CN102830138A - Photoelectrode array for neuron stimulation and electric signal recording and preparing method of array - Google Patents

Photoelectrode array for neuron stimulation and electric signal recording and preparing method of array Download PDF

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Publication number
CN102830138A
CN102830138A CN2012103586862A CN201210358686A CN102830138A CN 102830138 A CN102830138 A CN 102830138A CN 2012103586862 A CN2012103586862 A CN 2012103586862A CN 201210358686 A CN201210358686 A CN 201210358686A CN 102830138 A CN102830138 A CN 102830138A
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conductive layer
waveguiding structure
connector
layer
optoelectronic pole
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CN2012103586862A
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裴为华
陈三元
归强
李雷
陈弘达
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Institute of Semiconductors of CAS
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Institute of Semiconductors of CAS
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  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

A photoelectrode array for neuron stimulation and electric signal recording comprises a plurality of waveguide structures, a connector and a PCB (Printed Circuit Board), wherein the plurality of waveguide structures are cylindrical; the connector is rectangular, a plurality of connecting holes are formed in one surface of the connector; the waveguide structures are plugged in the connecting holes of the connector; and the PCB (Printed Circuit Board) is L-shaped, and the long edge of the PCB is fixed to the root parts of the waveguide structures. The photoelectrode array has the advantages of being capable of connecting a plurality of light sources simultaneously to perform optical simulation in different wave bands, and further simple to prepare and good in compatibility.

Description

The optoelectronic pole array and the preparation method that are used for neural stimulation and electric signal record
Technical field
The present invention relates to be used for the electrode sensor design and the manufacture field of biological nerve stimulation and electrical signal detection, more specifically relate in biomedical engineering based on genetic optoelectronic pole array and the preparation method who is used for neural stimulation and electric signal record of light.
Background technology
Illustrating basic process of nervous activity is one of target of modern brain science.When how the analysis neurocyte accomplishes various function, often need activate or suppress specific cells to confirm its effect of in the neural circuit of complicacy, bringing into play.Fast-developing in recent years light science of heredity can let the neurocyte of a certain type produce excited to the light of specific wavelength or suppress.Utilize optoelectronic pole that neuron is carried out light stimulus and electric signal record and become main research means gradually.
Optoelectronic pole structure commonly used at present comprises: tinsel and optical fiber are adhered to each other; Apply certain thickness hexamethyl siloxane transparent materials such as (PDMS) in wire surface and form middle conduction, the structure of outside leaded light; In the middle of the Utah stereo electrod, penetrate an optical fiber and constitute optoelectronic pole; The optical waveguide of material preparations such as fixing optical fiber or SU-8 photoresist is as the light stimulus source on Michigan plane electrode surface.Optoelectronic pole in the past all is to prepare after the electrographic recording point assembling more earlier or prepare optical waveguide layer; In order not hinder the signals collecting function of electrographic recording point; Optical waveguide layer can keep certain distance with electrode points; Therefore be difficult to satisfy the consistance at light stimulus position and electrographic recording position between light-emitting window and the electrographic recording point, there is some difference also to mean the cell of stimulated cells and record.The cause-effect relationship of this indefinite stimulation and response has influenced the analysis result of nerve signal.In addition, existing optoelectronic pole has only an optical waveguide mostly, when the Different Effects that the light source that faces multiple wave band causes nerve, does not possess the condition that stimulates simultaneously.
Summary of the invention
Fundamental purpose of the present invention is to provide a kind of optoelectronic pole array and preparation method who is used for neural stimulation and electric signal record; To guarantee that light stimulus point and electrographic recording point are at same position; Simultaneously can connect the optical stimulation that a plurality of light sources carry out different-waveband, and have simple with the compatible strong advantage of preparation.
The present invention provides a kind of optoelectronic pole array that is used for neural stimulation and electric signal record, comprising:
A plurality of waveguiding structures, this waveguiding structure are cylindrical;
A connector is rectangle, and the one side of this connector has a plurality of connecting holes, and said waveguiding structure is plugged in the connecting hole of connector;
One pcb board, this pcb board are the L type, and the long limit of this pcb board is fixed on the root of waveguiding structure.
The present invention also provides a kind of preparation method who is used for the optoelectronic pole array of neural stimulation and electric signal record, comprises the steps:
Step 1: get the connector of a plurality of cylindrical wave conducting shells and a rectangle, the one side of this connector has a plurality of connecting holes, and an end of ducting layer is added in the connecting hole of connector;
Step 2: corrosion ducting layer front end, making the ducting layer front end is taper;
Step 3: at ducting layer upper surface depositing conducting layer;
Step 4: depositing depositing insulating layer on the ducting layer of conductive layer, forming waveguiding structure;
Step 5: adopt the method for photoetching or laser ablation, the insulation course of etching waveguiding structure front end and root, exposed portion is told conductive layer, and the front end of this conductive layer is an electrode;
Step 6: the long limit of a L type pcb board is fixed on the root of waveguiding structure, pcb board and the conductive layer that exposes are electrically connected.
Can find out that from technique scheme the present invention has following beneficial effect:
1, this optoelectronic pole array that is used for neural stimulation and electric signal record provided by the invention; Because the metal RP is the metallic film attached to the waveguide fiber surface; So light stimulus site and electric signal RP are overlapping on the locus; Realized stimulating object and the consistance that writes down object, guaranteed the reliable corresponding cause-effect relationship of data in neural engineering science research.
2, this optoelectronic pole array that is used for neural stimulation and electric signal record provided by the invention; It is the array device that forms by a plurality of optical fiber arrangements; The brain area that can study as required selects some or a plurality of electrodes to stimulate and record neatly, and this array device can simultaneously want to be connected with multiple light source, can realize the neuron activity under the multiple source stimulating; Analyze the restriction growth and decline relation of these conditions, can more fully analyze brain activity;
3, this optoelectronic pole array that is used for neural stimulation and electric signal record provided by the invention, technology is simple, realizes that cost is low, has process rationality.
Description of drawings
In order to further specify technology contents of the present invention, be elaborated below in conjunction with accompanying drawing and embodiment, wherein:
Fig. 1 is the optoelectronic pole array structure synoptic diagram that is used for neural stimulation and electric signal record provided by the invention;
Fig. 2 is the preparation method's process flow diagram that is used for the optoelectronic pole array of neural stimulation and electric signal record provided by the invention.
Embodiment
See also shown in Figure 1ly, the present invention provides a kind of optoelectronic pole array that is used for neural stimulation and electric signal record, comprising:
A plurality of waveguiding structures 10, this waveguiding structure 10 is whole cylindrical, and front end is taper; Be convenient to when body is implanted, insert in the tissue, reduce tissue damage, the quantity of said waveguiding structure 10 is greater than 1; Said each waveguiding structure 10 is a three-decker, and comprise from inside to outside: a ducting layer 11, is deposited on the conductive layer 12 of ducting layer 11 upper surfaces; And the uniform insulation course 13 of thickness that is deposited on ducting layer 11 and the conductive layer 12, the material of this ducting layer 11 is the optical fiber that silicon dioxide or plastics are processed, and utilizes the total reflection principle of light to constrain light in the transmission of being responsible for light in the waveguide; The material of this conductive layer 12 is metal, conducting polymer or Graphene, 12 last half surfaces of this conductive layer attached to ducting layer 11, and the conductive layer 12 that this part covers can be realized the extraction of electric signal on the one hand; On the other hand because the front end of ducting layer 11 presents the taper pattern; Cause light to form optical reflection, make luminous energy, realize the stimulatory function of light smoothly from the side output of conductive layer 12 is arranged in ducting layer 11 1 sides that no conductive layer 12 covers; The material of this insulation course 13 is a high molecular polymer; Mode through molecule deposition realizes the parcel in all directions to ducting layer 11 and conductive layer 12, and thickness is even, plays the effect of insulation; Through removing the tip portion insulation course 13 of waveguiding structure 10, obtain exposed portions conductive layer 12 and exercise the electric signal writing function as electrode.
A connector 20 is rectangle, and the one side of this connector 20 has the controlled connecting hole of a plurality of spacings; The diameter of the diameter in hole and waveguiding structure 10 is complementary; Said a plurality of waveguiding structure 10 is plugged in the connecting hole of connector 20, and the effect of connector 20 is that an end is responsible for fixing a plurality of waveguiding structures 10, forms the array structure of spacing and controllable number; The other end is responsible for connecting a plurality of light sources, makes luminous energy stably pass in the afferent echo guide structure 10;
One pcb board 30; This pcb board 30 is the L type; The long limit of this pcb board 30 is fixed on the root of a plurality of waveguiding structures 10 abreast, root be with connector 20 near an end, with each waveguiding structure 10 corresponding connection end point is arranged on this pcb board 30; This pcb board 30 electrically connects with the conductive layer 12 of waveguiding structure 10 roots, and the electric signal that this pcb board 30 collects waveguiding structure 10 as a converting interface is connected on the interface of external analysis equipment.
See also shown in Figure 2ly, combine to consult Fig. 1 simultaneously, the present invention also provides a kind of preparation method who is used for the optoelectronic pole array of neural stimulation and electric signal record, comprises the steps:
Step 1: the connector 20 of getting a plurality of cylindrical wave conducting shells 11 and a rectangle; The one side of this connector 20 has a plurality of connecting holes; One end of a plurality of ducting layers 11 is inserted in the connecting hole of connector 20, forms the controlled arrayed of spacing, the material of this ducting layer 11 is the optical fiber of silicon dioxide;
Step 2: corrosion ducting layer 11 front ends, making ducting layer 11 front ends is taper, the pattern of taper is beneficial to entire device and is punctured to and stimulates in the biological tissue and record;
Step 3: at the upper surface depositing conducting layer 12 of ducting layer 11; This conductive layer 12 only covers the one side of ducting layer 11 towards evaporation source through the method for thermal evaporation; The conductive layer 12 that this part covers can be realized the extraction of electric signal on the one hand, does not influence the output of light from ducting layer 10 on the other hand;
Step 4: depositing insulating layer 13 on conductive layer 12 and ducting layer 11, the material of this insulation course 13 is a high molecular polymer, 13 pairs of ducting layers of this insulation course 11 form omnibearing tight parcel with conductive layer 12.Ducting layer 11, conductive layer 12 and the insulation course 13 common waveguiding structures 10 that form, the quantity of said waveguiding structure 10 is greater than 1;
Step 5: adopt the method for photoetching or laser ablation, the insulation course 13 of etching waveguiding structure 10 front ends and root, exposed portion is told conductive layer 12, and the area of exposure can be crossed through photoetching or laser and control.Partially conductive layer 12 at waveguiding structure 10 front ends forms the electrode that can carry out the electric signal record;
Step 6: the long limit of a L type pcb board 30 is fixed on the root of waveguiding structure 10, pcb board 30 and the conductive layer that exposes 12 are electrically connected, the effect of this pcb board 30 is that conductive layer 12 is connected with the external electrical analytical equipment.
Introduce this optoelectronic pole array and the preparation method who is used for neural stimulation and electric signal record provided by the invention for more well-known, combine concrete embodiment to describe once.
The silica fibre of step 1, selection internal diameter 62.5um; As ducting layer 11; Select then commercial 12 general passage optical fiber converting interface MPO heads as connector 20, optical fiber is removed protective seam, be cut into totally 6 sections of the long fiber segments of the smooth 5cm of section with the optical fiber cutter; Directly insert in the V-type groove of connector 20, and fix with casting glue.
Step 2, select for use concentration be 40% hydrofluorite as corrosive liquid, the 11 vertical liquid level static corrosion 90min that insert form the taper patterns with ducting layer.
Step 3, use thermal evaporation method at ducting layer 11 towards a side deposit thickness of evaporation source as the chromium of 50nm and thickness as the gold of 200nm as conductive layer 12.
Step 4, adopt film growth apparatus at ducting layer 11 and conductive layer 12 superficial growth layer of transparent organism parylene as insulation course 13, the thickness of parylene is 2um.
Step 5, do mask with photoresist; The parylene of etching insulation course 13 tips and root, lithographic method is a reactive ion etching, etching gas is the mixed gas of oxygen and argon gas; Expose most advanced and sophisticated partially conductive layer 12, formation can be write down the electrode of electric signal.
Step 6, conductive layer 12 and pcb board 13 that root is exposed weld together, and form to electrically connect, and utilize casting glue with pcb board 30 and the connector 20 increase fastness that is fixed together.The other end of pcb board is responsible for being connected with the external electrical analytical equipment.
Above-described specific embodiment; Be that the object of the invention, technical scheme and beneficial effect have been carried out further explain; All within spirit of the present invention and principle, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (9)

1. optoelectronic pole array that is used for neural stimulation and electric signal record comprises:
A plurality of waveguiding structures, this waveguiding structure are cylindrical;
A connector is rectangle, and the one side of this connector has a plurality of connecting holes, and said waveguiding structure is plugged in the connecting hole of connector;
One pcb board, this pcb board are the L type, and the long limit of this pcb board is fixed on the root of waveguiding structure.
2. the optoelectronic pole array that is used for biological neuron stimulation and electroneurographic signal record according to claim 1, the quantity of wherein said waveguiding structure is greater than 1.
3. the optoelectronic pole array that is used for biological neuron stimulation and electroneurographic signal record according to claim 2; Wherein said each waveguiding structure is a three-decker; Comprise a ducting layer; One is deposited on the conductive layer on the ducting layer, and the insulation course that is deposited on the conductive layer, and the front end of this conductive layer is an electrode.
4. the optoelectronic pole array that is used for biological neuron stimulation and electroneurographic signal record according to claim 3; Wherein the material of this ducting layer is silicon dioxide or plastics; The material of this conductive layer is metal, conducting polymer or Graphene, and the material of this insulation course is a high molecular polymer.
5. the optoelectronic pole array that is used for biological neuron stimulation and electroneurographic signal record according to claim 1, wherein the front end of this waveguiding structure is taper.
6. the optoelectronic pole array that is used for biological neuron stimulation and electroneurographic signal record according to claim 1, wherein the conductive layer in this pcb board and the waveguiding structure electrically connects.
7. a preparation method who is used for the optoelectronic pole array of neural stimulation and electric signal record comprises the steps:
Step 1: get the connector of a plurality of cylindrical wave conducting shells and a rectangle, the one side of this connector has a plurality of connecting holes, and an end of ducting layer is added in the connecting hole of connector;
Step 2: corrosion ducting layer front end, making the ducting layer front end is taper;
Step 3: at ducting layer upper surface depositing conducting layer;
Step 4: depositing depositing insulating layer on the ducting layer of conductive layer, forming waveguiding structure;
Step 5: adopt the method for photoetching or laser ablation, the insulation course of etching waveguiding structure front end and root, exposed portion is told conductive layer, and the front end of this conductive layer is an electrode;
Step 6: the long limit of a L type pcb board is fixed on the root of waveguiding structure, pcb board and the conductive layer that exposes are electrically connected.
8. the preparation method who is used for the optoelectronic pole array of neural stimulation and electric signal record according to claim 7, the quantity of wherein said waveguiding structure is greater than 1.
9. the preparation method who is used for the optoelectronic pole array of neural stimulation and electric signal record according to claim 7; Wherein the material of this ducting layer is silicon dioxide or plastics; The material of this conductive layer is metal, conducting polymer or Graphene, and the material of this insulation course is a high molecular polymer.
CN2012103586862A 2012-09-24 2012-09-24 Photoelectrode array for neuron stimulation and electric signal recording and preparing method of array Pending CN102830138A (en)

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CN103462600A (en) * 2013-09-04 2013-12-25 中国科学院深圳先进技术研究院 Photoelectrode component and in-vivo photoelectrode imaging system
CN103768709A (en) * 2014-01-21 2014-05-07 中国科学院半导体研究所 Electrode pin header used for assembling nerve-cell microelectrode array
CN108187147A (en) * 2018-02-06 2018-06-22 广东泰宝医疗器械技术研究院有限公司 A kind of CO2 laser weld stent and preparation method thereof
CN109171718A (en) * 2018-08-03 2019-01-11 北京大学 Microneedle electrodes array apparatus
CN109793502A (en) * 2019-03-15 2019-05-24 中国科学院半导体研究所 Neuron activity detection method and detection system
CN110231682A (en) * 2019-05-09 2019-09-13 上海大学 A kind of photoelectric fiber-optical and production method for nervous activity regulation
CN110946660A (en) * 2019-12-30 2020-04-03 中国科学技术大学 Adjustable double-hole core inserting needle clamping device and stereotaxic apparatus comprising same

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CN103462600A (en) * 2013-09-04 2013-12-25 中国科学院深圳先进技术研究院 Photoelectrode component and in-vivo photoelectrode imaging system
CN103768709A (en) * 2014-01-21 2014-05-07 中国科学院半导体研究所 Electrode pin header used for assembling nerve-cell microelectrode array
CN108187147A (en) * 2018-02-06 2018-06-22 广东泰宝医疗器械技术研究院有限公司 A kind of CO2 laser weld stent and preparation method thereof
CN109171718A (en) * 2018-08-03 2019-01-11 北京大学 Microneedle electrodes array apparatus
CN109171718B (en) * 2018-08-03 2020-11-20 北京大学 Microneedle electrode array device
CN109793502A (en) * 2019-03-15 2019-05-24 中国科学院半导体研究所 Neuron activity detection method and detection system
CN109793502B (en) * 2019-03-15 2021-03-05 中国科学院半导体研究所 Neuron activity detection method and detection system
CN110231682A (en) * 2019-05-09 2019-09-13 上海大学 A kind of photoelectric fiber-optical and production method for nervous activity regulation
CN110946660A (en) * 2019-12-30 2020-04-03 中国科学技术大学 Adjustable double-hole core inserting needle clamping device and stereotaxic apparatus comprising same
CN110946660B (en) * 2019-12-30 2021-05-07 中国科学技术大学 Adjustable double-hole core inserting needle clamping device and stereotaxic apparatus comprising same

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Application publication date: 20121219