CN102864952B - 洁净室及其净化单元 - Google Patents

洁净室及其净化单元 Download PDF

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CN102864952B
CN102864952B CN201210364869.5A CN201210364869A CN102864952B CN 102864952 B CN102864952 B CN 102864952B CN 201210364869 A CN201210364869 A CN 201210364869A CN 102864952 B CN102864952 B CN 102864952B
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filter
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CN102864952A (zh
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蒋运芍
吴俊豪
林昆贤
汪永强
舒志优
郭振华
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
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    • F24F8/30—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by ionisation
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Abstract

本发明公开了一种洁净室，用于存放玻璃基板，其中，该洁净室包括排风口和净化单元，该排风口设于该洁净室的底部；该净化单元设于该洁净室的顶部，该净化单元用于向该洁净室提供洁净的离子风以消除该玻璃基板表面的静电和该洁净室内的粒子。此外，本发明还公开了一种净化单元。本发明公开的洁净室及其净化单元可以有效地去除洁净室内的静电和粒子，提高产品良率。

Description

洁净室及其净化单元
技术领域
本发明涉及液晶面板生产制造技术领域，特别是涉及一种洁净室及其净化单元。
背景技术
洁净室亦称为无尘室或清净室，洁净室最主要之作用在于控制产品(如玻璃基板)所接触之空气的洁净度及温湿度，使产品能在一个良好之环境空间中生产、制造。
在现有技术中，洁净室的清洁是通过洁净室的顶板上的风机滤器单元向洁净室内吹出洁净空气，将洁净室内的污染空气(含微尘粒子等)从排风口排出。
然而，洁净室内通常会由于各种摩擦、感应等而存在静电，静电会吸附洁净室中的粒子，导致洁净室的粒子不易清除，此外，静电还可能对液晶模组的IC、ITO等造成击穿。
发明内容
本发明主要解决的技术问题是提供一种洁净室及其净化单元，以解决现有技术中洁净室没有静电消除措施的问题。
为解决上述技术问题，本发明采用的一个技术方案是：提供一种洁净室，用于存放玻璃基板，该洁净室包括：
排风口，设于该洁净室的底部；
净化单元，设于该洁净室的顶部，该净化单元用于向该洁净室提供洁净的离子风以消除该玻璃基板表面的静电和该洁净室内的粒子；
该洁净室包括抽风机，该抽风机设于该洁净室的底部，并设于该排风口上，且该抽风机与该净化单元的安装位置上下相对应，该抽风机与该净化单元配合形成垂直气流以减小该洁净室内的涡流现象。
根据本发明一优选实施例，该净化单元包括风机、过滤装置以及负离子净化器，该风机吸入空气后经由该过滤装置过滤再经由该负离子净化器作用吹出离子风。
根据本发明一优选实施例，该过滤装置包括预过滤器、高效过滤器以及超高效过滤器。
根据本发明一优选实施例，该洁净室包括顶板、侧板以及底板，该净化单元设于该顶板上，该排风口设于该底板上。
根据本发明一优选实施例，该洁净室包括储位架，该储位架放置于该底板上，用于存放卡匣，该卡匣用于存放该玻璃基板。
根据本发明一优选实施例，该洁净室包括导轨，该导轨设于该底板上。
根据本发明一优选实施例，该洁净室包括自动化搬运设备，该自动化搬运设备设于该导轨上，该自动化搬运设备包括搬运叉，该搬运叉用于叉取该储位架上的该卡匣。
根据本发明一优选实施例，该导轨为双轨，该双轨将该底板分隔为导轨内区和导轨外区，该抽风机设于该导轨内区内和/或该导轨外区内。
为解决上述技术问题，本发明采用的另一个技术方案是：提供一种净化单元，用于向洁净室提供洁净的离子风以消除该洁净室内的静电和粒子，该净化单元包括风机、过滤装置以及负离子净化器，该风机吸入空气后经由该过滤装置过滤再经由该负离子净化器作用吹出离子风；该过滤装置设于该风机与该负离子净化器之间，该过滤装置包括预过滤器、高效过滤器以及超高效过滤器，且该预过滤器、该高效过滤器以及该超高效过滤器依序上下排列设置。
本发明的有益效果是：区别于现有技术的情况，本发明提供的洁净室静电消除措施，通过向洁净室提供洁净的离子风来消除玻璃基板表面的静电和洁净室内的粒子，其清洁效率较较高，提高了产品良率。
附图说明
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图，其中：
图1为根据本发明一优选实施例的洁净室的立体结构示意图；
图2为根据本发明一优选实施例的洁净室的前视截面示意图；
图3为根据本发明一优选实施例的洁净室的俯视截面示意图；
图4为根据本发明一优选实施例的洁净室的净化单元的立体结构示意图；
图5为根据本发明另一优选实施例的洁净室的俯视截面示意图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
请一并参阅图1至图3，本发明提供一种洁净室10，该洁净室10用于存放玻璃基板，该洁净室10包括排风口102和净化单元200。
其中，该排风口102设于该洁净室10的底部；该净化单元200设于该洁净室10的顶部，该净化单元200用于向该洁净室10提供洁净的离子风以消除该玻璃基板表面的静电和该洁净室10内的粒子。
具体而言，本发明实施例提供的洁净室10由顶板110、侧板120以及底板130围合形成，该洁净室10包括储位架140、导轨150、自动化搬运设备160以及净化单元200。
其中，该顶板110可由多块板材拼接而成，该顶板110上设有多个安装开口，该净化单元200对应设于该安装开口上，将吸入的空气经净化后从该安装开口吹入该洁净室10内。
该侧板120包括四块，该顶板110、四块侧板120以及底板130围合形成一矩形空间的洁净室10。其中，每一侧板120可由多块板材拼接而成。
该底板130为相对地面的高架板，该底板130可由多块板材拼接而成，该底板130上设有多个排风口102，如图2中所示，该底板130的中间部位设有三列排风口102，当然，该多个排风口102的设置方式并不限于图2所示。
该储位架140放置于底板130上，该储位架140包括多个储位141，该多个储位141用于存放卡匣142，该卡匣142用于存放玻璃基板，如图1和图2中所示，洁净室10的两侧边各设有一储位架140，该储位架140可由多个架体拼接组合而成。
该导轨150设于底板130上，该导轨150为双轨，该双轨将该底板130分隔为导轨内区152和导轨外区154。在优选实施例中，该导轨150设于储位架140的中间。
该自动化搬运设备160设于该导轨150上，该自动化搬运设备160包括搬运叉162，该搬运叉162用于叉取该储位架140上的该卡匣142。
请一并参阅图4，图4为根据本发明一优选实施例的洁净室的净化单元的立体结构示意图。
如图4所示，本发明实施例提供的净化单元200包括风机210、过滤装置220以及负离子净化器230。
其中，该风机210吸入空气后经由该过滤装置220过滤再经由该负离子净化器230作用吹出离子风。
具体地，该过滤装置220包括预过滤器222、高效过滤器224以及超高效过滤器226。其中，高效过滤器224对直径为0.3微米(头发直径的1/200)以上的微粒去除效率可达到99.97％以上，是烟雾、灰尘以及细菌等污染物最有效的过滤媒介。超高效过滤器226对0.1～0.2μm的微粒、烟雾和微生物等尘埃粒子的过滤效率达到99.999％以上。
该负离子净化器230不仅具有净化过滤的作用，还能吹出离子风，该离子风飘散到卡匣及玻璃基板表面，能够消除玻璃表面的静电。该离子风带负电荷，可与漂浮在空气中带正电荷的烟雾粉尘进行电极中和，形成多个颗粒凝聚变大从而迅速沉降，达到净化空气的目的。
请一并参阅图5，图5为根据本发明另一优选实施例的洁净室的俯视截面示意图。
如图5所示，在本发明另一优选实施例中，洁净室10包括抽风机210，该抽风机210设于该洁净室10的底部，与该净化单元200配合形成垂直气流以减小该洁净室10内的涡流现象。由此可避免涡流卷带微尘粒子扬起污染玻璃基板，提高产品良率。
该抽风机210设于排风口102上，当然，该抽风机210的数量可以少于该排风口102的数量。通常，将底板130上的抽风机210与顶板110上的净化单元200的安装位置上下相对应，以便于形成垂直气流。
在优选实施例中，该抽风机210设于该导轨内区152内，如此可使得抽风机210大致位于底板130的两储位架140的中间，其位置较佳，且充分利用了导轨内区152的空间，不用占用洁净室10内的其他位置，给洁净室10内的其他设备让出空间。当然，在其他实施例中，该抽风机210亦可设于该导轨外区154内，或者，该抽风机210同时设于该导轨内区152内和该导轨外区154内。
本发明的有益效果是：区别于现有技术的情况，本发明提供的洁净室通过向洁净室提供洁净的离子风来消除玻璃基板表面的静电和洁净室内的粒子，其清洁效率较高，提高了产品良率，亦可减少洁净室的清洁保养次数，节约生产维护成本。
以上所述仅为本发明的示例性实施例，并非因此限制本发明的专利保护范围，凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (9)

1.一种洁净室，用于存放玻璃基板，其特征在于，所述洁净室包括：
排风口，设于所述洁净室的底部；
净化单元，设于所述洁净室的顶部，所述净化单元用于向所述洁净室提供洁净的离子风以消除所述玻璃基板表面的静电和所述洁净室内的粒子；
所述洁净室包括抽风机，所述抽风机设于所述洁净室的底部，并设于所述排风口上，且所述抽风机与所述净化单元的安装位置上下相对应，所述抽风机与所述净化单元配合形成垂直气流以减小所述洁净室内的涡流现象。
2.根据权利要求1所述的洁净室，其特征在于：所述净化单元包括风机、过滤装置以及负离子净化器，所述风机吸入空气后经由所述过滤装置过滤再经由所述负离子净化器作用吹出离子风。
3.根据权利要求2所述的洁净室，其特征在于：所述过滤装置包括预过滤器、高效过滤器以及超高效过滤器。
4.根据权利要求3所述的洁净室，其特征在于：所述洁净室包括顶板、侧板以及底板，所述净化单元设于所述顶板上，所述排风口设于所述底板上。
5.根据权利要求4所述的洁净室，其特征在于：所述洁净室包括储位架，所述储位架放置于所述底板上，用于存放卡匣，所述卡匣用于存放所述玻璃基板。
6.根据权利要求5所述的洁净室，其特征在于：所述洁净室包括导轨，所述导轨设于所述底板上。
7.根据权利要求6所述的洁净室，其特征在于：所述洁净室包括自动化搬运设备，所述自动化搬运设备设于所述导轨上，所述自动化搬运设备包括搬运叉，所述搬运叉用于叉取所述储位架上的所述卡匣。
8.根据权利要求7所述的洁净室，其特征在于：所述导轨为双轨，所述双轨将所述底板分隔为导轨内区和导轨外区，所述抽风机设于所述导轨内区内和/或所述导轨外区内。
9.一种净化单元，用于向洁净室提供洁净的离子风以消除所述洁净室内的静电和粒子，其特征在于，所述净化单元包括风机、过滤装置以及负离子净化器，所述风机吸入空气后经由所述过滤装置过滤再经由所述负离子净化器作用吹出离子风；所述过滤装置设于所述风机与所述负离子净化器之间，所述过滤装置包括预过滤器、高效过滤器以及超高效过滤器，且所述预过滤器、所述高效过滤器以及所述超高效过滤器依序上下排列设置。
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