CN102840857A - Single structural three-axis micro-electromechanical gyroscope - Google Patents
Single structural three-axis micro-electromechanical gyroscope Download PDFInfo
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- CN102840857A CN102840857A CN2011101725372A CN201110172537A CN102840857A CN 102840857 A CN102840857 A CN 102840857A CN 2011101725372 A CN2011101725372 A CN 2011101725372A CN 201110172537 A CN201110172537 A CN 201110172537A CN 102840857 A CN102840857 A CN 102840857A
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Abstract
The invention discloses a single structural three-axis micro-electromechanical gyroscope which consists of an xz axis structure for measuring the angular speeds of the x axis and the y axis and a y axis structure for measuring the angular speed of the y axis. The xz axis structure is arranged symmetrically along the x axis. The y axis structure is symmetrically along the y axis. The adjacent xz axis structure and the y axis structure are externally connected by a cord so that the three-axis structure obtains a single expanding-retracting drive. Two mass blocks of the xz axis and y axis are connected through a cross-shaped connector, and synchronous movements with inverse phases can be realized when the angular speeds of the x axis, the y axis and the z axis are sensed, so that differential outputs of the axis are realized.
Description
Technical field
The present invention relates to a kind of micro-electro-mechanical gyroscope, relate in particular to a kind of single structure three axis microelectromechanicdevice gyroscopes, belong to MEMS (MEMS) field with decoupling zero characteristic.
Background technology
Micro-electro-mechanical gyroscope is based on the inertia device of MEMS, can be used to measure the angular velocity of moving object.Compare with traditional gyroscope, it is little that micro-electro-mechanical gyroscope has a volume, and light weight is cheap, is more suitable for characteristics such as production in enormous quantities.The tradition gyroscope comprises mechanical gyroscope, lasergyro; Fibre optic gyroscope or the like, wide always model is applied to the stable control of aircraft, weapon navigational guidance; Fields such as automotive safety, because these gyroscope volumes are big, cost is high and be not suitable for being applied to consumer electronics product.In recent years, along with the development of MEMS technology, micro-electro-mechanical gyroscope is applied to consumer electronics product just gradually, and is stable like digital image of camera, the joystick of game machine, and cell-phone function control, and the micro navigation appearance that constitutes with micro-acceleration sensor or the like.
Micro-electro-mechanical gyroscope mainly is made up of drive part and sensing part; Because the complicacy of its design and manufacturing; Mostly what occur in the market is one and two gyroscopes; The application of three-axis gyroscope generally is a plurality of one or two gyrostatic quadrature assemblings, perhaps a plurality of gyroscopes is integrated on the single chip, and these all do not reach the purpose that the consumer electronics produce market is pursued miniaturization.Exploitation single structure three-axis gyroscope has become the important directions that micro-electro-mechanical gyroscope is researched and developed.
Micro-electro-mechanical gyroscope of the present invention adopts the single structure design, the drive pattern of overall shrinkage one expansion, and the differential output of condenser type static driven and electric capacity, structure is tightly short, has reduced the gyroscope volume, is fit to produce in enormous quantities, can realize good measuring accuracy and sensitivity.
Summary of the invention
The object of the present invention is to provide that a kind of structure is tightly short, with low cost, the simple single structure three axis microelectromechanicdevice gyroscopes of manufacture craft.Three gyroscopes of this single structure have the higher quality factor, and the signal coupling between its each can structurally be inhibited and each can be realized driving and detect mutual decoupling zero.
Realize that the technical scheme that above-mentioned purpose of the present invention adopted is: a kind of single structure three axis microelectromechanicdevice gyroscopes; It comprises substrate, axle construction, cross connector and umbilical cord; It is characterized in that: described axle construction comprises xz axle construction and y axle construction; Described xz axle construction and y axle construction are on said substrate, and described xz axle construction is used for measurement of x axis angular rate and z axis angular rate, and described xz axle construction is made up of two groups of xz axle separation structures that distribute along the x rotational symmetry; Described y axle construction is used for measuring the y axis angular rate, and described y axle construction is made up of two groups of y axle separation structures that distribute along the y rotational symmetry; Described two groups of xz axle separation structures link to each other through the cross connector with two groups of y axle separation structures are inner, and described two groups of xz axle separation structures are connected through 4 umbilical cords with two groups of y axle separation structure outsides successively.
Further; Each group xz axle separation structure in said two groups of xz axle separation structures includes xz axoplasm gauge block, xz axle Drive Structure, x axle induction structure, z axle induction structure, z axle feedback arrangement and xz axle elastic construction; Described xz axoplasm gauge block is suspended on the substrate; And link to each other with y axle separation structure through umbilical cord, the distortion of umbilical cord has guaranteed the consistance of each axoplasm gauge block motion; Xz axle Drive Structure comprises xz axle driving activity comb electrodes and xz axle drive fixing comb electrodes, and xz axle driving activity comb electrodes is connected on the xz axoplasm gauge block, and xz axle drive fixing comb electrodes is fixed on the substrate; Described x axle induction structure is made up of xz axoplasm gauge block and x axle bottom crown, and described x axle bottom crown is positioned at transverse axis mass below and laterally arranges with the transverse axis mass, and described x axle bottom crown also is fixed on the substrate; Said z axle induction structure dredges the tooth electrode by z axle sensed activity and the fixing tooth electrode of dredging of z axle induction is formed, and z axle sensed activity comb electrodes is connected on the xz axoplasm gauge block, and z axle induction fixed fingers electrode is fixed on the substrate; Said z axle feedback arrangement comprises z axle feedback float electrode and z axle feedback fixed electorde, and z axle feedback activity comb electrodes is connected on the xz axoplasm gauge block, and z axle feedback fixed fingers electrode is fixed on the substrate; Described xz axle elastic construction comprises totally two groups of xz axle outside spring devices, the inboard spring device of xz axle, described xz axle outside spring device; All be positioned at the outside of said xz axoplasm gauge block; One end of xz axle outside spring device is connected on the xz axoplasm gauge block; The other end is fixed on the substrate through anchor point, and an end of the inboard spring device of described xz axle is connected in the inboard of xz axoplasm gauge block, and the other end links to each other with described cross connector.
Further; Each group y axle separation structure in said two groups of y axle separation structures includes y axle Drive Structure, y axle induction structure and y axle elastic construction; Described y axle Drive Structure is drawn together y axle driving arm and y axle driving comb electrode group; Described y axle driving arm is suspended on the substrate; Described y axle driving comb electrode group comprises y axle driving activity comb electrodes and y axle drive fixing comb electrodes, and y axle driving activity comb electrodes is connected on the described y axle driving arm, and y axle fixed fingers electrode is fixed on the substrate; Described y axle induction structure is made up of step under y axoplasm gauge block and the y axle, and described y axoplasm gauge block is suspended on the substrate, and links to each other with described xz axoplasm gauge block through umbilical cord; Described y axle elastic construction comprises the flank elastic hinge of y axle outside spring device, the inboard spring device of y axle, central elastic hinge and two symmetrical distributions; Totally two groups of described y axle outside spring devices; All be positioned at the outside of said y axle driving arm; One end of said y axle outside spring device is connected in y axle driving arm, and the other end is fixed on the substrate through anchor point, and an end of the inboard spring device of said y axle is connected in the inboard of y axoplasm gauge block; The other end links to each other with described cross connector, and the two ends of the flank elastic hinge of said central elastic hinge and two symmetrical distributions link to each other with y axle driving arm with described y axoplasm gauge block respectively.
Further; Described cross connector comprises that the cross tie-beam is connected spring with cross; Described cross tie-beam is suspended on the substrate; This cross tie-beam is connected with the inboard spring device of the xz axle of two groups of xz axle separation structures on the y direction, and this cross tie-beam is connected with the inboard spring device of the y axle of two groups of y axle separation structures on the x direction, and cross connects the center that spring is positioned at the cross tie-beam; Said cross connects spring and on the x direction of principal axis, is fixedly connected with the cross tie-beam, on the y direction of principal axis, is fixed on the substrate through four anchor points.
Further, described xz axoplasm gauge block and y axoplasm gauge block are provided with micropore, in order to reduce air damping.
Compared with prior art, the present invention has following remarkable advantage: 1) can realize three single driving; 2) realize that three single structure is integrated, structure is tightly short, and manufacturing process is simple, is fit to produce in enormous quantities, and is cheap; 3) each adopts differential mode output, has increased the output signal, has improved gyrostatic sensitivity, has suppressed undesired signal; 4) induced signal structurally realizes not having coupling between each;
Below in conjunction with accompanying drawing and specific embodiment the present invention is done further detailed description.
Description of drawings
Fig. 1 is the gyrostatic stereographic map of the present invention;
Fig. 2 is the gyrostatic front view of the present invention;
Fig. 3 is the front view of xz axle separation structure in the gyroscope of the present invention;
Fig. 4 is the front view of y axle separation structure in the gyroscope of the present invention;
Fig. 5 is the front view of cross connector in the gyroscope of the present invention;
Fig. 6 is the front view of umbilical cord in the gyroscope of the present invention;
Fig. 7 is the gyrostatic principle schematic of the present invention.
Embodiment
To single structure three axis microelectromechanicdevice gyroscopes shown in Figure 6, it comprises substrate 10, axle construction, cross connector 40 and umbilical cord 50 like Fig. 1, and described axle construction comprises xz axle construction 20 and y axle construction 30.Described xz axle construction 20 and y axle construction 30 are on said substrate 10, and described xz axle construction 20 is used for measurement of x axis angular rate and z axis angular rate, and described xz axle construction 20 is made up of two groups of xz axle separation structures along the distribution of x rotational symmetry; Described y axle construction is used for measuring the y axis angular rate, and described y axle construction 30 is made up of two groups of y axle separation structures that distribute along the y rotational symmetry; Described two groups of xz axle separation structures link to each other through cross connector 40 with two groups of y axle separation structures are inner, and described two groups of xz axle separation structures are connected through 4 umbilical cords 50 with two groups of y axle separation structures are outside successively.
Each group xz axle separation structure in said two groups of xz axle separation structures includes xz axoplasm gauge block 21, xz axle Drive Structure, x axle induction structure, z axle induction structure, z axle feedback arrangement and xz axle elastic construction.Described xz axoplasm gauge block 21 is suspended on the substrate, and micropore 22 is arranged on it, and links to each other with y axle separation structure through umbilical cord 50; The xz Drive Structure comprises xz axle driving activity comb electrodes 23 and xz axle drive fixing comb electrodes 24, and xz axle driving activity comb electrodes 23 is connected on the xz axoplasm gauge block 21, and xz axle drive fixing comb electrodes 24 is fixed on the substrate 10; Described x axle induction structure is made up of xz axoplasm gauge block 21 and x axle bottom crown 25, and described x axle bottom crown 25 is positioned at xz axoplasm gauge block 21 belows and laterally arranges with xz axoplasm gauge block 21, and described x axle bottom crown 25 also is fixed on the substrate 10; Said z axle induction structure dredges tooth electrode 26 by z axle sensed activity and the fixing tooth electrode 27 of dredging of z axle induction is formed, and z axle sensed activity comb electrodes 26 is connected on the xz axoplasm gauge block 21, and z axle induction fixed fingers electrode 27 is fixed on the substrate 10; Said z axle feedback arrangement comprises z axle feedback float electrode 28 and z axle feedback fixed electorde 29, and z axle feedback activity comb electrodes 28 is connected on the xz axoplasm gauge block 21, and z axle feedback fixed fingers electrode 29 is fixed on the substrate 10; Described xz axle elastic construction comprises totally two groups of xz axle outside spring devices 210, the inboard spring device 211 of xz axle, described xz axle outside spring device 210; All be positioned at the outside of said xz axoplasm gauge block 21; One end of xz axle outside spring device 210 is connected on the xz axoplasm gauge block 21; The other end is fixed on the substrate 10 through anchor point, and an end of the inboard spring device 211 of described xz axle is connected in the inboard of xz axoplasm gauge block 21, and the other end links to each other with described cross connector 40.
Each group y axle separation structure in said two groups of y axle separation structures 30 includes y axle Drive Structure, y axle induction structure and y axle elastic construction; Described y axle Drive Structure is drawn together y axle driving arm 31 and y axle driving comb electrode group; Described y axle driving arm 31 is suspended on the substrate; Described y axle driving comb electrode group comprises y axle driving activity comb electrodes 32 and y axle drive fixing comb electrodes 33; Y axle driving activity comb electrodes 32 is connected on the described y axle driving arm 31, and y axle fixed fingers electrode 33 is fixed on the substrate 10; Described y axle induction structure is made up of step 35 under y axoplasm gauge block 34 and the y axle, and described y axoplasm gauge block 34 is suspended on the substrate, micropore 310 is arranged on it and pass through umbilical cord 50 to link to each other with described xz axoplasm gauge block 21; Described y axle elastic construction comprises the flank elastic hinge 39 of y axle outside spring device 36, the inboard spring device 37 of y axle, central elastic hinge 38 and two symmetrical distributions; Totally two groups of described y axle outside spring devices 36; All be positioned at the outside of said y axle driving arm 31; One end of said y axle outside spring device 36 is connected in y axle driving arm 31; The other end is fixed on the substrate 10 through anchor point; One end of the inboard spring device 37 of said y axle is connected in the inboard of y axoplasm gauge block 34, and the other end links to each other with described cross connector 40, and the two ends of the flank elastic hinge 39 of said central elastic hinge 38 and two symmetrical distributions link to each other with y axle driving arm 31 with described y axoplasm gauge block 34 respectively.
Described cross connector 40 comprises that cross tie-beam 41 is connected spring 42 with cross; Described cross tie-beam 41 is suspended on the substrate 10; This cross tie-beam 41 is connected with the inboard spring device 211 of the xz axle of two groups of xz axle separation structures on the y direction; This cross tie-beam 41 is connected with the inboard spring device 37 of the y axle of two groups of y axle separation structures on the x direction; Cross connects the center that spring 42 is positioned at the cross tie-beam, and said cross connects spring and on the x direction of principal axis, is fixedly connected with cross tie-beam 41, is being fixed on the substrate 10 through four anchor points on the y direction of principal axis.
Totally four on said umbilical cord 50 is used for connecting successively xz axoplasm gauge block 21 and y axoplasm gauge block 34.
Single structure three axis microelectromechanicdevice gyroscopes of the present invention, the single drive pattern that adopts the therefrom outside expansion of mind-set to shrink, the type of drive of each is the line vibration like this, Fig. 7 is this gyrostatic principle schematic.System drives with certain frequency under the acting in conjunction of xz axle Drive Structure and y axle Drive Structure; The motion that each axoplasm gauge block becomes expansion to shrink on the whole; The interior outside spring device of xz axle and y axle can be done corresponding distortion; The distortion of umbilical cord has guaranteed the consistance of each axoplasm gauge block motion, and the instantaneous velocity of each axoplasm gauge block is V like this.When system received the x axis angular rate, the mass of two pairs of xz axles received taxi driver brother's formula power and is: F
x=-2m
xΩ
x* V, equal and opposite in direction, in the opposite direction, the inboard spring device of xz axle outside spring device and xz axle can be done corresponding distortion, and the mass of such two symmetries can be done the opposite seesaw movement of phase place, and the cross connector has guaranteed that the pace of movement of two masses is consistent.The inductance capacitance of such side increases, and the inductance capacitance of opposite side reduces, and can realize differential output.When system received the z axis angular rate, the coriolis force that the two pairs of xz axoplasm gauge blocks receive was: F
z=-2m
zΩ
z* V; Opposite sign but equal magnitude, outer elastic mechanism and the inboard elastic mechanism in each z axle separation structure can be done corresponding deformation like this, and such two Symmetric Mass pieces can be done the opposite motion of phase place; Thereby guarantee the differential output of z axle; And z axle feedback arrangement can stop this motion, and when detecting the z axis angular rate with assurance, the induced signal to the x axle does not exert an influence.When system received the y axis angular rate, the mass of two pairs of y axles received taxi driver brother's formula power and is: F
y=-2m
xΩ
x* V equal and opposite in direction; In the opposite direction; Y axle outside spring device, the inboard spring device of y axle, central elastic hinge and flank elastic hinge can be done corresponding distortion; The mass of such two symmetries can be done the opposite seesaw movement of phase place, and the cross connector has guaranteed that the pace of movement of two masses is consistent.The inductance capacitance of such side increases, and the inductance capacitance of opposite side reduces, and can realize differential output.
More than be a most preferred embodiment of the present invention, those skilled in the art might make change or change to this design not breaking away from protection scope of the present invention, but these are to be understood that to still belonging within protection scope of the present invention.
Claims (5)
1. single structure three axis microelectromechanicdevice gyroscopes; It comprises substrate, axle construction, cross connector and umbilical cord; It is characterized in that: described axle construction comprises xz axle construction and y axle construction; Described xz axle construction and y axle construction are on said substrate, and described xz axle construction is used for measurement of x axis angular rate and z axis angular rate, and described xz axle construction is made up of two groups of xz axle separation structures that distribute along the x rotational symmetry; Described y axle construction is used for measuring the y axis angular rate, and described y axle construction is made up of two groups of y axle separation structures that distribute along the y rotational symmetry; Described two groups of xz axle separation structures link to each other through the cross connector with two groups of y axle separation structures are inner, and described two groups of xz axle separation structures are connected through 4 umbilical cords with two groups of y axle separation structure outsides successively.
2. single structure three axis microelectromechanicdevice gyroscopes as claimed in claim 1; It is characterized in that: each the group xz axle separation structure in said two groups of xz axle separation structures includes xz axoplasm gauge block, xz axle Drive Structure, x axle induction structure, z axle induction structure, z axle feedback arrangement and xz axle elastic construction; Described xz axoplasm gauge block is suspended on the substrate; And link to each other with y axle separation structure through umbilical cord, the distortion of umbilical cord has guaranteed the consistance of each axoplasm gauge block motion; Xz axle Drive Structure comprises xz axle driving activity comb electrodes and xz axle drive fixing comb electrodes, and xz axle driving activity comb electrodes is connected on the xz axoplasm gauge block, and xz axle drive fixing comb electrodes is fixed on the substrate; Described x axle induction structure is made up of xz axoplasm gauge block and x axle bottom crown, and described x axle bottom crown is positioned at transverse axis mass below and laterally arranges with the transverse axis mass, and described x axle bottom crown also is fixed on the substrate; Said z axle induction structure dredges the tooth electrode by z axle sensed activity and the fixing tooth electrode of dredging of z axle induction is formed, and z axle sensed activity comb electrodes is connected on the xz axoplasm gauge block, and z axle induction fixed fingers electrode is fixed on the substrate; Said z axle feedback arrangement comprises z axle feedback float electrode and z axle feedback fixed electorde, and z axle feedback activity comb electrodes is connected on the xz axoplasm gauge block, and z axle feedback fixed fingers electrode is fixed on the substrate; Described xz axle elastic construction comprises totally two groups of xz axle outside spring devices, the inboard spring device of xz axle, described xz axle outside spring device; All be positioned at the outside of said xz axoplasm gauge block; One end of xz axle outside spring device is connected on the xz axoplasm gauge block; The other end is fixed on the substrate through anchor point, and an end of the inboard spring device of described xz axle is connected in the inboard of xz axoplasm gauge block, and the other end links to each other with described cross connector.
3. single structure three axis microelectromechanicdevice gyroscopes as claimed in claim 1; It is characterized in that: each the group y axle separation structure in said two groups of y axle separation structures includes y axle Drive Structure, y axle induction structure and y axle elastic construction; Described y axle Drive Structure is drawn together y axle driving arm and y axle driving comb electrode group; Described y axle driving arm is suspended on the substrate; Described y axle driving comb electrode group comprises y axle driving activity comb electrodes and y axle drive fixing comb electrodes, and y axle driving activity comb electrodes is connected on the described y axle driving arm, and y axle fixed fingers electrode is fixed on the substrate; Described y axle induction structure is made up of step under y axoplasm gauge block and the y axle, and described y axoplasm gauge block is suspended on the substrate, and links to each other with described xz axoplasm gauge block through umbilical cord; Described y axle elastic construction comprises the flank elastic hinge of y axle outside spring device, the inboard spring device of y axle, central elastic hinge and two symmetrical distributions; Totally two groups of described y axle outside spring devices; All be positioned at the outside of said y axle driving arm; One end of said y axle outside spring device is connected in y axle driving arm, and the other end is fixed on the substrate through anchor point, and an end of the inboard spring device of said y axle is connected in the inboard of y axoplasm gauge block; The other end links to each other with described cross connector, and the two ends of the flank elastic hinge of said central elastic hinge and two symmetrical distributions link to each other with y axle driving arm with described y axoplasm gauge block respectively.
4. single structure three axis microelectromechanicdevice gyroscopes as claimed in claim 1; It is characterized in that: described cross connector comprises that the cross tie-beam is connected spring with cross; Described cross tie-beam is suspended on the substrate; This cross tie-beam is connected with the inboard spring device of the xz axle of two groups of xz axle separation structures on the y direction, and this cross tie-beam is connected with the inboard spring device of the y axle of two groups of y axle separation structures on the x direction, and cross connects the center that spring is positioned at the cross tie-beam; Said cross connects spring and on the x direction of principal axis, is fixedly connected with the cross tie-beam, on the y direction of principal axis, is fixed on the substrate through four anchor points.
5. single structure three axis microelectromechanicdevice gyroscopes as claimed in claim 1 is characterized in that: described xz axoplasm gauge block and y axoplasm gauge block are provided with micropore, in order to reduce air damping.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110172537.2A CN102840857B (en) | 2011-06-24 | 2011-06-24 | Single structural three-axis micro-electromechanical gyroscope |
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| CN201110172537.2A CN102840857B (en) | 2011-06-24 | 2011-06-24 | Single structural three-axis micro-electromechanical gyroscope |
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| CN102840857A true CN102840857A (en) | 2012-12-26 |
| CN102840857B CN102840857B (en) | 2015-04-08 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106871886A (en) * | 2015-12-10 | 2017-06-20 | 上海矽睿科技有限公司 | Vibration module and gyroscope |
| CN109405819A (en) * | 2018-10-20 | 2019-03-01 | 中北大学 | A kind of three axis accelerometer array of structures of single-chip integration z-axis redundancy |
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| CN101270990A (en) * | 2008-05-06 | 2008-09-24 | 中北大学 | Testing apparatus of multi-layer nano-film tunneling micro-gyroscope |
| CN101839718A (en) * | 2009-03-17 | 2010-09-22 | 毛敏耀 | Tri-axis angular rate sensor |
| WO2010108773A1 (en) * | 2009-03-26 | 2010-09-30 | Sensordynamics Ag | Micro gyroscope for determining rotational movements about three spatial axes which are perpendicular to one another |
| CN202109911U (en) * | 2011-06-24 | 2012-01-11 | 鄂尔多斯市嘉美科技股份有限公司 | Single structure three-axle micro electro mechanical gyroscope |
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2011
- 2011-06-24 CN CN201110172537.2A patent/CN102840857B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101270990A (en) * | 2008-05-06 | 2008-09-24 | 中北大学 | Testing apparatus of multi-layer nano-film tunneling micro-gyroscope |
| CN101839718A (en) * | 2009-03-17 | 2010-09-22 | 毛敏耀 | Tri-axis angular rate sensor |
| WO2010108773A1 (en) * | 2009-03-26 | 2010-09-30 | Sensordynamics Ag | Micro gyroscope for determining rotational movements about three spatial axes which are perpendicular to one another |
| CN202109911U (en) * | 2011-06-24 | 2012-01-11 | 鄂尔多斯市嘉美科技股份有限公司 | Single structure three-axle micro electro mechanical gyroscope |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106871886A (en) * | 2015-12-10 | 2017-06-20 | 上海矽睿科技有限公司 | Vibration module and gyroscope |
| CN109405819A (en) * | 2018-10-20 | 2019-03-01 | 中北大学 | A kind of three axis accelerometer array of structures of single-chip integration z-axis redundancy |
| CN109405819B (en) * | 2018-10-20 | 2020-04-28 | 中北大学 | Monolithic integration z-axis redundancy three-axis gyroscope structure array |
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