CN102980521A - Thick-thin dual-purpose plating thickness measurer - Google Patents
Thick-thin dual-purpose plating thickness measurer Download PDFInfo
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- CN102980521A CN102980521A CN2012104137273A CN201210413727A CN102980521A CN 102980521 A CN102980521 A CN 102980521A CN 2012104137273 A CN2012104137273 A CN 2012104137273A CN 201210413727 A CN201210413727 A CN 201210413727A CN 102980521 A CN102980521 A CN 102980521A
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Abstract
The invention relates to the technical field of measurement, and in particular to a thick-thin dual-purpose plating thickness measurer which comprises an equipment support and at least one optical detection device fixed on the equipment support. The optical detection device is connected with a micro processor system, a light source is arranged on the optical detection device, the light source is an infrared laser, the optical detection device is provided with a photosensitive element, the photosensitive element is an infrared photosensitive diode, a strip-shaped opening is arranged on the equipment support, the infrared laser and the infrared photosensitive diode are arranged on two sides of the strip-shaped opening in a correlation mode, the infrared laser is connected with a power supply through a power adjusting mechanism and can adjust light intensity through the power adjusting mechanism. Laser is concentrate in the illumination plane and strong in light intensity, has the capacity penetrating through thick coatings and is suitable for thick coatings. The laser has the characteristic of being adjustable in luminance and can be applied to thin coatings after the luminance is reduced.
Description
Technical field
The present invention relates to field of measuring technique, be specifically related to a kind of thickness of coating measuring technique.
Background technology
Often can use coated product in life, production, coating technique is the important technology field in the material technology in commercial production.
Important indicator for the coated product Quality Identification is the thickness of coating, and the homogeneity of coating.Because thickness of coating has been brought great difficulty to measurement often as thin as a wafer.
Often by detecting the light transmission of coating, measure the thickness of coating in the existing technology.Illuminating source by light correlation pick-up unit shines a side of coating, and the photosensitive device of light correlation pick-up unit is arranged on the opposite side of coating, thereby obtains coating light transmission data, and then measures the thickness of coating.That existing smooth correlation pick-up unit remains is low in precision, be subject to the deficiencies such as extraneous light interference.
Existing smooth correlation pick-up unit operation parameter is relatively fixing, often can only be used for a kind of coating of thickness range, can't accurately measure for the coating that exceeds the thickness range upper limit or lower limit.
Summary of the invention
The object of the invention is to, provide a kind of thick-thin two-purpose coating thickness meter, to solve the problems of the technologies described above.
Technical matters solved by the invention can realize by the following technical solutions:
The thick-thin two-purpose coating thickness meter comprises an equipment supporter, and at least one optical detection device that is fixed on the described equipment supporter, described optical detection device connect a microprocessor system, it is characterized in that,
Described optical detection device is provided with a light source, and described light source adopts infrared laser;
Described optical detection device is provided with a light activated element, and described light activated element adopts infrared photodiode;
Described equipment supporter is provided with a strip opening, and described infrared laser and described infrared photodiode lay respectively at described strip opening both sides, is the correlation relation;
Described infrared laser connects power supply by a power adjusting mechanism, adjusts luminous intensity by described power adjusting mechanism.
The coated plated film film of plating that needs are detected passes described strip opening, opens optical detection device, by detecting the intensive parameter of throw light.Optical detection device sends detected data to the microprocessor system, finally obtains the thickness of coating through data analysis.Laser has that plane of illumination is concentrated, light intensity is strong, has the ability that penetrates thicker coating, goes for thickness coating.Because have the adjustable characteristics of brightness, behind Dimming, also go for the coating of thinner thickness again.
Described power adjusting mechanism comprises two current-limiting resistances, and two current-limiting resistances connect described infrared laser by a selector switch respectively, selects to carry out the current-limiting resistance that circuit is connected with described infrared laser by selector switch.Experimental results show that the present invention goes for 1 ~ 60nm, and 1 ~ 20nm.
It is the infrared laser of 860nm ~ 960nm that described infrared laser adopts luminous wave band.
It is the infrared photodiode of 860nm ~ 960nm that described infrared photodiode adopts sensitive band.The infrared light of 860nm ~ 960nm is difficult to nature at nature and sends, and therefore can effectively reduce extraneous light to the interference of equipment.
Described optical detection device is provided with an oscillator signal transmitter module, and described oscillator signal transmitter module connects described infrared laser by described power adjusting mechanism, thereby makes lighting and extinguishing state alternately of described infrared laser, produces flicker; Described infrared photodiode connects an AD converter, connect described microprocessor system by described AD converter, the numerical value that the described AD converter of described microprocessor system log (SYSLOG) transmits, be subject to the image of described infrared laser flicker, described AD converter can produce the numerical value of alternation, described microprocessor system asks poor to the numerical value of the alternation that described AD converter produces, and uses the difference of trying to achieve as the numerical value of reflection thickness of coating.Can effectively eliminate extraneous light by the mode of difference disturbs.
Described optical detection device is provided with a frequency-selecting module corresponding with described oscillator signal transmitter module frequency, and described frequency-selecting module connects described infrared photodiode.By for infrared laser loads oscillation frequency, make light produce flicker.Can more effectively reduce external interference, and accuracy of detection is provided.
Described microprocessor system also connects a man-machine interaction mechanism, and a display.Described man-machine interaction mechanism can adopt a keyboard, also can adopt a touch-screen.Described microprocessor system connects the control end of described power adjusting mechanism, by man-machine interaction mechanism being operated control microprocessor system, and then controls described power adjusting mechanism, again and then the emissive power of control infrared laser.
Described equipment supporter is provided with at least 8 described optical detection devices, and at least 8 described optical detection devices are arranged along described strip opening.
Distance between two described optical detection devices is less than 8cm.So that the thickness of each position of intensive detection coating face.
Description of drawings
Fig. 1 is structural representation of the present invention.
Embodiment
For technological means, creation characteristic that the present invention is realized, reach purpose and effect is easy to understand, further set forth the present invention below in conjunction with concrete diagram.
With reference to Fig. 1, the thick-thin two-purpose coating thickness meter comprises an equipment supporter 1, at least one optical detection device 2 that is fixed on the equipment supporter 1, and optical detection device 2 connects a microprocessor system, and optical detection device 2 is provided with a light source, and light source adopts infrared laser; Optical detection device 2 is provided with a light activated element, and light activated element adopts infrared photodiode; Equipment supporter 1 is provided with a strip opening 3, and infrared laser and infrared photodiode lay respectively at strip opening 3 both sides, is the correlation relation; Infrared laser connects power supply by a power adjusting mechanism, adjusts luminous intensity by the power adjusting mechanism.
The coated plated film film of plating that needs are detected passes strip opening 3, opens optical detection device 2, by detecting the intensive parameter of throw light.Optical detection device 2 sends detected data to the microprocessor system, finally obtains the thickness of coating through data analysis.Laser has that plane of illumination is concentrated, light intensity is strong, has the ability that penetrates thicker coating, goes for thickness coating.Because have the adjustable characteristics of brightness, behind Dimming, also go for the coating of thinner thickness again.
Design for the power adjusting mechanism, can be: the power adjusting mechanism comprises two current-limiting resistances, two current-limiting resistances connect described infrared laser by a selector switch respectively, select to carry out the current-limiting resistance that circuit is connected with described infrared laser by selector switch.Experimental results show that the present invention goes for 1 ~ 60nm, and 1 ~ 20nm.
It is the infrared laser of 860nm ~ 960nm that infrared laser adopts luminous wave band.It is the infrared photodiode of 860nm ~ 960nm that infrared photodiode adopts sensitive band.The infrared light of 860nm ~ 960nm is difficult to nature at nature and sends, and therefore can effectively reduce extraneous light to the interference of equipment.
The microprocessor system also connects a man-machine interaction mechanism, and a display.Man-machine interaction mechanism can adopt a keyboard, also can adopt a touch-screen.The power adjusting mechanism can also adopt an electronics controlled mechanism, the microprocessor system connects the control end of power adjusting mechanism, by man-machine interaction mechanism being operated control microprocessor system, and then the power ratio control adjusting mechanism, again and then the emissive power of control infrared laser.The controlled member of power adjusting mechanism can be the controlled members such as triode, coms pipe.
More than show and described ultimate principle of the present invention and principal character and advantage of the present invention.The technician of the industry should understand; the present invention is not restricted to the described embodiments; that describes in above-described embodiment and the instructions just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.
Claims (8)
1. the thick-thin two-purpose coating thickness meter comprises an equipment supporter, and at least one optical detection device that is fixed on the described equipment supporter, described optical detection device connect a microprocessor system, it is characterized in that,
Described optical detection device is provided with a light source, and described light source adopts infrared laser;
Described optical detection device is provided with a light activated element, and described light activated element adopts infrared photodiode;
Described equipment supporter is provided with a strip opening, and described infrared laser and described infrared photodiode lay respectively at described strip opening both sides, is the correlation relation;
Described infrared laser connects power supply by a power adjusting mechanism, adjusts luminous intensity by described power adjusting mechanism.
2. thick-thin two-purpose coating thickness meter according to claim 1, it is characterized in that, described power adjusting mechanism comprises two current-limiting resistances, two current-limiting resistances connect described infrared laser by a selector switch respectively, select to carry out the current-limiting resistance that circuit is connected with described infrared laser by selector switch.
3. thick-thin two-purpose coating thickness meter according to claim 1 is characterized in that, it is the infrared laser of 860nm ~ 960nm that described infrared laser adopts luminous wave band; It is the infrared photodiode of 860nm ~ 960nm that described infrared photodiode adopts sensitive band.
4. according to claim 1,2 or 3 described thick-thin two-purpose coating thickness meters, it is characterized in that, described optical detection device is provided with an oscillator signal transmitter module, described oscillator signal transmitter module connects described infrared laser by described power adjusting mechanism, thereby make lighting and extinguishing state alternately of described infrared laser, produce flicker; Described infrared photodiode connects an AD converter, connect described microprocessor system by described AD converter, the numerical value that the described AD converter of described microprocessor system log (SYSLOG) transmits, be subject to the image of described infrared laser flicker, described AD converter can produce the numerical value of alternation, described microprocessor system asks poor to the numerical value of the alternation that described AD converter produces, and uses the difference of trying to achieve as the numerical value of reflection thickness of coating.Can effectively eliminate extraneous light by the mode of difference disturbs.
5. thick-thin two-purpose coating thickness meter according to claim 4 is characterized in that, described optical detection device is provided with a frequency-selecting module corresponding with described oscillator signal transmitter module frequency, and described frequency-selecting module connects described infrared photodiode.
6. according to claim 1,2 or 3 described thick-thin two-purpose coating thickness meters, it is characterized in that described microprocessor system also connects a man-machine interaction mechanism, and a display; Described man-machine interaction mechanism can adopt a keyboard, also can adopt a touch-screen; Described microprocessor system connects the control end of described power adjusting mechanism, by man-machine interaction mechanism being operated control microprocessor system, and then controls described power adjusting mechanism, again and then the emissive power of control infrared laser.
7. according to claim 1,2 or 3 described thick-thin two-purpose coating thickness meters, it is characterized in that described equipment supporter is provided with at least 8 described optical detection devices, at least 8 described optical detection devices are arranged along described strip opening.
8. according to claim 1,2 or 3 described thick-thin two-purpose coating thickness meters, it is characterized in that the distance between two described optical detection devices is less than 8cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210413727.3A CN102980521B (en) | 2012-10-25 | 2012-10-25 | Thick-thin dual-purpose plating thickness measurer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210413727.3A CN102980521B (en) | 2012-10-25 | 2012-10-25 | Thick-thin dual-purpose plating thickness measurer |
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| Publication Number | Publication Date |
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| CN102980521A true CN102980521A (en) | 2013-03-20 |
| CN102980521B CN102980521B (en) | 2015-04-22 |
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| CN201210413727.3A Expired - Fee Related CN102980521B (en) | 2012-10-25 | 2012-10-25 | Thick-thin dual-purpose plating thickness measurer |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105091763A (en) * | 2015-08-14 | 2015-11-25 | 芜湖真空科技有限公司 | Detection system for coated glass |
| CN108801194A (en) * | 2018-08-02 | 2018-11-13 | 广州市盛华实业有限公司 | A kind of non-contact powder wet film thickness gauge |
| CN111238384A (en) * | 2020-02-27 | 2020-06-05 | 无锡市振华开祥科技有限公司 | Qualitative thickness measuring method for thin stainless steel part coating |
| TWI745898B (en) * | 2020-03-20 | 2021-11-11 | 龍華科技大學 | Material detection method for electron microscope |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000241127A (en) * | 1999-02-25 | 2000-09-08 | Toppan Printing Co Ltd | Film thickness measurement method and winding-up vacuum film-forming device |
| JP2006064580A (en) * | 2004-08-27 | 2006-03-09 | Futec Inc | Measuring device and measuring method of double-layer film sheet using x-ray inspection method |
| CN201273814Y (en) * | 2008-07-04 | 2009-07-15 | 上海曙光机械制造厂有限公司 | On-line thickness measurement apparatus for aluminum film |
| CN101839695A (en) * | 2010-06-24 | 2010-09-22 | 哈尔滨工业大学 | Method for measuring thickness of LED type solid infrared thin film |
-
2012
- 2012-10-25 CN CN201210413727.3A patent/CN102980521B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000241127A (en) * | 1999-02-25 | 2000-09-08 | Toppan Printing Co Ltd | Film thickness measurement method and winding-up vacuum film-forming device |
| JP2006064580A (en) * | 2004-08-27 | 2006-03-09 | Futec Inc | Measuring device and measuring method of double-layer film sheet using x-ray inspection method |
| CN201273814Y (en) * | 2008-07-04 | 2009-07-15 | 上海曙光机械制造厂有限公司 | On-line thickness measurement apparatus for aluminum film |
| CN101839695A (en) * | 2010-06-24 | 2010-09-22 | 哈尔滨工业大学 | Method for measuring thickness of LED type solid infrared thin film |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105091763A (en) * | 2015-08-14 | 2015-11-25 | 芜湖真空科技有限公司 | Detection system for coated glass |
| CN108801194A (en) * | 2018-08-02 | 2018-11-13 | 广州市盛华实业有限公司 | A kind of non-contact powder wet film thickness gauge |
| CN111238384A (en) * | 2020-02-27 | 2020-06-05 | 无锡市振华开祥科技有限公司 | Qualitative thickness measuring method for thin stainless steel part coating |
| TWI745898B (en) * | 2020-03-20 | 2021-11-11 | 龍華科技大學 | Material detection method for electron microscope |
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| CN102980521B (en) | 2015-04-22 |
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