CN102869185B - Cavity exercising method of high-current compact type editcyclotron - Google Patents
Cavity exercising method of high-current compact type editcyclotron Download PDFInfo
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- CN102869185B CN102869185B CN201210336337.0A CN201210336337A CN102869185B CN 102869185 B CN102869185 B CN 102869185B CN 201210336337 A CN201210336337 A CN 201210336337A CN 102869185 B CN102869185 B CN 102869185B
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Abstract
The invention relates to a radio-frequency cavity exercising method of a high-current compact type editcyclotron. The method is mainly characterized in that a cavity is primarily exercised through long-cycle narrow pulses, and the range of a multi-electron multiplication effect generated voltage is judged; according to color changes of the surface of a radio-frequency cavity, a magnetic pole face or a panel of the editcyclotron in the process, a graphite material is brushed at corresponding positions so as to reduce the secondary electron emission coefficient of the region; afterwards, by means of closing a magnetic field of the editcyclotron, all multi-electron effect regions are exercised from low to high in sequence by using a continuous power increase method, when all the multi-electron effect regions are passed, power feed is tuned and maintained for a period of time to accelerate gas outlet on a surface, then, push power is reduced at fixed time interval, and all the multi-electron effect regions are exercised from high to low; and after the processes are repeated ten times, the power supply of the magnetic field is switched on, and the exercise of the radio-frequency cavity can be completed rapidly by using the same method.
Description
Technical field
The present invention relates to a kind of technology effectively overcoming polyelectron multiplier effect in compact cyclotron, be specifically related to a kind of high current compact cyclotron cavity exercise method.
Background technology
Under vacuum environment, particularly vacuum degree is better than 5 × 10
-5during mbar, a small amount of radio-frequency power secondary electron yield higher than 1 metal geometric jacquard patterning unit surface be just enough to produce with frequency, power and back and forth shake apart from relevant electron cloud, this phenomenon is called polyelectron multiplier effect, has fatal impact to the normal work of accelerator or space flight radio-frequency devices.Its reason is, first this electron cloud is a kind of nonlinear load, can affect the coupling of radio system; If the energy of secondly electronics bombardment is not limited, change and the inefficacy of surfacing can be caused, even damage the critical component as accelerator RF ceramic coupling window.Especially, in compact cyclotron, because space is little, material category is complicated, in the impact of the fringing field that especially radio frequency cavity electrode is in magnet peak, paddy district has a common boundary, these factors objectively exacerbate the complexity of the type accelerator polyelectron multiplier effect.At present popular is in the world the method that pulse is taken exercise, and namely adopt the repetition period short, the pulse of duty ratio about 10% performs physical exercise, and coefficient of safety is higher comparatively speaking, and shortcoming is very consuming time, to such an extent as to is difficult to obtain practical in compact cyclotron.
Summary of the invention
The object of the invention is the defect for traditional pulse exercising way, a kind of simple, quick, safe compact cyclotron cavity exercise method is provided.
Technical scheme of the present invention is as follows: a kind of high current compact cyclotron cavity exercise method, comprises the steps:
(1) under the condition having magnetic field, vacuum, the long burst pulse that, duty ratio long by the repetition period is low carries out the demarcation of cavity voltage to the polyelectron multiplier effect region existed, and the polyelectron cloud utilizing interval to occur bombards the vestige stayed at accelerator internal electron, identify the metal surface that corresponding polyelectron multiplier effect occurs;
(2) under the condition of stopping magnetic field, vacuum, water-soluble graphite paint is brushed to the cavity metal surface that polyelectron multiplier effect occurs;
(3) there being vacuum, without under the condition in magnetic field, radio frequency cavity adds continuous power and tentatively takes exercise, alleviate the inner metal surface produced because of the bombardment of polyelectron multiplier effect electron cloud of cyclotron and give vent to anger;
(4) under the condition having magnetic field, vacuum, radio frequency cavity adds continuous power and finally takes exercise, and to deposit enough carbon compounds in the metal surface of correspondence, overcomes the polyelectron multiplier effect of compact cyclotron inside.
Further, high current compact cyclotron cavity exercise method as above, in step (1), the long burst pulse that the described repetition period is long, duty ratio is low refers to that the repetition rate of driving pulse is in Hz magnitude, only has the pulse having radio-frequency power in the time of 0.1% in per repetition period.
Further, high current compact cyclotron cavity exercise method as above, in step (1), the foundation of the polyelectron multiplier effect region existed being carried out to the demarcation of cavity voltage is: when polyelectron multiplier effect occurs, cavity voltage does not meet relation
wherein, P is cavity driving power, and U is the effective value of cavity accelerating voltage, R
pfor cavity parallel impedance.
Further, high current compact cyclotron cavity exercise method as above, in step (2), described water-soluble graphite paint is the water-soluble graphite that use 95% spirit solvent dissolves, and brushing scope should cover variable color metal surface and thickness is 0.1 ~ 0.5mm.
Further, high current compact cyclotron cavity exercise method as above, in step (3), radio frequency cavity adds continuous power to carry out preliminary method of taking exercise and is: maintain that reflection power is less than or equal to radio frequency power source reflection limit value 2/3, the simultaneously FM modulation that be no faster than 0.1Hz of drive singal in addition centered by cavity resonant frequency, modulation depth is not less than 3 times of radio frequency resonant cavity bandwidth, and modulating function is SIN function or triangular wave function; After cavity sampling voltage is higher than the highest polyelectron multiplier effect voltage demarcated in step (1), stop FM modulation, and maintain cavity tuning at least 30 minutes, reduced pumping signal amplitude 0.1dB, until cavity Voltage Drop electron multiplication effect region at the most every 30 minutes subsequently; Such process at least repeats 10 times.
Further, high current compact cyclotron cavity exercise method as above, in step (4), radio frequency cavity adds continuous power to carry out final method of taking exercise and is: maintain that reflection power is less than or equal to radio frequency power source reflection limit value 2/3, the simultaneously FM modulation that be no faster than 0.1Hz of drive singal in addition centered by cavity resonant frequency, modulation depth is not less than 2 times of radio frequency resonant cavity bandwidth, and modulating function is SIN function or triangular wave function.After cavity sampling voltage is higher than the highest polyelectron multiplier effect voltage demarcated in step (1), stop FM modulation, and maintain cavity tuning at least 30 minutes, reduced pumping signal amplitude 0.1dB, until cavity Voltage Drop electron multiplication effect region at the most every 30 minutes subsequently; Such process at least repeats 10 times.
Beneficial effect of the present invention is as follows: the present invention is taken exercise by long, burst pulse, judges and records cavity sampling voltage corresponding to polyelectron multiplier effect; By without the continuous exercise under magnetic field condition, reach the object accelerating surface outgassing; Finally by the continuous exercise method had under magnetic field condition, overcome the polyelectron multiplier effect of compact cyclotron inside.Compared with prior art, continuous exercise method provided by the present invention can complete the exercise of cavity within the very short cycle, effectively overcomes the polyelectron multiplier effect in complex environment.
Accompanying drawing explanation
Fig. 1 is method schematic diagram of the present invention;
Fig. 2 is the method flow diagram of the specific embodiment of the invention;
Fig. 3 is certain high current compact convolution polyelectron multiplier effect and input power graph of a relation;
Fig. 4 be certain high current compact convolution cavity and center, panel relative position schematic diagram.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in detail.
As shown in Figure 1, high current compact cyclotron cavity exercise method provided by the present invention, comprises the steps:
(1) under the condition having magnetic field, vacuum, the long burst pulse that, duty ratio long by the repetition period is low carries out the demarcation of cavity voltage to the polyelectron multiplier effect region existed, and the polyelectron cloud utilizing interval to occur bombards the vestige stayed at accelerator internal electron, identify the metal surface that corresponding polyelectron multiplier effect occurs; The foundation that the demarcation of cavity voltage is carried out in the polyelectron multiplier effect region existed is: when polyelectron multiplier effect occurs, cavity voltage does not meet relation
wherein, P is cavity driving power, and U is the effective value of cavity accelerating voltage, R
pfor cavity parallel impedance, as shown in Figure 3;
(2) under the condition of stopping magnetic field, vacuum, water-soluble graphite paint is brushed to the cavity metal surface that polyelectron multiplier effect occurs;
(3) there being vacuum, without under the condition in magnetic field, radio frequency cavity adds continuous power and tentatively takes exercise, alleviate the inner metal surface produced because of the bombardment of polyelectron multiplier effect electron cloud of cyclotron and give vent to anger;
(4) under the condition having magnetic field, vacuum, radio frequency cavity adds continuous power and finally takes exercise, and to deposit enough carbon compounds in the metal surface of correspondence, overcomes the polyelectron multiplier effect of compact cyclotron inside.
The idiographic flow of said method as shown in Figure 2, is described in detail below in conjunction with Fig. 2.
First, the long burst pulse that, duty ratio long by the repetition period is low is demarcated the polyelectron multiplier effect region existed.The long repetition period refers to that the repetition rate of driving pulse is in Hz magnitude, i.e. a pulse or lower per second.Low duty ratio refers in per repetition period to only have in the time of 0.1% have radio-frequency power, and all the other times should turn off source driving signal.In this step, the driving power in pulsewidth should be not less than promotion power source to dummy load situation and be issued to 1/3 when full power exports.Long burst pulse effectively can prevent the lasting generation of polyelectron multiplier effect, gives vacuum system more pumpdown time simultaneously, is conducive to utilizing the quick rising characteristic of pulse front edge to increase sharply cavity energy storage, passes through the voltage that polyelectron multiplier effect occurs.When occurring conditioning signal source driving frequency, when respective chamber sampled signal meets cavity amplitude-frequency response, can carry out tuning, keeping driving signal frequency identical with cavity resonant frequency, recording frequency f now
0with cavity sampling amplitude V
0.Close pumping signal about 30 seconds afterwards, repeat this process, notice that record cavity is reaching V
0before repeated steady state voltage sequence, is recorded as V from small to large
1, V
2, V
3v
n, the corresponding many-electron effect region of each steady state voltage.Afterwards, 2 ~ 3 times can be repeated with the repeatability of inspection record data.
After indicating the voltage that each many-electron effect district is corresponding, should magnetic field be stopped, stopping vacuum, accelerator is uncapped, examine Dee box surface and magnetic pole surfaces, magnetic pole surfaces and panel surface color situation of change.For oxygen-free copper, should there is grey black vestige in electronics bombardment place; For pure iron, electronics pounds and should produce green or yellow green vestige.In compact accelerator, by peak valley intersection influence of magnetic field, the wall scroll width of such vestige is in the majority with 3 ~ 5mm, fine and close and have cyclic variation with from accelerating gap distance.Now, reply produces vestige and is coated with alcohol-soluble water-soluble graphite material, and coating should bombard region by overlay electronic completely, and thickness is no more than 0.5mm, and is not less than 0.1mm.After completing, should keep accelerator uncapped state 4 ~ 6 hours, after alcohol volatilizees completely, accelerator lid vacuumizes.Water-soluble graphite material in said process should the block or powdery of air-dry one-tenth in an atmosphere in advance, use after then dissolving with the spirit solvent of 95% before accelerator is uncapped.
Then, under the condition of high vacuum without magnetic field, radio frequency cavity adds continuous power.Require that maintaining reflection power is less than or equal to radio frequency power source reflection limit value P
r2/3, simultaneously drive singal should the FM modulation being no faster than 0.1Hz in addition centered by cavity resonant frequency, and modulation depth should be not less than 3 times of radio frequency resonant cavity bandwidth, and modulating function can be SIN function or triangular wave function.Now, the sampling amplitude of cavity there will be V
1, V
2, V
3v
nsuch sequence, when cavity sampling voltage is higher than V
nafter, FM should be stopped to modulate, and maintain cavity after tuning at least 30 minutes, reduce pumping signal amplitude 0.1dB, until cavity Voltage Drop is to V every 30 minutes
1, V
2, V
3v
nin scope.Afterwards, should stop driving about 30 seconds, recover excitation signal amplitude, and open frequency sweep function, again repeat such process.Such process, can alleviate rapidly the inner metal surface because of polyelectron multiplier effect electron cloud bombardment generation of cyclotron and give vent to anger, should at least repeat 10 times.
Finally, the continuous exercise method under magnetic field condition is being had finally to take exercise.This process entails maintenance reflection power is less than or equal to 2/3 of radio frequency power source reflection limit value, simultaneously drive singal should the FM modulation being no faster than 0.1Hz in addition centered by cavity resonant frequency, modulation depth should be not less than 2 times of radio frequency resonant cavity bandwidth, and modulating function can be SIN function or triangular wave function.When cavity sampling voltage is higher than V
nafter, FM should be stopped to modulate, and hold cavity after tuning at least 30 minutes, reduce pumping signal amplitude 0.1dB, until cavity Voltage Drop is to certain polyelectron multiplier effect region every 30 minutes.Such process should at least repeat 10 times, to deposit enough carbon compounds in the metal surface of correspondence, reaches exercise object.
Embodiment
For certain medical cyclotron, introduce its method power value and time distribution condition.This accelerator radio system comprises, and an Analysis of Nested Design accelerating voltage is 40kV radio frequency cavity, resonance frequency 72.9MHz, and design loss is 10kW, a 20kW radio frequency power source, and this power source reflection protection is 2kW.Dummy load test time-16dbm can be pushed into export about 2kW ,-10dbm export be about 8.5kW ,-8dbm can be pushed into and export about 15kW.
In the exercise routine of this cavity, first stage and about 1.5 weeks consuming time of pulse exercise period, frequency is 72.9MHz, and duty ratio is 0.1%, 1 second repetition period, and in pulse, signal source promotes power is-10dbm.Record many-electron effect region, the cavity for-46.8db samples, and the interval of nonlinear amplitude is 40 ~ 70mVpp, 120 ~ 200mVpp, 310 ~ 580mVpp, 1.2 ~ 1.6Vpp, pass through many-electron effect tuning after V
0be about 5.8Vpp.After uncapping, water-soluble graphite application area is outside Dee plate 1, and center magnetic pole surfaces 2 and panel surface 3, see Fig. 4.
Second stage is taken exercise without magnetic field, and signal source amplitude is-16dbm, and swept frequency range is centered by 72.88MHz, in 10 seconds cycles, the degree of depth is 60KHz, after passing through many-electron effect tuning good time, corresponding sample voltage is about 3.12Vpp, uses about 1 day time to complete 10 exercises of this stage.
Phase III has magnetic field to take exercise, and signal source amplitude is-16dbm, and swept frequency range is centered by 72.9MHz, in 10 seconds cycles, the degree of depth is 40KHz, after passing through many-electron effect tuning good time, corresponding sample voltage is about 3.14Vpp, uses about 2 day time to complete 10 exercises of this stage.
Above content is illustrating of doing the present invention in conjunction with preferred embodiment, and can not assert that the specific embodiment of the present invention is only limitted to these explanations.Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if belong within the scope of the claims in the present invention and equivalent technology thereof to these amendments of the present invention and modification, then the present invention is also intended to comprise these change and modification.
Claims (2)
1. a high current compact cyclotron cavity exercise method, comprises the steps:
(1) under the condition having magnetic field, vacuum, the long burst pulse that, duty ratio long by the repetition period is low carries out the demarcation of cavity voltage to the polyelectron multiplier effect region existed, and the polyelectron cloud utilizing interval to occur bombards the vestige stayed at accelerator internal electron, identify the metal surface that corresponding polyelectron multiplier effect occurs; The long burst pulse that the described repetition period is long, duty ratio is low refers to that the repetition rate of driving pulse is in Hz magnitude, only has the pulse having radio-frequency power in the time of 0.1% in per repetition period; The foundation of the polyelectron multiplier effect region existed being carried out to the demarcation of cavity voltage is: when polyelectron multiplier effect occurs, cavity voltage does not meet relation
wherein, P is cavity driving power, and U is the effective value of cavity accelerating voltage, R
pfor cavity parallel impedance;
(2) under the condition of stopping magnetic field, vacuum, water-soluble graphite paint is brushed to the cavity metal surface that polyelectron multiplier effect occurs;
(3) there being vacuum, without under the condition in magnetic field, radio frequency cavity adds continuous power and tentatively takes exercise, concrete grammar is: maintenance reflection power is less than or equal to 2/3 of radio frequency power source reflection limit value, the simultaneously FM modulation that be no faster than 0.1Hz of drive singal in addition centered by cavity resonant frequency, modulation depth is not less than 3 times of radio frequency resonant cavity bandwidth, and modulating function is SIN function or triangular wave function; After cavity sampling voltage is higher than the highest polyelectron multiplier effect voltage demarcated in step (1), stop FM modulation, and maintain cavity tuning at least 30 minutes, reduced pumping signal amplitude 0.1dB, until cavity Voltage Drop electron multiplication effect region at the most every 30 minutes subsequently; Such process at least repeats 10 times;
(4) under the condition having magnetic field, vacuum, radio frequency cavity adds continuous power and finally takes exercise, to deposit enough carbon compounds in the metal surface of correspondence, overcome the polyelectron multiplier effect of compact cyclotron inside, concrete grammar is: maintenance reflection power is less than or equal to 2/3 of radio frequency power source reflection limit value, the simultaneously FM modulation that be no faster than 0.1Hz of drive singal in addition centered by cavity resonant frequency, modulation depth is not less than 2 times of radio frequency resonant cavity bandwidth, and modulating function is SIN function or triangular wave function; After cavity sampling voltage is higher than the highest polyelectron multiplier effect voltage demarcated in step (1), stop FM modulation, and maintain cavity tuning at least 30 minutes, reduced pumping signal amplitude 0.1dB, until cavity Voltage Drop electron multiplication effect region at the most every 30 minutes subsequently; Such process at least repeats 10 times.
2. high current compact cyclotron cavity exercise method as claimed in claim 1, it is characterized in that: in step (2), described water-soluble graphite paint is the water-soluble graphite that use 95% spirit solvent dissolves, and brushing scope should cover variable color metal surface and thickness is 0.1 ~ 0.5mm.
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CN103179773B (en) * | 2013-02-07 | 2015-09-16 | 中国科学院上海应用物理研究所 | The automatic high pressure exercise method of high-pressure type accelerator and automatic high pressure exercise system |
CN106527218B (en) * | 2016-08-30 | 2019-05-03 | 中广核达胜加速器技术有限公司 | A kind of method of key control accelerator facility safe operation |
CN107863283A (en) * | 2016-09-22 | 2018-03-30 | 中国科学院大连化学物理研究所 | A kind of automatic ageing system and method for photocathode protection |
CN110392479B (en) * | 2019-07-31 | 2022-02-15 | 中广核达胜加速器技术有限公司 | Automatic energy exercise method and system for accelerator |
CN110536536B (en) * | 2019-09-03 | 2020-06-23 | 中国原子能科学研究院 | Restarting automatic exercise device for low-level system of cyclotron and control method |
CN110913560B (en) * | 2019-12-09 | 2024-05-31 | 中国原子能科学研究院 | Cavity exercise acceleration device and method of charged particle cyclotron and cyclotron |
CN111341518B (en) * | 2020-02-28 | 2021-11-09 | 合肥中科离子医学技术装备有限公司 | Aging exercise device for magnetic field environment |
CN116634649B (en) * | 2023-05-30 | 2024-01-26 | 迈胜医疗设备有限公司 | Accelerator cavity aging device and method, electronic equipment and related device |
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US6326861B1 (en) * | 1999-07-16 | 2001-12-04 | Feltech Corporation | Method for generating a train of fast electrical pulses and application to the acceleration of particles |
US6771684B2 (en) * | 2000-03-02 | 2004-08-03 | Alan E. Hill | Compact, flexible, rapid-pulsed, molecular gas laser |
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