CN102809297B - Furnace wire lead mounting and fixing device for thermal treatment equipment - Google Patents
Furnace wire lead mounting and fixing device for thermal treatment equipment Download PDFInfo
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- CN102809297B CN102809297B CN201210314284.2A CN201210314284A CN102809297B CN 102809297 B CN102809297 B CN 102809297B CN 201210314284 A CN201210314284 A CN 201210314284A CN 102809297 B CN102809297 B CN 102809297B
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- lead
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Abstract
The invention relates to a furnace wire lead mounting and fixing device for thermal treatment equipment. The furnace wire lead mounting and fixing device comprises a lead fixing block which is provided with a through hole. A furnace wire lead can pass through the through hole. A boss is arranged on the periphery of the through hole and on one side of the lead fixing block. The lead fixing block is made of insulation materials. Safety potential hazards and other adverse affections caused by mounting error of the furnace wire lead in the thermal treatment equipment can be effectively eliminated. Besides, the furnace wire lead mounting and fixing device is simple and convenient to mount and debug.
Description
Technical field
The present invention relates to a kind of semiconductor heat treatment equipment stove silk lead-in wire fixing device for installing.
Background technology
The mode that in this field Equipment for Heating Processing, stove silk lead fixing structure adopts at present, if there is obvious alignment error in stove silk lead-in wire in installation process, then can not effectively regulate to eliminate error adverse effect to fixed block, and stove silk lead-in wire can not carry out good strick precaution with the insulation of inboard wall of furnace body; Current stove silk lead fixing structure also also exists complex structure, installs inconvenient feature.
In order to overcome the above problems, invention has been useful improvement.
Summary of the invention
(1) technical problem that will solve
The object of this invention is to provide one can effectively avoid stove silk lead-in wire to contact with inboard wall of furnace body, and effectively eliminates the stove silk lead-in wire mount fixing structure of the adverse effect that alignment error is brought.
(2) technical scheme
The present invention is achieved by the following technical solutions: a kind of Equipment for Heating Processing stove silk lead-in wire fixing device for installing, comprises lead-in wire fixed block; Described lead-in wire fixed block is provided with through hole, for being gone between by stove silk; Be provided with boss around described through hole, described boss is positioned at the side of described lead-in wire fixed block; The material of described lead-in wire fixed block is insulating materials.
Particularly, described through hole is slotted hole.
Further, this device also comprises set bolt; Described lead-in wire fixed block is provided with installing hole, and described set bolt fixes described lead-in wire fixed block through this installing hole.
Further, described installing hole is slotted hole, the length direction of this installing hole and the length direction of described through hole perpendicular; Described lead-in wire fixed block, after the length direction of slotted hole carries out position adjustments, is fixed by set bolt.
Further again, described installing hole is two, and described two installing holes are separately positioned on the two ends of described through hole.
In addition, the material of described lead-in wire fixed block is pottery.
(3) beneficial effect
Compare with product with prior art, the present invention has the following advantages:
1. effectively eliminate potential safety hazard and other adverse effects that the alignment error gone between by stove silk in Equipment for Heating Processing is brought;
2. the fixing device for installing structure of this stove silk lead-in wire is simple, is convenient to installation and debugging.
Accompanying drawing explanation
Fig. 1 is the front view of lead-in wire fixed block of the present invention;
Fig. 2 is the cross section view of Fig. 1;
Fig. 3 is the rearview of lead-in wire fixed block of the present invention;
Fig. 4 is the installation site schematic diagram of lead-in wire fixed block of the present invention on body of heater;
Fig. 5 is the installation site schematic diagram that the present invention goes between to stove silk.
In accompanying drawing, the assembly representated by each mark and corresponding construction are listed as follows:
1, go between fixed block, and 2, boss, 3, through hole, 4, installing hole, 5, stove silk lead-in wire, 6, inboard wall of furnace body, 7, set bolt.
Detailed description of the invention
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is made a detailed explanation.
As shown in Figure 1, Figure 2 and Figure 3, for the fixing device for installing of semiconductor heat treatment equipment stove silk lead-in wire, this device is mainly lead-in wire fixed block 1, and this lead-in wire fixed block 1 is provided with boss 2 and through hole 3.Boss 2 is arranged on around the port of the side of through hole 3.Through hole 3 is slotted hole shape.At the two ends of through hole 3, lead-in wire fixed block 1 is also provided with two installing holes 4, and these two installing holes 4 are similarly slotted hole shape, and their length direction is vertical with the length direction of through hole 3.
As shown in Figure 4, boss 2 can be embedded in inboard wall of furnace body 6 li, and stove silk lead-in wire 5 stretches out from the through hole 3 this lead-in wire fixed block 1.Boss 2 can effectively prevent stove silk go between 5 with the contacting of inboard wall of furnace body 6, enhance the security of equipment.Stove silk lead-in wire 5 is placed in described through hole 3, through hole 3 on lead-in wire fixed block 1 adopts the form of slotted hole to carry out the alignment error of absorption furnace silk lead-in wire 5 on inboard wall of furnace body 6, guarantees that stove silk lead-in wire 5 can not make because of the effect of mismachining tolerance or alignment error stove silk go between and 5 produce corresponding external force.
As shown in Figure 5, lead-in wire fixed block 1 is fixed on inboard wall of furnace body 6 by installing hole 4 by set bolt 7.Because installing hole 4 is also slotted hole shape, therefore lead-in wire fixed block 1 can move left and right along this slotted hole length direction, and lead-in wire fixed block 1, after the length direction of slotted hole carries out position adjustments, is fixed by set bolt 7.Thus complete lead-in wire fixed block 1 and stove silk go between 5 the adjustment of relative position.
The designing material of this device should be high temperature resistant, insulating materials; Be preferably pottery.
Above embodiment is only for illustration of the present invention; and be not limitation of the present invention; the those of ordinary skill of relevant technical field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all equivalent technical schemes also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (3)
1. an Equipment for Heating Processing stove silk lead-in wire fixing device for installing, it is characterized in that, comprise lead-in wire fixed block, described lead-in wire fixed block is provided with through hole, for being gone between by stove silk; Be provided with boss around described through hole, described boss is positioned at the side of described lead-in wire fixed block; The material of described lead-in wire fixed block is insulating materials;
Described through hole is slotted hole;
This device also comprises set bolt; Described lead-in wire fixed block is provided with installing hole, and described set bolt fixes described lead-in wire fixed block through this installing hole;
Described installing hole is slotted hole, the length direction of this installing hole and the length direction of described through hole perpendicular; Described lead-in wire fixed block, after the length direction of slotted hole carries out position adjustments, is fixed by set bolt.
2. stove silk lead-in wire fixing device for installing according to claim 1, it is characterized in that, described installing hole is two, and described two installing holes are separately positioned on the two ends of described through hole.
3. stove silk lead-in wire fixing device for installing according to claim 1, is characterized in that, the material of described lead-in wire fixed block is pottery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210314284.2A CN102809297B (en) | 2012-08-29 | 2012-08-29 | Furnace wire lead mounting and fixing device for thermal treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210314284.2A CN102809297B (en) | 2012-08-29 | 2012-08-29 | Furnace wire lead mounting and fixing device for thermal treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102809297A CN102809297A (en) | 2012-12-05 |
| CN102809297B true CN102809297B (en) | 2015-01-21 |
Family
ID=47233079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210314284.2A Active CN102809297B (en) | 2012-08-29 | 2012-08-29 | Furnace wire lead mounting and fixing device for thermal treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102809297B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104154754A (en) * | 2014-07-31 | 2014-11-19 | 长兴华久耐火材料厂 | Prefabricated brick for kiln hood walls |
| CN112696929B (en) * | 2020-12-18 | 2023-02-14 | 北京北方华创微电子装备有限公司 | Semiconductor heat treatment equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2636178Y (en) * | 2003-06-17 | 2004-08-25 | 北京七星华创电子股份有限公司 | Furnace body for vertical heating furnace |
| CN201352061Y (en) * | 2008-12-17 | 2009-11-25 | 北京七星华创电子股份有限公司 | 300mm vertical oxidation furnace body furnace wire lead fixing device |
| CN201811591U (en) * | 2010-09-16 | 2011-04-27 | 范楚廷 | Ceramic closed constant temperature electric furnace |
| CN202869282U (en) * | 2012-08-29 | 2013-04-10 | 北京七星华创电子股份有限公司 | Installation fixing device of heat processing equipment furnace wire lead |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2006013931A1 (en) * | 2004-08-04 | 2008-05-01 | イビデン株式会社 | Firing furnace and method for producing a porous ceramic fired body using the firing furnace |
-
2012
- 2012-08-29 CN CN201210314284.2A patent/CN102809297B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2636178Y (en) * | 2003-06-17 | 2004-08-25 | 北京七星华创电子股份有限公司 | Furnace body for vertical heating furnace |
| CN201352061Y (en) * | 2008-12-17 | 2009-11-25 | 北京七星华创电子股份有限公司 | 300mm vertical oxidation furnace body furnace wire lead fixing device |
| CN201811591U (en) * | 2010-09-16 | 2011-04-27 | 范楚廷 | Ceramic closed constant temperature electric furnace |
| CN202869282U (en) * | 2012-08-29 | 2013-04-10 | 北京七星华创电子股份有限公司 | Installation fixing device of heat processing equipment furnace wire lead |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102809297A (en) | 2012-12-05 |
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| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
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| CP03 | Change of name, title or address |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180316 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |