CN102902857A - Monte Carlo analysis method and system for optical element support parameters - Google Patents
Monte Carlo analysis method and system for optical element support parameters Download PDFInfo
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Abstract
The invention discloses a method for determining optical element support parameters. The method comprises determining the number of the least support points capable of ensuring the surface shape accuracy as the optimum number, and calculating the ideal supporting force of the support points; defining the fluctuation levels of different supporting forces according to the ideal supporting force, calculating the surface shape change of a lens caused by a random supporting force under the different supporting force levels; finding and examining the random distribution rule of the surface shape distortion of the lens, and constructing the mapping relationship between different supporting force levels and the imaging quality of the optical element; and determining the fluctuation range of the supporting force according to the quality control specification. Based on the Monte Carlo method, the random distribution rule of surface shape distortion of the lens under action of a nonuniform supporting force can be analyzed so as to analyze the influence of different random supporting force levels on the imaging quality of the optical element, thereby determining a reasonable supporting force fluctuation range, and providing effective reference data for design, installation and debugging of an optical element support system.
Description
Technical field
The present invention relates to the design of optical element support system and debug the field, be specifically related to a kind of optical element flexible support determination method for parameter and system, be applicable to optical mirror slip support system design that heavy caliber, high resolving power, multi-point flexibly support and debug, tolerance and technological design, image quality analysis, optical system imaging quality analysis and the anchorage force level that can be applied to all the other type random loads are definite.
Background technology
In order to improve resolution, astronomical telescope, space telescope and electro-optical tracking device etc. all need large-aperture optical saturating (instead) to penetrate eyeglass.In order to satisfy the high-precision surface shape requirement of optical mirror slip, usually adopt the multi-point flexibly supporting way to reduce the face deformation under the eyeglass deadweight, the design of support system has become the key content of heavy caliber, optical system for high resolution design.Eyeglass multi-point support structure will be brought redundant constraint to eyeglass, and its high-order face deformation need to adopt Ze Nike (Zernike) polynomial expression to approach.Actual debuging in the process, because the personnel of debuging debug the factor affecting such as precision, the each point anchorage force presents larger unevenness usually, this has become the principal element that affects the optical component surface shape precision.Therefore, inhomogeneous anchorage force is considered as obeying the random load that the personnel of debuging debug power stochastic distribution rule, analyze different random anchorage force level to the impact of optical system imaging quality, thereby determine rational anchorage force variation range, for the design of optical system flexible support structure with debug, tolerance design and image quality analysis have important theory and using value.
At present optical design adopts monte carlo method to carry out size and the position of related features design of optical element usually, mostly eyeglass is considered as rigid body, do not consider in the practical set high-order face deformation of eyeglass under the at random anchorage force effect, can not be used for instructing the determining of anchorage force variation range of flexible support structure.
Summary of the invention
The object of the present invention is to provide a kind of analysis and definite method of optical element support parameters, the present invention considers the stochastic distribution rule of eyeglass face deformation under the inhomogeneous anchorage force effect, analyze different random anchorage force level to the impact of optical element image quality, thereby determine rational anchorage force fluctuation range, for the design of optical element support system with debug effective reference data is provided.
Another object of the present invention also is to provide a kind of system that realizes said method.
A kind of definite method of optical element support parameters is specially:
Step 1 is set up the finite element model of optical element, calculate and support the deformation induced by gravity result who counts and increase progressively lower optical element, analyze the variation tendency that the optical element surface distortion is counted and increased with support, determine to guarantee according to this variation tendency that the minimum support of surface figure accuracy is counted and support the n that counts for optimum, calculate desirable anchorage force F=mg/n, m is the quality of element, and g is acceleration of gravity, and the optimum flexible support that comprises among the n that counts that supports is counted and is designated as n ';
Step 2 generates in the following manner N and organizes at random anchorage force: pre-determine the Statistical Distribution that optical element is debug power based on M different anchorage force fluctuating level f of desirable anchorage force F definition under each anchorage force fluctuating level f; Under anchorage force fluctuating level f, generate to obey the individual random load of n ' of debuging the power Statistical Distribution, the individual random load of this n ' consists of under the anchorage force fluctuating level f one group at random anchorage force; The N that so repeats to generate under the anchorage force fluctuating level f organizes at random anchorage force;
The finite element model that step 3 is set up based on step 1, the N of calculating under each anchorage force fluctuating level f organizes the surface deformation result of optical element under the at random anchorage force effect;
The N that step 4 adopts the homogeneous coordinates method to remove under each anchorage force fluctuating level organizes the rigid body displacement that comprises among the surface deformation result, adopt again least square fitting to characterize the polynomial every coefficient of Zernike of its high-order distortion, thereby obtain N face shape parameter under each anchorage force fluctuating level;
The stochastic distribution rule of N face shape parameter under each anchorage force fluctuating level is added up respectively and checked to step 5;
Step 6 is set up element based on the optical quality evaluation function of face shape parameter according to the image quality index request of optical element; Based on the stochastic distribution rule of the face shape parameter under each the anchorage force fluctuating level that obtains in the step 5, generate L group face shape parameter stochastic variable; The L group stochastic variable of calculating under each anchorage force fluctuating level satisfies the probability of optical quality evaluation function, thereby sets up the discrete point mapping relations of anchorage force fluctuating level and image quality index;
Step 7 in conjunction with the discrete point mapping relations of anchorage force fluctuating level and image quality index, adopts linear interpolation method to ask for the maximum support fluctuation level of permission, thereby determines the variation range of anchorage force according to quality control standard.
Described shape parameter is the combination in any of Zernike multinomial coefficient or face shape PV value or RMS value or above-mentioned three parameters.
A kind of optical element support parameters is determined system, comprising:
The support optimization module of counting, be used for setting up the finite element model of optical element, calculate and support the deformation induced by gravity result who counts and increase progressively lower optical element, analyze the variation tendency that the optical element surface distortion is counted and increased with support, minimum support according to the definite assurance of this variation tendency surface figure accuracy is counted as optimum supports the n that counts, and calculates desirable anchorage force F=mg/n, and m is the quality of element, g is acceleration of gravity, and the optimum flexible support that comprises among the n that counts that supports is counted and is designated as n ';
Anchorage force generation module is used for generating in the following manner N and organize at random anchorage force under each anchorage force fluctuating level f: pre-determine the Statistical Distribution that optical element is debug power based on M different anchorage force fluctuating level f of desirable anchorage force F definition at random; Under anchorage force fluctuating level f, generate to obey the individual random load of n ' of debuging the power Statistical Distribution, the individual random load of this n ' consists of under the anchorage force fluctuating level f one group at random anchorage force; The N that so repeats to generate anchorage force fluctuating level f organizes at random anchorage force;
Module is found the solution in distortion, optimizes the finite element model that module is set up for counting based on support, calculates the surface deformation result who organizes optical element under the at random anchorage force effect at the N under each anchorage force fluctuating level;
Zernike multinomial coefficient fitting module, be used for adopting the homogeneous coordinates method to remove the rigid body displacement that the N group surface deformation result under each anchorage force fluctuating level comprises, adopt again least square fitting to characterize the polynomial every coefficient of Zernike of its high-order distortion, thereby obtain N face shape parameter under each anchorage force fluctuating level;
Regularity of distribution statistical module is for the stochastic distribution rule of adding up and check respectively N face shape parameter under each anchorage force fluctuating level;
The evaluation of imaging quality module is used for the image quality index request according to optical element, sets up element based on the optical quality evaluation function of face shape parameter; Based on the stochastic distribution rule of the face shape parameter under each anchorage force fluctuating level of regularity of distribution statistical module acquisition, generate L group face shape parameter stochastic variable; The L group stochastic variable of calculating under each anchorage force fluctuating level satisfies the probability of optical quality evaluation function, thereby sets up the discrete point mapping relations of anchorage force fluctuating level and image quality index;
The support parameters computing module, be used for according to quality control standard, in conjunction with the discrete point mapping relations of anchorage force fluctuating level and image quality index, adopt linear interpolation method to ask for the maximum support fluctuation level of permission, thereby determine the variation range of anchorage force.
Technique effect of the present invention is embodied in:
The present invention adopts monte carlo method, the inhomogeneous anchorage force of flexible support structure is considered as at random anchorage force, the stochastic distribution rule of the eyeglass face deformation that analysis different random anchorage force level causes, set up the mapping relations of different anchorage force levels and optical element image quality, and then determine the at random fluctuation range of anchorage force according to quality control standard (such as 3 σ criterions, 6 σ criterions).The present invention utilizes finite element software to calculate eyeglass face deformation under the inhomogeneous anchorage force effect, with the Zernike polynomial expression as the integrated data transformation interface of ray machine, can reduce the experimental work amount of optical mirror slip image quality under the at random anchorage force effect, can direct basis anchorage force statistical property the image quality of prediction optical element; Compare common employing monte carlo method and carry out the Folerances of Optical Elements design, maximum feature of the present invention is to carry out the optical element evaluation of imaging quality for the high-order face deformation that eyeglass bears inhomogeneous anchorage force, can determine the anchorage force parameter of optical element by adopting simulation calculation and Stochastic Analysis Method.
Description of drawings
Fig. 1 is the inventive method overall flow figure.
Fig. 2 is for realizing the system construction drawing of the inventive method.
Fig. 3 is physical dimension and the support profile of embodiment lens, and wherein, Fig. 3 a is the physical dimension figure of lens, and Fig. 3 b is the support distribution synoptic diagram.
Fig. 4 is the limited element calculation model figure of embodiment lens.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
Fig. 1 is the inventive method process flow diagram, and the below is supported for example explanation embodiment with the end of optical element:
1, for geometric model Fig. 3 a of optical element, set up its limited element calculation model in finite element software, calculating is supported to count and is increased progressively the face deformation result that lower element deadweight causes; Obtain the variation tendency that the element surface maximum distortion is counted and increased with support, the optimum that the minimum support of determining to satisfy the surface figure accuracy requirement is counted as support system supports the n that counts; The strong point of general optical elements of large caliber comprises fixed support point and flexible support point, and flexible support point adopts flexible support structure, such as spring leaf, flexible hinge etc.Calculate the mean gravity that each strong point bears under the perfect condition, this is the desirable anchorage force F=mg/n that supporting construction need provide, and m is the quality of element, and g is acceleration of gravity.
2, according to the ergonomics statistical method, determine that it debug the Statistical Distribution of power when the optical element personnel of debuging assembled, and M different anchorage force fluctuating levels of definition.Adopt the MATLAB program to organize at random anchorage force at generation N under each anchorage force fluctuating level in the following manner: under anchorage force fluctuating level f, generate the individual random load of n ' of obeying given Statistical Distribution, be used for the inhomogeneous axial support power that the simulated optical element bears, n ' counts for flexible support, and the individual random load of n ' of this anchorage force fluctuating level f consists of one group of at random anchorage force; The N that so repeats to generate anchorage force fluctuating level f organizes at random anchorage force, and symbiosis becomes M * N to organize at random anchorage force.
3, batch processing loading and the calculation procedure of establishment finite element software calculate the surface deformation result that M * N organizes element under the at random anchorage force effect.The N that next will add up respectively same anchorage force fluctuating level organizes the stochastic distribution rule of component side deformation under the at random anchorage force effect.
4, adopt the homogeneous coordinates method to remove the rigid body displacement that comprises among the surface deformation result, and the distortion of the high-order on surface adopts the Zernike polynomial expression to approach, realize the conversion of different pieces of information form in the integrated optomechanical analysis, thereby obtain N face shape parameter under each anchorage force fluctuating level.The concrete selection of face shape parameter is relevant with the imaging index request, and the face shape parameter can be Zernike multinomial coefficient or face shape PV value or RMS value.
5, establishment stochastic distribution fit procedure adopts common stochastic distribution type to add up and check the stochastic distribution rule of N face shape parameter under the same anchorage force fluctuating level, i.e. stochastic distribution type and parameter thereof.This is committed step of the present invention, and the stochastic distribution rule of face shape parameter is that important foundation has been established in the subsequent element evaluation of imaging quality.
6, according to the image quality index of optical element, set up element based on the evaluation of imaging quality function of face shape parameter; According to stochastic distribution type and the coefficient of the face shape parameter that obtains in the step 5, and generation L group random number (L＞N); Calculate the probability that L group random number satisfies the evaluation of imaging quality function by simulation analysis, so just set up the mapping relations of different random anchorage force level and optical element image quality.
7, according to quality control standard, for example 3 σ criterions are that the probability that the interior optical element of 3 σ scopes satisfies the image quality index request is 99.73%, the counter at random limit range of anchorage force permission of asking.Because anchorage force level and the image quality set up in the step 6 are the discrete point mapping relations, adopt linear interpolation method to ask for the at random fluctuating level of anchorage force, thereby determine the extreme variations scope of anchorage force.
The below provides an embodiment.
The optical lens geometric model is shown in Fig. 3 a, and eyeglass operation wavelength λ is 193nm, and material is fused quartz, elastic modulus 7e10Pa, and Poisson ratio 0.17, density are 2200kg/m
3, the lens gross mass is 2.506kg.The scheme that bottom support adopts 3 fixed supports and multi-point flexibly to support, along circumferentially being evenly arranged, wherein 3 fixed support points are the equilateral triangle distribution, shown in Fig. 3 b.Eyeglass supports counts take 3 for radix increases progressively, and maximum support is counted, and to differ less than λ/100 be basis for estimation to former and later two face deformations of increase PV value; The face deformation PV value that image quality requires the anchorage force unevenness to cause is no more than λ/100.At this moment, lens shape PV value below the effect of desirable anchorage force F is 14.243nm, then requiring face shape PV value that inhomogeneous anchorage force causes according to 3 σ quality control standards is 99.73% less than the probability of 16.173nm, and namely face shape PV value only is 0.27% greater than the probability of 16.173nm.Now carry out the Monte Carlo of this lens bottom supporting scheme and analyze, the maximum support of determining these lens is counted and the maximum allowable fluctuation range of flexible support power.In conjunction with Fig. 2, this example implementation step is as follows:
(1) set up the finite element model of eyeglass, flexible support is counted and is increased progressively take 3 as radix.Fixed support place, 3 place at finite element model imposes restriction, and the flexible support position applies desirable anchorage force, and desirable anchorage force size equals the eyeglass deadweight and counts divided by total support.The optimization module of counting is supported in operation, and obtaining that its maximum support counts is 24 points, and wherein 21 is flexible support, and desirable anchorage force is 1.023N;
(2) according to ergonomics Statistics and method, know when the optical mirror slip personnel that debug adjust 21 flexible support points that the size of anchorage force is obeyed evenly and distributed.Now set respectively five kinds of anchorage force levels that the personnel of debuging debug power, namely the anchorage force that applies of flexible support point 21 desirable anchorage force ± 10%, ± 15%, ± 20%, ± 25% and ± 30% scope in fluctuate.Adopt at random anchorage force generation module, generate under each anchorage force fluctuating level each 100 groups at random anchorage forces;
(3) finite element model of respectively each being organized anchorage force at random and lenses imports the eyeglass distortion and finds the solution module, calculates the eyeglass distortion result of eyeglass under this group anchorage force effect.Finite element loading calculation model as shown in Figure 4.
(4) eyeglass is distorted result imports Zernike multinomial coefficient fitting module, adopts 36 Fringe Zernike polynomial expressions to characterize eyeglass face shapes, asks for the face shape parameter of optical element.In this example, the face shape parameter mainly considers to reflect the face shape PV value of wave front aberration;
(5) add up respectively and check the stochastic distribution rule of N face shape parameter under each anchorage force fluctuating level;
Adopt regularity of distribution statistical module that the random character of 100 PV values under each anchorage force level is added up and test of hypothesis.Analysis result shows, the PV value under every kind of anchorage force level and the every coefficient of Zernike be Normal Distribution preferably.Parameters of Normal Distribution such as the table 1 of the PV value under five kinds of anchorage force levels, Parameters of Normal Distribution such as the table 2 of Zernike polynomial expression low order coefficient;
Table 1
Table 2
(6) with the Parameters of Normal Distribution of the face shape PV value under five kinds of anchorage force levels, and the polynomial every coefficient of Zernike imports the evaluation of imaging quality module, according to the corresponding evaluation of imaging quality function of optical element image quality index definition.Obtain by simulation calculation that lens imaging quality satisfies eyeglass face shape PV value greater than the probability of 16.173nm under the different anchorage force levels, the probability that namely ± 10% the PV value surpasses 16.173nm under the level is 0%, probability under ± 15% level is 0%, the probability of ± 20% level is 3%, probability under ± 25% level is that the probability under 14%, ± 30% level is 24%.
(7) according to 3 σ criterions of optical system quality control standard, be that the maximum probability that the PV value surpasses 16.173nm is 0.27%, five anchorage force levels that obtain in the integrating step (6) and the corresponding relation of image quality, adopt the variation range of the definite at random anchorage force permission of linear interpolation method to be about ± 15.16%, be that the anchorage force of optics when debuging the personnel adjustment eyeglass allows fluctuation between [0.868N, 1.178N].
(8) system diagram formed according to the present invention, system be input as the example lens geometric parameter, physical parameter, Monte Carlo simulation parameter, debug the power regularity of distribution, anchorage force fluctuating level, image quality index, quality control standard etc., the maximum support that system is output as the example lens is counted and the permission variation range of anchorage force.It is 24 points that the maximum support of example lens is counted, and wherein to count be 21 points to flexible support, and the variation range that flexible support power allows is [0.868N, 1.178N].
Claims (3)
1. definite method of an optical element support parameters is specially:
Step 1 is set up the finite element model of optical element, calculate and support the deformation induced by gravity result who counts and increase progressively lower optical element, analyze the variation tendency that the optical element surface distortion is counted and increased with support, determine to guarantee according to this variation tendency that the minimum support of surface figure accuracy is counted and support the n that counts for optimum, calculate desirable anchorage force F=mg/n, m is the quality of element, and g is acceleration of gravity, and the optimum flexible support that comprises among the n that counts that supports is counted and is designated as n ';
Step 2 generates in the following manner N and organizes at random anchorage force: pre-determine the Statistical Distribution that optical element is debug power based on M different anchorage force fluctuating level f of desirable anchorage force F definition under each anchorage force fluctuating level f; Under anchorage force fluctuating level f, generate to obey the individual random load of n ' of debuging the power Statistical Distribution, the individual random load of this n ' consists of under the anchorage force fluctuating level f one group at random anchorage force; The N that so repeats to generate under the anchorage force fluctuating level f organizes at random anchorage force;
The finite element model that step 3 is set up based on step 1, the N of calculating under each anchorage force fluctuating level f organizes the surface deformation result of optical element under the at random anchorage force effect;
The N that step 4 adopts the homogeneous coordinates method to remove under each anchorage force fluctuating level organizes the rigid body displacement that comprises among the surface deformation result, adopt again least square fitting to characterize the polynomial every coefficient of Zernike of its high-order distortion, thereby obtain N face shape parameter under each anchorage force fluctuating level;
The stochastic distribution rule of N face shape parameter under each anchorage force fluctuating level is added up respectively and checked to step 5;
Step 6 is set up element based on the optical quality evaluation function of face shape parameter according to the image quality index request of optical element; Based on the stochastic distribution rule of the face shape parameter under each the anchorage force fluctuating level that obtains in the step 5, generate L group face shape parameter stochastic variable; The L group stochastic variable of calculating under each anchorage force fluctuating level satisfies the probability of optical quality evaluation function, thereby sets up the discrete point mapping relations of anchorage force fluctuating level and image quality index;
Step 7 in conjunction with the discrete point mapping relations of anchorage force fluctuating level and image quality index, adopts linear interpolation method to ask for the maximum support fluctuation level of permission, thereby determines the variation range of anchorage force according to quality control standard.
2. definite method of optical element support parameters according to claim 1 is characterized in that, described shape parameter is the combination in any of Zernike multinomial coefficient or face shape PV value or RMS value or above-mentioned three parameters.
3. an optical element support parameters is determined system, comprising:
The support optimization module of counting, be used for setting up the finite element model of optical element, calculate and support the deformation induced by gravity result who counts and increase progressively lower optical element, analyze the variation tendency that the optical element surface distortion is counted and increased with support, minimum support according to the definite assurance of this variation tendency surface figure accuracy is counted as optimum supports the n that counts, and calculates desirable anchorage force F=mg/n, and m is the quality of element, g is acceleration of gravity, and the optimum flexible support that comprises among the n that counts that supports is counted and is designated as n ';
Anchorage force generation module is used for generating in the following manner N and organize at random anchorage force under each anchorage force fluctuating level f: pre-determine the Statistical Distribution that optical element is debug power based on M different anchorage force fluctuating level f of desirable anchorage force F definition at random; Under anchorage force fluctuating level f, generate to obey the individual random load of n ' of debuging the power Statistical Distribution, the individual random load of this n ' consists of under the anchorage force fluctuating level f one group at random anchorage force; The N that so repeats to generate anchorage force fluctuating level f organizes at random anchorage force;
Module is found the solution in distortion, optimizes the finite element model that module is set up for counting based on support, calculates the surface deformation result who organizes optical element under the at random anchorage force effect at the N under each anchorage force fluctuating level;
Zernike multinomial coefficient fitting module, be used for adopting the homogeneous coordinates method to remove the rigid body displacement that the N group surface deformation result under each anchorage force fluctuating level comprises, adopt again least square fitting to characterize the polynomial every coefficient of Zernike of its high-order distortion, thereby obtain N face shape parameter under each anchorage force fluctuating level;
Regularity of distribution statistical module is for the stochastic distribution rule of adding up and check respectively N face shape parameter under each anchorage force fluctuating level;
The evaluation of imaging quality module is used for the image quality index request according to optical element, sets up element based on the optical quality evaluation function of face shape parameter; Based on the stochastic distribution rule of the face shape parameter under each anchorage force fluctuating level of regularity of distribution statistical module acquisition, generate L group face shape parameter stochastic variable; The L group stochastic variable of calculating under each anchorage force fluctuating level satisfies the probability of optical quality evaluation function, thereby sets up the discrete point mapping relations of anchorage force fluctuating level and image quality index;
The support parameters computing module, be used for according to quality control standard, in conjunction with the discrete point mapping relations of anchorage force fluctuating level and image quality index, adopt linear interpolation method to ask for the maximum support fluctuation level of permission, thereby determine the variation range of anchorage force.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104036071A (en) * | 2014-05-21 | 2014-09-10 | 中国科学院西安光学精密机械研究所 | Computer-assisted wide-dynamic-range adjustment method for optical system |
| CN109839086A (en) * | 2017-11-27 | 2019-06-04 | 长光华大基因测序设备（长春）有限公司 | A kind of method and device of distorting lens rigid body displacement error measure |
| CN109917504A (en) * | 2019-03-29 | 2019-06-21 | 华中科技大学 | A kind of the Zero-order diffractive grating and its manufacturing method of light-induced variable polychrome |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101504685A (en) * | 2009-03-03 | 2009-08-12 | 中国科学院光电技术研究所 | Bare engine thermal integration analysis method based on Fringe Zernike polynomial |
| CN102620917A (en) * | 2012-04-11 | 2012-08-01 | 长春理工大学 | Photoinduced thermal deformation image quality analyzing method of transmission-type optical element |
-
2012
- 2012-10-08 CN CN201210378060.8A patent/CN102902857B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101504685A (en) * | 2009-03-03 | 2009-08-12 | 中国科学院光电技术研究所 | Bare engine thermal integration analysis method based on Fringe Zernike polynomial |
| CN102620917A (en) * | 2012-04-11 | 2012-08-01 | 长春理工大学 | Photoinduced thermal deformation image quality analyzing method of transmission-type optical element |
Non-Patent Citations (4)
| Title |
|---|
| MICHAEL VERVAEKE，ET AL。: "Optomechanical Monte Carlo Tolerancing Study of a Packaged Free-Space Intra-MCM Optical Interconnect System", 《IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS》 * |
| T.Y. LIN: "A novel opto-mechanical tolerance analysis method for precision lens systems", 《PRECISION ENGINEERING》 * |
| 李贤辉: "光机集成有限元分析光学面形后处理研究与实现", 《中国优秀博硕士学位论文全文数据库(硕士)工程科技II辑》 * |
| 王平，等。: "旋转支撑法去除元件面形测量的夹持误差", 《光学学报》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104036071A (en) * | 2014-05-21 | 2014-09-10 | 中国科学院西安光学精密机械研究所 | Computer-assisted wide-dynamic-range adjustment method for optical system |
| CN104036071B (en) * | 2014-05-21 | 2017-02-15 | 中国科学院西安光学精密机械研究所 | Computer-assisted wide-dynamic-range adjustment method for optical system |
| CN109839086A (en) * | 2017-11-27 | 2019-06-04 | 长光华大基因测序设备（长春）有限公司 | A kind of method and device of distorting lens rigid body displacement error measure |
| CN109839086B (en) * | 2017-11-27 | 2021-01-15 | 长春长光华大智造测序设备有限公司 | Method and device for measuring rigid displacement error of deformable mirror |
| CN109917504A (en) * | 2019-03-29 | 2019-06-21 | 华中科技大学 | A kind of the Zero-order diffractive grating and its manufacturing method of light-induced variable polychrome |
| CN109917504B (en) * | 2019-03-29 | 2021-07-02 | 华中科技大学 | Photochromic multicolor zero-order diffraction grating and manufacturing method thereof |
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