CN102803858B - Precise air conditioning device - Google Patents
Precise air conditioning device Download PDFInfo
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- CN102803858B CN102803858B CN201180002373.7A CN201180002373A CN102803858B CN 102803858 B CN102803858 B CN 102803858B CN 201180002373 A CN201180002373 A CN 201180002373A CN 102803858 B CN102803858 B CN 102803858B
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- evaporimeter
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- 238000004378 air conditioning Methods 0.000 title claims abstract description 33
- 238000011084 recovery Methods 0.000 claims abstract description 20
- 238000001816 cooling Methods 0.000 claims abstract description 5
- 239000003507 refrigerant Substances 0.000 claims description 33
- 239000000428 dust Substances 0.000 claims description 30
- 238000001704 evaporation Methods 0.000 claims description 18
- 239000012530 fluid Substances 0.000 claims description 7
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 230000004044 response Effects 0.000 abstract description 3
- 238000005057 refrigeration Methods 0.000 abstract 4
- 239000007789 gas Substances 0.000 abstract 2
- 239000002918 waste heat Substances 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 18
- 238000009833 condensation Methods 0.000 description 9
- 230000005494 condensation Effects 0.000 description 9
- 239000000498 cooling water Substances 0.000 description 8
- 238000003303 reheating Methods 0.000 description 8
- 230000009471 action Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000017525 heat dissipation Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 230000006837 decompression Effects 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 230000033228 biological regulation Effects 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 230000008676 import Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005520 electrodynamics Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004941 influx Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 208000037805 labour Diseases 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000033001 locomotion Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011555 saturated liquid Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004781 supercooling Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F1/00—Room units for air-conditioning, e.g. separate or self-contained units or units receiving primary air from a central station
- F24F1/02—Self-contained room units for air-conditioning, i.e. with all apparatus for treatment installed in a common casing
- F24F1/022—Self-contained room units for air-conditioning, i.e. with all apparatus for treatment installed in a common casing comprising a compressor cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
- F24F11/80—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air
- F24F11/83—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air by controlling the supply of heat-exchange fluids to heat-exchangers
- F24F11/84—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air by controlling the supply of heat-exchange fluids to heat-exchangers using valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
- F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
- F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
- F24F11/77—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity by controlling the speed of ventilators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F5/00—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater
- F24F5/0007—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater cooling apparatus specially adapted for use in air-conditioning
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
- F24F2110/10—Temperature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2140/00—Control inputs relating to system states
- F24F2140/30—Condensation of water from cooled air
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Air Conditioning Control Device (AREA)
Abstract
Provided is a precise air conditioning device which can control the amount of waste heat in response to the air conditioning load of a control target while a constant load of a refrigeration cycle is maintained. The precise air conditioning device of the present invention introduces air in a chamber (12) disposed in a clean room (10) and circulates the air in the chamber (12) at a set temperature, wherein a condenser (31), an expansion valve (35), and an evaporator (26) are sequentially connected from a discharge side to a suction side of a compressor (29). The precise air conditioning device comprises: a refrigeration cycle (25) which includes a hot gas bypass circuit (40) flowing hot gas at the discharge side of the compressor (29) to the evaporator (26); a heat recovery unit (28) which has the evaporator (26) of the refrigeration cycle (25) accommodated therein, and introduces air from the chamber (12) and circulates the air in the chamber (12) by adjusting the air to the set temperature by means of the evaporator (26); and a heat radiating unit (33) which is disposed in the clean room (10) and accommodates the condenser (31) of the refrigeration cycle (25), and includes a variable capacity fan (32) for cooling the condenser (31) with the air in the clean room (10).
Description
Technical field
The present invention relates to precision air conditioner machine, the air after it supplies precision temperature adjustment to the chamber as air-conditioning object containing the exposure device be arranged in dust free room etc. also makes it circulate.
Background technology
The surrounding enviroment of the exposure device of liquid crystal glass base, because of the thermal expansion of variations in temperature glass substrate, are therefore necessary air-conditioner temperature precision (precision ± 0.01 ~ ± 0.1 DEG C) to control.
Such exposure devices etc. are arranged in the interior chamber formed by next door etc. of dust free room, under the precision air conditioner machine different from used in dustless room air conditioner is arranged on the floor of dust free room, by this precision air conditioner machine, the chamber as air-conditioning object is supplied by the Air Conditioning after precision temperature control and makes it circulate.
This precision air conditioner machine is made up of freeze cycle, by evaporimeter by temperature (such as 17 DEG C) extremely low than design temperature for the Air flow from chamber, and be heated into design temperature (such as 23 DEG C) by action electric water heater again, be supplied to chamber as Air Conditioning and make it circulate.
At this, the endothermic section as evaporimeter of freeze cycle is in order to be arranged in dust free room in air conditioning chamber, but the condenser becoming heating part is arranged on outside dust free room as off-premises station together with compressor, heating part and off-premises station refrigerant piping are formed by connecting as air-cooled air conditioner.Or propose various types of water-cooled air condictioner when being arranged on as water-cooled by the condenser becoming heating part under the floor of dust free room, as apparatus for supplying cool water is arranged on outside dust free room, the water-cooled air condictioner that radiating part is connected by water-cooled pipe arrangement with apparatus for supplying cool water etc. (patent document 1).
But, by the problem increased by the operating cost that the precision temperature control that action electric water heater is heated to design temperature again exists electric heater by evaporator cools to the Air Conditioning of the temperature lower than design temperature.
Therefore, as patent document 2 motions, proposition has following technical scheme, utilize the hot gas of freeze cycle, make it flow to evaporimeter and be added in the hot-gas bypass (hot gasbypass) controlling evaporating temperature, arrange other reheating condenser to flow to this reheating condenser to make hot gas in the Air blowing side of evaporimeter, and with the heating of this reheating condenser by the air after evaporator cools, afterwards by reheating electric heater precision temperature control.
In this patent document 2, hot gas is made to control evaporating temperature to evaporimeter flowing, Air Conditioning is controlled by reheating condenser temperature, the operating cost of action electric water heater can be reduced to a certain extent again, but by hot-gas bypass by the condensation temperature of freeze cycle or evaporating temperature response well and critically control to be impossible, then the setting of action electric water heater is indispensable.
In addition, following scheme is proposed in patent document 3, in the blowout side of evaporimeter, reheating condenser is set, the bypass amount of the threeway proportioning valve done by utilizing air pressure to hot gas controls, thus, the temperature control of response excellence can be realized by reheating condenser, thus, do not need to arrange action electric water heater again.
In this patent document 3, the air from chamber is heated to design temperature by reheating condenser by evaporator cools to the temperature of lower than design temperature 5 DEG C, owing to not needing action electric water heater again, therefore, it is possible to suppress operating cost.
Conventional art document
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2000-283500 publication
Patent document 2: Japanese Unexamined Patent Publication 2009-216332 publication
Patent document 3: Japan Patent No. 3283245 publication
Summary of the invention
Invent technical problem to be solved
But, in patent document 1 ~ 3, need to use cooling water in heat extraction recovery condenser, and the operation by cold water pipe arrangement, apparatus for supplying cool water is connected with the radiating part of condenser side while needing to be arranged on by apparatus for supplying cool water outside dust free room in addition.
Particularly, nearest dust free room keeps the large-scale development, be provided with the nearly 10m of height of the clear area of the handling machines such as exposure device, and the height of underfloor return passage also has about 5 ~ 6m, and its area extending floor is tens thousand of square meter, is set individually at the chamber of the multiple handling machine of dustless in-door covering.The radiating part of heat of this each chamber of dispelling the heat is separately positioned on return passage, on the other hand, dust free room is outside equipped with apparatus for supplying cool water, therefore, the cold water pipe arrangement be connected with each radiating part by this cold water supply apparatus is inevitable elongated, and high-rise working is needed in connection, the insulation of cold water pipe arrangement and countermeasure of leaking etc. need spend a large amount of labours.
And, in patent document 1 ~ 3, the load of freeze cycle is configured to the ability corresponding with maximum air conditioning load, spue to press to make the cold-producing medium of compressor and be stably run, the heat extraction control flow check of the cold-producing medium heat after being absorbed heat by evaporimeter to the internal circulating load of the cooling water of condenser, and realizes the coupling of caloric receptivity and heat exhaust.But, by the water-cooled of water quench condenser when air conditioner load is large, although the heat dissipation capacity of condenser suitably can be controlled, but when air conditioner load is less, the cooling water flow being supplied to condenser side tails off terrifically, likely makes stable operation become difficulty below the control range becoming cooling water flow.
That is, the temperature as the chamber of control object controls, if sucking air with the temperature difference of blowout temperature is less than ± 2 DEG C, then the example that diminishes of air conditioner load is a lot.On the other hand, cooling water temperature to condenser supply uses the cooling water of about 18 DEG C, low relative to condensation temperature (about the 70 DEG C) cooling water temperature of cold-producing medium, so air conditioner load becomes less, the control of cooling water inflow is more difficult, stably runs cool cycles and regulates the heat exhaust of condenser side to become difficulty matchingly with air conditioner load.
Therefore, the object of the invention is to solve the problem and provide a kind of and the load of freeze cycle can be remained certain and the precision air conditioner machine of heat exhaust can be controlled accordingly with the air conditioner load of the chamber of control object.
For solving the means of problem
In order to reach the precision air conditioner machine of the present invention of above-mentioned purpose, will importing as the air in the chamber of air-conditioning object of dust free room be arranged on, and become design temperature and circulate at above-mentioned chamber, it is characterized in that,
Possess:
Freeze cycle, is connected with condenser, expansion valve, evaporimeter from the exhaust end of compressor in turn to suction side, and has the hot gas bypass circuit making the thermal current of the exhaust end of above-mentioned compressor to above-mentioned evaporimeter;
Heat recovery section, contains the evaporimeter of above-mentioned freeze cycle, and is imported by the air from above-mentioned chamber, and becomes design temperature by above-mentioned evaporimeter air-conditioning and circulate at above-mentioned chamber; And
Radiating part, to be arranged in above-mentioned dust free room and to contain the condenser of above-mentioned freeze cycle, and possessing the variable fan of ability by this condenser of air air cooling in dust free room.
In the present invention, above-mentioned freeze cycle, above-mentioned heat recovery section and above-mentioned radiating part are housed in same housing.
In the present invention, above-mentioned hot gas bypass circuit has proportional control valve, the temperature sensor detected by the temperature of the Air Conditioning after above-mentioned evaporator cools is provided with in above-mentioned heat recovery section, by the detected value of this temperature sensor, control aforementioned proportion control valve, thus, precision temperature control is by the Air Conditioning of evaporator cools.
In the present invention, the refrigerant piping linking the refrigerant outlet of above-mentioned evaporimeter and the suction side of compressor is connected with the refrigerant suction pressure of compressor is remained certain back pressure regulator, above-mentioned expansion valve is made up of temperature-type expansion valve, the pipe arrangement of the upstream side of above-mentioned back pressure regulator is provided with the temperature sensing tube of said temperature formula expansion valve, thus the cold-producing medium evaporating pressure at above-mentioned evaporimeter is remained necessarily.
In the present invention, high pressure sensor is being provided with from above-mentioned condenser to the high-pressure side refrigerant piping of said temperature formula expansion valve, on the other hand, the variable fan of ability of above-mentioned radiating part is driven by convertor device, and the rotation of the variable fan of aforementioned capabilities is controlled by convertor device, to make the condensing pressure of the cold-producing medium detected by above-mentioned high pressure sensor be certain, thus, the condensation of refrigerant pressure at condenser is remained necessarily.
High-pressure side refrigerant piping between above-mentioned condenser and above-mentioned high pressure sensor is preferably connected with fluid-containing pot.
The housing of accommodating above-mentioned heat recovery section and above-mentioned radiating part is preferably arranged at the return passage of above-mentioned dust free room.
The effect of invention:
According to the present invention, during air in the chamber of precision temperature control as air-conditioning object, evaporimeter to air-conditioning (air conditioning) chamber atmosphere flows out hot gas, precision temperature control Air Conditioning thus, by a great deal of by the heat after evaporimeter recuperation of heat with the condenser of the heating part be arranged in dust free room by air cooling heat extraction, realize stable precision temperature control thus, and the excellent results that off-premises station and cold water source need be set outside dust free room can be played.
Accompanying drawing explanation
Fig. 1 is the overall diagram representing one embodiment of the present invention.
Fig. 2 is the details drawing of the freeze cycle of the precision air conditioner machine shown in Fig. 1.
Fig. 3 is the key diagram freeze cycle of Fig. 2 represented on mollier diagram.
Detailed description of the invention
Below, based on accompanying drawing, the preferred embodiment of the present invention is described.
First, be described to dust free room 10 with to covering that be arranged on the handling machines 11 such as exposure device in dust free room 10, carry out air-conditioning as the chamber 12 of air-conditioning object precision air conditioner machine 13 by Fig. 1.
Dust free room 10 has: the clear area 16 being provided with chamber 12, and this chamber 12 is provided with the handling machines such as exposure device 11 and is covered; Plenum chamber 18, is formed in the top of the ceiling 17 of dust free room 16, clean air is supplied to clear area 16; And return passage 20, be formed at 19 times, the floor of clear area 16, the air from clear area 16 is attracted.Return passage 20 is connected by circulation line 21 with plenum chamber 18, this circulation line 21 is provided with used in dustless room air conditioner 22, ceiling 17 in plenum chamber 18 arranges multiple fan filter unit 23, and it blows out pure air to clear area 16, and has HEPA and fan.Air from return passage 20 is fed to air conditioner 22 via circulation line 21, become design temperature by air conditioner 22 air-conditioning, this Air Conditioning is cleaned by the high-performance filter in fan filter unit 23 from air-supply chamber 18 and is blown out to clear area 16 by dirty.
Being provided with the chamber 12 of Mulching treatment machine 11 on floor 19 in clear area 16, by carrying out air-conditioning in precision air conditioner machine 13 pairs of chambers 12, realizing the surrounding environment of precision temperature control handling machine 11 and handling machine 11 thus.
In the present invention, this precision air conditioner machine 13 is arranged in dust free room 10, is particularly arranged in return passage 20.That is, precision air conditioner machine 13 has: imported as return air (RA) by the air in chamber 12 and carried out precision air conditioner and be supplied to chamber 12 as air-supply SA and make heat recovery section 28 that it circulates, that have evaporimeter 26 and circulating fan 27; The radiating part 33 of the machine section 30 possessing compressor 29 grade and the variable fan 32 of ability possessing condenser 31 and air cooling.Here, radiating part 33 is at least arranged on dust free room 10 especially in return passage 20.Further, as shown in the figure, the machine section 30 and radiating part 33 that possess heat recovery section 28 and compressor 29 etc. be housed in a housing 14 and become precision air conditioner machine 13.This precision air conditioner machine 12 is arranged on clear area 16 in dust free room 10 or return passage 20, but is particularly preferably located at return passage 20.
Then by Fig. 2, the freeze cycle 25 forming precision air conditioner machine 12 is described.
Be connected with in turn condenser 31, fluid-containing pot 34, the temperature-type expansion valve 35 as expansion valve, the evaporimeter 26 of heat recovery section 28, the accumulator 36 of radiating part 33 by refrigerant piping 37 from the exhaust end of compressor 29 to suction side, and then from the high-pressure side refrigerant piping 37a branch of exhaust end to condenser 31 of compressor 29, arrange and make thermal current substantially form freeze cycle 25 to the hot gas bypass circuit 40 of evaporimeter 26.
And then this freeze cycle is described in detail.
The high-pressure side refrigerant piping 37a of the exhaust end of compressor 29 is provided with the pressure switch 41 of the overload for detecting compressor 29, this high-pressure side refrigerant piping 37a is connected the entrance side of condenser 31.The high-pressure side refrigerant piping 37a of the entrance side of condenser 31 is connected with condensation pressure regulation valve 50.Condenser 31 is formed by fin or pipe, this condenser 31 is provided with the variable fan 32 of ability to form radiating part 33.The high-pressure side refrigerant piping 37a of the outlet side of condenser 31 is connected the top of fluid-containing pot 34, is connected with high-pressure side refrigerant piping 37b in the bottom of fluid-containing pot 34.The high-pressure side refrigerant piping 37b of this fluid-containing pot 34 to temperature-type expansion valve 35 is connected with high pressure sensor 42, and then on the high-pressure side refrigerant piping 37b in this downstream, is connected with the inspection window 43, the Filter dryer 44 of moisture, the check-valves 45 as shutoff valve in removing cold-producing medium that detect amount of moisture.
Low side refrigerant pipe arrangement 37c from temperature-type expansion valve 35 is connected the entrance side of evaporimeter 26.Evaporimeter 26 is formed by fin or pipe, is provided with circulating fan 27 to form heat recovery section 28 at the outlet side of this evaporimeter 26.
Be connected with pressure gauge 46 in turn from the low side refrigerant pipe arrangement 37c of outlet side to accumulator 36 of evaporimeter 26, outer all pressures import valve 47, coarse filter 48, back pressure regulator 49.
Temperature-type expansion valve 35 is made up of diaphragm valve, although not shown in detail, and, the chamber of septum of a side is connected with temperature sensing tube 52 by capillary 51, and the chamber of septum of the opposing party is connected on outer all pipes 53.Temperature sensing tube 52 is arranged along the low side refrigerant pipe arrangement 37c of the outlet side of evaporimeter 26, and outer all pipes 53 are connected outer all pressures and import on valve 47.Temperature-type expansion valve 35 by from temperature sensing tube 52 via the differential pressure control valve aperture (degree of decompression) between the pressure (pressure based on the evaporating temperature of evaporimeter 26) of side's effect of capillary 51 pairs of barrier films and the pressure (evaporating pressure of evaporimeter 26) acted on by the opposing party of outer all pipes 53 pairs of barrier films.
In addition, in illustrated example, be illustrated for the temperature-type expansion valve 35 of outside even pressure type, but use the temperature-type expansion valve of inner even pressure type or electrodynamic type expansion valve also passable.
Back pressure regulator 49 regulates the suction pressure of compressor 29, to input the pressure of the cold-producing medium in this downstream, and makes this refrigerant pressure be certain.
Hot gas bypass circuit 40 is formed from the bypass pipe arrangement 54 of the entrance of high-pressure side refrigerant piping 37a to condenser 31 of the exhaust end of compressor 29 and evaporimeter 26 and the proportional control valve 55 be connected to this bypass pipe arrangement by connecting.Further, the bypass pipe arrangement 54 of the upstream side of proportional control valve 55 is connected with coarse filter 56.
Heat recovery section 28 being provided with for detecting by evaporimeter 26 air conditioning and the temperature sensor 58 of the temperature of the air-supply SA supplied to chamber 12 by circulating fan 27, being controlled the proportional control valve 55 of hot gas bypass circuit 40 by the detected value of this temperature sensor 58.
And, the variable fan 32 of the ability of radiating part 33 is driven by convertor device 60 variable speed, and the detected value of high pressure sensor 42 is inputted to this convertor device 60, the air quantity of the variable fan 32 of convertor device 60 control ability, becomes certain to make the detected value of high pressure sensor 42.
In the freeze cycle 25 of Fig. 2, by compressor 29 compress after refrigerant gas (hot gas) by condensation pressure regulation valve 50 by Stress control, mainly through condenser 31, here, with the rotation of the variable fan 32 of handling capacity by air (about 23 ~ 25 DEG C) heat exchange in the return passage 20 of blowing and condensation, reduced pressure by temperature-type expansion valve 35 and flow to evaporimeter 26.On the other hand, from the part of hot gas bypass circuit 40 passing ratio control valve 55 flow-control from the hot gas of compressor 29, and flow to evaporimeter 26 together with the post-decompression gas-liquid mixed phase cold-producing medium of temperature-type expansion valve 35.In heat recovery section 28, be imported with the return air RA from chamber 12, cooled by evaporimeter and form design temperature ± 0.01 ~ ± 0.1 DEG C, be supplied to chamber 12 as the air-supply SA after precision temperature control.
Be adjusted to the suction pressure of compressor 29 by back pressure regulator 49 as vaporized refrigerant by the cold-producing medium after evaporimeter 26 recuperation of heat, be sucked into compressor 29 via accumulator 36 and again by compressing as hot gas cycle.
First, in the present invention, compressor 29 is inhaled into pressure-regulating valve 49 and is adjusted to suction pressure, and the vaporized refrigerant becoming overheated (higher than saturated gas line 5 DEG C) is compressed into predetermined pressure and as hot gas.This hot gas is supplied to the both sides of evaporimeter 26 by the condenser 31 of radiating part 33 and hot gas bypass circuit 40.Now, high pressure sensor 42 detects the pressure of the outlet side of condenser 31, and based on the air output of the variable fan 32 of this convertor device 60 control ability, and condensation pressure regulation valve 50 regulates the pressure flowed into condenser 31.Thus, regulate the heat exchange amount (heat exhaust) at condenser 31, regardless of the variation of hot gas amount, be retained as necessarily at the condensing pressure of condenser 31.This condenser 31 condensation due to air (23 DEG C ~ about the 25 DEG C) heat exchange in return passage 20, temperature difference between condensating refrigerant temperature and air is little, even if also suitably control heat dissipation capacity by the air output of the variable fan 32 of ability when heat dissipation capacity is little.
Then, can control as follows at the precision temperature control of the air-supply SA of heat recovery section 28, by the aperture of temperature sensor 58 control ratio control valve 55, and control the hot gas amount flowing into evaporimeter 26 from hot gas bypass circuit 40.
Although show the example that this temperature sensor 58 detects the temperature of the air-supply SA of the outlet side of the evaporimeter 26 of heat recovery section 28 in the drawings, but the temperature sensor of the temperature of the return air RA of the entrance side detecting evaporimeter 26 also can be set in addition, by the temperature sensor control ratio control valve 55 of this gateway.
On the other hand, temperature-type expansion valve 35 and hot-gas bypass amount have nothing to do, and regulate degree of decompression that the evaporating pressure of evaporimeter 26 is remained necessarily.Namely, the outlet side temperature of evaporimeter 26 is transformed to the pressure of the cold-producing medium be sealing in temperature sensing tube 52, it is directed to a side of the chamber of septum of temperature-type expansion valve 35 via capillary 51, simultaneously, the evaporating pressure of the cold-producing medium evaporated by evaporimeter 26 is imported to the opposing party of the chamber of septum of temperature-type expansion valve 35 via outer all pipes 53, regulated the degree of decompression of temperature-type expansion valve 35 by the pressure reduction of two chamber of septum.
Thus, in evaporimeter 26, evaporating pressure is retained as necessarily, is controlled, therefore, it is possible to carry out the precision temperature control according to air conditioner load at the evaporation capacity of the cold-producing medium of this evaporimeter 26 and the heat exchange amount of return air RA and cold-producing medium by hot gas influx.
In this freeze cycle 25, the heat reclaimed by evaporimeter 26 by heat recovery section 28 releases heat in the air of return passage 20 by the condenser 31 of radiating part 33, but this heat exhaust is very little relative to the heat processed with the air conditioner 13 of dust free room 10, therefore, can fully be processed by the air-conditioning (air conditioning) of air conditioner 13.Therefore, do not need in order to heat extraction, off-premises station or cold water supply apparatus to be arranged on outside dust free room 10 as in the past, and do not need time of being connected by refrigerant piping.
Further, when precision temperature control, in hot gas bypass circuit 40, the air conditioner load of this hot gas flow and return passage 20 carries out controlling and makes it flow to evaporimeter 26 by passing ratio control valve 55 matchingly.Now, by the detected value condenser 31 of high pressure sensor 42, condensing pressure is controlled to necessarily, evaporating pressure is controlled to necessarily by simultaneous temperature formula expansion valve 35, and then, back pressure regulator 49 regulates the suction pressure of compressor 29 to make freeze cycle 25 stable operation.
Further, proportional control valve 55 controls hot gas amount according to the air conditioner load variation of return passage 20, by evaporimeter 26 according to air conditioner load, and cold-producing medium recuperation of heat.Afterwards, import to the condenser 31 of radiating part 33 by the hot gas after compressor 29 compression and dispel the heat.Dispel the heat after recuperation of heat like this, therefore, when air conditioner load sharply changes, easily be deteriorated in the recuperation of heat amount of freeze cycle 25 and the coupling of heat dissipation capacity, but owing to arranging fluid-containing pot 34 in freeze cycle 25, therefore the stable operation of freeze cycle 25 becomes possibility.
Then, by the mollier diagram of Fig. 3, this freeze cycle 25 is described.
Fig. 3 represents that transverse axis represents specific enthalpy (kJ/kg), and the longitudinal axis represents absolute pressure (MPa), and Lg represents the saturated gas line chart of R 407C, and L1 represents saturated liquidus to the freeze cycle on mollier diagram during cold-producing medium use R 407C.
First, the suction cold-producing medium of compressor 29 is fed to compressor 29 by back pressure regulator 49 at an A (12 DEG C, 0.5Mpa).This A, in the gas phase side than saturated gas line Lg high (+5 DEG C), is in superheat state, and this refrigerant gas is compressed into a B (75 DEG C, 2.0MPa) by compressor 29.The hot gas of this B is supplied to condenser 31 side and hot gas bypass circuit 40 side, at its branch point, becomes the pressure dropping to a C (1.7MPa).Be directed to the hot gas of condenser 31 by heat radiation, the condensing pressure ground of holding point C by saturated liquid line L1, and is cooled to the some D (31 DEG C) becoming supercooling liquid from gas-liquid mixed phase state.
The degree of subcooling of this D is controlled by temperature-type expansion valve 35, is depressurized to an E (11 DEG C, 0.8MPa) by temperature-type expansion valve 35.Evaporimeter 26 maintains the evaporating pressure under the pressure of this E.On the other hand, to become the evaporating pressure of evaporimeter 26 to some F (0.8MPa) by being directed to evaporimeter 26 and pressure drop from the hot gas of a C.Flow into the hot gas of some F to evaporimeter 26 and be decompressed to the cold-producing medium of an E by temperature-type expansion valve 35, this cold-producing medium and air (return air RA) heat exchange from chamber 12.Thus, cold-producing medium becomes the state of a G, flow into the entrance side of back pressure regulator 49 from the outlet of evaporimeter 26, is adjusted to an A and is directed to compressor 29 by this back pressure regulator 49 from a G decompression.
The heat of the freeze cycle mid point C on this mollier diagram to some D is the heat dissipation capacity of condenser 31, be the thermal change at evaporimeter 26 from an E to the heat of a G, the heat dissipation capacity of condenser 31 becomes the total heat of the heat of compressor 29 (from a G to the heat of a F) and evaporimeter heat.
Therefore, when hot-gas bypass amount is 0%, the evaporation heat of evaporimeter 26 becomes the heat from an E to a G, without air conditioner load and hot-gas bypass amount is 100% time, dispelled the heat by condenser 26 by the heat of compressor 29, the specific enthalpy of the cold-producing medium of the entrance of evaporimeter 26 becomes the some H deducting the heat of compressor 29 from a G.Therefore, relative to hot-gas bypass amount 0% ~ 100%, the specific enthalpy of the cold-producing medium of the entrance of evaporimeter 26 becomes the arbitrfary point H ' of an an E ~ H, and the heat of a some H ' ~ G becomes the evaporation heat corresponding with air conditioner load, namely by the heat after evaporimeter 26 and air (return air RA) heat exchange.
Therefore, the scope being 0% ~ 100% with hot-gas bypass amount matchingly with the air conditioner load state of chamber 12 controls, and thus, between the some E shown in figure to some H, can regulate the heat exchange amount matched with air conditioner load.
When the internal circulating load of the cold-producing medium of freeze cycle 25 is 100%, the hot-gas bypass amount flowing to this hot gas bypass circuit 40 can be reached to dispel the heat and be produced the amount of heat by compressor, also can steady running freeze cycle 25 even if flow till being up to about 70%.Therefore, by suitably carrying out the flow-control of proportion of utilization control valve 55, relative design temperature (such as 23 DEG C) can precision temperature control to ± 0.01 DEG C ~ ± 0.1 DEG C.
Above, embodiments of the present invention are illustrated, but the present invention is not limited to above-mentioned embodiment but can carries out various change.Namely be illustrated for temperature-type expansion valve as expansion valve, but also can be electrodynamic type expansion valve, and, condensation of refrigerant pressure time in figure 3 to use R 407 as cold-producing medium, evaporating pressure, compressor suction pressure represent, but according to air conditioner load or process air quantity, compressed capability or condensing pressure, the evaporating pressure of compressor can certainly be changed.
Symbol description
10 dust free rooms
12 chambers
14 housings
25 freeze cycle
26 evaporimeters
28 heat recovery section
29 compressors
31 condensers
The variable fan of 32 ability
33 radiating parts
40 hot gas bypass circuit
Claims (7)
1. a precision air conditioner machine, for being arranged on importing as the air in the chamber of air-conditioning object of dust free room, and becoming design temperature and circulates to above-mentioned chamber, it is characterized in that,
Possess:
Freeze cycle, is connected with condenser, expansion valve, evaporimeter from the exhaust end of compressor in turn to suction side, and has the hot gas bypass circuit making the thermal current of the exhaust end of above-mentioned compressor to above-mentioned evaporimeter;
Heat recovery section, contains the evaporimeter of above-mentioned freeze cycle, and is imported by the air from above-mentioned chamber, and becomes design temperature by above-mentioned evaporimeter air-conditioning and circulate to above-mentioned chamber;
Radiating part, being arranged in above-mentioned dust free room and containing the condenser of above-mentioned freeze cycle, and possessing the variable fan of ability, the condensing pressure of above-mentioned condenser by this condenser of air air cooling in dust free room, thus remains necessarily by the variable fan of this ability;
High pressure sensor, detects the condensing pressure of the cold-producing medium of above-mentioned condenser; And
Convertor device, drives the variable fan of the ability of above-mentioned radiating part, and controls the rotation of the variable fan of aforementioned capabilities, is certain to make the condensing pressure of the cold-producing medium detected by above-mentioned high pressure sensor.
2. precision air conditioner machine as claimed in claim 1, is characterized in that,
Above-mentioned freeze cycle, above-mentioned heat recovery section and above-mentioned radiating part are housed in same housing.
3. precision air conditioner machine as claimed in claim 1 or 2, is characterized in that,
Above-mentioned hot gas bypass circuit has proportional control valve, the temperature sensor detected by the temperature of the Air Conditioning after above-mentioned evaporator cools is provided with in above-mentioned heat recovery section, aforementioned proportion control valve is controlled by the detected value of this temperature sensor, thus, precision temperature control is by the Air Conditioning of evaporator cools.
4. precision air conditioner machine as claimed in claim 3, is characterized in that,
The refrigerant piping linking the refrigerant outlet of above-mentioned evaporimeter and the suction side of compressor is connected with the refrigerant suction pressure of compressor is remained certain back pressure regulator, above-mentioned expansion valve is made up of temperature-type expansion valve, the pipe arrangement of the upstream side of above-mentioned back pressure regulator is provided with the temperature sensing tube of said temperature formula expansion valve, thus the cold-producing medium evaporating pressure of above-mentioned evaporimeter is remained necessarily.
5. precision air conditioner machine as claimed in claim 4, is characterized in that,
Above-mentioned high pressure sensor is being provided with from above-mentioned condenser to the high-pressure side refrigerant piping of said temperature formula expansion valve.
6. precision air conditioner machine as claimed in claim 5, is characterized in that,
High-pressure side refrigerant piping between above-mentioned condenser and above-mentioned high pressure sensor is connected with fluid-containing pot.
7. precision air conditioner machine as claimed in claim 2, is characterized in that,
The housing of accommodating above-mentioned heat recovery section and above-mentioned radiating part is arranged at the return passage of above-mentioned dust free room.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010291585A JP4712910B1 (en) | 2010-12-28 | 2010-12-28 | Precision air conditioner |
| JP2010-291585 | 2010-12-28 | ||
| PCT/JP2011/050173 WO2012090511A1 (en) | 2010-12-28 | 2011-01-07 | Precise air conditioning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102803858A CN102803858A (en) | 2012-11-28 |
| CN102803858B true CN102803858B (en) | 2015-07-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201180002373.7A Active CN102803858B (en) | 2010-12-28 | 2011-01-07 | Precise air conditioning device |
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| Country | Link |
|---|---|
| JP (1) | JP4712910B1 (en) |
| KR (1) | KR101272088B1 (en) |
| CN (1) | CN102803858B (en) |
| TW (1) | TWI431230B (en) |
| WO (1) | WO2012090511A1 (en) |
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| CN102635990B (en) * | 2012-05-11 | 2014-08-13 | 杭州雪中炭恒温技术有限公司 | Refrigerating output control device and test device and control method using the refrigerating output control device |
| CN103090467B (en) * | 2012-12-29 | 2015-04-22 | 连添达 | Air conditioner without outdoor machine and working method thereof |
| CN104475518B (en) * | 2014-11-28 | 2018-02-16 | 芜湖通和汽车管路***股份有限公司 | A kind of automobile helix tube road Process Unit |
| TWI554732B (en) * | 2015-03-17 | 2016-10-21 | 國立勤益科技大學 | Heating and air conditioning device capable of recycling waste cold gas |
| JP7101024B2 (en) * | 2018-04-03 | 2022-07-14 | 東京エレクトロン株式会社 | Temperature control system |
| CN111121152B (en) * | 2019-12-20 | 2021-07-06 | 宁波奥克斯电气股份有限公司 | Multi-connected outdoor unit and fresh air fan mixed connection system and control method thereof |
| JP7205916B2 (en) * | 2020-02-19 | 2023-01-17 | オリオン機械株式会社 | Free cooling chiller and its operation method |
| CN112432340B (en) * | 2020-11-26 | 2021-11-26 | 珠海格力电器股份有限公司 | Control method and control device of air conditioner, processor and air conditioning system |
| CN112594949B (en) * | 2020-12-14 | 2022-11-15 | 广州兰石技术开发有限公司 | Energy-saving enthalpy difference laboratory |
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- 2011-01-07 KR KR1020117028332A patent/KR101272088B1/en active IP Right Grant
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| JP2002130847A (en) * | 2000-10-24 | 2002-05-09 | Ckd Corp | Liquid constant-temperature apparatus |
| JP2004020103A (en) * | 2002-06-18 | 2004-01-22 | Add:Kk | Temperature control chiller |
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| JP3160443U (en) * | 2010-04-15 | 2010-06-24 | 株式会社アピステ | Precision air conditioner for server |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101272088B1 (en) | 2013-06-07 |
| TW201226813A (en) | 2012-07-01 |
| TWI431230B (en) | 2014-03-21 |
| JP2012137271A (en) | 2012-07-19 |
| JP4712910B1 (en) | 2011-06-29 |
| CN102803858A (en) | 2012-11-28 |
| WO2012090511A1 (en) | 2012-07-05 |
| KR20120087803A (en) | 2012-08-07 |
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