CN102954973A - Transmission x-ray analyzer and transmission x-ray analysis method - Google Patents
Transmission x-ray analyzer and transmission x-ray analysis method Download PDFInfo
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- CN102954973A CN102954973A CN2012102744727A CN201210274472A CN102954973A CN 102954973 A CN102954973 A CN 102954973A CN 2012102744727 A CN2012102744727 A CN 2012102744727A CN 201210274472 A CN201210274472 A CN 201210274472A CN 102954973 A CN102954973 A CN 102954973A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
- G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
- G01N2223/3307—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts source and detector fixed; object moves
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Abstract
The invention provides a transmission x-ray analyzer and a transmission x-ray analysis method which can easily adjust accumulative series of a TDI sensor in a large scope when the TDI sensor is used for detecting transmission x-ray images of a sample. The transmission X-ray analyzer (1) for detecting a transmission X-ray image of a sample (100) that moves relatively in a predetermined scanning direction (L) includes: a time delay and integration (TDI) sensor (14) including a plurality of stages of line sensors including the plurality of two-dimensionally arranged image pickup devices arranged in a direction perpendicular to the predetermined scanning direction, being configured to transfer charge accumulated in one line sensor to an adjacent subsequent line sensor (14a-14h); a shield unit (21) for shielding a part of the image of light entering the TDI sensor by moving back and forth in the predetermined scanning direction, the shield unit being disposed between the TDI sensor and the sample; and a shield unit position control unit (60) for controlling a position of the shield unit so as to shield a predetermined number of stages of line sensors among the plurality of stages of line sensors.
Description
Technical field
The Transmission X ray analysis device and method that the present invention relates to postpone the sensor of integration (TDI) formula a kind of service time and can measure the Transmission X ray of test portion.
Background technology
In the past, the X ray transmission imaging was used to the detection of density unevenness of detection, the element of the foreign matter in the test portion.As the method for such X ray transmission imaging, known method is, the Transmission X ray of test portion is converted to fluorescence by fluorescent plate etc., uses imaging apparatus (charge coupled cell; CCD(Charge Coupled Devices)) detect this fluorescence.And, as the detection method of using CCD to carry out, have and use the linear transducer that a plurality of imaging apparatuss are arranged along a direction, test portion is scanned the image of constantly obtaining wire and obtains the method that 2 of test portion is tieed up images.
Yet when the translational speed of test portion in the direction of scanning accelerated, the electric charge accumulating time of linear transducer shortened, and the S/N ratio will reduce when the sensitivity of linear transducer was low.For this reason, utilization and will be accumulated in the TDI(Time Delay and Integration that an electric charge in the linear transducer is transferred to the next linear transducer of adjacency with a plurality of linear transducers along the direction of scanning side by side: time delay integration) sensor.In the tdi sensor, the electric charge that accumulates in the 1st grade the linear transducer is transferred to the 2nd grade linear transducer, in the 2nd grade sensor, the electric charge that will shift from the 1st grade linear transducer and self sensitization and transfer to the linear transducer of 3rd level after the electric charge addition that accumulates.Like this, each linear transducer successively addition shifts the electric charge of coming from the linear transducer of prime, and the stored charge of transferring to the linear transducer of rear class is output.
Tdi sensor is compared accumulation T electric charge doubly with single linear transducer when progression is T like this, and noise obtains lowering when contrast becomes T times, and S/N is than improving when measuring at a high speed.
Pseudo-shadow), be used for the rising of the vertical transfer clock that electric charge shifts and overlapping bad of noise when descending on the other hand, because tdi sensor has high sensitivity, so the change meeting of sensitization light quantity produces defective (artifact: in detected image.At this, exploitation has the technology (patent documentation 1,2) of the cumulative progression that uses circuit control tdi sensor.
In addition, investigation according to the present inventor, when tdi sensor is used for the Transmission X ray analysis following problem is arranged: the more depth of field of cumulative progression of tdi sensor are then less, only can the part focusing on the depth direction of the test portion that thickness is arranged consist of picture, part beyond it can not consist of picture, can not hold integral body.
Patent documentation 1: TOHKEMY 2000-50063 communique;
Patent documentation 2: TOHKEMY 2010-4105 communique.
Summary of the invention
The problem to be solved in the present invention
Yet, the cumulative progression of the utilization circuit of record control tdi sensor in the patent documentation 1,2, must possess special-purpose IC(Integrated Circuit by manufacturings such as ASIC: tdi sensor integrated circuit), perhaps change the operational software of tdi sensor, can not utilize general tdi sensor, therefore can raise the cost.In addition, the technology of record in patent documentation 1,2, cumulative progression is at circuit, when operational software is set, and mensuration person is difficult to the thickness, kind of corresponding test portion etc. and freely regulates the cumulative progression of T.
The present invention makes for addressing the above problem, and its purpose is to provide a kind of x-ray analysis equipment and method of can be easily and regulating the cumulative progression of tdi sensor on a large scale.
For reaching above-mentioned purpose, Transmission X ray analysis device of the present invention looks like to detect to the Transmission X ray of the test portion that relatively moves on the set direction of scanning, wherein possess: the tdi sensor of time delay integration formula, possess a plurality of imaging apparatuss that read the electric charge that origin is generated in the image opto-electronic conversion of described Transmission X ray picture with 2 dimension shapes, this tdi sensor is multistage arrangement linear transducer on described direction of scanning, imaging apparatus described in this linear transducer is arranged along the direction vertical with described direction of scanning, will be accumulated in an electric charge in the linear transducer and transfer to the next linear transducer of adjacency; Masking device is disposed between described tdi sensor and the described test portion, covers the described image that incides described tdi sensor along the direction of scanning forward-reverse; And the masking device position control, control the position of described masking device to cover the described linear transducer of set progression.。
According to this Transmission X ray analysis device, because regulate the cumulative progression of tdi sensor gets final product by masking device physics, so need not make the tdi sensor with the special use of circuit, the cumulative progression of operational software control, can utilize general tdi sensor to reduce cost.In addition, when the special-purpose tdi sensor of use was regulated cumulative progression, mensuration person was difficult to freely regulate cumulative progression, but the amount of movement because of physics adjusting masking device gets final product among the present invention, so can freely regulate the cumulative progression of tdi sensor.
When in addition tdi sensor being used for the Transmission X ray analysis, there are the more depth of field of cumulative progression of tdi sensor then less, only can the part focusing on the depth direction of the test portion that thickness is arranged consist of picture, the part beyond it does not consist of picture, can not hold whole problem.Therefore, in the Transmission X ray analysis device of the present invention, because mensuration person can freely regulate cumulative progression, so can be set with the focusing range of the test portion of thickness maximum magnitude.
Transmission X ray analysis method of the present invention looks like to detect to the Transmission X ray of the test portion that relatively moves on the set direction of scanning, wherein use the tdi sensor that possesses the time delay integration formula of a plurality of imaging apparatuss that read the electric charge that origin is generated in the image opto-electronic conversion of described Transmission X ray picture with 2 dimension shapes, to be accumulated in an electric charge in the linear transducer and transfer to the next linear transducer of adjacency, with the masking device that is disposed between described tdi sensor and the described test portion, cover the described linear transducer of set progression, multistage arrangement linear transducer on described direction of scanning, imaging apparatus described in this linear transducer is arranged along the direction vertical with described direction of scanning.
According to the present invention, use tdi sensor to detect when the Transmission X ray picture of test portion, can be easily and regulate the cumulative progression of tdi sensor on a large scale.
Description of drawings
Fig. 1 is the block diagram that the structure of the Transmission X ray analysis device that embodiments of the present invention relate to is shown;
Fig. 2 is the stereographic map that the structure of shield is shown;
Fig. 3 is the figure that an example of the method for using tdi sensor to carry out the time delay integration processing is shown;
Fig. 4 illustrates when tdi sensor is used for the Transmission X ray analysis, and the position of the depth direction of analytic target causes the figure of the state that the depth of field diminishes;
Fig. 5 illustrates shield is moved and reduces the progression that carries out time delay integration along the L direction, makes the figure of the method that the depth of field of tdi sensor deepens.
Embodiment
Below, with reference to the description of drawings embodiments of the present invention.
Fig. 1 is the block diagram that the structure of the Transmission X ray analysis device 1 that embodiments of the present invention relate to is shown.
Transmission X ray analysis device 1 possesses: x-ray source 12; TDI(Time Delay and Integration: time delay integration) sensor 14; Be disposed between tdi sensor 14 and the test portion 100, will convert from the Transmission X ray 12x of test portion 100 fluorescent plate 16 of fluorescence (visible images) to; Be disposed at the below of fluorescent plate 16, the shield (masking device) 21 that a part that incides the visible images of tdi sensor 14 is covered; Make shield 21 with respect to the shield mobile device 30 of tdi sensor 14 forward-reverses; The masking device position control 60 of the position of control shield 21.
At this, x-ray source 12 is disposed at the below of test portion 100, X ray from x-ray source 12 emit upward and transmission test portion 100 after, be converted into visible images by fluorescent plate 16.Then, this image can be by the tdi sensor sensitization of test portion 100 tops.In addition, test portion 100 is the Co(cobalt that for example are used for the positive pole of lithium ion battery: cobalt) the continuous band-shaped thing of sour lithium electrode plate loads on belt conveyer (belt conveyor) 50 the from left to right direction along direction of scanning L(Fig. 1) mobile.And x-ray source 12 is emitted X ray always, carries out continuously the X-ray analysis of mobile test portion 100.
Masking device position control 60 is made of computing machine, ROM (read-only memory)), RAM(Random Access Memory CPU (central processing unit)), ROM(Read Only Memory comprise CPU(Central Processing Unit::: random access memory) etc., when can carrying out set computer program, the whole processing such as carry out that also the irradiation from the X ray of x-ray source 12, the sensitization of using the visible images that tdi sensor 14 carries out and output are processed.
In addition, Transmission X ray analysis device 1 detects the foreign matter 101(iron (Fe) for example in the test portion 100).
As shown in Figure 2, shield 21 orthogonal shapes, 2 limits in the shield 21 are parallel to linear transducer 14a ~ 14h vertically towards the L direction.In addition, be held between the pair of tracks 31 that section is the L font and load on track 31 along 2 lateral margins of L direction in the shield 21, shield 21 can be along track 31 forward-reverse on the L direction.In addition, a side of shield 21 is formed with through hole 21a along the L direction, and the inside of through hole 21a is processed with screw thread.And, the feed screw 32L and the through hole 21a threaded engagement that are supported by stepping motor (stepping motor) 32 axles, the rotation by stepping motor 32 makes shield 21 along track 31 forward-reverse on the L direction.
As mentioned above, when shield 21 when the L direction moves, cover the part of linear transducer 14a ~ 14h, physics regulate to use the progression of the time delay integration that tdi sensor 14 carries out as described later.
In addition, the structure of shield mobile device 30 is not limited to foregoing, and the structure of shield 21 also is not limited to foregoing.In addition, as shield 21, can use for example sheet of tungsten, molybdenum (sheet) (for example, about thickness 0.5mm).
Next, one example of the method for the time delay integration processing that use tdi sensor 14 carries out is described with reference to Fig. 3.At this, as shown in Figure 2, tdi sensor 14 is made of multistage (8 grades) linear transducer 14a ~ 14h.
At this moment, if the foreign matter 101 in the test portion 100 has entered the photosensitive region of the 1st grade linear transducer 14a, the electric charge that then is accumulated among the linear transducer 14a is transferred to linear transducer 14b(Fig. 3 (a) of the 2nd grade).Next, if foreign matter 101 moves into the photosensitive region of the 2nd grade linear transducer 14b, then charge accumulated (Fig. 3 (b)) in linear transducer 14b along the L direction.
Among the 2nd grade the linear transducer 14b, the electric charge that the 1st grade linear transducer 14a transfer is next is transferred among the linear transducer 14c of 3rd level after the adduction accumulation mutually with the electric charge of self sensitization.Like this, shift the electric charge that comes by successively addition from the linear transducer of prime among each linear transducer 14a ~ 14h, the stored charge of transferring to the linear transducer 14h of rear class is output.And, along the test portion 100 that the L direction moves, obtain continuously 2 dimensional data images of test portion 100 by continuous linear analysis.
Like this, tdi sensor 14 is compared accumulation T electric charge doubly with single linear transducer when progression is T, and noise obtains lowering when contrast becomes T times, and S/N is than improving when measuring at a high speed.
In addition, the structure of tdi sensor 14 and action can be used known technology.
Yet, as shown in Figure 4, when tdi sensor 14 is used for the Transmission X ray analysis, if the thickness d thickening of the foreign matter 101 in the test portion 100 of formation analytic target, then because position P1, the P2 of the depth direction of foreign matter 101, the distance h 1 of tdi sensor 14 and foreign matter 101, h2 change.At this moment, the more depth of field of cumulative progression N of tdi sensor are then less, only can consist of picture in the position P1 of the foreign matter 101 that thickness is arranged focusing, can not consist of picture on the P2 of position, can not hold integral body.With reference to Fig. 4 this problem is described.At first, the distance of establishing till x-ray source 12 to P1, the P2 is respectively S1, S2, establishes test portion 100(foreign matter 101) the scanning along the L direction (movement) speed be V.
At this moment, the translational speed of the shadow cast at tdi sensor 14 of P1 is V1=V * (S1+h1)/h1.Equally, the translational speed of the shadow cast at tdi sensor 14 of P2 is V2=V * (S2+h2)/h2.On the other hand, because for P1 and P2, V can only set 1 value, so if set V1=V, then the translational speed V1 of the shadow of P1 on tdi sensor 14 is consistent with the scan velocity V of test portion 100, so the shadow of P1 consists of picture.Relative therewith, translational speed and the scan velocity V of the shadow of P2 on tdi sensor 14 are inconsistent, so the shadow of P2 blurs the multistage of tdi sensor 14.Particularly this problem at the foreign matter 101 that forms detected object not only on the surface of test portion 100, when also going deep into depth direction, particularly remarkable when the thickness of foreign matter 101 surpasses the 2mm left and right sides.
At this, be NE=N * (V2-V1)/V1 with the shadow of P2 at tdi sensor 14 fuzzy series expressions, the cumulative progression N of itself and tdi sensor 14 is proportional.Thereby, diminish by the progression N that will add up, can enlarge the scope of the different foreign matter of each depth 101 focusings.
Namely, as shown in Figure 5, by with shield 21 along the L direction move a part of covering linear transducer 14a ~ 14h (in the example of Fig. 5 for 3 linear transducer 14f of rear-stage side ~ 14h) reduce the progression that carries out time delay integration, thus the depth of field of deepening tdi sensor 14.
When using shield 21, can use general tdi sensor 14.That is, the same with Fig. 3, among each linear transducer 14a ~ 14h, the electric charge that the linear transducer of prime shifts is by successively addition, and the stored charge of transferring to the linear transducer 14h of rear class is output.But, crested plate 21 covers and linear transducer 14f ~ 14h that can not bearing member, image does not accumulate the electric charge of self, so being remained untouched successively, the stored charge that linear transducer 14a ~ 14e shifts successively transfers among linear transducer 14f ~ 14h, from the linear transducer 14h output of rear class.Like this, can reduce the cumulative progression (in the example of Fig. 5 being 5 grades) of tdi sensor 14.
As mentioned above, the progression of regulating tdi sensor 14 by shield 21 physics gets final product, so need not make the tdi sensor with the special use of the cumulative progression of the circuit of sensor self, operational software control tdi sensor, can utilize general tdi sensor to reduce cost.In addition, when using special-purpose tdi sensor to regulate cumulative progression, mensuration person is difficult to freely regulate cumulative progression, but the amount of movement of physics adjusting shield 21 gets final product among the present invention, so can freely regulate the cumulative progression of tdi sensor.
The progression that increase the progression of tdi sensor 14 when for example, analyzing the test portion of thin thickness, reduces tdi sensor 14 when analyzing the thick test portion of thickness gets final product.The adjusting of the progression of tdi sensor 14, such as connecting at computing machine (masking device position control) 60 input media 61 such as keyboards, mensuration person is from the arbitrarily amount of movement (the perhaps progression of the tdi sensor 14 of corresponding amount of movement) of input media input shield 21.Masking device position control 60 based on the rotation of the information control step motor 32 of mensuration person input, thereby is regulated the amount of movement of shield 21.
The present invention is not limited to above-mentioned embodiment, and the various distortion and the equivalent that are contained in thought of the present invention and the scope all fall into protection scope of the present invention.
Symbol description
1 Transmission X ray analysis device
12 x-ray sources
The optical axis of 12C x-ray source
12x Transmission X ray
14 tdi sensors
14a ~ 14h linear transducer
21 shields (masking device)
60 masking device position controls
100 test portions
101 foreign matters
The L direction of scanning.
Claims (2)
1. Transmission X ray analysis device looks like to detect to the Transmission X ray of the test portion that relatively moves on the set direction of scanning, wherein possesses:
The tdi sensor of time delay integration formula, possess a plurality of imaging apparatuss that read the electric charge that origin is generated in the image opto-electronic conversion of described Transmission X ray picture with 2 dimension shapes, this tdi sensor is multistage arrangement linear transducer on described direction of scanning, imaging apparatus described in this linear transducer is arranged along the direction vertical with described direction of scanning, will be accumulated in an electric charge in the linear transducer and transfer to the next linear transducer of adjacency;
Masking device is disposed between described tdi sensor and the described test portion part of covering the described image that incides described tdi sensor along the direction of scanning forward-reverse; And
The masking device position control is controlled the position of described masking device to cover the described linear transducer of set progression.
2. Transmission X ray analysis method looks like to detect to the Transmission X ray of the test portion that relatively moves on the set direction of scanning, wherein
At the tdi sensor that possesses the time delay integration formula of a plurality of imaging apparatuss that read the electric charge that origin is generated in the image opto-electronic conversion of described Transmission X ray picture with 2 dimension shapes, with when being accumulated in an electric charge in the linear transducer and transferring to the next linear transducer of adjacency
With the masking device that is disposed between described tdi sensor and the described test portion, cover the described linear transducer of set progression,
Multistage arrangement linear transducer on described direction of scanning, imaging apparatus described in this linear transducer is arranged along the direction vertical with described direction of scanning.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-171824 | 2011-08-05 | ||
| JP2011171824A JP5827064B2 (en) | 2011-08-05 | 2011-08-05 | Transmission X-ray analysis apparatus and method |
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| Publication Number | Publication Date |
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| CN102954973A true CN102954973A (en) | 2013-03-06 |
| CN102954973B CN102954973B (en) | 2016-03-16 |
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| CN201210274472.7A Active CN102954973B (en) | 2011-08-05 | 2012-08-03 | Transmission X-ray analytical equipment and method |
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|---|---|
| US (1) | US8912503B2 (en) |
| JP (1) | JP5827064B2 (en) |
| KR (1) | KR101950515B1 (en) |
| CN (1) | CN102954973B (en) |
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| CN104076053A (en) * | 2013-03-28 | 2014-10-01 | 日本株式会社日立高新技术科学 | Foreign matter detector |
| CN104792805A (en) * | 2015-04-16 | 2015-07-22 | 中国原子能科学研究院 | Transmission detector and interpolation data calculation method |
| CN104950002A (en) * | 2014-03-31 | 2015-09-30 | 日本株式会社日立高新技术科学 | X-ray transmission inspection apparatus |
| CN105388176A (en) * | 2014-08-28 | 2016-03-09 | 日本株式会社日立高新技术科学 | X-ray fluorescence analyzer and method of displaying sample thereof |
| CN108307656A (en) * | 2015-09-10 | 2018-07-20 | 日本株式会社日立高新技术科学 | X-ray inspection method and X ray checking device |
| CN117198565A (en) * | 2023-11-08 | 2023-12-08 | 陕西星环聚能科技有限公司 | Radiation detection module and fusion device |
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| JP6462228B2 (en) * | 2014-03-28 | 2019-01-30 | アンリツインフィビス株式会社 | X-ray inspection equipment |
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| CN104076053B (en) * | 2013-03-28 | 2018-06-19 | 日本株式会社日立高新技术科学 | Detection device for foreign matter |
| CN104950002A (en) * | 2014-03-31 | 2015-09-30 | 日本株式会社日立高新技术科学 | X-ray transmission inspection apparatus |
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| CN105388176B (en) * | 2014-08-28 | 2019-12-06 | 日本株式会社日立高新技术科学 | fluorescent X-ray analyzer and sample display method thereof |
| CN104792805A (en) * | 2015-04-16 | 2015-07-22 | 中国原子能科学研究院 | Transmission detector and interpolation data calculation method |
| CN104792805B (en) * | 2015-04-16 | 2017-09-12 | 中国原子能科学研究院 | A kind of transmission detectors and interpolated data computational methods |
| CN108307656A (en) * | 2015-09-10 | 2018-07-20 | 日本株式会社日立高新技术科学 | X-ray inspection method and X ray checking device |
| CN117198565A (en) * | 2023-11-08 | 2023-12-08 | 陕西星环聚能科技有限公司 | Radiation detection module and fusion device |
| CN117198565B (en) * | 2023-11-08 | 2024-02-27 | 陕西星环聚能科技有限公司 | Radiation detection module and fusion device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130016081A (en) | 2013-02-14 |
| JP5827064B2 (en) | 2015-12-02 |
| JP2013036805A (en) | 2013-02-21 |
| CN102954973B (en) | 2016-03-16 |
| US8912503B2 (en) | 2014-12-16 |
| US20130032728A1 (en) | 2013-02-07 |
| KR101950515B1 (en) | 2019-02-20 |
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