CN102962904A - Three-position multi-line cutting table - Google Patents
Three-position multi-line cutting table Download PDFInfo
- Publication number
- CN102962904A CN102962904A CN2012104972662A CN201210497266A CN102962904A CN 102962904 A CN102962904 A CN 102962904A CN 2012104972662 A CN2012104972662 A CN 2012104972662A CN 201210497266 A CN201210497266 A CN 201210497266A CN 102962904 A CN102962904 A CN 102962904A
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- China
- Prior art keywords
- workbench
- work station
- cutting work
- holding screw
- flitch
- Prior art date
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- Granted
Links
- 239000007921 spray Substances 0.000 claims description 9
- 229910000831 Steel Inorganic materials 0.000 claims description 8
- 239000004570 mortar (masonry) Substances 0.000 claims description 8
- 239000010959 steel Substances 0.000 claims description 8
- 238000009413 insulation Methods 0.000 claims description 7
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000012423 maintenance Methods 0.000 abstract description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000004677 Nylon Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229920001778 nylon Polymers 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention provides a three-position multi-line cutting table which comprises three cutting positions, wherein material plates are fixed in the three cutting positions respectively, three to-be-cut work pieces are arranged on the material plates respectively, the table is provided with four nozzles, one to-be-cut work piece is arranged between two of the four nozzles, and the sum of the diameter of each to-be-cut work piece and the width of each nozzle is less than the distance between the central axes of two adjacent cutting positions. The invention has the benefits that the three-position multi-line cutting table improves the production capacity of a multi-line cutting machine and has the advantages of simple structure, convenience in maintenance, low manufacturing cost and high production efficiency.
Description
Technical field
The invention belongs to crystal line cutting technology field, especially relate to a kind of workbench of realizing semiconductor monocrystal three station multi-wire saws.
Background technology
Through the fast development of decades, the cutting of semiconductor monocrystal develops into the multi-wire saw technology that generally adopts at present by initial interior (outward) circle cutting technique, is all obtaining great progress aspect cost and the product quality raising.
Cutting steel wire is under the home roll of high speed rotating drives, and the mortar that carries by the nozzle ejection carries out grinding and cutting to crystalline material.The multi-line cutting machine that adopts at present mainly contains two kinds: single station cutting machine and double cutting machine.Early stage multi-line cutting machine generally adopts single station cutting, namely once can only process a monocrystalline; Later stage, comparatively advanced multi-line cutting machine adopted the double cutting, namely once can process two monocrystalline.When the monocrystalline of processing more than 8 inches or 8 inches, used multi-line cutting machine is generally single station cutting at present.In the existing monocrystalline cutting equipment, limited cutting work station has restricted the production capacity of equipment largely.
Summary of the invention
The problem to be solved in the present invention provides a kind of three station multi-wire saw workbench, especially is suitable for improving the output of multi-line cutting machine.
For solving the problems of the technologies described above, the technical solution used in the present invention is: a kind of three station multi-wire saw workbench, comprise three cutting work station, be fixed with respectively flitch on described three cutting work station, a workpiece to be cut can be housed respectively on each described flitch, described workbench is furnished with four nozzles, described four nozzles can have respectively a workpiece to be cut between any two, and the width sum of the diameter of described workpiece to be cut and a described nozzle is less than the distance between the described adjacent cutting work station central axis.
The present invention can also adopt following technical measures:
Described three cutting work station are the horizontal bar shaped inner groovy on the described workbench lower surface, and include part and lower part, described three cutting work station are parallel to each other and are highly equal, the minimum widith of part is all greater than the Breadth Maximum of separately lower part on described three cutting work station, the side of described flitch is worker's shape, the upper part of described three cutting work station all allows the upper partial insertion of described flitch, and described flitch is separately fixed on described three cutting work station by the flitch holding screw.
The cutting work station left side in the middle of middle flitch holding screw hole is positioned at, comprise cap nut hole and lead screw hole, described cap nut hole is divided with the top of left side cutting work station and is communicated, and its length is greater than the length of the cap nut of flitch holding screw in the middle of described, and its height is more than or equal to the diameter of described cap nut.
Cutting work station the right in the middle of middle flitch holding screw hole is positioned at, comprise cap nut hole and lead screw hole, described cap nut hole is divided with the top of the right cutting work station and is communicated, and its length is greater than the length of the cap nut of flitch holding screw in the middle of described, and its height is more than or equal to the diameter of described cap nut.
Described workbench is fixed on the connecting plate of top by the workbench holding screw, accompany the high rigidity insulation sleeve between described workbench holding screw and the described workbench, be used for guaranteeing the insulation of described workbench holding screw and described workbench, cover has annulus steel pad on the lead screw of described workbench holding screw, be affixed with the cap nut of described workbench holding screw, for the wearing and tearing of avoiding between screw and the high rigidity insulation sleeve, the thickness of described annulus steel pad is more than or equal to 0.5 millimeter and is less than or equal to 3 millimeters.
Described workbench holding screw is distributed in described three cutting work station tops, the quantity of the described workbench holding screw on each described cutting work station is more than or equal to three and is less than or equal to nine, and described workbench holding screw evenly distributes on each described cutting work station.
Described four nozzles distribute side by side, described each nozzle and between the workpiece to be cut on its next door distance for more than or equal to 1 millimeter and be less than or equal to 10 millimeters.
The below that lays respectively at two described nozzles at described workbench two ends all has a spray orifice, the below that is positioned at two middle described nozzles of described workbench all has two spray orifices, the direction of described each spray orifice ejection mortar is respectively towards the vertical central axis of the described cutting work station that is adjacent, and be to spend greater than 0 degree and less than 90 with the vertical direction angulation.
Advantage and good effect that the present invention has are: technique scheme has improved the production capacity of multi-line cutting machine, has simple in structurely, easy to maintenance, and processing cost is low, the production efficiency advantages of higher.
Description of drawings
Fig. 1 is the schematic diagram with three cutting work station workbench
Fig. 2 is the upward view of workbench
Fig. 3 is the fastener schematic diagram of workbench
Fig. 4 is mortar emission direction schematic diagram
Among the figure:
1, flitch holding screw 2, flitch 3, cap nut hole
4, workbench 5, cutting work station 6, nozzle
7, monocrystalline silicon 8, workbench holding screw 9, nylon jacket
10, annulus steel pad 11, top connecting plate 12, mortar
The specific embodiment
As shown in Figure 1, the invention provides a kind of three station multi-wire saw workbench, comprise three cutting work station 5, be fixed with respectively flitch 2 on three cutting work station 5, a diameter can be housed respectively be 3 inches monocrystalline silicon 7 on each flitch 2, workbench 4 is furnished with 6, four nozzles 6 of four nozzles can have respectively a monocrystalline silicon 7 between any two, the width sum of the diameter of monocrystalline silicon 7 and a nozzle 6 is less than the distance between adjacent cutting work station 5 central axis, and the silicon wafer thickness after the cutting is 300 microns.
Three cutting work station 5 are the horizontal bar shaped inner groovy on workbench 4 lower surfaces, and include part and lower part, three cutting work station 5 are parallel to each other and are highly equal, the minimum widith of part is all greater than the Breadth Maximum of separately lower part on three cutting work station 5, the side of flitch 2 is worker's shape, the upper part of three cutting work station 5 all allows the upper partial insertion of flitch 2, and flitch 2 is separately fixed on three cutting work station 5 by flitch holding screw 1.
Such as Fig. 2, shown in 3, workbench 4 is fixed on the top connecting plate 11 by workbench holding screw 8, accompany nylon jacket 9 between workbench holding screw 8 and the workbench 4, be used for guaranteeing workbench holding screw 8 and workbench 4 insulation, the thickness of nylon jacket 9 is 1 millimeter, the internal diameter of its top cylinder ring is 6 millimeters, the internal diameter of lower cylindrical ring is 10 millimeters, cover has annulus steel pad 10 on the lead screw of workbench holding screw 8, be affixed with the cap nut of workbench holding screw 8, for the wearing and tearing of avoiding between screw and the nylon jacket 9, the thickness of annulus steel pad 10 is 1.5 millimeters, its internal diameter is 6.2 millimeters, and external diameter is 9.8 millimeters.
Workbench holding screw 8 is distributed in three cutting work station 5 tops, and the quantity of the workbench holding screw 8 on each cutting work station 5 is four, and workbench holding screw 8 evenly distributes on each cutting work station 5.
As shown in Figure 4, four nozzles 6 distribute side by side, each nozzle 6 and its next door monocrystalline silicon between the distance be 5 millimeters.
The below that lays respectively at two nozzles 6 at workbench 4 two ends all has a spray orifice, the below that is positioned at two nozzles 6 of workbench 4 centres all has two spray orifices, the direction of each spray orifice ejection mortar 12 is respectively towards the vertical central axis of the cutting work station 5 that is adjacent, and with the vertical direction angulation be 15 degree.
The implementation of above embodiment is, take the double-station multiwire cutting machine of type as 442 as the basis, increases a cutting work station and a corresponding mortar nozzle between two stations on its workbench.
Improved multi-line cutting machine carries out cutting work after knowing the method outfit of knowing in the industry and pouring into mortar, coiling, the corresponding technological parameter of input, finish final monocrystalline silicon processing, and improved equipment capacity improves 25%-50%.
More than one embodiment of the present of invention are had been described in detail, but described content only is preferred embodiment of the present invention, can not be considered to be used to limiting practical range of the present invention.All equalizations of doing according to the present patent application scope change and improve etc., all should still belong within the patent covering scope of the present invention.
Claims (8)
1. station multi-wire saw workbench, it is characterized in that: comprise three cutting work station, be fixed with respectively flitch on described three cutting work station, a workpiece to be cut can be housed respectively on each described flitch, described workbench is furnished with four nozzles, described four nozzles can have respectively a workpiece to be cut between any two, and the width sum of the diameter of described workpiece to be cut and a described nozzle is less than the distance between the described adjacent cutting work station central axis.
2. workbench according to claim 1, it is characterized in that: described three cutting work station are the horizontal bar shaped inner groovy on the described workbench lower surface, and include part and lower part, described three cutting work station are parallel to each other and are highly equal, the minimum widith of part is all greater than the Breadth Maximum of separately lower part on described three cutting work station, the side of described flitch is worker's shape, the upper part of described three cutting work station all allows the upper partial insertion of described flitch, and described flitch is separately fixed on described three cutting work station by the flitch holding screw.
3. workbench according to claim 2, it is characterized in that: the cutting work station left side in the middle of middle flitch holding screw hole is positioned at, comprise cap nut hole and lead screw hole, described cap nut hole is divided with the top of left side cutting work station and is communicated, and its length is greater than the length of the cap nut of flitch holding screw in the middle of described, and its height is more than or equal to the diameter of described cap nut.
4. workbench according to claim 2, it is characterized in that: cutting work station the right in the middle of middle flitch holding screw hole is positioned at, comprise cap nut hole and lead screw hole, described cap nut hole is divided with the top of the right cutting work station and is communicated, and its length is greater than the length of the cap nut of flitch holding screw in the middle of described, and its height is more than or equal to the diameter of described cap nut.
5. workbench according to claim 1, it is characterized in that: described workbench is fixed on the connecting plate of top by the workbench holding screw, accompany the high rigidity insulation sleeve between described workbench holding screw and the described workbench, be used for guaranteeing the insulation of described workbench holding screw and described workbench, cover has annulus steel pad on the lead screw of described workbench holding screw, be affixed with the cap nut of described workbench holding screw, for the wearing and tearing of avoiding between screw and the high rigidity insulation sleeve, the thickness of described annulus steel pad is more than or equal to 0.5 millimeter and is less than or equal to 3 millimeters.
6. workbench according to claim 5, it is characterized in that: described workbench holding screw is distributed in described three cutting work station tops, the quantity of the described workbench holding screw on each described cutting work station is more than or equal to three and is less than or equal to nine, and described workbench holding screw evenly distributes on each described cutting work station.
7. workbench according to claim 1, it is characterized in that: described four nozzles distribute side by side, described each nozzle and between the workpiece to be cut on its next door distance for more than or equal to 1 millimeter and be less than or equal to 10 millimeters.
8. according to claim 1 or 7 described workbench, it is characterized in that: the below that lays respectively at two described nozzles at described workbench two ends all has a spray orifice, the below that is positioned at two middle described nozzles of described workbench all has two spray orifices, the direction of described each spray orifice ejection mortar is respectively towards the vertical central axis of the described cutting work station that is adjacent, and be to spend greater than 0 degree and less than 90 with the vertical direction angulation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210497266.2A CN102962904B (en) | 2012-11-28 | 2012-11-28 | A kind of three station multi-wire saw workbench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210497266.2A CN102962904B (en) | 2012-11-28 | 2012-11-28 | A kind of three station multi-wire saw workbench |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102962904A true CN102962904A (en) | 2013-03-13 |
| CN102962904B CN102962904B (en) | 2015-08-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210497266.2A Active CN102962904B (en) | 2012-11-28 | 2012-11-28 | A kind of three station multi-wire saw workbench |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102211362A (en) * | 2011-04-11 | 2011-10-12 | 黄禹宁 | Three-roller multi-wire cutting machine |
| CN202016131U (en) * | 2011-04-11 | 2011-10-26 | 黄禹宁 | Three-roller multi-wire cutting machine |
| CN102398314A (en) * | 2010-09-17 | 2012-04-04 | 上海日进机床有限公司 | Diamond cutting line slicing machine |
| CN102555091A (en) * | 2012-02-29 | 2012-07-11 | 无锡斯达新能源科技有限公司 | Multi-station sapphire single-wire swinging cutting machine |
| CN203046012U (en) * | 2012-11-28 | 2013-07-10 | 天津市环欧半导体材料技术有限公司 | Three-position multi-line cutting working platform |
| JP5424251B2 (en) * | 2009-11-20 | 2014-02-26 | コマツＮｔｃ株式会社 | Thin wafer processing method |
-
2012
- 2012-11-28 CN CN201210497266.2A patent/CN102962904B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5424251B2 (en) * | 2009-11-20 | 2014-02-26 | コマツＮｔｃ株式会社 | Thin wafer processing method |
| CN102398314A (en) * | 2010-09-17 | 2012-04-04 | 上海日进机床有限公司 | Diamond cutting line slicing machine |
| CN102211362A (en) * | 2011-04-11 | 2011-10-12 | 黄禹宁 | Three-roller multi-wire cutting machine |
| CN202016131U (en) * | 2011-04-11 | 2011-10-26 | 黄禹宁 | Three-roller multi-wire cutting machine |
| CN102555091A (en) * | 2012-02-29 | 2012-07-11 | 无锡斯达新能源科技有限公司 | Multi-station sapphire single-wire swinging cutting machine |
| CN203046012U (en) * | 2012-11-28 | 2013-07-10 | 天津市环欧半导体材料技术有限公司 | Three-position multi-line cutting working platform |
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| Publication number | Publication date |
|---|---|
| CN102962904B (en) | 2015-08-05 |
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| TR01 | Transfer of patent right |
Effective date of registration: 20181224 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Park (outside the ring) Hai Tai Road 12 Patentee before: TIANJIN HUANOU SEMICONDUCTOR MATERIAL TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20191225 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring) Haitai Road No. 12 Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
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| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |