Summary of the invention
The purpose of this invention is to provide a kind of performance testing device for the X ray scintillation screen, can between the image-forming condition of different detection areas and picture element density, adjust flexibly, measure the parameters such as modulation transfer function, non-uniform light and luminous intensity of scintillation screen simultaneously, the scintillation screens different to imaging characteristic all can reach higher measuring accuracy, have advantages of that measuring accuracy is high, applied widely, flexible and convenient to use and with low cost.
The objective of the invention is to be achieved through the following technical solutions, a kind of performance testing device for the X ray scintillation screen, described device comprises x-ray source, beam-defining clipper, test component, scintillation screen, optical module and electrooptical device, wherein:
Described x-ray source is for generation of the X ray with specific power spectrum and angle of divergence;
Described beam-defining clipper is fixed on the exit of described x-ray source, for controlling the radiation areas of X ray;
Described test component is fixed between described beam-defining clipper and described scintillation screen, for the masked segment X ray to form the knife-edge image on described scintillation screen;
Described optical module is used for the visual light imaging of described scintillation screen output at described electrooptical device; This optical module comprises the adjustable type lens group, described adjustable type lens group is the imaging surface to described electrooptical device by the visible ray focusing of described scintillation screen output, and the relative distance of this adjustable type lens group and described electrooptical device can be regulated within the specific limits;
Described electrooptical device is used for surveying the output light of described scintillation screen, and is converted into electric signal.
Described adjustable type lens group is by single or some lens, and the displacement mechanism composition, wherein:
The relative distance that described displacement mechanism is also regulated lens and described electrooptical device within the specific limits for fixed lens.
Described beam-defining clipper further comprises limit bundle plate and support, wherein:
Described limit bundle intralamellar part perforate and aperture capable of regulating, for retraining the radiation areas of the X ray that described x-ray source sends;
Described support, for fixing described limit bundle plate and position capable of regulating, is limited in described scintillation screen for the radiation areas by X ray.
Described optical module further comprises catoptron, and described catoptron is fixed between described scintillation screen and described adjustable type lens group, for the output light that reflects described scintillation screen, to change light path, makes described electrooptical device outside the X-radiation scope.
Described scintillation screen, optical module and electrooptical device are fixed in same box body, for shielding described scintillation screen light source in addition, disturb;
And described scintillation screen, optical module and electrooptical device be in coaxial state, the axial direction that moving direction when described optical module and scintillation screen carry out position adjustments is this coaxial system.
Described device also comprises: data acquisition unit for controlling the acquisition parameter of described electrooptical device, and gathers and stores the image that described electrooptical device generates;
Data analysis unit, for storing the calibrating parameters of described adjustable type lens group and described electrooptical device, described calibrating parameters comprises modulation transfer function, roomage response and the intensity response of described adjustable type lens group and electrooptical device, and the calibrating parameters of further coupling system setting carries out correction calculation, draw modulation transfer function, non-uniform light and the luminous intensity parameter of described scintillation screen.
As seen from the above technical solution provided by the invention, described device comprises x-ray source, beam-defining clipper, test component, scintillation screen, optical module and electrooptical device, and wherein said x-ray source is for generation of the X ray with specific power spectrum and angle of divergence; Described beam-defining clipper is fixed on the exit of described x-ray source, for controlling the radiation areas of X ray; Described test component is fixed between described beam-defining clipper and described scintillation screen, for the masked segment X ray to form the knife-edge image on described scintillation screen; Described optical module is used for the visual light imaging of described scintillation screen output at described electrooptical device; This optical module comprises the adjustable type lens group, described adjustable type lens group is the imaging surface to described electrooptical device by the visible ray focusing of described scintillation screen output, and the relative distance of this adjustable type lens group and described electrooptical device can be regulated within the specific limits; Described electrooptical device is used for surveying the output light of described scintillation screen, and is converted into electric signal.Described device can be adjusted flexibly between the image-forming condition of different detection areas and picture element density, measure the parameters such as modulation transfer function, non-uniform light and luminous intensity of scintillation screen simultaneously, the scintillation screens different to imaging characteristic all can reach higher measuring accuracy, have advantages of that measuring accuracy is high, applied widely, flexible and convenient to use and with low cost.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Based on embodiments of the invention, those of ordinary skills, not making under the creative work prerequisite the every other embodiment obtained, belong to protection scope of the present invention.
Below in conjunction with accompanying drawing, the embodiment of the present invention is described in further detail, be illustrated in figure 1 the structural representation of the performance testing device for the X ray scintillation screen that the embodiment of the present invention provides, device described in Fig. 1 comprises x-ray source, beam-defining clipper, test component, scintillation screen, optical module and electrooptical device, wherein:
Described x-ray source is for generation of the X ray with specific power spectrum and angle of divergence; Specifically, this x-ray source consists of X ray ray machine and added filter, the X ray ray machine produces the X ray for being excited by specific voltage and electric current, and added filter is according to the parameter designing of stipulating in standard IEC 62220-1, thus the power spectrum of regulating X ray for absorbing low energy X ray.
Described beam-defining clipper is fixed on the exit of described x-ray source, for controlling the radiation areas of X ray; Be specially shielding and be distributed in box body plane of incidence X ray in addition, with the protection electrooptical device, not damaged by X-radiation, and suppress the X ray of the outer scattering of box body.
In specific implementation, this beam-defining clipper further comprises limit bundle plate and support, wherein:
Described limit bundle intralamellar part perforate and aperture capable of regulating, for retraining the radiation areas of the X ray that described x-ray source sends, reduce scattering effect simultaneously to greatest extent; Described support, for fixing limit bundle plate and position capable of regulating, is limited in described scintillation screen for the radiation areas by X ray, protects described electrooptical device not damaged by X-radiation.
Described test component is fixed between described beam-defining clipper and described scintillation screen, for the masked segment X ray to form the knife-edge image on described scintillation screen; In specific implementation, this test component can consist of edge of a knife assembly and base, edge of a knife assembly is according to the parameter designing of stipulating in standard IEC 62220-1, base for fixing edge of a knife assembly the angle of inclination that makes knife-edge within the specific limits capable of regulating to realize edge over-sampling measurement.
Described scintillation screen is fixed on the scintillation screen specimen holder; In specific implementation, this scintillation screen specimen holder comprises base and back up pad, and base is can be within the specific limits quantitatively mobile to realize focusing and to regulate the magnification ratio of imaging system, and back up pad is fixed on base for fixing scintillation screen.
Described optical module is used for the visual light imaging of described scintillation screen output at described electrooptical device; Specifically comprise the adjustable type lens group in this optical module, this adjustable type lens group is the imaging surface to described electrooptical device by the visible ray focusing of described scintillation screen output, and the relative distance of this adjustable type lens group and described electrooptical device can be regulated within the specific limits, make the magnification ratio capable of regulating of this imaging system, thereby realize regulating the function of detection area and picture element density.
In specific implementation, this adjustable type lens group can be by single or some lens, and displacement mechanism forms, the interface of this adjustable type lens group is positioned at the inboard of performance testing device box body rear end, equivalent focal length is on the occasion of to guarantee becoming real image at the electrooptical device imaging surface, the relative distance that described displacement mechanism also can be regulated lens and described electrooptical device within the specific limits for fixed lens, to realize focusing.Because the relative distance of lens and electrooptical device in the adjustable type lens group can be regulated within the specific limits, make the magnification ratio capable of regulating of this imaging system, thereby realize regulating the function of detection area and picture element density.
Described electrooptical device is used for surveying the output light of described scintillation screen, and is converted into electric signal; Specifically, this electrooptical device is surveyed the space distribution of the light intensity that incides its imaging surface, and incident light is sent by scintillation screen and the adjustable type lens group in optical module is focused to the imaging surface of this electrooptical device.
In specific implementation, electrooptical device can be semiconductor detector, sensitive chip, sensing circuit and refrigerator, consists of, and its interface is positioned at the outside of performance testing device box body rear end.
In addition, above-mentioned scintillation screen, optical module and electrooptical device can be fixed in same box body, for shielding described scintillation screen light source in addition, disturb, and described scintillation screen, optical module and electrooptical device are in coaxial state, to realize correct focusing, the axial direction that moving direction when optical module and scintillation screen carry out position adjustments is this coaxial system.
In addition, above-mentioned optical module also can further comprise catoptron, described catoptron is fixed between described scintillation screen and described adjustable type lens group, for the output light that reflects described scintillation screen, to change light path, makes described electrooptical device outside the X-radiation scope.
In specific implementation, box body act as the support platform that the light path system be comprised of devices such as electrooptical device, adjustable type lens group, scintillation screen specimen holder and catoptrons is provided, the interference of shielding box external body light source simultaneously; Box body consists of the X ray plane of incidence and box body supporting walls, and both form darkroom to guarantee that scintillation screen is the observable unique light source of electrooptical device, and the treated black that is processed as of cartridge inner surface is to suppress the interference of parasitic light simultaneously.The decay that to be effective atomic number is low and thickness is little flaky material cause when reducing X ray through the plane of incidence of the X ray plane of incidence, the box body supporting walls is to have certain thickness and the higher metal material of physical strength to guarantee the stability of box body structure, the interface that the box body supporting walls is provided with the devices such as electrooptical device, adjustable type lens group, scintillation screen specimen holder and catoptron simultaneously with is connected and fix more than each device.
In specific implementation, described device also can comprise:
Data acquisition unit, for controlling the acquisition parameter of described electrooptical device, acquisition parameter comprises biasing, gain, time shutter, pixel merging patterns, repeated acquisition amount and cryogenic temperature, gathers simultaneously and store the image that described electrooptical device generates.
Data analysis unit, for storing the calibrating parameters of described adjustable type lens group and described electrooptical device, calibrating parameters comprises modulation transfer function, roomage response and the intensity response of adjustable type lens group and electrooptical device, and coupling system arranges corresponding calibrating parameters and carry out correction calculation, draw modulation transfer function, non-uniform light and the luminous intensity parameter of described scintillation screen.
Below with concrete example, the structure to above-mentioned performance testing device describes, be illustrated in figure 2 the structural representation of embodiment of the present invention example performance testing device, be illustrated in figure 3 the principle schematic of embodiment of the present invention example performance testing device, in conjunction with Fig. 2 and 3, described device comprises platform 1, beam-defining clipper 2, test component 3, box body 4, scintillation screen specimen holder 5, catoptron 6, adjustable type lens group 7, electrooptical device 8 and x-ray source 9, wherein:
Beam-defining clipper 2, test component 3 and box body 4 together are fixed on platform 1, and the plane of incidence center of the perforate center of beam-defining clipper 2, the knife-edge center of test component 3, box body 4 is in coaxial state; Scintillation screen specimen holder 5, catoptron 6, adjustable type lens group 7 and electrooptical device 8 are fixed on box body 4, after 6 reflections of middle the heart channel of Hang-Shaoyin catoptron of the center of the center of scintillation screen specimen holder 5, adjustable type lens group 7, electrooptical device 8 centers and x-ray source 9 in coaxial state.
The structure of beam-defining clipper 2 comprises support and limit bundle plate.The support Outside Dimensions is 400mm*200mm, and the internal side hole dimension is 150mm*150mm, adopts the Pb plate that thickness is 4mm.Limit bundle plate is fixed in the internal stent square hole, and the center drilling size comprises a plurality of specifications such as 120mm*120mm, 100mm*100mm, 80mm*80mm, 60mm*60mm and 40mm*40mm, adopts the Pb plate that thickness is 4mm, and limit bundle plate can be dismantled and replace from support.
The structure of test component 3 comprises edge of a knife assembly and base.Edge of a knife assembly, according to standard IEC 62220-1 design, is comprised of W sheet and Pb plate, W chip size 100mm*75mm*1mm wherein, and purity is higher than 99%, Pb board size 200mm*100mm*3mm, and purity is higher than 99%.Base is position, angle platform, and angle of regulation range is from-10 ° to 10 °, and edge of a knife assembly is fixed on base.
Box body 4 structures are L-type, are about 300mm, wide about 300mm, height 150mm.The front end plane of incidence adopts the Al sheet of 150mm*150mm*1mm, and supporting walls adopts the Al plate that thickness is 2mm, and the plane of incidence and supporting walls inside surface are after treatment for being black.The outside, rear end is electrooptical device 8 interfaces, and interface type is the M77 inclined-plane; Rear inside is adjustable type lens group 7 interfaces, and interface type is the F bayonet socket.
The structure of scintillation screen specimen holder 5 comprises scintillation screen, base and back up pad.Base moves and fixes in the coaxial cable direction along slide rail, and base and box body 4 bottom surfaces indicate scale, mobile range 70mm.Back up pad is fixed on base, and scintillation screen adds and holds fixingly by the copper intermediate plate on back up pad, and back up pad adopts the Al sheet of size 120mm*120mm*1mm, and scintillation screen is positioned at the back up pad center, and maximum area can reach 110mm*110mm.
The structure of catoptron 6 comprises minute surface and support, the quartz plate that minute surface substrate preferred dimension is 110mm*180mm*5mm, and front surface plated film and reflectivity are higher than 96%.Minute surface is fixed by support and perpendicular to box body 4 bottom surfaces, and support can be regulated in the center of center that the anglec of rotation makes scintillation screen specimen holder 5, adjustable type lens group 7 and electrooptical device 8 after 6 reflections of the heart channel of Hang-Shaoyin catoptron in coaxial state along the direction of vertical box body 4 bottom surfaces.
The equivalent focal length of adjustable type lens group 7 is 60mm, is with graduated focusing ring, mobile adjustable lens combination position vertically, and moving range is 30mm, maximum amplification times yield is 1.
The sensitive chip of electrooptical device 8 is the CCD chip, the KAF16803 that model is Kodak company.Connect sensing circuit and semiconductor chilling plate after the CCD chip, the sensing circuit output terminal is USB interface, and the maximum refrigeration temperature difference of semiconductor chilling plate is 45 ℃.
X-ray source 9 comprises X ray ray machine and added filter.The FXE225.99 ray machine that the X ray ray machine is Comet-Finfocus company, target material is tungsten, operating voltage 10 ~ 225kV, working current 0.02 ~ 30mA, the Electron Beam Focusing diameter is less than 5um@<5W.Added filter is according to the parameter designing in standard IEC 62220-1, and the filter disc material is aluminium, purity 99.99%, and area 60mm*60mm, thickness comprises tetra-kinds of 10mm, 21mm, 30mm and 40mm.
In addition, said apparatus also can comprise data acquisition unit and data analysis unit.
Data acquisition unit is installed in computing machine, by the usb data line, connects electrooptical device 8 and controls its acquisition parameter, gathers simultaneously and store the image that electrooptical device 8 generates.Above-mentioned acquisition parameter comprises the parameters such as biasing, gain, time shutter, pixel merging patterns, repeated acquisition amount and cryogenic temperature, wherein the bias-adjusted scope is 0 to 255, the gain-adjusted scope is 0 to 63, the time shutter range of adjustment is 0 to 30min, minimum interval 1ms, the pixel merging patterns comprise tetra-kinds of 1*1,2*2,3*3 and 4*4, and cryogenic temperature range of adjustment-50 are ℃ to 30 ℃.
Data analysis unit is carried out the image processing to flat field image and the knife-edge image of scintillation screen output.The image treatment scheme of flat field image comprises multi-frame mean and details in a play not acted out on stage, but told through dialogues correction, and the luminous intensity that obtains imaging system distributes; The image treatment scheme of knife-edge image comprises multi-frame mean, details in a play not acted out on stage, but told through dialogues correction, flat field correction and edge extracting, the line spread function obtained obtains the modulation transfer function of imaging system after numerical analysis, and the numerical analysis flow process comprises Fourier transform, normalization and slope correction etc.
Store the preset calibrating parameters of adjustable type lens group 7 and electrooptical device 8 in this data analysis unit, preset calibrating parameters comprises that the imaging amplification ratio is respectively 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9 and the position of 1.0 o'clock adjustable type lens groups 7, the modulation transfer function of the position of scintillation screen specimen holder 5 and adjustable type lens group 7 coupling light power conversion devices 8, roomage response and intensity response etc., and coupling system arranges corresponding calibrating parameters and carries out correction calculation, draw the modulation transfer function of scintillation screen, non-uniform light and luminous intensity parameter.
The specific works process of above-mentioned performance testing device is:
At first, open box body 4 upside cappings, with the copper intermediate plate, scintillation screen is fixed in to the back up pad center of scintillation screen specimen holder 5, being chosen to as amplification ratio is 0.3, and preset calibrating parameters is regulated the position of adjustable type lens group 7 and the position of scintillation screen specimen holder 5 according to data analysis unit, consider that the thickness of scintillation screen suitably adjusts the position of scintillation screen specimen holder 5 simultaneously.
Closed box 4 upside cappings also guarantee that box body 4 is without light leak, and the position of adjusting platform 1 is positioned at X ray line center vertical with beam direction with the plane of incidence that highly makes box body 4.The limit bundle plate of beam-defining clipper 2 is selected the perforate specification of 100mm*100mm.Regulate the base of test component 3, make the knife-edge of edge of a knife assembly become 2 ° with the vertical direction angle.The RQA5 stipulated in ray quality choice criteria IEC62220-1, the added filter that is 21mm by thickness is installed on x-ray source 9, and it is 7.1mm that the voltage (about 70kV) of adjusting X ray ray machine makes the half value thickness through the X ray of filter disc.
Then, connection data line and power supply, arrange acquisition parameter by data acquisition unit, regulates biasing and make background numerical value remain on 500 to 1000, and gain is set to 0, and the pixel merging patterns are made as 1*1, and the repeated acquisition amount is set to 100.Gather successively darkfield image, flat field image and knife-edge image, be set to 0s for its time shutter of darkfield image, for 60% to 80% of its time shutter selection saturation value of flat field image, identical with flat field image for its time shutter setting of knife-edge image.Test component 3 shifted out to line and keep arranging of all the other devices constant when gathering flat field image, when gathering the knife-edge image, test component 3 being put back to original position, in all exposure process, the parameter of X-radiation field remains unchanged.
After gathering darkfield image, flat field image and knife-edge image, the image that electrooptical device 8 is generated is done image and is processed, and the flow process that image is processed comprises multi-frame mean, details in a play not acted out on stage, but told through dialogues correction, flat field correction and edge extracting.
Specifically, multi-frame mean, by the image superposed average of repeated acquisition under the same terms, obtains respectively the mean value of darkfield image, flat field image and knife-edge image; Details in a play not acted out on stage, but told through dialogues is proofreaied and correct and to be usingd the mean value of darkfield image as background, obtains respectively the details in a play not acted out on stage, but told through dialogues corrected value of flat field image and knife-edge image after deduction; Flat field correction is usingd the details in a play not acted out on stage, but told through dialogues corrected value of flat field image as the unevenness Distribution Value, obtains the flat field correction value of knife-edge image after deduction; Edge extracting is done edge identification to the flat field correction value of edge of a knife edge image, obtains edge response function and the edge slope of one dimension, and edge response function obtains line spread function through difference processing.
This line spread function obtains the modulation transfer function of system after numerical analysis, the numerical analysis flow process comprises Fourier transform, normalization and slope correction, and the imaging system modulation transfer function that measures and preset modulation transfer function are divided by and just can obtain the modulation transfer function of scintillation screen; Distribution of light intensity Distribution Value using the details in a play not acted out on stage, but told through dialogues corrected value of flat field image as the CCD surface, and can obtain non-uniform light and the luminous intensity parameter of scintillation screen in conjunction with preset roomage response and intensity response.
In sum, the embodiment of the present invention can be adjusted flexibly between the image-forming condition of different detection areas and picture element density, measure the parameters such as modulation transfer function, non-uniform light and luminous intensity of scintillation screen simultaneously, the scintillation screens different to imaging characteristic all can reach higher measuring accuracy, have advantages of that measuring accuracy is high, applied widely, flexible and convenient to use and with low cost.
The above; be only the present invention's embodiment preferably, but protection scope of the present invention is not limited to this, anyly is familiar with in technical scope that those skilled in the art disclose in the present invention; the variation that can expect easily or replacement, within all should being encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.