CN102981278B - Laser linewidth based on isosceles right-angled triangular prism narrows and expands method and system - Google Patents
Laser linewidth based on isosceles right-angled triangular prism narrows and expands method and system Download PDFInfo
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Abstract
The invention discloses a kind of laser linewidth to narrow and expand method and system, system includes beam expander device and grating, and beam expander device is for carrying out one-dimensional expanding to laser, and grating for carrying out the selection of centre wavelength to laser, thus realizes linewidth narrowing.Beam expander device is made up of single prism or prism group, and the prism of described single prism and composition prism group is isosceles right angle prism.The advantage that the present invention has simple in construction, machining accuracy is high, little on the impact of beam Propagation wavefront, expands multiplying power by the selection of prism incidence angle and prism set of pieces number is realized different laser beams, it is thus achieved that required narrow band laser linewidth.
Description
Technical field
The invention belongs to laser technology field, be specifically related to a kind of based on isosceles right-angled triangular prism sharp
Optical linewidth narrows and expands method and system.
Background technology
Narrow bandwidth laser in certain wave strong point exports has the biggest application.In order to meet, there is spectrum
Control to require and the application demand of laser of narrowband output, need to be controlled by special linewidth narrowing spectrum
The natural spectrum that laser instrument free oscillation is produced by measure narrows, and carries out high-precision ripple simultaneously
Long selection.
Prism group expands and combines the spectrum-controlling method of grating beam splitting is currently used wider live width pressure
Narrow structure.Prism beam-expanded group carries out one-dimensional broadening to beam sizes based on prism dispersion characteristics.Rib
Mirror group has the advantages such as optical element is easy to process, simple in construction, light path calibration are simple, the most same to ball
The beam-expanding elements such as face mirror, cylindrical mirror, reflecting mirror are compared, and prism group structure is by interelement interval variation
Affect less.Beam Propagation after prism group expands to grating carries out high accuracy light splitting, utilizes high score
The dispersion dichroism of resolution grating combines light path control and forms the wavelength choosing for incident laser spectrum
Select and bandwidth narrows.
Prism group is that laser linewidth narrows in module for the most-often used method expanded, prism beam expander
Group, as the critical component of linewidth narrowing module, is the critical elements obtaining laser of narrowband live width.Prism
Group plays and the light beam before being incident to grating carries out one-dimensional broadening effect, the simultaneously dispersion characteristics of prism
Incident spectrum is also had certain function that dissipates, thus carries out light splitting for follow-up grating and premise is provided
Prepare.Linewidth narrowing bandwidth expression formula is:
In formula, Δ θ is laser beam divergent angle, and N is the single-pulse laser round vibration in resonator cavity
Number of times, K is that (during polygon prism, enlargement ratio is for the beam broadening multiple of prism beam expander group
N is prism set of pieces quantity),For the angle dispersion of prism group,For Littrow pattern grating
The angle dispersion of element.From formula, prism group expand multiplying power K and angle dispersion is that impact is final
The key element that laser spectral width narrows.
Prism beam expander in linewidth narrowing module generally use optimized design after there is particular corner
Corner cube prism, by prism arrangement way choice, to greatest extent eliminate prism group dispersive influence.
This kind of design is dashed forward by the control realization control accurate to laser linewidth to prism incidence angle, repdocutbility
Go out.This kind of design light beam i.e. can get according to specific incident angles and set expand enlargement ratio,
And then select to obtain required line width values through grating precision light splitting.Therefore this kind of design usually requires that prism top
Angle has the highest machining accuracy, in use needs accurately to control angle of incidence, can ensure incident ray
Optic path according to given design.
Fig. 1 is the principle schematic of prism transmitting beam.As it can be seen, prism limit with
Ground is parallel, hereon referred to as base, and another two limits are side.Light beam after a side incidence from separately
Article one, side outgoing.The angle relative with base of this prism be drift angle be α, prism refractive index is
N, a branch of have width D1Light beam with certain incidence angle θiIncide via a side of prism
Prism, there is deviation in this light beam, deflection angle is on prism incidence surfaceLight beam is at medium interface
Occur to follow fresnel formula during deviation, haveThen, when another from prism of this light beam
Article one, side is back in air dielectric, has equally according to fresnel formulaIn formula
For light beam at the angle of incidence of prism exit facet, θeFor light beam in the angle of emergence of exit facet.Light beam is through single
Enlargement ratio K after the prism mainly common effect to light beam by prism incidence surface and exit surface
Gained, i.e. single prism enlargement ratio K=K ' × K ", K ' for light beam from air incidence to prism time in incidence
There is enlargement ratio produced by deflection of light in surface, K " is going out when prism shines air for light beam
Enlargement ratio produced by reflective surface generation deflection of light, when prism material refractive index n is situated between more than surrounding
During matter refractive index, understand K "≤1 according to angle formula.Width of light beam after outgoing is D3, this time
The bundle multiplying power that expands after prism can be expressed as:
Light beam width of light beam after prism i.e. with one fixed width will increase to K times of former width,
There is one-dimensional broadening phenomenon in this light beam.
Fig. 2 be have special drift angle right angle prism expand principle schematic.As it can be seen, work as
When prism is right angle prism, make the shorter right-angle side of this right angle prism as base, light beam
From longer right-angle side outgoing after hypotenuse incidence.Equally, big when refractive index n of this prism material
In surrounding medium refractive index and incidence angle θiDuring for definite value, according to formulaUnderstand, when beam orthogonal is in the right angle of prism
During the outgoing of limit,(now D3=D2, K " and=1), prism exit facet does not produces contracting bundle and makees light beam
Only expanded contribution gained by prism incidence face with, the enlargement ratio of prism, now can obtain to enter at this
Maximum prism enlargement ratio during firing angle.Under the conditions of this kind, according to fresnel formulaCan determine that apex angle α value when meeting vertical exit condition.Under the conditions of this kind,
The right angle prism with special drift angle is facing generally towards the use of specific angle of incidence, now can realize light beam and hang down
Directly expand multiplying power in prism outgoing to obtain maximum.
Summary of the invention
(1) to solve the technical problem that
The technical problem to be solved is to be traditionally used for the right-angle prismatic that linewidth narrowing expands
Mirror typically requires the drift angle to particular design to carry out high accuracy and processes, and prism process-cycle length, is processed into
This height, the most in use the requirement to prism positioning precision and single prism incidence angle is strict
Problem.
(2) technical scheme
For this problem, the present invention proposes a kind of laser linewidth and narrows and expand method and system, the method
Use isosceles right-angle prism to replace routine to have the corner cube prism of special drift angle as beam-expanding element, utilize
The combination of several isosceles right angle prisms obtains effective light beam enlargement ratio, spreads out in conjunction with high-resolution
Penetrate the accurate light splitting effect of grating, it is achieved effective spectrum narrows function.
Described laser linewidth narrows beam-expanding system and includes beam expander device and grating, beam expander device
For expanding laser, grating for carrying out the selection of centre wavelength to laser, thus realizes line
Width narrows, and described beam expander device is made up of single prism or prism group, described single prism and group
The prism becoming prism group is isosceles right angle prism.
According to a kind of detailed description of the invention that this is bright, described beam expander device is made up of prism group, rib
Mirror group is made up of the multiple isosceles right angle prisms cascaded successively, and laser beam passes sequentially through described level
Multiple isosceles right angle prisms of connection are to expand.
According to a kind of detailed description of the invention that this is bright, described laser beam is from each rib of described prism group
After the hypotenuse place face incidence of mirror, from one right-angle side outgoing.
According to a kind of detailed description of the invention that this is bright, described prism group is made up of the prism of N number of cascade,
N is natural number and is more than or equal to 2, and a combination thereof mode is: along front M the rib of light beam incident direction
The drift angle of mirror is towards unanimously, and this M prism is put successively according to identical light beam deviation direction,
Wherein M is natural number and is less than or equal to N-1；Rear N-M prism along light beam incident direction
Drift angle is towards contrary with front M prism, and this N-M prism is according to contrary with front M prism
Light beam deviation direction is put successively.
According to a kind of detailed description of the invention that this is bright, form the drift angle of all prisms of described prism group
All towards unanimously, light beam is consistent through the deviation direction of all prisms.
(3) beneficial effect
The present invention uses isosceles right-angle prism to narrow the beam-expanding element of beam-expanding system as laser linewidth, with
Routine has the corner cube prism element of particular corner and compares, while can meeting and expanding application on an equal basis,
Isosceles right-angle prism has simple in construction, is easily obtained higher machining accuracy, processing cost and cycle
Relatively low advantage.Simultaneously for for the crystalline material that linewidth narrowing system prism beam expander is conventional,
Cubic crystal, along 45 ° of diagonal angle cutting modes, is substantially reduced the internal flaw of crystalline material in the course of processing
Damage, reduces the material impact on beam propagation wavefront to a certain extent.
The present invention is by expanding the selection of isosceles right-angle prism quantity of device, interelement pendulum to composition
Put the control of mode and angle of incidence to realize difference and narrow the enlargement ratio needed for bandwidth and dispersion is wanted
Asking, the accurate light splitting for follow-up specific light grid element provides premise and guarantee.
Accompanying drawing explanation
Fig. 1 is the principle schematic of prism transmitting beam；
Fig. 2 be have special drift angle right angle prism expand principle schematic；
Fig. 3 be the isosceles right angle prism employed in the present invention expand principle schematic；
Fig. 4 is that the laser linewidth based on isosceles right-angled triangular prism of the present invention narrows the one of beam-expanding system
The schematic diagram of individual embodiment.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with concrete real
Execute example, and referring to the drawings, the present invention is described in further detail.
It is contemplated that the application demand in narrowing for laser linewidth, propose to use isosceles right-angle prismatic
Mirror builds linewidth narrowing beam-expanding system.By in the incident angle of isosceles right angle prism, prism group
Number of prisms, the combined selection of the factor such as compound mode, it is achieved meet and there is specific enlargement ratio want
Ask and the spectrum one-dimensional broadening function of high beam transmitance.
Fig. 3 be the isosceles right angle prism employed in the present invention expand principle schematic.As schemed
Show, when light beam through the face, hypotenuse place (plane of incidence) of this isosceles right angle prism from air dielectric transmission
The effect that expands of light beam will occur when entering prism, width of light beam is by D1Become D2；When light beam is through prism
Face, right-angle side place (exit facet) can produce contracting bundle, light when prism transfer makes the return trip empty gas medium to light beam
Beam width is by D2Become D3。
In laser linewidth narrows beam-expanding system, when prism material refractive index n reflects more than surrounding medium
During rate, expand application for meeting, it usually needs light beam is big according within the specific limits of prism surface
Angle carries out incidence.
When light beam from the hypotenuse plane of incidence of isosceles right angle prism with big angle of incidenceTime incident,
According to formulaUnderstand, when refractive index n mono-timing, refraction angleWith θiIt is directly proportional,
Bigger refraction angle can be obtained during large angle incidenceHave according to angle conversion formulaReally
FixedAfter can try to achieve the angle of incidence of prism exit facetAnd then according to formulaCan
Try to achieve single output prism surface refraction angle θe.As can be seen here, when refractive index n and apex angle α one timing, when
When light beam is with large angle incidence, i.e.When there is bigger numerical, θiIncrease therewith, andAnd θeValue phase
Should reduce.
It is to say, above-mentioned feelings subordinate, light beam is in the entering of exit surface of this isosceles right angle prism
Firing angleWith refraction angle θeThe least, so that K by " closely 1.Now, light beam is from prism
The contracting Shu Zuoyong that when returning air dielectric, light beam is produced by prism exit facet is the faintest, will not put prism
Big multiplying power produces a very large impact.
For example, when the operation wavelength of laser is 193.37nm, isosceles right angle prism uses molten stone
English material is made, its refractive index n=1.56022, when light beam is from the hypotenuse of single isosceles right angle prism
When the plane of incidence is with the incident angles of ＜ 67 °, this isosceles right angle prism can produce contracting Shu Zuoyong to light beam
(K ＜ 1) or expand multiplying power less (K is between 1～2), along with the increase of angle of incidence expands multiplying power
Increase slower, it is impossible to meet and expand needs；When light beam is with the angle of incidence large angle incidence of ＞ 68 °,
Along with the increase of angle of incidence, enlargement ratio K can sharply increase, and laser linewidth narrowing result is notable, can
Expand application meeting linewidth narrowing, the incidence of ＞ 68 ° can be referred to as wide-angle the most in that case
Incident.Large angle incidence in the range of beam-expanding system generally selects certain angle.For 193.37nm
For the fused quartz isosceles right angle prism of wave band, in the big incident angle range of ＞ 68 °, single prism
The enlargement ratio K of exit facet is " between 0.98～1, the least on the contracting bundle impact of light beam entirety.
For the corner cube prism of more conventional special drift angle, isosceles right angle prism is used to have spectrum control
The laser linewidth of demand processed narrows can meet in system and expands application demand on an equal basis.Meanwhile, isosceles are straight
Angle prism have on beam Propagation wavefront little, the simple in construction of impact, be easily obtained higher machining accuracy,
Processing cost and cycle relatively low advantage.
In actual applications, by the incident angle of prism, the number of prism of selection, prism
Between the combined selection of the factor such as compound mode, required light beam enlargement ratio and high energy can be realized
The requirement of amount transmitance.In a specific embodiment, by single isosceles right angle prism or by multiple etc.
The prism group of waist right angle prism composition constitutes beam expander device, the hypotenuse of isosceles right angle prism
Face, place can receive more light beam entrance prism as the disposing way of beam incident surface.
Embodiment
Fig. 4 is that the laser linewidth based on isosceles right-angled triangular prism of the present invention narrows the one of beam-expanding system
The schematic diagram of individual embodiment.As shown in Figure 4, this system include outgoing mirror 1, discharge chamber 3,
Prism group 3 and grating 4.
In this embodiment, prism group 3 is by the isosceles right angle prism structure of the N number of cascade cascaded successively
Becoming, N is that natural number and N are more than or equal to 2.I.e. first prism the 31, second prism 32 ...,
N-1 prism 33 and N prism 34.Each prism based on upper-... previous-next ...-lower compound mode
Arrangement, i.e. in the incident direction of light beam, front M prism vertex angle towards unanimously, rear N-M rib
Vertex angle is towards contrary with front M prism, and wherein M is natural number and is less than or equal to N-1.Described
Drift angle herein means 45 degree of angles of isosceles right triangle.Further, all prisms are incided successively
Light beam all incident from face, hypotenuse place, and from a right-angle side (non-base) face, place outgoing.Light
The bundle total enlargement ratio after this prism group 3 expandsN is prism set of pieces number,
KiEnlargement ratio for each prism.Light beam will obtain K after the beam-expanding system that multiple prisms form
Beam broadening again.
Described prism group 3 is for expanding light beam, and grating 4 is for entering the centre wavelength of laser
Row selects, and thus, includes what discharge chamber 2 was sent by the resonator cavity of prism group 3 and grating 4
Laser carries out centre wavelength selection and linewidth narrowing.Grating 4 can as laserresonator one side chamber mirror with
Outgoing mirror 1 combines and forms effective laser generation output.The beam expander device energy being made up of prism group 3
Enough realize the prism beam-expanded system of low dispersion even zero dispersion, variations in temperature can be reduced at work to ripple
The impact of long drift.
In other embodiments of the present invention, prism group 3 may be used without-go up-... the group on-
Conjunction mode, the drift angle of the most all prisms is all towards unanimously, and light beam is through the deviation side of all prisms
To unanimously.In this embodiment, dispersion characteristics based on prismatic spectrum, in linewidth narrowing module
The angle dispersion of middle introducing prism, can realize narrowing further of laser linewidth.
In this embodiment, light beam incides the desirable identical value of the incident angle of each prism in prism group,
The most desirable different value, chooses in conjunction with actual application.With each prism in prism group 3 have identical enter
As a example by firing angle degree illustrate, optical maser wavelength is 193.37nm, uses four go up-previous-nexts-under the side of putting
The fused quartz material isosceles right angle prism composition linewidth narrowing beam-expanding system of formula, each prism incidence angle
Taking identical value, such as 68 °, i.e. light beam incides the angle of incidence of the first prism 32, incides second
The angle of incidence of prism 32 and incide the angle of incidence of prism the 33, the 4th prism 34 and be
68 °, the shooting angle that can try to achieve each prism exit facet according to angle formula is 13.40 °, now
It is consistent that the plane of incidence of each prism expands multiplying power, exit facet to expand multiplying power also consistent, i.e. K '=2.147,
K "=0.984, continue to try to achieve Ki"=2.115, i.e. single prism expands multiplying power and is=K ' × K to light beam
2.115.Multiplying power K that expands of four prism groups is four prism beam-expanded multiplying power joint contribution gained, i.e.Thus achieve the uniform amplification to light beam of each prism,
In this embodiment prism group can realize 20.001 times always expand multiplying power.
The light beam angle of emergence after single prismAlong with light beam angle of incidence (θ on prismi)
Increasing and reduce, prism exit facet is the faintest to the contracting Shu Zuoyong of light beam simultaneously.Still with 193.37nm
As a example by wave band, fused quartz isosceles right-angle prism, when light beam angle of incidence on prism is 68 °, pass through
The angle of emergence of prism is 13.40 °, K "=0.984；When angle of incidence is 75 °, the prism angle of emergence is
10.57 °, K "=0.990；When angle of incidence is 80 °, the prism angle of emergence is 9.17 °, K "=0.992；
As can be seen here, in big ranges of incidence angles, the contracting bundle of light beam is affected by the exit facet of isosceles right-angle prism
Less, incident angle is the biggest, and contracting bundle impact is the least.
In linewidth narrowing expands application, each element of prism group may select identical beam incident angle degree,
The most each prism to expand multiplying power identical, light beam realizes uniformly amplifying through each prism；The each unit of prism group
Part also may select different incident angles, expands multiplying power requirement according to actual, to individual prism angle of incidence
Degree is adjusted.Improve prism incidence angle or use multiple prism arrangement all be improve prism beam-expanded
The main method of multiplying power, but the most all can be with energy loss to a certain extent, therefore should in reality
In with, effectively expand multiplying power, the realization of efficient energy output need to be to prism incidence angle, prism
The selection of component number is comprehensively analyzed.The present invention is when deep ultraviolet wave band is applied, in prism group 3
Prism can be selected for the UV level fused quartz of high permeability, UV level CaF2Deng materials processing.Fused quartz
There is the advantages such as high, the easy volume production of machining accuracy, in low-repetition-frequency, the live width of low laser power density
There is in narrowing certain application advantage.CaF2Because of its material itself high thermoconductivity, be not likely to produce
The advantages such as colour center and broader applications are under high laser power density application conditions.
Simultaneously for for the crystalline material that linewidth narrowing system prism beam expander is conventional, cubic crystal edge
45 ° of diagonal angle cutting modes, can be substantially reduced crystal material in the course of processing when manufacturing isosceles right angle prism
The internal flaw damage of material, reduces the material impact on beam propagation wavefront to a certain extent.
Although above embodiment described the situation constituting beam expander device that consists of a prism, but,
The embodiment being made up of beam expander device single isosceles right angle prism also can reach identical
Technique effect, its concrete scheme easily can be realized according to foregoing description by those skilled in the art, therefore
Do not repeat them here.Thus, the technology of beam expander device it is made up of single isosceles right angle prism
Scheme is also covered by within the scope of the present invention.
Particular embodiments described above, is carried out the purpose of the present invention, technical scheme and beneficial effect
Further describe it should be understood that the foregoing is only the specific embodiment of the present invention,
Be not limited to the present invention, all within the spirit and principles in the present invention, any amendment of being made,
Equivalent, improvement etc., should be included within the scope of the present invention.
Claims (7)
1. laser linewidth narrows the method for expanding, for laser being carried out linewidth narrowing and expanding,
It is characterized in that:
Using prism group to expand laser, this prism group is by the multiple isosceles right angles three cascaded successively
Prism is constituted, and laser beam passes sequentially through multiple isosceles right angle prisms of described cascade to expand
Bundle.
2. laser linewidth as claimed in claim 1 narrows the method for expanding, it is characterised in that described
Prism group is made up of the prism of N number of cascade, and N is natural number and is more than or equal to 2, a combination thereof mode
For:
Along the drift angle of front M prism of light beam incident direction towards unanimously, and this M prism according to
Identical light beam deviation direction is put successively, and wherein M is natural number and is less than or equal to N-1；
Along the drift angle of rear N-M prism of light beam incident direction towards contrary with front M prism, and
This N-M prism is put successively according to the light beam deviation direction contrary with front M prism.
3. laser linewidth as claimed in claim 1 narrows the method for expanding, it is characterised in that composition
The drift angle of all prisms of described prism group is all towards unanimously, and light beam is through the deviation of all prisms
Direction is consistent.
4. laser linewidth narrows a beam-expanding system, including beam expander device and grating, described light
Bundle expands device for expanding laser, and described grating for carrying out the choosing of centre wavelength to laser
Select, thus realize linewidth narrowing, it is characterised in that
Described beam expander device is made up of prism group, and described prism group is by the multiple isosceles cascaded successively
Right angle prism is constituted, and laser beam pass sequentially through multiple isosceles right angle prisms of described cascade with
Expand.
5. laser linewidth as claimed in claim 4 narrows beam-expanding system, it is characterised in that described
Laser beam after the hypotenuse place face incidence of each prism of described prism group, a right angle from which
Limit outgoing.
6. laser linewidth as claimed in claim 5 narrows beam-expanding system, it is characterised in that described
Prism group is made up of the prism of N number of cascade, and N is natural number and is more than or equal to 2, a combination thereof mode
For:
Along the drift angle of front M prism of light beam incident direction towards unanimously, and this M prism according to
Identical light beam deviation direction is put successively, and wherein M is natural number and is less than or equal to N-1；
Along the drift angle of rear N-M prism of light beam incident direction towards contrary with front M prism, and
This N-M prism is put successively according to the light beam deviation direction contrary with front M prism.
7. laser linewidth as claimed in claim 5 narrows beam-expanding system, it is characterised in that composition
The drift angle of all prisms of described prism group is all towards unanimously, and light beam is through the deviation of all prisms
Direction is consistent.
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| CN103235395A (en) * | 2013-04-24 | 2013-08-07 | 中国科学院上海光学精密机械研究所 | Prism beam expanding device |
| JP6182988B2 (en) * | 2013-06-12 | 2017-08-23 | 住友電気工業株式会社 | Spectroscopic device and wavelength selective switch |
| CN103438805A (en) * | 2013-08-19 | 2013-12-11 | 长春理工大学 | Refraction-amplifying optical displacement sensor |
| CN104503090B (en) * | 2014-12-19 | 2018-12-25 | 中国科学院上海光学精密机械研究所 | Prism beam-expanded system |
| CN105186277B (en) * | 2015-07-16 | 2018-05-22 | 中国科学院光电研究院 | A kind of spectrum control device |
| CN106291822A (en) * | 2016-08-30 | 2017-01-04 | 武汉光迅科技股份有限公司 | A kind of wavelength-selective switches |
| US9997888B2 (en) * | 2016-10-17 | 2018-06-12 | Cymer, Llc | Control of a spectral feature of a pulsed light beam |
| CN112490825B (en) * | 2020-11-06 | 2021-11-09 | 中国科学院微电子研究所 | Line width narrowing module and excimer laser |
| CN113437631A (en) * | 2021-06-28 | 2021-09-24 | 北京科益虹源光电技术有限公司 | Excimer laser and line width narrowing device and method |
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| CN101004925A (en) * | 2006-07-14 | 2007-07-25 | 清华大学深圳研究生院 | Shaping structure and method for optical storage in use for blue wave band of laser |
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| US4972429A (en) * | 1988-11-18 | 1990-11-20 | Spectra-Physics, Inc. | Achromatic prism beam expander for high magnification and tunable laser using same |
| US7352791B2 (en) * | 2004-07-27 | 2008-04-01 | Corning Incorporated | Optical systems including wavefront correcting optical surfaces |
| US7646546B1 (en) * | 2005-06-10 | 2010-01-12 | Cvi Laser, Llc | Anamorphic optical system providing a highly polarized laser output |
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