CN102944564A - Portable stray light detection device of double far center inclined lighting structure - Google Patents
Portable stray light detection device of double far center inclined lighting structure Download PDFInfo
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- CN102944564A CN102944564A CN2012104883461A CN201210488346A CN102944564A CN 102944564 A CN102944564 A CN 102944564A CN 2012104883461 A CN2012104883461 A CN 2012104883461A CN 201210488346 A CN201210488346 A CN 201210488346A CN 102944564 A CN102944564 A CN 102944564A
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Abstract
The invention discloses a portable stray light detection device of a double far center inclined lighting structure and belongs to the technical field of optical detection. The portable stray light detection device solves the problem that the optical system stray light detection method in the prior art is high in cost, poor in equipment portability and low in efficiency. The portable stray light detection device is composed of a lighting system, a double far center imaging system and a charge coupled device (CCD) system, wherein the object position of the double far center imaging system is the surface of the lens to be detected, the image position is used for placing the CCD system, and the lens to be detected, the double far center imaging system and the CCD system are placed coaxially. Emergent light of the lighting system is irradiated onto the lens to be detected from an inclined angle and then focused by the lens to be detected, focus points are arranged outside the double far center imaging system, and partial light of the lighting system is scattered by scattering points on the surface of the lens to be detected and then imaged on the CCD system through a limited remote distance imaging system after scattering. The portable stray light detection device has the advantages of being low in cost, high in efficiency and convenient to carry.
Description
Technical field
The present invention relates to a kind of portable two heart oblique illumination structure parasitic light pick-up units far away, belong to the optical detective technology field.
Background technology
At present, in high-grade, precision and advanced optical system, parasitic light has directly affected the performance of system, and as the optical lens of optical system important component part, its smooth finish also affects the level of parasitic light in the system always, but does not also have direct solution for the parasitic light test problems of optical lens.Normally utilizing the microcosmic detection instrument such as atomic force microscope to carry out surface microscopic detects, perhaps utilize the equipment such as integrating sphere to detect carrying out system after lens arrangement is in the camera lens, these methods have that cost is high, portable devices is poor and the shortcomings such as efficient is low again.System's parasitic light problem has also become the bottleneck that high-end optical system continues development.
Summary of the invention
The present invention provides a kind of portable two heart oblique illumination structure parasitic light pick-up units far away for solving prior art to optical system parasitic light detection method cost is high, portable devices is poor and inefficient problem.
The present invention is achieved by the following technical solutions:
A kind of portable two heart oblique illumination structure parasitic light pick-up units far away, this device is comprised of illuminator, two telecentric imaging system and CCD system; The object space position of two telecentric imaging system is lens surface to be checked, the CCD system is put in the image aspect, and lens to be checked, the coaxial placement of two telecentric imaging system and CCD system, the emergent light of illuminator incides lens to be checked with the angle of inclination, by lens focus to be checked, focus is outside two telecentric imaging system, and the part light of illuminator is by lens surface scattering point to be checked scattering, and the light after the scattering is imaged in the CCD system by the finite distance imaging system.
Beneficial effect of the present invention: apparatus of the present invention illuminator emergent light is along inciding lens surface to be checked with the angled direction of the optical axis of lens to be checked, and light, is detected in order to avoid enter the systematic influence of back outside two telecentric imaging systems by lens focus to be checked; Part light incides on the spuious point of lens to be checked and is scattered, and forms scattered light, scattered light again through two telecentric imaging system imagings in the CCD system, thereby the parasitic light of realizing lens to be checked detects; Imaging system has adopted two core structures far away in this device, because the object space depth of field and picture side's depth of field of two telecentric imaging systems are all larger, avoided like this because the imaging system focusing is inaccurate, lens curvature to be checked is excessive and CCD departs from the detection error that causes the image planes position; This device has the advantage that cost is low, efficient is high, be convenient for carrying.
Description of drawings
Fig. 1: a kind of portable two heart oblique illumination structure parasitic light pick-up unit synoptic diagram far away of the present invention.
Fig. 2: a kind of portable two another synoptic diagram of heart oblique illumination structure parasitic light pick-up unit far away of the present invention.
Among the figure: 1, illuminator, 2, lens to be checked, 3, two telecentric imaging system, 4, the CCD system, 5, eyepiece system.
Embodiment
Below in conjunction with accompanying drawing technical scheme of the present invention is described in further detail.
As shown in Figure 1, a kind of portable two heart oblique illumination structure parasitic light pick-up units far away of the present invention, this device is comprised of illuminator 1, two telecentric imaging system 3 and CCD system 4, and two telecentric imaging system 3 and the coaxial placement of CCD system needs; The directional light that illuminator 1 is sent becomes the oblique incidence of A angle direction to lens 2 to be checked with the optical axis of lens 2 to be checked, and light is focused on beyond two telecentric imaging systems 3, in order to avoid enter the systematic influence testing result of back by lens 2 to be checked; By the scattering point scattering on lens to be checked 2 surfaces, form scattered light from the part light of illuminator 1, scattered light is imaged in the CCD system 4 through two telecentric imaging systems 3 again.
The only directional light that illuminator 1 is sent or the light that certain angle of divergence (convergent angle) arranged, light becomes the oblique incidence of A angle direction to lens 2 to be checked with the optical axis of lens 2 to be checked, can adopt a receiving screen collectiong focusing point, in the motionless situation of other device and lens to be checked 2, the emergent light of converted illumination systems 1 incides on the lens 2 to be checked, incident angle is angle A, when the focus that receives when receiving screen has just shifted out the visual field of two telecentric imaging systems 3, this moment angle be θ, so angle A scope should be more than or equal to θ less than 90 °.
Two telecentric imaging system 3 belongs to closely imaging system, and the system wavelength is the wavelength of lighting source.Two telecentric imaging system 3 is comprised of 7 mirrors, regards front lens group as from three lens of object space, and rear 4 lens are regarded rear mirror group as, and the right-hand focus of front lens group and the left focus of rear mirror group overlap, and diaphragm just is arranged on this focus place.Diaphragm is entrance pupil by the front lens group imaging, and in the object space infinite distance of two telecentric imaging system 3, diaphragm is emergent pupil by rear mirror group imaging, the infinite distance, picture side in two telecentric imaging system 3.Object space and the picture side of the two telecentric imaging systems 3 of the inevitable parallel ejaculation of the chief ray by the diaphragm center, on the contrary the chief ray of the light beam that the object plane of two telecentric imaging system sends must pass through the center of entrance pupil, diaphragm and emergent pupil, and perpendicular to image planes; And the chief ray of the light beam that the image planes of two telecentric imaging system are sent must pass through the center of emergent pupil, diaphragm and entrance pupil, and perpendicular to object plane.If lens to be checked 2 occur necessarily along the translation of optical axis, its real image planes can depart from the position of CCD system 4, but its chief ray same position by CCD still; If in like manner the translation along optical axis occurs for CCD system 4, its conjugation object plane also can depart from the position of lens to be checked, but the chief ray that is imaged on the point on the CCD still can be regarded the correspondence position from lens 2 to be checked as.According to above-mentioned situation as can be known, adopt two telecentric imaging systems 3, can make apparatus of the present invention at lens to be checked skew object plane, the imaging system focusing is inaccurate, lens curvature to be checked is excessive and CCD departs from the error that can not occur measuring in the situation of image planes position, and can become clearly as.Two telecentric imaging system 3 is all larger imaging systems of the object space depth of field and picture side's depth of field, can avoid the error that detects in field depth.
Receive the picture point of above scattered light with CCD system 4, CCD system 4 place two telecentric imaging systems the image distance position and with the 3 coaxial placements of two telecentric imaging system, be the conjugate position relation with lens 2 to be checked, the signal that CCD system 4 gathers is processed through computer, observe through display screen, just can observe the defective of lens to be checked, the distribution of flaw point and the density of contamination by dust thing.
As shown in Figure 2, eyepiece system 5 placed two telecentric imaging systems 3 after so that the image planes position of the object plane position of eyepiece system 5 and two telecentric imaging systems 3 overlaps, by eyepiece system 5 picture of scattered light is projected to the infinite distance, directly observe for human eye.
Claims (3)
1. portable two heart oblique illumination structure parasitic light pick-up units far away is characterized in that this device is comprised of illuminator (1), two telecentric imaging systems (3) and CCD system (4); The object space position of two telecentric imaging systems (3) is lens to be checked (2) surfaces, CCD system (4) is put in the image aspect, and lens to be checked (2), the coaxial placement of two telecentric imaging systems (3) and CCD system (4), the emergent light of illuminator (1) incides lens to be checked (2) with the angle of inclination, focused on by lens to be checked (2), focus is outside two telecentric imaging systems (3), the part light of illuminator (1) is by lens to be checked (2) surface scattering point scattering, and the light after the scattering is imaged in the CCD system (4) by finite distance imaging system (3).
2. a kind of portable two heart oblique illumination structure parasitic light pick-up units far away according to claim 1 is characterized in that illuminator (1) becomes an angle of inclination with lens to be checked (2) optical axis; The emergent light of illuminator (1) incides on the lens to be checked (2) with the angle of inclination.
3. a kind of portable two far away heart oblique illumination structure parasitic light pick-up units according to claim 1, it is characterized in that, described CCD system (4) can replace to eyepiece system (5), and light is through being imaged on the object plane position of eyepiece system (5) through two telecentric imaging systems (3) after the scattering again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104883461A CN102944564A (en) | 2012-11-26 | 2012-11-26 | Portable stray light detection device of double far center inclined lighting structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104883461A CN102944564A (en) | 2012-11-26 | 2012-11-26 | Portable stray light detection device of double far center inclined lighting structure |
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| CN102944564A true CN102944564A (en) | 2013-02-27 |
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| CN2012104883461A Pending CN102944564A (en) | 2012-11-26 | 2012-11-26 | Portable stray light detection device of double far center inclined lighting structure |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110554048A (en) * | 2019-09-12 | 2019-12-10 | 南京先进激光技术研究院 | touch-sensitive screen ITO membrane roughness defect detection device |
| CN113701676A (en) * | 2021-08-02 | 2021-11-26 | 清华大学 | Stray light measuring device and method |
| CN113701675A (en) * | 2021-08-02 | 2021-11-26 | 清华大学 | Stray light measuring device and method |
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| US20060001885A1 (en) * | 2004-04-05 | 2006-01-05 | Hertzsch Albrecht E | Method and device for quantitative determination of the optical quality of a transparent material |
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| CN102128839A (en) * | 2009-09-25 | 2011-07-20 | 肖特股份有限公司 | Method for detecting defects in a transparent material transparent and a device for same |
| CN102426648A (en) * | 2011-11-01 | 2012-04-25 | 长春方圆光电技术有限责任公司 | Finger and palm print instrument used for collection of soaked finger and palm prints |
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- 2012-11-26 CN CN2012104883461A patent/CN102944564A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11194069A (en) * | 1997-12-30 | 1999-07-21 | Tetsuya Kawanishi | Optical parts-inspecting device using scattered light |
| DE10210209A1 (en) * | 2002-03-01 | 2003-09-11 | Zeiss Carl Smt Ag | Automatic scattered light inspection of optical lenses and crystal to detect internal defects, whereby an inspection and evaluation component is arranged at an angle to an incident test beam that passes through the test piece |
| CN1493868A (en) * | 2002-10-31 | 2004-05-05 | 电子科技大学 | Detection method of optical instrument internal optical component state and device |
| US20060001885A1 (en) * | 2004-04-05 | 2006-01-05 | Hertzsch Albrecht E | Method and device for quantitative determination of the optical quality of a transparent material |
| CN101360985A (en) * | 2005-11-21 | 2009-02-04 | 康宁股份有限公司 | Oblique transmission illumination inspection system and method for inspecting a glass sheet |
| CN101487983A (en) * | 2009-02-18 | 2009-07-22 | 上海微电子装备有限公司 | Light beam transmission apparatus and method |
| US20110085161A1 (en) * | 2009-09-07 | 2011-04-14 | Pepperl+Fuchs Gmbh | Method and device for detecting soiling |
| CN102128839A (en) * | 2009-09-25 | 2011-07-20 | 肖特股份有限公司 | Method for detecting defects in a transparent material transparent and a device for same |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110554048A (en) * | 2019-09-12 | 2019-12-10 | 南京先进激光技术研究院 | touch-sensitive screen ITO membrane roughness defect detection device |
| CN113701676A (en) * | 2021-08-02 | 2021-11-26 | 清华大学 | Stray light measuring device and method |
| CN113701675A (en) * | 2021-08-02 | 2021-11-26 | 清华大学 | Stray light measuring device and method |
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Application publication date: 20130227 |