层的时间为45～90s。
11.如权利要求9所述的镀膜件的制备方法，其特征在于：形成所述金属铱层的方法为：采用磁控溅射法，使用铱靶，设置铱靶的电源功率为8～10kw，以氩气为工作气体，氩气流量为80～150sccm，对基材施加的偏压为-100～-300V，镀膜温度为100～200℃，溅镀金属铱层的时间为45～90s。
12.如权利要求9所述的镀膜件的制备方法，其特征在于：交替溅镀镍铝钬层和金属铱层的次数为50～133次。
13.如权利要求9所述的镀膜件的制备方法，其特征在于：形成所述铬氧氮层的方法为：采用磁控溅射法，使用铬靶，并设置铬靶的电源功率为8～10kw，以氮气和氧气为反应气体，氮气流量为10～50sccm，氧气流量为20～80sccm，以氩气为工作气体，氩气流量为80～150sccm，对基材施加的偏压为-100～-300V，镀膜温度为100～200℃，溅镀铬氧氮层的时间为50～80min。
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103256142A (zh) * 2013-05-03 2013-08-21 武汉大学 一种节油型Cr-O-N纳米晶复合陶瓷涂层柴油发动机活塞环及制备方法
CN105143498A (zh) * 2013-04-16 2015-12-09 欧瑞康表面处理解决方案股份公司特鲁巴赫 铬基的氧化保护层

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4761346A (en) * 1984-11-19 1988-08-02 Avco Corporation Erosion-resistant coating system
US5540981A (en) * 1994-05-31 1996-07-30 Rohm And Haas Company Inorganic-containing composites
FR2814473B1 (fr) * 2000-09-25 2003-06-27 Snecma Moteurs Procede de realisation d'un revetement de protection formant barriere thermique avec sous-couche de liaison sur un substrat en superalliage et piece obtenue
FR2861423B1 (fr) * 2003-10-28 2008-05-30 Snecma Moteurs Piece de turbine a gaz muni d'un revetement de protection et procede de realisation d'un revetement de protection sur un substrat metallique en superalliage
US8014104B2 (en) * 2007-03-21 2011-09-06 Sae Magnetics (Hk) Ltd. Magnetic head/disk with transition metal oxynitride adhesion/corrosion barrier and diamond-like carbon overcoat bilayer
GB2450933A (en) * 2007-07-13 2009-01-14 Hauzer Techno Coating Bv Method of providing a hard coating

Cited By (3)

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CN105143498B (zh) * 2013-04-16 2018-11-09 欧瑞康表面处理解决方案股份公司普费菲孔 铬基的氧化保护层
CN103256142A (zh) * 2013-05-03 2013-08-21 武汉大学 一种节油型Cr-O-N纳米晶复合陶瓷涂层柴油发动机活塞环及制备方法

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