CN102820422A - Monolithic piezoelectric transducer and manufacturing method thereof - Google Patents
Monolithic piezoelectric transducer and manufacturing method thereof Download PDFInfo
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- CN102820422A CN102820422A CN2012103014914A CN201210301491A CN102820422A CN 102820422 A CN102820422 A CN 102820422A CN 2012103014914 A CN2012103014914 A CN 2012103014914A CN 201210301491 A CN201210301491 A CN 201210301491A CN 102820422 A CN102820422 A CN 102820422A
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Abstract
The invention provides a monolithic piezoelectric transducer and a manufacturing method thereof. The transducer comprises a piezoelectric piece, wherein a first drive interdigital electrode and a second drive interdigital electrode are respectively arranged on the upper surface and the lower surface of the piezoelectric piece; a first grounding interdigital electrode and a second grounding interdigital electrode are also respectively arranged on the upper surface and the lower surface of the piezoelectric piece; the first grounding interdigital electrode is electrically connected with the second grounding interdigital electrode to form a common grounding electrode; and under the action of a direct-current voltage applied to the first drive interdigital electrode, the second drive interdigital electrode and the common grounding electrode, cross polarization areas are respectively formed on the upper surface piezoelectric layer and the lower surface piezoelectric layer of the piezoelectric piece. The piezoelectric transducer provided by the invention is simple in structure and convenient to implement, and can be used as a piezoelectric bending motion driver, or conversely used as a sensor for sensing the bending vibration or the bending displacement generated by a sound wave, a pressure, vibration, acceleration and the like; and moreover, the piezoelectric transducer can work in high-and-low temperature severe environment.
Description
Technical field
The present invention relates to the piezoelectric device technology, relate in particular to a kind of monolithic piezoelectric transducer that is operated in end compression electricity, curved motor pattern and preparation method thereof.
Background technology
PZT (piezoelectric transducer) be utilize piezoelectric just, the intelligent device made of inverse piezoelectric effect; Have that size is little, good linearity, convenient, the characteristics such as displacement resolution is high, frequency response good, energy consumption is low, noiseless of control, obtained extensive use at high-technology fields such as precision optics, micromachine, microelectric techniques.
At present; As rigid displacement driver common in the PZT (piezoelectric transducer); Mainly comprise multiple field driver, rainbow formula (Rainbow) driver, month dentition formula (Moonie) driver, cymbals formula (Cymbals) driver and single (two) crystal chip driver etc., wherein, the bearing capacity of multiple field driver is big; But complex manufacturing technology, displacement is little; In order to obtain bigger displacement; PZT (piezoelectric transducer) generally is designed and is operated in a curved-motor pattern; For example common Rainbow driver, Moonie driver and Cymbals driver etc.; PZT (piezoelectric transducer) can zoom into the bending displacement that flexure strip is big with the micro-displacement that piezoelectrics produce through a curved-pattern.But a curved-motor pattern transducer architecture is comparatively complicated; Single (two) crystal chip driver of tradition is that one or two piezoelectric patches and a metallic elastic sheet are combined into cantilever beam structure, through the asymmetric stretch of piezoelectric patches along y direction, directly obtains bigger bending displacement.This transducer has advantages such as simple in structure, that displacement is big; But their making need be used organic binder bond different flaky materials are combined with each other; Be unwell to extreme severe rugged environment; For example the high and low temperature environment uses down, and what utilize is horizontal low tension coefficient d 31 pattern work, the Piezoelectric Driving poor-performing.
To sum up, existing piezoelectric actuator adopts layer structure usually, the complex structure of piezoelectric device, and complex manufacturing technology, cost of manufacture is high; Simultaneously, the bound fraction restriction because of layer structure causes the adaptability of piezoelectric actuator environment relatively poor, and particularly high temperature or low temperature environment use down and be restricted.
Summary of the invention
The present invention provides a kind of monolithic piezoelectric transducer and preparation method thereof; Can effectively overcome complex structure and the relatively poor defective of environmental suitability that existing layer structure piezoelectric device exists; Can simplify the structure and the manufacture craft of PZT (piezoelectric transducer), make PZT (piezoelectric transducer) have better environmental suitability.
The present invention provides a kind of monolithic piezoelectric transducer, comprising:
Piezoelectric patches, the upper surface of said piezoelectric patches and lower surface are respectively arranged with first and drive the interdigital electrode and the second driving interdigital electrode, and the said first driving interdigital electrode and second drives interdigital electrode and is symmetrical set up and down;
The upper surface of said piezoelectric patches and lower surface also are respectively arranged with the first earthy interdigital electrode and the second ground connection interdigital electrode; The said first ground connection interdigital electrode and the second ground connection interdigital electrode are arranged in a crossed manner relatively with the said first driving interdigital electrode and the second driving interdigital electrode respectively at the upper surface and the lower surface of said piezoelectric patches; And the said first ground connection interdigital electrode and the second ground connection interdigital electrode are electrically connected through the side electrode of said piezoelectric patches, constitute the common ground electrode;
Said piezoelectric patches drives interdigital electrode, second and drives under the direct voltage effect of interdigital electrode and common ground electrode through being applied to said first, forms the cross polarization zone respectively at the upper surface piezoelectric layer and the lower surface piezoelectric layer of said piezoelectric patches.
In the above-mentioned monolithic piezoelectric transducer, the voltage that is applied on the said common ground electrode is earthed voltage V3=0, and the voltage that is applied to the said first driving interdigital electrode is V1, and the voltage that is applied to the said second driving interdigital electrode is V2.
Above-mentioned monolithic piezoelectric transducer can be used as piezoelectric actuator; Under the driving voltage effect that is applied on the said first driving interdigital electrode and the second driving interdigital electrode; Upper surface piezoelectric layer through said piezoelectric patches and vertical piezoelectric d 33 patterns of lower surface piezoelectric layer and along the asymmetric strain of the upper surface and the lower surface of y direction make said piezoelectric patches produce flexural vibrations or curved displacement along thickness direction.
Above-mentioned monolithic piezoelectric transducer also can be used as sonic test transducer, pressure test transducer, vibration-testing transducer or acceleration test transducer.
The present invention also provides a kind of manufacture method of monolithic piezoelectric transducer, comprising:
Upper surface at piezoelectric patches is provided with the first driving interdigital electrode and the first ground connection interdigital electrode; Lower surface at said piezoelectric patches is provided with the second driving interdigital electrode and the second ground connection interdigital electrode; Wherein, The said first driving interdigital electrode and second drives interdigital electrode and is symmetrical set up and down, and the said first ground connection interdigital electrode and the second ground connection interdigital electrode are arranged in a crossed manner relatively with the said first driving interdigital electrode and the second driving interdigital electrode respectively at the upper surface and the lower surface of said piezoelectric patches;
The said first ground connection interdigital electrode and the second ground connection interdigital electrode side electrode through said piezoelectric patches is electrically connected, constitutes the common ground electrode;
Drive interdigital electrode, the second driving interdigital electrode and common ground electrode said first and apply direct voltage; Upper surface piezoelectric layer and lower surface piezoelectric layer to said piezoelectric patches carry out cross polarization, make the upper surface piezoelectric layer of said piezoelectric patches and lower surface piezoelectric layer form the cross polarization zone respectively.
In the manufacture method of above-mentioned monolithic piezoelectric transducer; At the upper surface and the lower surface of said piezoelectric patches, make first through modes such as sputter or printings respectively and drive interdigital electrode, second driving interdigital electrode, the first ground connection interdigital electrode and the second ground connection interdigital electrode.
In addition, the present invention also provides a kind of monolithic piezoelectric transducer, comprising:
Piezoelectric patches, the upper surface of said piezoelectric patches and lower surface are respectively arranged with first and drive the interdigital electrode and the second ground connection interdigital electrode, and the said first driving interdigital electrode and the second ground connection interdigital electrode are symmetrical set up and down;
The upper surface of said piezoelectric patches and lower surface also are respectively arranged with the first ground connection interdigital electrode and second and drive interdigital electrode; It is arranged in a crossed manner relatively with the said first driving interdigital electrode and the second ground connection interdigital electrode respectively at the upper surface and the lower surface of said piezoelectric patches that the said first ground connection interdigital electrode and second drives interdigital electrode, and said first ground connection interdigital electrode and second ground connection interdigital electrode formation common ground electrode;
Said piezoelectric patches drives interdigital electrode, second and drives under the direct voltage effect of interdigital electrode and common ground electrode through being applied to said first, forms the cross polarization zone respectively at the upper surface piezoelectric layer and the lower surface piezoelectric layer of said piezoelectric patches.
Correspondingly, the present invention also provides a kind of manufacture method of monolithic piezoelectric transducer, comprising:
Upper surface at piezoelectric patches is provided with the first driving interdigital electrode and the first ground connection interdigital electrode; Lower surface at said piezoelectric patches is provided with the second driving interdigital electrode and the second ground connection interdigital electrode; Wherein, The said first driving interdigital electrode and the second ground connection interdigital electrode are symmetrical set up and down; It is arranged in a crossed manner relatively with the said first driving interdigital electrode and the second ground connection interdigital electrode respectively at the upper surface and the lower surface of said piezoelectric patches that the said first ground connection interdigital electrode and second drives interdigital electrode, and the said first ground connection interdigital electrode and the second ground connection interdigital electrode constitute the common ground electrode;
Drive interdigital electrode, the second driving interdigital electrode and common ground electrode said first and apply direct voltage; Upper surface piezoelectric layer and lower surface piezoelectric layer to said piezoelectric patches carry out cross polarization, make the upper surface piezoelectric layer of said piezoelectric patches and lower surface piezoelectric layer form the cross polarization zone respectively.
Monolithic piezoelectric transducer provided by the invention adopts individual layer piezoelectric patches structure; Through making interdigital electrode on the piezoelectric patches surface; And carry out cross polarization, can make piezoelectric patches upper and lower surfaces layer be operated in vertical piezoelectric d 33 patterns, and can be flexible along piezoelectric patches y direction antisymmetry; The twin lamella PZT (piezoelectric transducer) that works in horizontal piezoelectric d 31 patterns that this is traditional relatively can more effective generation flexural vibrations or curved displacement during as driver; Because it is much little that the capacitance of the relative layer structure of interdigital electrode structure of piezoelectric patches is wanted, the power that under equal driven condition, is consumed can be still less; Simultaneously, during as transducer, the interdigital electrode of piezoelectric patches upper and lower surfaces can produce a pair of differential output signal under the bending strain effect, thereby has higher sensing sensitivity; In addition, because the monolithic piezoelectric transducer provided by the invention piezoelectricity single chip architecture that is non-stratiform, so have advantage such as better variation of ambient temperature adaptability.PZT (piezoelectric transducer) provided by the invention is simple in structure, and is easy to make, can effectively reduce cost of manufacture, need not use simultaneously the not material of high-and low-temperature resistance such as organic binder bond in traditional sandwich construction, can more effectively under adverse circumstances such as high low temperature, work.
Description of drawings
The volume rendering structural representation of the PZT (piezoelectric transducer) that Fig. 1 provides for the embodiment of the invention one;
Fig. 2 is the upper surface electrode distribution schematic diagram of PZT (piezoelectric transducer) among Fig. 1;
Fig. 3 is the lower surface electrode distribution schematic diagram of PZT (piezoelectric transducer) among Fig. 1;
Fig. 4 A is a kind of sketch map that the crossed electrode along the length direction of piezoelectric patches that produced in upper surface piezoelectric layer and the lower surface piezoelectric layer of piezoelectric patches in the embodiment of the invention divides cloth;
Fig. 4 B is the another kind of sketch map that the crossed electrode along the length direction of piezoelectric patches that produced in upper surface piezoelectric layer and the lower surface piezoelectric layer of piezoelectric patches in the embodiment of the invention divides cloth;
The bending deformation sketch map that the PZT (piezoelectric transducer) that Fig. 5 provides for the embodiment of the invention produces under driven;
The volume rendering structural representation of the PZT (piezoelectric transducer) that Fig. 6 provides for the embodiment of the invention two;
Fig. 7 is the upper surface electrode distribution schematic diagram of PZT (piezoelectric transducer) among Fig. 6;
Fig. 8 is the lower surface electrode distribution schematic diagram of PZT (piezoelectric transducer) among Fig. 6;
The manufacture method schematic flow sheet of the PZT (piezoelectric transducer) that Fig. 9 provides for the embodiment of the invention three;
The manufacture method schematic flow sheet of the PZT (piezoelectric transducer) that Figure 10 provides for the embodiment of the invention four.
Embodiment
The volume rendering structural representation of the PZT (piezoelectric transducer) that Fig. 1 provides for the embodiment of the invention one; Fig. 2 is the upper surface electrode distribution schematic diagram of PZT (piezoelectric transducer) among Fig. 1; Fig. 3 is the lower surface electrode distribution schematic diagram of PZT (piezoelectric transducer) among Fig. 1.Like Fig. 1-shown in Figure 3; The present embodiment PZT (piezoelectric transducer) comprises piezoelectric patches 11; The upper surface of this piezoelectric patches 11 and lower surface are respectively arranged with first and drive the interdigital electrode 21 and the second driving interdigital electrode 22; And the first driving interdigital electrode 21 and second drives interdigital electrode 22 and is symmetrical set up and down, and promptly the first driving interdigital electrode 21 and second drives interdigital electrode 22 about being provided with in the face of title in the piezoelectric patches thickness; The upper surface of this piezoelectric patches 11 and lower surface also are respectively arranged with the first ground connection interdigital electrode 231 and the second ground connection interdigital electrode 232, and the first ground connection interdigital electrode 231 and the second ground connection interdigital electrode 232 to drive interdigital electrode 21 arranged in a crossed manner relatively with the second driving interdigital electrode 22 with two first of the upper and lower surface of piezoelectric patches respectively; The first ground connection interdigital electrode 231 and the second ground connection interdigital electrode 232 are electrically connected formation common ground electrode 23 through the side electrode 233 of piezoelectric patches 11; Piezoelectric patches 11 drives under the direct voltage effect of interdigital electrode 21, the second driving interdigital electrode 22 and common ground electrode 23 through being applied to first; Form the crossed electrode that is arc line type along piezoelectric patches 11 length directions respectively at the upper surface piezoelectric layer of piezoelectric patches 11 and lower surface piezoelectric layer and divide cloth, promptly form the cross polarization zone.The present embodiment PZT (piezoelectric transducer) is single piezoelectric patches structure; Can be used as piezoelectric actuator; Upper surface and lower surface through at piezoelectric patches are provided with interdigital electrode respectively, and form crossed electrodeization along its length on the surface of piezoelectric patches, like this; Be applied under the driving voltage effect that respectively drives interdigital electrode; The upper and lower piezoelectric layer of piezoelectric patches can be operated in vertical piezoelectric d 33 patterns, but along the asymmetric stretch of piezoelectric patches y direction, thereby can cause piezoelectric patches to produce the curved vibration or the flexural deformation of thickness direction.
It will be understood by those skilled in the art that above-mentioned interdigital electrode is on the main electrode, be distributed with a plurality of branch electrodes that the same direction in a plurality of edges is arranged, like the structure of the first driving interdigital electrode 21 among Fig. 2.In the present embodiment, the described first driving interdigital electrode 21 and the first ground connection interdigital electrode 231 are arranged in a crossed manner relatively, just are meant that two branch electrodes in the interdigital electrode are arranged in a crossed manner.
Fig. 4 A is a kind of sketch map that the crossed electrode along the length direction of piezoelectric patches that produced in upper surface piezoelectric layer and the lower surface piezoelectric layer of piezoelectric patches in the embodiment of the invention divides cloth.In the present embodiment; Between a pair of driving interdigital electrode on the upper and lower surface of piezoelectric patches 11 and a pair of common ground electrode, apply suitable direct voltage; Just can in the upper and lower surperficial piezoelectric layer of piezoelectric patches 11, form respectively, i.e. the crossed electrodeization of the length direction of piezoelectric patches along y direction; Particularly, can apply voltage V1 driving on the interdigital electrode 21, drive on the interdigital electrode 22 second and apply voltage V2 like first of Fig. 1-shown in Figure 3; On common ground electrode 23, apply voltage V3, and make V1=V2, V3=0; Be about to common ground electrode 23 ground connection; The first driving interdigital electrode 21 and second drives on the interdigital electrode 22 and applies identical voltage, like this, between each two adjacent interdigital electrode, will produce the electric polarization distribution that is arc shaped along y direction.Shown in Fig. 4 A, near the polarization in upper and lower surfaces zone, be in the other direction between each adjacent interdigital electrode, but their arc shape electric polarization is about piezoelectric patches thickness center line C-C ' symmetrical distribution in the piezoelectric patches.
Fig. 4 B is the another kind of sketch map that the crossed electrode along the length direction of piezoelectric patches that produced in upper surface piezoelectric layer and the lower surface piezoelectric layer of piezoelectric patches in the embodiment of the invention divides cloth.Different with above-mentioned Fig. 4 A is; When applying voltage formation crossed electrode; The voltage V1=-V2 that applies, like this, the arc-shaped electrode direction that forms at the upper and lower surfaces relative position of piezoelectric patches 11 is opposite; Promptly up and down in the piezoelectric layer arc shape electrode be to distribute about piezoelectric patches thickness center line C-C ' antisymmetry, shown in Fig. 4 B.
The present embodiment PZT (piezoelectric transducer) can be used as piezoelectric actuator and uses; Drive interdigital electrode 21, second and drive under the driving voltage effect of interdigital electrode 22 and common ground electrode 23 being applied to first, the piezoelectric patches driver can produce needed along thickness direction flexural deformation or length direction distortion.The driving voltage that facility is added in the first driving interdigital electrode 21 is V1, and the driving voltage that is applied to the second driving interdigital electrode 22 is V2, and common ground electrode 23 is generally the earth potential (zero potential) of driving voltage, is used for ground connection.
Under the polarization effect situation of the piezoelectric patches shown in Fig. 4 A, < 0, piezoelectric patches will extend so as if V1=V2; If V1=V2>0, piezoelectric patches will shorten so; If V1=-V2, or V1 ≠ V2, piezoelectric patches will be because of upper surface piezoelectric layer and the asymmetric strain of lower surface piezoelectric layer along y direction so, and the flexural deformation of generation thickness direction is as shown in Figure 5.The method of this asymmetric driving and generating bending strain because of having overcome the interface strain loss of layer structure transducer, can make piezoelectric actuator have the better driving effect.Therefore, if V1 and V2 are the alternating voltage that same-phase and amplitude equate, then piezoelectric patches will produce vibration along its length; If V1 and V2 are the alternating voltage (also pre-bias voltage can be arranged) of antiphase; Then piezoelectric patches will produce the curved vibration along thickness direction; Thus; Through selecting suitable V1 and V2 just can realize piezoelectric patches vibration along the longitudinal direction, or along the flexural vibrations of thickness direction, thereby realize the specific drive function of driver.
Similarly, under the polarization effect situation of the piezoelectric patches shown in Fig. 4 B, < 0, piezoelectric patches will extend so as if V1=-V2; If V1=-V2>0, piezoelectric patches will shorten so; If V1=V2, or V1 ≠-V2, then piezoelectric patches will produce the flexural deformation along thickness direction, and this is the bending strain method that another kind of asymmetric driving produces.Therefore, if during the alternating voltage that V1 and V2 are antiphase and amplitude to be equated, piezoelectric patches will produce along its length and vibrate; If when V1 and V2 were synchronous alternating voltage (also pre-bias voltage can be arranged), piezoelectric patches will produce the flexural vibrations along thickness direction, thereby can realize the bending strain specific drive function of piezoelectric actuator more easily.
Can find out, when the present embodiment PZT (piezoelectric transducer) uses as piezoelectric actuator, can utilize inverse piezoelectric effect, realize the certain variations and the vibrating function of piezoelectric actuator, convert electrical energy into mechanical energy being applied under the voltage effect that respectively drives interdigital electrode.Simultaneously, the piezoelectric patches in the PZT (piezoelectric transducer) is a single chip architecture, and cross polarization, and piezoelectric patches can work in vertical piezoelectric d 33 patterns.Because vertical piezoelectric coefficient d 33 of piezoelectric patches is the twice of horizontal piezoelectric coefficient d 31 normally, therefore, piezoelectric patches is operated under vertical piezoelectric d 33 patterns, has better Piezoelectric Driving performance, can obtain the better driving effect.
In addition, the present embodiment PZT (piezoelectric transducer) also can be used as sonic test transducer, pressure test transducer, vibration-testing transducer or acceleration test electric transducer, does the time spent when piezoelectric transducer receives external force; Because of bending strain can produce voltage, thereby, just can confirm the size of external force through detecting the size of voltage; Particularly, when using, the one or both ends of piezoelectric patches are fixed as piezoelectric transducer; And with common ground electrode 23 ground connection; The first driving interdigital electrode 21 and second drives interdigital electrode 22 and is connected to oscilloscope or potentiometer as signal output part respectively, applies multi-form and big or small external force at the other end or the middle part of piezoelectric patches, observes and also writes down the voltage output that is measured; According to the size of the magnitude of voltage that measures, just can obtain to be applied to the pressure size information on the piezoelectric patches.For ease of explanation, suppose first, to drive the voltage that interdigital electrode 21 places produce be V1 ', second drive the generation of interdigital electrode 22 places voltage be V2 ', the voltage that then produces under like Fig. 4 A or Fig. 4 B situation is explained as follows respectively.
When piezoelectric patches under the piezoelectric patches polarization effect situation shown in Fig. 4 A, if the external force that is applied to the piezoelectric patches other end can make piezoelectric patches produce compression or elongation strain, the voltage V1 '=V2 ' that then produces; That piezoelectric patches is produced is crooked if be applied to external force on the piezoelectric patches, and the voltage V1 ' and the V2 ' that then produce will equate, but phase place is opposite, promptly V1 '=-V2 '; If externally applied forces makes piezoelectric patches produce vibration along its length, then V1 ' and V2 ' equate and cyclic variation; If externally applied forces produces along the thickness direction swing piezoelectric patches, then V1 ' and V2 ' equate and anti-phase and cyclic variation.
When piezoelectric patches under the piezoelectric patches polarization effect situation shown in Fig. 4 B, if externally applied forces makes piezoelectric patches produce compression or elongation strain, then V1 '=-V2 '; If it is crooked that externally applied forces produces piezoelectric patches, then V1 ' and V2 ' homophase, i.e. V1 '=V2 '; If externally applied forces vibrates piezoelectric patches along its length, then V1 ' and V2 ' anti-phase and cyclic variation; If externally applied forces makes piezoelectric patches swing along thickness direction, then equal, homophase of V1 ' and V2 ' and cyclic variation.
It will be understood by those skilled in the art that size according to detected V1 ' and V2 ', and V1 ' with the voltage of V2 ' positive and negative or phase place, just can confirm piezoelectric patches stressed situation.When the present embodiment PZT (piezoelectric transducer) uses as transducer; Acoustic pressure to be detected, acceleration force etc. can force piezoelectric patches to produce curved displacement or curved vibration, thereby will produce a pair of differential output signal at the V1 ' and the V2 ' of two signal output part outputs of piezoelectric patches; This can accurately obtain sound wave, acceleration signal through a differential amplifier very easily.Monolithic piezoelectric transducer of the present invention has low-frequency response and higher detection precision preferably, but the accurate sensing function of realizable force, sound, acceleration.
The volume rendering structural representation of the PZT (piezoelectric transducer) that Fig. 6 provides for the embodiment of the invention two; Fig. 7 is the upper surface electrode distribution schematic diagram of PZT (piezoelectric transducer) among Fig. 6; Fig. 8 is the lower surface electrode distribution schematic diagram of PZT (piezoelectric transducer) among Fig. 6.Different with above-mentioned Fig. 1-technical scheme embodiment illustrated in fig. 5 is; In the present embodiment; It is antisymmetry setting at the upper and lower surfaces of piezoelectric patches that the first driving interdigital electrode and second drives interdigital electrode, and accordingly, the first ground connection interdigital electrode and the second ground connection interdigital electrode also are the antisymmetry settings at the upper and lower surfaces of piezoelectric patches; Particularly; As shown in Figure 6, in the present embodiment, the first driving interdigital electrode 21 and the second ground connection interdigital electrode 232 are symmetrical set up and down; Promptly first drive interdigital electrode 21 and the second ground connection interdigital electrode 232 about being provided with in the face of claiming in the piezoelectric patches thickness, and the first ground connection interdigital electrode 231 and the second driving interdigital electrode 22 are arranged in a crossed manner relatively with two the first driving interdigital electrodes 21 and the second ground connection interdigital electrode 232 on the upper and lower surface of piezoelectric patches respectively; The first ground connection interdigital electrode 231 and the second ground connection interdigital electrode 232 form common ground electrode 23 through being electrically connected; Piezoelectric patches 11 drives under the direct voltage effect of interdigital electrode 21, the second driving interdigital electrode 22 and common ground electrode 23 through being applied to first; Form the crossed electrode that is arc line type along piezoelectric patches 11 length directions respectively at the upper surface piezoelectric layer of piezoelectric patches 11 and lower surface piezoelectric layer and divide cloth; Promptly form the cross polarization zone, its polarization effect can be referring to shown in Fig. 4 A or the 4B.
In the present embodiment,, just can produce the polarization distribution effect shown in Fig. 4 A through applying suitable voltage at each electrode; Particularly, like Fig. 6-shown in Figure 8, can drive on the interdigital electrode 21 first and apply voltage V1; On the second driving interdigital electrode 22, apply voltage V2; On common ground electrode 23, apply voltage V3, promptly the first ground connection interdigital electrode 231 and the second ground connection interdigital electrode 232 meet voltage V3 simultaneously, constitute common ground electrode 23 and make V1=-V2; V3=0 carries out respectively and goes up piezoelectric layer and the polarization of lower piezoelectric layer.Like this, between each two adjacent interdigital electrode, will produce the electric polarization distribution that is arc shaped along y direction, shown in Fig. 4 A.
In addition; When applying voltage formation crossed electrode; If the voltage that applies is V1=V2, like this, the arc-shaped electrode direction that forms at the upper and lower surfaces relative position of piezoelectric patches 11 is opposite; Promptly up and down in the piezoelectric layer arc shape electric polarization be to distribute about piezoelectric patches thickness center line C-C ' antisymmetry, thereby can produce the polarization distribution shown in Fig. 4 B.
In the present embodiment, when PZT (piezoelectric transducer) used as piezoelectric actuator, under the polarization effect situation of the piezoelectric patches shown in Fig. 4 A, < 0, piezoelectric patches will extend so as if V1=-V2; If V1=-V2>0, piezoelectric patches will shorten so; If V1 ≠-V2, piezoelectric patches will produce the flexural deformation of thickness direction so.Therefore, if V1 and V2 are the alternating voltage that antiphase and amplitude equate, then piezoelectric patches will produce vibration along its length; If V1 and V2 are synchronous alternating voltage (also pre-bias voltage can be arranged); Then piezoelectric patches will produce the curved vibration along thickness direction; Thus; Through selecting suitable V1 and V2 just can realize piezoelectric patches vibration along the longitudinal direction, or along the flexural vibrations of thickness direction, thereby realize the specific drive function of driver.
In the present embodiment, under the polarization effect situation of the piezoelectric patches shown in Fig. 4 B, < 0, piezoelectric patches will extend so as if V1=V2; If V1=V2>0, piezoelectric patches will shorten so; If V1 ≠ V2, then piezoelectric patches will produce the flexural deformation along thickness direction.Therefore, if during the alternating voltage that V1 and V2 are same-phase and amplitude to be equated, piezoelectric patches will produce along its length and vibrate; If when V1 and V2 were the alternating voltage (also pre-bias voltage can be arranged) of antiphase, piezoelectric patches will produce the flexural vibrations along thickness direction, thereby can realize the bending strain specific drive function of piezoelectric actuator more easily.
In addition; The present embodiment PZT (piezoelectric transducer) is when using as piezoelectric transducer; The one or both ends of piezoelectric patches are fixed, and with common ground electrode 23 ground connection, the first driving interdigital electrode 21 and second drives interdigital electrode 22 and is connected to oscilloscope or potentiometer as signal output part respectively; The other end or middle part at piezoelectric patches apply multi-form and big or small external force; Observe and write down the voltage output that is measured,, just can obtain to be applied to the pressure size information on the piezoelectric patches according to the size of the magnitude of voltage that measures.For ease of explanation, suppose first, to drive the voltage that interdigital electrode 21 places produce be V1 ', second drive the generation of interdigital electrode 22 places voltage be V2 ', the voltage that then produces under like Fig. 4 A or Fig. 4 B situation is explained as follows respectively.
When piezoelectric patches under the piezoelectric patches polarization effect situation shown in Fig. 4 A, if the external force that is applied to the piezoelectric patches other end can make piezoelectric patches produce compression or elongation strain, the voltage V1 ' that then produces=-V2 '; If the external force that is applied on the piezoelectric patches makes piezoelectric patches produce bending, then the voltage V1 ' and the V2 ' of generation will equate, i.e. V1 '=V2 '; If externally applied forces makes piezoelectric patches produce vibration along its length, then equal, anti-phase of V1 ' and V2 ' amplitude and cyclic variation; If externally applied forces produces along the thickness direction swing piezoelectric patches, then equal, homophase of V1 ' and V2 ' amplitude and cyclic variation.
When piezoelectric patches under the piezoelectric patches polarization effect situation shown in Fig. 4 B, if externally applied forces makes piezoelectric patches produce compression or elongation strain, then V1 '=V2 '; If it is crooked that externally applied forces produces piezoelectric patches, then V1 ' and V2 ' anti-phase, promptly V1 '=-V2 '; If externally applied forces vibrates piezoelectric patches along its length, then equal, homophase of V1 ' and V2 ' and cyclic variation; If externally applied forces makes piezoelectric patches swing along thickness direction, then equal, anti-phase of V1 ' and V2 ' and cyclic variation.
The monolithic piezoelectric transducer that the embodiment of the invention provides adopts individual layer piezoelectric patches structure; Through making interdigital electrode on the piezoelectric patches surface; And carry out cross polarization, can make piezoelectric patches be operated in vertical piezoelectric d 33 patterns, traditional relatively twin lamella PZT (piezoelectric transducer) that works in horizontal piezoelectric d 31 patterns; Can have the advantage that displacement is big and energy consumption is little during as driver, can have advantage highly sensitive and that response performance is good during as transducer.The PZT (piezoelectric transducer) that the embodiment of the invention provides is simple in structure, and is easy to make, can effectively reduce cost of manufacture, need not use simultaneously the not material of high-and low-temperature resistance such as organic binder bond in traditional sandwich construction, can work under the environment adverse circumstances such as high low temperature.
The manufacture method schematic flow sheet of the PZT (piezoelectric transducer) that Fig. 9 provides for the embodiment of the invention three.The present embodiment manufacture method can prepare Fig. 1-PZT (piezoelectric transducer) that provides embodiment illustrated in fig. 5, and is as shown in Figure 9 particularly, can may further comprise the steps:
Wherein, The first driving interdigital electrode and second drives interdigital electrode and is symmetrical set up and down, and the first ground connection interdigital electrode and the second ground connection interdigital electrode are arranged in a crossed manner relatively with the first driving interdigital electrode and the second driving interdigital electrode respectively at the upper surface and the lower surface of piezoelectric patches.The concrete setting of each interdigital electrode can be repeated no more at this referring to the explanation of the invention described above device embodiment.
In this step; One side electrode can be set in the side of piezoelectric patches; Electrode layer all is arranged in whole side that can be as shown in Figure 1, perhaps also can two ground connection interdigital electrodes of upper and lower surfaces are electrically connected be integral through several electrodes is set, and constitutes the common ground electrode.
In the present embodiment, above-mentioned step 103 also can be accomplished before step 102, and present embodiment is not done special restriction to this.
Before the above-mentioned steps 101, can make mask plate in advance, so that utilize mask plate to make interdigital electrode; Particularly; Can according to the size of the transducer that will make, design template is according to interdigital electrode shape, the size of design; On mask plate, reserve cutting, to be used for printing or sputter interdigital electrode.
In addition, before the above-mentioned steps 101, can obtain the piezoelectric patches of required size, and piezoelectric patches is carried out abrasive disc, ultrasonic cleaning and drying, to guarantee the making precision and the effect of piezoelectric patches from large-area piezoelectric patches cutting.
In the above-mentioned steps 101, the mask plate of making in advance capable of using, at the piezoelectric patches surface sputtering or print interdigital electrode, and the material of electrode can be gold or silver-colored, and after making interdigital electrode, the conduction of detecting electrode is to guarantee to make effect.
In the above-mentioned steps 101, also can drive interdigital electrode and the common ground electrode is provided with contact conductor, so that be electrically connected with other electronic units at each.
In the above-mentioned steps 102, can be through being electrically connected in the mode of side sputter of piezoelectric patches or printed silver electrode or gold electrode two ground connection interdigital electrodes with the piezoelectric patches upper and lower surfaces.
In the above-mentioned steps 103, when piezoelectric patches was polarized, the voltage that is applied on each interdigital electrode can repeat no more at this referring to the explanation of the invention described above device embodiment.
Just can make the PZT (piezoelectric transducer) shown in Fig. 1-Fig. 4 B through above-mentioned steps, it can be used as piezoelectric actuator, converts electrical energy into mechanical energy; Perhaps as transducer; Detect external force, concrete realization can be repeated no more at this referring to the explanation of the invention described above device embodiment.
The manufacture method schematic flow sheet of the PZT (piezoelectric transducer) that Figure 10 provides for the embodiment of the invention four.The present embodiment method can be made and obtained like Fig. 6-PZT (piezoelectric transducer) that provides embodiment illustrated in fig. 8, and shown in figure 10 particularly, the present embodiment method can comprise:
Can find out that different with above-mentioned method shown in Figure 9 is that present embodiment is that the antisymmetry position of the upper and lower surfaces of piezoelectric patches forms the ground connection interdigital electrode respectively and drives interdigital electrode; Thereby can obtain piezoelectric patches shown in Figure 6, it can be used as piezoelectric actuator, converts electrical energy into mechanical energy; Perhaps as transducer; Detect external force, concrete realization can be repeated no more at this referring to the explanation of the invention described above device embodiment.
It will be appreciated by those skilled in the art that; Among each embodiment of the invention described above; The distance that the first driving interdigital electrode, second drives between the interdigital electrode in the interdigital electrode can rationally be set in the practical application as required; With the size of common ground, and the size of piezoelectric patches size, to satisfy the real work needs.
What should explain at last is: above each embodiment is only in order to explaining technical scheme of the present invention, but not to its restriction; Although the present invention has been carried out detailed explanation with reference to aforementioned each embodiment; Those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, perhaps to wherein part or all technical characteristic are equal to replacement; And these are revised or replacement, do not make the scope of the essence disengaging various embodiments of the present invention technical scheme of relevant art scheme.
Claims (8)
1. a monolithic piezoelectric transducer is characterized in that, comprising:
Piezoelectric patches, the upper surface of said piezoelectric patches and lower surface are respectively arranged with first and drive the interdigital electrode and the second driving interdigital electrode, and the said first driving interdigital electrode and second drives interdigital electrode and is symmetrical set up and down;
The upper surface of said piezoelectric patches and lower surface also are respectively arranged with the first ground connection interdigital electrode and the second ground connection interdigital electrode; The said first ground connection interdigital electrode and the second ground connection interdigital electrode are arranged in a crossed manner relatively with the said first driving interdigital electrode and the second driving interdigital electrode respectively at the upper surface and the lower surface of said piezoelectric patches; And the said first ground connection interdigital electrode and the second ground connection interdigital electrode are electrically connected through the side electrode of said piezoelectric patches, constitute the common ground electrode;
Said piezoelectric patches drives interdigital electrode, second and drives under the direct voltage effect of interdigital electrode and common ground electrode through being applied to said first, forms the cross polarization zone respectively at the upper surface piezoelectric layer and the lower surface piezoelectric layer of said piezoelectric patches.
2. monolithic piezoelectric transducer according to claim 1; It is characterized in that; The voltage that is applied on the said common ground electrode is earthed voltage V3=0, and the voltage that is applied to the said first driving interdigital electrode is V1, and the voltage that is applied to the said second driving interdigital electrode is V2.
3. monolithic piezoelectric transducer according to claim 1 and 2; It is characterized in that; Said monolithic piezoelectric transducer is a piezoelectric actuator; Drive under the driving voltage effect that interdigital electrode and second drives on the interdigital electrode being applied to said first, the upper surface piezoelectric layer through said piezoelectric patches and vertical piezoelectric d 33 patterns of lower surface piezoelectric layer and along the asymmetric strain of the upper surface and the lower surface of y direction make flexural vibrations or the curved displacement of said piezoelectric patches generation along thickness direction.
4. monolithic piezoelectric transducer according to claim 1 and 2 is characterized in that, said monolithic piezoelectric transducer is sonic test transducer, pressure test transducer, vibration-testing transducer or acceleration test transducer.
5. the manufacture method of a monolithic piezoelectric transducer is characterized in that, comprising:
Upper surface at piezoelectric patches is provided with the first driving interdigital electrode and the first ground connection interdigital electrode; Lower surface at said piezoelectric patches is provided with the second driving interdigital electrode and the second ground connection interdigital electrode; Wherein, The said first driving interdigital electrode and second drives interdigital electrode and is symmetrical set up and down, and the said first ground connection interdigital electrode and the second ground connection interdigital electrode are arranged in a crossed manner relatively with the said first driving interdigital electrode and the second driving interdigital electrode respectively at the upper surface and the lower surface of said piezoelectric patches;
The said first ground connection interdigital electrode and the second ground connection interdigital electrode side electrode through said piezoelectric patches is electrically connected, constitutes the common ground electrode;
Drive interdigital electrode, the second driving interdigital electrode and common ground electrode said first and apply direct voltage; Upper surface piezoelectric layer and lower surface piezoelectric layer to said piezoelectric patches carry out cross polarization, make the upper surface piezoelectric layer of said piezoelectric patches and lower surface piezoelectric layer form the cross polarization zone respectively.
6. the manufacture method of monolithic piezoelectric transducer according to claim 5; It is characterized in that; At the upper surface and the lower surface of said piezoelectric patches, make first through sputter or mode of printing respectively and drive interdigital electrode, second driving interdigital electrode, the first ground connection interdigital electrode and the second ground connection interdigital electrode.
7. a monolithic piezoelectric transducer is characterized in that, comprising:
Piezoelectric patches, the upper surface of said piezoelectric patches and lower surface are respectively arranged with first and drive the interdigital electrode and the second ground connection interdigital electrode, and the said first driving interdigital electrode and the second ground connection interdigital electrode are symmetrical set up and down;
The upper surface of said piezoelectric patches and lower surface also are respectively arranged with the first ground connection interdigital electrode and second and drive interdigital electrode; It is arranged in a crossed manner relatively with the said first driving interdigital electrode and the second ground connection interdigital electrode respectively at the upper surface and the lower surface of said piezoelectric patches that the said first ground connection interdigital electrode and second drives interdigital electrode, and said first ground connection interdigital electrode and second ground connection interdigital electrode formation common ground electrode;
Said piezoelectric patches drives interdigital electrode, second and drives under the direct voltage effect of interdigital electrode and common ground electrode through being applied to said first, forms the cross polarization zone respectively at the upper surface piezoelectric layer and the lower surface piezoelectric layer of said piezoelectric patches.
8. the manufacture method of a monolithic piezoelectric transducer is characterized in that, comprising:
Upper surface at piezoelectric patches is provided with the first driving interdigital electrode and the first ground connection interdigital electrode; Lower surface at said piezoelectric patches is provided with the second driving interdigital electrode and the second ground connection interdigital electrode; Wherein, The said first driving interdigital electrode and the second ground connection interdigital electrode are symmetrical set up and down; It is arranged in a crossed manner relatively with the said first driving interdigital electrode and the second ground connection interdigital electrode respectively at the upper surface and the lower surface of said piezoelectric patches that the said first ground connection interdigital electrode and second drives interdigital electrode, and the said first ground connection interdigital electrode and the second ground connection interdigital electrode constitute the common ground electrode;
Drive interdigital electrode, the second driving interdigital electrode and common ground electrode said first and apply direct voltage; Upper surface piezoelectric layer and lower surface piezoelectric layer to said piezoelectric patches carry out cross polarization, make the upper surface piezoelectric layer of said piezoelectric patches and lower surface piezoelectric layer form the cross polarization zone respectively.
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| CN103674409A (en) * | 2013-11-30 | 2014-03-26 | 成都国科海博信息技术股份有限公司 | Improved pressure sensor |
| CN103943772A (en) * | 2013-01-21 | 2014-07-23 | 北京大学 | Single-piece piezoelectric transducer and manufacturing method thereof |
| CN105633269A (en) * | 2016-02-26 | 2016-06-01 | 汉得利（常州）电子股份有限公司 | Piezoelectric patch structure |
| CN105892757A (en) * | 2016-06-24 | 2016-08-24 | 京东方科技集团股份有限公司 | Embedded touch screen and display device |
| CN107623068A (en) * | 2017-09-18 | 2018-01-23 | 中北大学 | Based on interdigitated electrode structure flexible extensible piezoelectric nano generator and preparation method |
| WO2019122402A1 (en) * | 2017-12-22 | 2019-06-27 | Luxembourg Institute Of Science And Technology (List) | Piezoelectric device with a sensor and method for measuring the behaviour of said piezoelectric device |
| CN110071658A (en) * | 2018-01-22 | 2019-07-30 | 原子能与替代能源委员会 | Piezoelectric transducer |
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| CN103943772B (en) * | 2013-01-21 | 2016-06-22 | 北京大学 | Monolithic piezoelectric transducer and preparation method thereof |
| CN103674409A (en) * | 2013-11-30 | 2014-03-26 | 成都国科海博信息技术股份有限公司 | Improved pressure sensor |
| CN105633269A (en) * | 2016-02-26 | 2016-06-01 | 汉得利（常州）电子股份有限公司 | Piezoelectric patch structure |
| CN105892757A (en) * | 2016-06-24 | 2016-08-24 | 京东方科技集团股份有限公司 | Embedded touch screen and display device |
| CN105892757B (en) * | 2016-06-24 | 2019-02-22 | 京东方科技集团股份有限公司 | A kind of In-cell touch panel and display device |
| CN107623068A (en) * | 2017-09-18 | 2018-01-23 | 中北大学 | Based on interdigitated electrode structure flexible extensible piezoelectric nano generator and preparation method |
| CN107623068B (en) * | 2017-09-18 | 2020-11-27 | 中北大学 | Flexible stretchable piezoelectric nano generator based on interdigital electrode structure and preparation method thereof |
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| WO2019122402A1 (en) * | 2017-12-22 | 2019-06-27 | Luxembourg Institute Of Science And Technology (List) | Piezoelectric device with a sensor and method for measuring the behaviour of said piezoelectric device |
| CN110071658A (en) * | 2018-01-22 | 2019-07-30 | 原子能与替代能源委员会 | Piezoelectric transducer |
| CN110071658B (en) * | 2018-01-22 | 2024-03-29 | 原子能与替代能源委员会 | Piezoelectric transducer |
| CN112074716A (en) * | 2018-03-08 | 2020-12-11 | 埃尔特克有限公司 | Mechanical stress sensor and method of manufacture |
| CN112074716B (en) * | 2018-03-08 | 2023-11-28 | 埃尔特克有限公司 | Mechanical stress sensor and method of manufacture |
| CN110147050A (en) * | 2018-06-06 | 2019-08-20 | 北京纳米能源与***研究所 | A kind of monitoring system |
| CN110147050B (en) * | 2018-06-06 | 2021-07-06 | 北京纳米能源与***研究所 | Monitoring system |
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