CN102808222A - Tube-in-tube single crystal furnace heat insulation cylinder with different density layers - Google Patents
Tube-in-tube single crystal furnace heat insulation cylinder with different density layers Download PDFInfo
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- CN102808222A CN102808222A CN2012103013019A CN201210301301A CN102808222A CN 102808222 A CN102808222 A CN 102808222A CN 2012103013019 A CN2012103013019 A CN 2012103013019A CN 201210301301 A CN201210301301 A CN 201210301301A CN 102808222 A CN102808222 A CN 102808222A
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Abstract
The invention provides a tube-in-tube single crystal furnace heat insulation cylinder with different density layers. The heat insulation cylinder consists of at least two concentric cylinders with different diameters; the cylinders are sleeved with each other to form the whole heat insulation cylinder; an inner-layer cylinder is formed by adhering and curing soft carbon felt by using adhesive, the whole layer can be immersed in soluble resin and is subjected to chemical liquid phase densification or densified by a chemical vapor deposition mode, and soft graphite paper is adhered to the inner and outer surfaces, the density of the prepared inner-layer cylinder is more than 0.30g/cm<3>, the thickness of the inner-layer cylinder is 20 to 50 percent of the total thickness of the heat insulation cylinder; and according to an outer-layer cylinder, soft carbon felt is adhered and cured by using adhesive and then is carbonized, coatings are painted on the inner and outer surfaces of the soft carbon felt, and the density of the outer-layer cylinder is 0.15 to 0.30g/cm<3>. The tube-in-tube single crystal furnace heat insulation cylinder has the advantages that the density of the inner-layer cylinder is increased, so that the ablation resistance and the air flow scouring resistance of the inner-layer heat insulation cylinder can be greatly improved, and the service life is prolonged.
Description
Technical field
The present invention relates to the heat preserving and insulating material technical field, the typing carbon fiber composite heat insulation system that particularly a kind of pulling of silicon single crystal thermal field heat-insulation system is used.
Background technology
The domestic used lagging material of thermal field of single crystal furnace has been abandoned the molectron of the high-purity soft charcoal felt parcel of greying graphite tube basically at present, adopts the combined system of graphite tube and typing charcoal fiber heat preservation material (claiming cured charcoal felt again, compound charcoal felt) in a large number.Existing typing charcoal fiber thermal insulation system forms for the mat lamination is bonding mostly; Usually laminated thickness is between 50-100mm; Though bigger improvement is arranged in raising size precision, self-supporting ability to; And having reduced charcoal dirt to the healthy influence that produces of operator, internal layer is easy ablates, involves great expense but also exist, if local damage needs all shortcomings of replacing.
Summary of the invention
Technical problem to be solved by this invention is exactly: existing typing charcoal fiber heat preservation material internal layer is prone to ablation, gasproof stream does not wash away, and work-ing life is short, if local damage needs whole technological deficiencies of changing.
For realizing above-mentioned purpose; Technical scheme provided by the present invention is: a kind of telescopic single crystal growing furnace heat-preservation cylinder with different densities layer, and described heat-preservation cylinder is made up of the concentric drums that at least two diameters do not wait, and it is whole that the cylinder mutual sheathing forms heat-preservation cylinder; Inner layer cylinder by soft charcoal felt through the bonding curing of sticker; Whole layer carries out the chemical liquid phase density or adopts the density of chemical vapour deposition mode with the soluble resin dipping, and at inside and outside surperficial sticking flexible graphite paper; Density after processing is greater than 0.30g/cm
3The thickness of inner layer cylinder is the 20%-50% of heat-preservation cylinder total thickness; Outer cylinder through the bonding curing of sticker, carries out charing with soft charcoal felt then, and carries out the coating processing at surfaces externally and internally and form, and the density of outer cylinder is 0.15-0.30 g/cm
3
Said cylinder is two or more, and the external diameter of inner layer cylinder is less than the internal diameter of outer cylinder.
The invention has the beneficial effects as follows,, the anti-ablation of internal layer heat-preservation cylinder and gasproof stream performance of flushing are greatly strengthened, prolonged work-ing life owing to increased the density of internal layer tube.Handle and perhaps carry out coating, can improve the surface, can thermal radiation be reflexed to centre in the stove, help the fusion of silicon materials, and have effect of saving energy thermal-radiating reflection potential at surfaces externally and internally sticking flexible graphite paper.When if certain one deck ablation phenomen seriously causes using needs to be changed, only need this layer is taken out transposing, and do not need whole replacings, can be the user and practice thrift the wide variety of materials expense.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention 1.
Fig. 2 is the separate stage synoptic diagram of Fig. 1.
Fig. 3 is the structural representation of the embodiment of the invention 2.
Fig. 4 is the separate stage synoptic diagram of Fig. 3.
Embodiment
Below in conjunction with institute's drawings attached the present invention is described further, preferred embodiment of the present invention is:
Embodiment 1
Referring to accompanying drawing 1 and accompanying drawing 2; The described heat-preservation cylinder of present embodiment is by inside and outside two-layer cylinder mutual sheathing typing carbon fiber composite heat-preservation cylinder together, wherein, the internal layer heat-preservation cylinder by soft charcoal felt through the bonding curing of sticker; Whole layer carries out the chemical liquid phase density with the soluble resin dipping; Perhaps adopt mode density such as chemical vapour deposition, adopt common process to handle, and at surfaces externally and internally sticking flexible graphite paper; Density after processing is controlled at and is not less than 0.40g/cm
3The gauge control of internal layer heat-preservation cylinder is about 35% of the heat-preservation cylinder total thickness.Outer heat-preservation cylinder through the bonding curing of sticker, carries out charing with soft charcoal felt then, and carries out coating at surfaces externally and internally and handle and form, and common control of density is at 0.15-0.30 g/cm
3Reserve the gap of 1-3mm between the ectonexine heat-preservation cylinder, be convenient to change operation.
Embodiment 2
Referring to accompanying drawing 3 to accompanying drawing 4, the described heat-preservation cylinder of present embodiment by interior, in, the typing carbon fiber composite heat-preservation cylinder that constitutes of outer three layers of cylinder fit.Wherein, through the bonding curing of sticker, whole layer carries out the chemical liquid phase density with the soluble resin dipping to the internal layer heat-preservation cylinder, perhaps adopts mode density such as chemical vapour deposition by soft charcoal felt, adopts common process to handle.Carry out coating handles on the ectonexine surface.Density after processing is controlled at and is not less than 0.60g/cm
3The gauge control of internal layer heat-preservation cylinder is about 25% of the heat-preservation cylinder total thickness.Middle level and outer heat-preservation cylinder through the bonding curing of sticker, carry out charing with soft charcoal felt then, and carry out coating at surfaces externally and internally and handle and to form, and control of density is at 0.15-0.30 g/cm usually
3Reserve the gap of 1-3mm between each layer heat-preservation cylinder, be convenient to change operation.
The embodiment of the above only is the present invention's preferred embodiment, is not to limit practical range of the present invention with this, so the variation that all shapes according to the present invention, principle are done all should be encompassed in protection scope of the present invention.
Claims (2)
1. telescopic single crystal growing furnace heat-preservation cylinder with different densities layer; It is characterized in that: described heat-preservation cylinder is made up of the concentric drums that at least two diameters do not wait; It is whole that the cylinder mutual sheathing forms heat-preservation cylinder, and through the bonding curing of sticker, whole layer floods with soluble resin inner layer cylinder by soft charcoal felt; Carry out the chemical liquid phase density or adopt the density of chemical vapour deposition mode, and at inside and outside surperficial sticking flexible graphite paper; Density after processing is greater than 0.30g/cm
3The thickness of inner layer cylinder is the 20%-50% of heat-preservation cylinder total thickness; Outer cylinder through the bonding curing of sticker, carries out charing with soft charcoal felt then, and carries out the coating processing at surfaces externally and internally and form, and the density of outer cylinder is 0.15-0.30 g/cm
3
2. a kind of telescopic single crystal growing furnace heat-preservation cylinder with different densities layer according to claim 1 is characterized in that: cylinder is two or more, and the external diameter of inner layer cylinder is less than the internal diameter of outer cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103013019A CN102808222A (en) | 2012-08-23 | 2012-08-23 | Tube-in-tube single crystal furnace heat insulation cylinder with different density layers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103013019A CN102808222A (en) | 2012-08-23 | 2012-08-23 | Tube-in-tube single crystal furnace heat insulation cylinder with different density layers |
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| CN102808222A true CN102808222A (en) | 2012-12-05 |
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| CN2012103013019A Pending CN102808222A (en) | 2012-08-23 | 2012-08-23 | Tube-in-tube single crystal furnace heat insulation cylinder with different density layers |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103205803A (en) * | 2013-04-24 | 2013-07-17 | 哈尔滨奥瑞德光电技术股份有限公司 | Zirconia heat insulation structure applied to sapphire single crystal furnace |
| CN106521637A (en) * | 2017-01-18 | 2017-03-22 | 嘉兴启晟碳材料有限公司 | Heat-insulating drum for single crystal growth furnace and manufacturing method thereof |
| CN108130593A (en) * | 2017-12-20 | 2018-06-08 | 中国科学院上海硅酸盐研究所 | A kind of crystal growing furnace attemperator |
| CN109306512A (en) * | 2018-11-27 | 2019-02-05 | 上海骐杰碳素材料有限公司 | A kind of solidification heat-preservation cylinder |
| CN110886014A (en) * | 2019-12-18 | 2020-03-17 | 福建北电新材料科技有限公司 | Crystal growing device |
| CN113549891A (en) * | 2021-08-17 | 2021-10-26 | 上海康碳复合材料科技有限公司 | Continuous feeding and discharging device and method for deposition furnace |
| WO2024071096A1 (en) * | 2022-09-28 | 2024-04-04 | イビデン株式会社 | Heat insulating material |
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| JPH1025185A (en) * | 1996-07-08 | 1998-01-27 | Toyo Tanso Kk | Crucible for pulling up single crystal |
| JPH1072292A (en) * | 1996-08-30 | 1998-03-17 | Ibiden Co Ltd | Heat insulation cylinder for silicon single crystal pulling-up device |
| CN201158723Y (en) * | 2008-03-03 | 2008-12-03 | 湖南金博复合材料科技有限公司 | Flame-proof heat preserving cover of high temperature furnace |
| CN101463500A (en) * | 2008-03-03 | 2009-06-24 | 湖南金博复合材料科技有限公司 | High temperature furnace fire resistant heat preserving cover and technique for producing the same |
| CN100567217C (en) * | 2006-12-06 | 2009-12-09 | 湖南南方搏云新材料有限责任公司 | The high purity cured charcoal felt silicon crystal growth oven manufacture method |
| CN101723698A (en) * | 2009-12-18 | 2010-06-09 | 王占双 | Preparation of heat preservation carbon felt with integral structure |
| CN102206852A (en) * | 2011-04-26 | 2011-10-05 | 湖南金博复合材料科技有限公司 | Heat preservation barrel made of carbon/carbon compound material and preparation method thereof |
| CN202041084U (en) * | 2011-04-26 | 2011-11-16 | 湖南金博复合材料科技有限公司 | Carbon/carbon composite material thermal insulation cylinder |
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- 2012-08-23 CN CN2012103013019A patent/CN102808222A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH1025185A (en) * | 1996-07-08 | 1998-01-27 | Toyo Tanso Kk | Crucible for pulling up single crystal |
| JPH1072292A (en) * | 1996-08-30 | 1998-03-17 | Ibiden Co Ltd | Heat insulation cylinder for silicon single crystal pulling-up device |
| CN100567217C (en) * | 2006-12-06 | 2009-12-09 | 湖南南方搏云新材料有限责任公司 | The high purity cured charcoal felt silicon crystal growth oven manufacture method |
| CN201158723Y (en) * | 2008-03-03 | 2008-12-03 | 湖南金博复合材料科技有限公司 | Flame-proof heat preserving cover of high temperature furnace |
| CN101463500A (en) * | 2008-03-03 | 2009-06-24 | 湖南金博复合材料科技有限公司 | High temperature furnace fire resistant heat preserving cover and technique for producing the same |
| CN101723698A (en) * | 2009-12-18 | 2010-06-09 | 王占双 | Preparation of heat preservation carbon felt with integral structure |
| CN102206852A (en) * | 2011-04-26 | 2011-10-05 | 湖南金博复合材料科技有限公司 | Heat preservation barrel made of carbon/carbon compound material and preparation method thereof |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103205803A (en) * | 2013-04-24 | 2013-07-17 | 哈尔滨奥瑞德光电技术股份有限公司 | Zirconia heat insulation structure applied to sapphire single crystal furnace |
| CN103205803B (en) * | 2013-04-24 | 2016-04-20 | 哈尔滨奥瑞德光电技术有限公司 | The zirconium white insulation construction applied in sapphire single-crystal furnace |
| CN106521637A (en) * | 2017-01-18 | 2017-03-22 | 嘉兴启晟碳材料有限公司 | Heat-insulating drum for single crystal growth furnace and manufacturing method thereof |
| CN108130593A (en) * | 2017-12-20 | 2018-06-08 | 中国科学院上海硅酸盐研究所 | A kind of crystal growing furnace attemperator |
| CN109306512A (en) * | 2018-11-27 | 2019-02-05 | 上海骐杰碳素材料有限公司 | A kind of solidification heat-preservation cylinder |
| CN109306512B (en) * | 2018-11-27 | 2024-03-15 | 上海骐杰碳素材料有限公司 | Solidifying heat-preserving cylinder |
| CN110886014A (en) * | 2019-12-18 | 2020-03-17 | 福建北电新材料科技有限公司 | Crystal growing device |
| CN110886014B (en) * | 2019-12-18 | 2021-07-27 | 福建北电新材料科技有限公司 | Crystal growing device |
| CN113549891A (en) * | 2021-08-17 | 2021-10-26 | 上海康碳复合材料科技有限公司 | Continuous feeding and discharging device and method for deposition furnace |
| WO2024071096A1 (en) * | 2022-09-28 | 2024-04-04 | イビデン株式会社 | Heat insulating material |
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Application publication date: 20121205 |