CN102866596B - Micro-positioner of vertical decoupling gravity compensator provided with corrugated pipe - Google Patents
Micro-positioner of vertical decoupling gravity compensator provided with corrugated pipe Download PDFInfo
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- CN102866596B CN102866596B CN201210385289.4A CN201210385289A CN102866596B CN 102866596 B CN102866596 B CN 102866596B CN 201210385289 A CN201210385289 A CN 201210385289A CN 102866596 B CN102866596 B CN 102866596B
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Abstract
The invention provides a micro-positioner of a vertical decoupling gravity compensator provided with a corrugated pipe and belongs to the technical field of semiconductor manufacturing devices. The corrugated pipe is configured at the top of the gravity compensator to achieve vertical decoupling of the micro-positioner, support spring pieces formed by three identical flat springs are symmetrically configured at the top of a vertical voice coil motor active cell steel magnet relative to the axis, and a water-cooling annular cavity is arranged between a base and the vertical voice coil motor stator coil and is provided with a cooling water and compressed air temperature homogenizing device. The micro-positioner has the advantages of being simple in structure, easy to process, capable of releasing thermal expansion stress of a motor active cell, carrying away heat produced by a motor and restraining temperature rise, and simultaneously can homogenize the temperature of cooling water and the temperature of compressed air, eliminate the compressed air temperature rise caused by cable heat in parallel layout of air channels and cables, facilitate restraining of temperature fluctuation under the micro-positioner microenvironment and ensure external severe constant temperature environment.
Description
Technical field
The invention belongs to semiconductor manufacturing equipment technical field, relate generally to the micropositioner of the vertical decoupling zero gravity compensator of a kind of equipped corrugated tube.
Background technology
Litho machine is one of ultraprecise equipment important during great scale integrated circuit is manufactured.Litho machine resolution, alignment precision, productive rate are the large performance index of litho machine three that people pursue always, and photo-etching machine work-piece platform technology is as one of litho machine three large core technologies, most important for lifting litho machine These parameters.Workpiece table system is as the core component of litho machine, its main task is to realize at a high speed and the ultraprecise motion control of high acceleration, deceleration degree, possessing nanometer positioning precision at a high speed and under high acceleration condition, with coordinate in photoetching process upper slice, the processing and manufacturing operation such as prealignment, aligning, exposure and lower.
In order to solve work stage contradiction between long stroke and nanometer positioning precision under high-speed condition, there is grand micro-combination two-stage movement control technology.Generally, the long stroke micron order of grand moving realization location, fine motion realizes short stroke nanoscale location, and the two is in conjunction with the contradiction that can solve to a certain extent long stroke and ultraprecise location.Therefore, the current core component of realizing nanometer positioning precision in work stage is micropositioner.For realizing micropositioner six degree of freedom nanometer positioning precision, micropositioner environment of living in is very harsh, and environment microvibration and temperature fluctuation are the factors that must consider.Local temperature control technology and vibration isolation technique are the gordian techniquies that determines micropositioner performance.The form that micropositioner local temperature control generally adopts water-cooled and gas bath to combine at present, vibration isolation generally adopts air supporting or the floating gravity compensator of magnetic to realize.In addition, gravity compensator can reduce the heat dissipation of the vertical motor of micropositioner by the gravity of compensation micropositioner moving component, reduces the impact that micropositioner is subject to thermal expansion, goes back the task that gravity compensator is born the decoupling zero of micropositioner six degree of freedom simultaneously.Therefore, gravity compensator is the critical component of litho machine micropositioner.
The Holland ASML EP_973067_A2 of house journal and US_6337484_B1 have announced a kind of two kinds of versions of air supporting gravity compensator, all adopt annular long-range navigation thatch motor as vertical driver, by high pressure air cavity, realize gravity compensation, thrust air-bearing is realized horizontal decoupling zero.Two kinds of version differences of this device are that vertical rotation decoupling-structure is different, and one adopts spherical air-bearing bearing, and another adopts vertically disposed shaft flexible hinge.But spherical air-bearing bearing exists the problem that sphere processing grinding is difficult and detection is difficult, shaft flexible hinge problem is to exist stress to concentrate, and under micropositioner continuous working condition, reliability is not high.Similar and above-mentioned two patents of the disclosed gravity compensator basic structure of the EP_1160628_A2 of ASML house journal.Shanghai SMEE patent CN101082775 announced a kind of can vertically delicate adjusting and gravity-compensated device, this device can obtain accurate position control with inching locator meams, the mode that simultaneously adopts balance mass is to reduce and to eliminate the impact that motion counter-force and system barycenter frequent changes bring to litho machine, this installs horizontal decoupling zero and adopts thrust air-bearing to realize, vertical decoupling zero adopts shaft flexible hinging manner to realize, and particularly on vertically delicate adjusting drive unit voice coil motor, is provided with flexible support link.Equally, there is difficult processing and the concentrated problem of stress in flexible hinge.Shanghai SMEE patent CN101477314 has announced a kind of air supporting gravity compensator, introduce side direction kickboard and horizontal kickboard and solve horizontal decoupling problem, vertical decoupling zero is still shaft flexible hinge, and this device characteristic is to utilize the elasticity of corrugated tube to realize vertical deviation and follows, and adopts separation motor to drive.With respect to sleeved motor, separation motor has design of electrical motor and processes simple advantage, but the situation that micropositioner exists the dynamic adjustments strong point and the static compensation strong point not to overlap is brought problems such as controlling decoupling zero computing difficulty.Shanghai SMEE patent CN102141734A has announced the version of a kind of gravity compensator and micropositioner, this device is used separately a gravity compensator with the vertical decoupling zero of button-head hinge to support micropositioner, gravity compensator floats on bottom support face by bottom levitation device, realize horizontal decoupling zero, the motor that micropositioner distributes by six discretes completes six degree of freedom and drives control.This device advantage is to use single gravity compensator to support, vertical decoupling zero and horizontal decoupling zero are more thorough, but supporting axis, gravity compensator must guarantee micropositioner moving component barycenter, and only guarantee by designing, implement comparatively difficulty, micropositioner poor stability, and can not come self-adaptation to regulate centre of support by a plurality of gravity compensators, there is equally ball pivot processing and the large problem of detection difficulty.Shanghai SMEE patent CN102200698A has announced a kind of mixed magnetic floating formula gravity compensator, this device adopts magnetic suspension force to make the object of relative motion carry out non-contacting motion, and realized micropositioner static weight compensation and level to decoupling zero, vertical decoupling zero realizes by biaxial hinge equally.With respect to air-flotation type gravity compensator, this device advantage is not need peripheral compressed gas source device, and system is comparatively simple, but has the problem of support stiffness dynamic change.The factor that determines the anti-vibration performance of gravity compensator is that support stiffness is stable and enough low, air-flotation type is mainly realized rigidity by the gas tank of external certain volume and is stabilized in the state that approaches zero stiffness, can not change with vertical deviation, and maglev type support stiffness changes with vertical deviation because of pole pitch.
In above-mentioned existing gravity compensator scheme, vertical decoupling zero adopts bulb air-bearing, has the common problem of processing detection difficult, and shaft flexible hinge can stress be concentrated and caused the not high problem of reliability under continuous high speed condition of work.Above-mentioned each scheme is not all considered the problem of gravity compensator temperature control simultaneously, haves much room for improvement.
Summary of the invention
The present invention is directed to the deficiency that above-mentioned prior art exists, the micropositioner of the vertical decoupling zero gravity compensator of a kind of equipped corrugated tube is proposed, reach simplified structure, reduce the difficulty of processing of traditional spherical hinge structure, eliminating shaft flexible hinge stress concentrates, be applicable to continuous working environment, suppress temperature rise, reduce the impact of electric mover thermal expansion on micropositioner, eliminate the pressurized air temperature rise that the parallel laying of gas circuit and cable is brought by cable heating, homogenizing chilled water and compressed air temperature, suppress the temperature fluctuation under micropositioner microenvironment, guarantee the object of the constant temperature external environment condition that micropositioner is harsh.
The object of the present invention is achieved like this:
A kind of micropositioner that configures the vertical decoupling zero gravity compensator of corrugated tube, this micropositioner comprises the micropositioner load platform being supported by three gravity compensators, described gravity compensator comprises vertical voice coil motor mover magnet steel, vertical voice coil motor stator coil, pedestal, piston, sealing O type circle, wherein piston and base interior cylindrical cavity concentric fit, and between piston bottom end face and base interior cylindrical cavity, form bottom air cavity, in the bottom side of pedestal, air intake opening is set, described air intake opening is communicated with base bottom air cavity, between outer surface of piston and base interior cylindrical cavity internal face, forms radially air-bearing, the bottom air cavity support piston of pedestal, and make it can Z-direction free movement, on pedestal, set out gas port, vertical voice coil motor stator coil is fixed on pedestal, and vertical voice coil motor mover magnet steel coordinates with the concentric spiral-lock of vertical voice coil motor stator coil, and is provided with gap in the horizontal direction, and vertical voice coil motor mover magnet steel exists level and vertical freedom degree simultaneously, on the top land of described gravity compensator, dispose corrugated tube, corrugated tube top and micropositioner load platform are bonding, and corrugated tube bottom forms thrust air-bearing with piston, between vertical voice coil motor mover magnet steel and micropositioner load platform, dispose supporting spring, supporting spring lower end is fixed in vertical voice coil motor mover magnet steel top, supporting spring upper end and micropositioner load platform are bonding, supporting spring consists of three identical sheet springs, and three sheet springs are symmetric with respect to vertical voice coil motor mover magnet steel axle center, between pedestal and vertical voice coil motor stator coil, be provided with water-cooled ring cavity, at pedestal and contact position, vertical voice coil motor stator coil upper and lower part, be provided with sealing O type circle, on pedestal, have the water inlet and the water delivering orifice that communicate with water-cooled ring cavity, described gravity compensator is communicated with temperature equalization system respectively, described temperature equalization system comprises temperature equalization system hydroecium, temperature equalization system air chamber, spiral pipeline and temperature equalization system air intake opening, temperature equalization system gas outlet, temperature equalization system water inlet and temperature equalization system water delivering orifice, wherein temperature equalization system air chamber is arranged on temperature equalization system hydroecium inside, it is indoor that spiral pipeline is configured in temperature equalization system hydroecium, the two ends of spiral pipeline are communicated with temperature equalization system air chamber and temperature equalization system gas outlet respectively, equipped temperature equalization system water inlet and temperature equalization system water delivering orifice on temperature equalization system hydroecium, temperature equalization system water delivering orifice is communicated with the water inlet on gravity compensator, and be communicated with the water-cooled ring cavity of gravity compensator, temperature equalization system air chamber is communicated with temperature equalization system air intake opening, and temperature equalization system gas outlet is communicated with the air intake opening on pedestal.
The present invention has following innovative point and outstanding advantages:
1) a kind of gravity compensator based on the vertical decoupling zero of corrugated tube has been proposed.This device adopts corrugated tube to realize the vertical decoupling zero of gravity compensator, structure is very simple, greatly reduces the difficulty of processing that uses traditional spherical hinge structure, does not have the concentrated problem of shaft flexible hinge stress simultaneously, be applicable to continuous working environment, this is one of innovative point of the present invention and outstanding advantages.
2) increased motor water cooling structure, adopting water-cooling pattern to take away motor heat dissipates, suppress temperature rise, use three spring supporting way that are symmetric about electric mover axle center simultaneously, can discharge the stress that electric mover thermal expansion produces, reduce its impact on micropositioner, this is two of innovative point of the present invention and outstanding advantages.
3) be equipped with cold anhydrating and compressed-air actuated temperature equalization system, the pressurized air temperature rise being brought by cable heating in order to eliminate the parallel laying of gas circuit and cable, homogenizing chilled water and compressed air temperature, suppress greatly the temperature fluctuation under micropositioner microenvironment, guaranteed the harsh constant temperature external environment condition of micropositioner.This is three of innovative point of the present invention and outstanding advantages.
Accompanying drawing explanation
Fig. 1 is the micropositioner axonometric drawing of the equipped vertical decoupling zero gravity compensator of corrugated tube;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is gravity compensator and temperature equalization system syndeton schematic diagram;
Fig. 4 is gravity compensator structural representation;
Fig. 5 is gravity compensator supporting spring distributed architecture schematic diagram;
Fig. 6 is temperature equalization system structural drawing.
Piece number in figure: 1-micropositioner load platform; 2A, 2B, 2C-gravity compensator; 3-temperature equalization system; 4-corrugated tube; 5-supporting spring; The vertical voice coil motor mover of 6-magnet steel; The vertical voice coil motor stator coil of 7-; 8-pedestal; 9-piston; 10-water delivering orifice; 11-gas outlet; 12-air intake opening; 13-water inlet; 14-sealing O type circle; 15-temperature equalization system hydroecium; 16--temperature equalization system air chamber; 17-spiral pipeline; 18-temperature equalization system air intake opening; 19-temperature equalization system gas outlet; 20-temperature equalization system water inlet: 21-temperature equalization system water delivering orifice.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is elaborated.
A kind of micropositioner that configures the vertical decoupling zero gravity compensator of corrugated tube, this micropositioner comprises the micropositioner load platform 1 being supported by three gravity compensator 2A, 2B, 2C, described gravity compensator 2A, 2B, 2C comprise vertical voice coil motor mover magnet steel 6, vertical voice coil motor stator coil 7, pedestal 8, piston 9, sealing O type circle 14, wherein piston 9 and pedestal 8 inner cylinder chamber concentric fit, and air cavity bottom forming between piston 9 bottom faces and pedestal 8 inner cylinder chambeies, air intake opening 12 is set in the bottom side of pedestal 8, described air intake opening 12 is communicated with pedestal 8 bottom air cavitys, between piston 9 outside surfaces and pedestal 8 inner cylinder cavity wall faces, form radially air-bearing, the bottom air cavity support piston 9 of pedestal 8, and make it can Z-direction free movement, on pedestal 8, set out gas port 11, vertical voice coil motor stator coil 7 is fixed on pedestal 8, vertical voice coil motor mover magnet steel 6 coordinates with the concentric spiral-lock of vertical voice coil motor stator coil 7, and in the horizontal direction, be provided with gap, there is level and vertical freedom degree in vertical voice coil motor mover magnet steel 6 simultaneously, it is characterized in that disposing corrugated tube 4 on piston 9 tops of described gravity compensator 2A, 2B, 2C, corrugated tube 4 tops and micropositioner load platform 1 are bonding, and corrugated tube 4 bottoms and piston 9 form thrust air-bearings, between vertical voice coil motor mover magnet steel 6 and micropositioner load platform 1, dispose supporting spring 5, supporting spring 5 lower ends are fixed in vertical voice coil motor mover magnet steel 6 tops, supporting spring 5 upper ends and micropositioner load platform 1 are bonding, supporting spring 5 consists of three identical sheet springs, and three sheet springs are symmetric with respect to vertical voice coil motor mover magnet steel 6 axle center, between pedestal 8 and vertical voice coil motor stator coil 7, be provided with water-cooled ring cavity, in pedestal 8 and vertical voice coil motor stator coil 7 contact positions, upper and lower part, be provided with sealing O type circle 14, on pedestal 8, have the water inlet 13 and the water delivering orifice 10 that communicate with water-cooled ring cavity, described gravity compensator 2A, 2B, 2C is communicated with temperature equalization system 3 respectively, described temperature equalization system 3 comprises temperature equalization system hydroecium 15, temperature equalization system air chamber 16, spiral pipeline 17 and temperature equalization system air intake opening 18, temperature equalization system gas outlet 19, temperature equalization system water inlet 20 and temperature equalization system water delivering orifice 21, wherein temperature equalization system air chamber 16 is arranged on temperature equalization system hydroecium 15 inside, it is indoor that spiral pipeline 17 is configured in temperature equalization system hydroecium 15, the two ends of spiral pipeline 17 are communicated with temperature equalization system air chamber 16 and temperature equalization system gas outlet 19 respectively, equipped temperature equalization system water inlet 20 and temperature equalization system water delivering orifice 21 on temperature equalization system hydroecium 15, temperature equalization system water delivering orifice 21 and gravity compensator 2A, 2B, water inlet 13 on 2C is communicated with, and with gravity compensator 2A, 2B, the water-cooled ring cavity of 2C is communicated with, temperature equalization system air chamber 16 is communicated with temperature equalization system air intake opening 18, and temperature equalization system gas outlet 19 is communicated with the air intake opening 12 on pedestal 8.
Workflow of the present invention is as follows:
Micropositioner by bottom, be that equilateral triangle distributes three gravity compensator 2A, 2B, 2C support, in design, guarantee that equilateral triangle center and micropositioner barycenter are on same vertical line, single gravity compensator has vertical drive motor, and three motions are synthesized can realize micropositioner Z, Rx, Ry three-degree-of-freedom motion.Three sheet springs are symmetric with respect to vertical voice coil motor mover magnet steel 6 axle center, and the thermal deformation that vertical voice coil motor mover magnet steel 6 produces because of temperature rise flexibly connects by reed, weakens to micropositioner load platform 1 diffusion.Chilled water enters temperature equalization system hydroecium 15 by temperature equalization system water inlet 20, through temperature equalization system water delivering orifice 21, flow into water inlet 13 again, enter gravity compensator 2A, 2B, 2C water-cooled ring cavity, pressurized air enters temperature equalization system air chamber 16 by temperature equalization system air intake opening 18, flow through again spiral pipeline 17 carry out heat interchange with the chilled water of temperature equalization system hydroecium 15, homogenizing water temperature and temperature, finally enter pedestal 8 bottom air cavitys through temperature equalization system gas outlet 19 and air intake opening 12.Pressurized air and chilled water, by the rear temperature homogenisation of temperature equalization system 3, are eliminated the pressurized air temperature rise that the parallel laying of gas circuit and cable is brought by cable heating, suppress the temperature fluctuation under micropositioner microenvironment.One
Claims (1)
1. a micropositioner that configures the vertical decoupling zero gravity compensator of corrugated tube, this micropositioner comprises the micropositioner load platform (1) being supported by three gravity compensators (2A, 2B, 2C), described gravity compensator (2A, 2B, 2C) comprises vertical voice coil motor mover magnet steel (6), vertical voice coil motor stator coil (7), pedestal (8), piston (9), sealing O type circle (14), wherein piston (9) and pedestal (8) inner cylinder chamber concentric fit, and air cavity bottom forming between piston (9) bottom face and pedestal (8) inner cylinder chamber, air intake opening (12) is set in the bottom side of pedestal (8), described air intake opening (12) is communicated with pedestal (8) bottom air cavity, between piston (9) outside surface and pedestal (8) inner cylinder cavity wall face, form radially air-bearing, the bottom air cavity support piston (9) of pedestal (8), and make it can Z-direction free movement, on pedestal (8), set out gas port (11), vertical voice coil motor stator coil (7) is fixed on pedestal (8), vertical voice coil motor mover magnet steel (6) coordinates with the concentric spiral-lock of vertical voice coil motor stator coil (7), and in the horizontal direction, be provided with gap, there is level and vertical freedom degree in vertical voice coil motor mover magnet steel (6) simultaneously, it is characterized in that disposing corrugated tube (4) on piston (9) top of described gravity compensator (2A, 2B, 2C), corrugated tube (4) top and micropositioner load platform (1) are bonding, and corrugated tube (4) bottom forms thrust air-bearing with piston (9), between vertical voice coil motor mover magnet steel (6) and micropositioner load platform (1), dispose supporting spring (5), supporting spring (5) lower end is fixed in vertical voice coil motor mover magnet steel (6) top, supporting spring (5) upper end and micropositioner load platform (1) are bonding, supporting spring (5) consists of three identical sheet springs, and three sheet springs are symmetric with respect to vertical voice coil motor mover magnet steel (6) axle center, between pedestal (8) and vertical voice coil motor stator coil (7), be provided with water-cooled ring cavity, in pedestal (8) and vertical voice coil motor stator coil (7) contact position, upper and lower part, be provided with sealing O type circle (14), on pedestal (8), have the water inlet (13) and the water delivering orifice (10) that communicate with water-cooled ring cavity, described gravity compensator (2A, 2B, 2C) be communicated with temperature equalization system (3) respectively, described temperature equalization system (3) comprises temperature equalization system hydroecium (15), temperature equalization system air chamber (16), spiral pipeline (17) and temperature equalization system air intake opening (18), temperature equalization system gas outlet (19), temperature equalization system water inlet (20) and temperature equalization system water delivering orifice (21), wherein temperature equalization system air chamber (16) is arranged on temperature equalization system hydroecium (15) inside, it is indoor that spiral pipeline (17) is configured in temperature equalization system hydroecium (15), the two ends of spiral pipeline (17) are communicated with temperature equalization system air chamber (16) and temperature equalization system gas outlet (19) respectively, at the upper equipped temperature equalization system water inlet (20) of temperature equalization system hydroecium (15) and temperature equalization system water delivering orifice (21), temperature equalization system water delivering orifice (21) and gravity compensator (2A, 2B, water inlet 2C) (13) is communicated with, and with gravity compensator (2A, 2B, water-cooled ring cavity 2C) is communicated with, temperature equalization system air chamber (16) is communicated with temperature equalization system air intake opening (18), and temperature equalization system gas outlet (19) are communicated with the air intake opening (12) on pedestal (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210385289.4A CN102866596B (en) | 2012-09-26 | 2012-09-26 | Micro-positioner of vertical decoupling gravity compensator provided with corrugated pipe |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210385289.4A CN102866596B (en) | 2012-09-26 | 2012-09-26 | Micro-positioner of vertical decoupling gravity compensator provided with corrugated pipe |
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| Publication Number | Publication Date |
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| CN102866596A CN102866596A (en) | 2013-01-09 |
| CN102866596B true CN102866596B (en) | 2014-07-16 |
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| CN201210385289.4A Expired - Fee Related CN102866596B (en) | 2012-09-26 | 2012-09-26 | Micro-positioner of vertical decoupling gravity compensator provided with corrugated pipe |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104238275A (en) * | 2013-06-19 | 2014-12-24 | 上海微电子装备有限公司 | Six-degree-of-freedom micropositioner and application thereof |
| CN105988304B (en) | 2015-02-28 | 2018-10-16 | 上海微电子装备（集团）股份有限公司 | A kind of adjustable magnetic buoyancy gravity compensator |
| DE102017223548B4 (en) * | 2017-12-21 | 2021-03-25 | Siemens Aktiengesellschaft | Drive stem with compensation element |
| CN108263646B (en) * | 2018-03-21 | 2024-01-16 | 天津航天机电设备研究所 | Multistage coupling type gravity compensation device |
| CN113548603A (en) * | 2020-04-24 | 2021-10-26 | 上海微电子装备（集团）股份有限公司 | Grating component integration device and method |
| CN114660899A (en) * | 2020-12-22 | 2022-06-24 | 上海微电子装备（集团）股份有限公司 | Flexible supporting platform system |
| CN112701075B (en) * | 2021-03-24 | 2021-06-04 | 上海隐冠半导体技术有限公司 | Micro-motion platform, handover method and sports equipment |
| CN113126451A (en) * | 2021-04-01 | 2021-07-16 | 三河建华高科有限责任公司 | Marble precision workbench air-flotation jacking mechanism |
| CN114413134B (en) * | 2022-02-23 | 2022-07-08 | 上海隐冠半导体技术有限公司 | Gravity compensation device and motion platform |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1160628B1 (en) * | 2000-06-02 | 2007-07-18 | ASML Netherlands B.V. | Lithographic projection apparatus with a supporting assembly |
| CN200993163Y (en) * | 2006-12-18 | 2007-12-19 | 广州市大族高精电机有限公司 | Lower air baring for air-floating electric spindle |
| CN100578362C (en) * | 2007-06-29 | 2010-01-06 | 上海微电子装备有限公司 | Vertically delicate adjusting and gravity force compensating mechanism and photo-etching machine |
| CN100573340C (en) * | 2008-08-07 | 2009-12-23 | 上海微电子装备有限公司 | Two-freedom degree electric machine actuating mechanism and corresponding 6-freedom micro-motion platform |
| CN102207240A (en) * | 2010-03-31 | 2011-10-05 | 上海微电子装备有限公司 | Precise motion platform with vibration dampers |
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2012
- 2012-09-26 CN CN201210385289.4A patent/CN102866596B/en not_active Expired - Fee Related
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