CN102790524A - Charge pump device on basis of MEMS (Micro Electro Mechanical System) microphone bias circuit - Google Patents

Charge pump device on basis of MEMS (Micro Electro Mechanical System) microphone bias circuit Download PDF

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Publication number
CN102790524A
CN102790524A CN2012103164771A CN201210316477A CN102790524A CN 102790524 A CN102790524 A CN 102790524A CN 2012103164771 A CN2012103164771 A CN 2012103164771A CN 201210316477 A CN201210316477 A CN 201210316477A CN 102790524 A CN102790524 A CN 102790524A
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charge pump
clock
amplitude
circuit
reference voltage
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张震
戚湧
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Nanjing University of Science and Technology Changshu Research Institute Co Ltd
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Nanjing University of Science and Technology Changshu Research Institute Co Ltd
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Abstract

The invention discloses a charge pump device on the basis of a MEMS (Micro Electro Mechanical System) microphone bias circuit. The charge pump device comprises an oscillator, a reference voltage source, a clock amplitude doubling circuit, a Dickson charge pump, a low pass filter and the like. The oscillator is used for providing a two-phase non-overlapping clock with the duty cycle of 50 percent and regulating the amplitude of a two-phase non-overlapping clock signal into two times of the amplitude of a reference voltage. According to the invention, a reference voltage and clock amplitude defining circuit is added and can be used for implementing the stable high voltage output; and due to the adoption of a clock amplitude doubling technology, the number of stages of a diode-capacitance voltage unit is reduced by at least four stages, the area of a core circuit of the charge pump is at least shortened by 21 percent, the power consumption is at least reduced by 40 percent and the conversion efficiency is improved by nearly once.

Description

Charge pump apparatus based on MEMS microphone biasing circuit
Technical field
The present invention relates to the charge pump design of integrated circuit technique, more particularly to microphone bias circuit.
Background technology
Since proposing integrated charge pump circuit structure in the chips earliest from J.F.Dickson in 1976, Dickson charge pump is increasingly becoming DC-DC booster circuit the most commonly used in DRAM, EEPROM and flash memory.Due to the metal-oxide-semiconductor threshold voltage loss in charge pump, Dickson charge pump can not often reach preferable high output voltage at low supply voltages, and circuit overhead is very big, and conversion efficiency is low.For these problems, many solutions are proposed both at home and abroad, and such as static electric charge transfer switch technology, PMOS substitute nmos switch to compensate the technology of bulk effect.In the charge pump design that MEMS microphone provides biasing, it is related to some key factors:
(1) low-power consumption, MEMS microphone is applied in electronic equipment for consumption, the especially handheld devices such as MP3/MP4, PDA, phone, audiphone, and the requirement to power consumption is very high, and conversion efficiency should be improved as far as possible;
(2) voltage gain, handheld device is often powered using battery, therefore during normal use, supply voltage may as little as 1.3-1.5V, the regulated output voltage between 10-12V is obtained as the biasing of microphone, it is necessary to consider to use the problems such as stable reference voltage is as driving and voltage gain;
(3) area, the volume requirement of handheld device is typically relatively stricter, it is desirable to which charge pump chip occupying area is minimized;
(4) output voltage ripple, as the biasing of MEMS microphone, the influence of voice quality can be reduced by reducing charge pump output voltage ripple.
The content of the invention
The technical problems to be solved by the invention:
In order to weaken the influence of threshold voltage as far as possible, improve voltage gain, the present invention is on the basis of traditional Dickson charge pump structure, from the angle for improving charge pump clock signal amplitude, a kind of adaptation Low-voltage Low-power application needs, the improved charge pump configuration of high voltage gain are proposed.
The technical solution adopted in the present invention:
As shown in Figure 1.Compared with traditional Dickson charge pump structure, it adds clock amplitude double circuit, is made up of oscillator, reference voltage source, clock amplitude double circuit, Dickson charge pump and low pass filter etc..Wherein, oscillator provides the two-phase non-overlapp-ing clock that dutycycle is 50%;Clock amplitude double circuit is one of two cores of improved charge pump configuration, and it adjusts 2 times that two-phase non-overlapp-ing clock signal amplitude is reference voltage amplitude;Reference voltage source can provide stable reference voltage to clock amplitude double circuit and Dickson charge pump in the case of mains voltage variations and be used as driving;Dickson charge pump is another core;Low pass filter filter eliminates the high fdrequency component of output voltage.Physical circuit of the present invention, which is realized, to be included by PMOS M0, M1, M4, M5, M6, M8;NMOS tube M2, M3, M7, M9, and electric capacity C1 and C2 composition.The wherein described non-overlapped initial clock ck1 of two-phase with
Figure 214898DEST_PATH_IMAGE001
It is the importation of clock amplitude double circuit, VrefIt is the reference voltage that reference voltage source is provided, the output of clock amplitude double circuit is that amplitude is 2VrefTwo-phase non-overlapp-ing clock ck with
Figure 590516DEST_PATH_IMAGE002
.The concrete operating principle of the invention circuit is as follows:As ck1 ﹦ VDDWhen, N-type metal-oxide-semiconductor M2And M3Turn on, now electric capacity C1Lower step current potential is zero, and ck ﹦ 0, and then p-type metal-oxide-semiconductor M0Conducting, reference voltage source passes through p-type metal-oxide-semiconductor M0Give electric capacity C1Top crown is charged to Vref.As ck1 ﹦ 0, p-type metal-oxide-semiconductor M1And M4Conducting, electric capacity C1The current potential of lower step is Vref, because the voltage at electric capacity two ends will not be mutated, therefore electric capacity C1Top crown current potential be 2Vref.Analysis can be seen that more than:Ck1 and ck is anti-phase clock signal, and ck amplitude is 2Vref.Similarly,WithIt is anti-phase clock signal, and amplitude is also 2Vref
Compared with prior art, its remarkable advantage is the present invention:In the case where output voltage meets MEMS microphone offset requirements, compared with traditional Dickson charge pump structure, improved charge pump configuration is based on the double trap CMOS technologies of SMIC 0.35um high pressures, using clock amplitude doubling techniques, the series of diode-capacitance boost unit reduces at least 4 grades, the area of charge pump core circuit at least reduces 21%, and power consumption at least reduces by 40%, and conversion efficiency is improved will by about one time.Under identical series, the output voltage of improved charge pump configuration is apparently higher than traditional Dickson charge pump structure, voltage gain is significantly improved, the need for fully meeting MEMS microphone biasing circuit and consumer electronics product low-power consumption, the application demand of small size.
Brief description of the drawings
Fig. 1 modified Dickson charge pump structures
Fig. 2 Dickson charge pump principles
Fig. 3 clock amplitude double circuits
Embodiment
Reference voltage source
In the application of MEMS microphone, it is allowed to supply voltage as little as 1.3V-1.5V.In the range of this voltage swing, using reference voltage source, the 1.1V reference voltage insensitive to supply voltage can be provided, to ensure that charge pump output voltage is stable, and the accuracy of charge pump output high-pressure is improved in the range of 10-12V.
Oscillator
In the application of MEMS microphone biasing circuit, based on reducing electromagnetic interference and improving the consideration of power-efficient, the clock signal that oscillator output frequencies are 250KHZ is selected.Ring oscillator in oscillator provides the square-wave signal that frequency is 500KHZ, master-slave RS trigger by this square-wave signal be converted into dutycycle be the non-overlapped initial clock signal ck1 of two-phase that 50%, frequency is 250KHZ with
Figure 534835DEST_PATH_IMAGE001
.This will be converted into amplitude to initial clock signal for 2V by clock amplitude double circuitrefClock signal, to drive charge pump.
Dickson charge pump
Dickson charge pump principle is as shown in Fig. 2 it is one of two cores of whole improved charge pump configuration.The 1.1V reference voltage insensitive to supply voltage is provided as driving by reference voltage source, and it is that 250KHZ, amplitude are 2V to provide frequency by clock amplitude double circuitref, dutycycle be used as clock for the 50% non-overlapped signal of two-phase.
Clock amplitude double circuit and clock amplitude doubling techniques
Compared with traditional Dickson charge pump structure, most important improve of improved charge pump configuration is to apply clock amplitude doubling techniques, and the initial clock signal amplitude that oscillator is exported is adjusted to 2 times of reference voltage amplitude by clock amplitude double circuit as shown in Figure 3 by it.The non-overlapped initial clock ck1 of two-phase withIt is the importation of clock amplitude double circuit, VrefIt is the reference voltage that reference voltage source is provided, the output of clock amplitude double circuit is that amplitude is 2VrefTwo-phase non-overlapp-ing clock ck with
Figure 622057DEST_PATH_IMAGE002
.The concrete operating principle of circuit is as follows:As ck1 ﹦ VDDWhen, M2And M3Turn on, now C1Lower step current potential is zero, and ck ﹦ 0, and then M0Conducting, reference voltage source passes through M0To C1Top crown is charged to Vref.As ck1 ﹦ 0, M1And M4Conducting, electric capacity C1The current potential of lower step is Vref, because the voltage at electric capacity two ends will not be mutated, therefore C1Top crown current potential be 2Vref.Analysis can be seen that more than:Ck1 and ck is anti-phase clock signal, and ck amplitude is 2Vref.Similarly,
Figure 683554DEST_PATH_IMAGE001
With
Figure 905588DEST_PATH_IMAGE002
It is anti-phase clock signal, and amplitude is also 2Vref
The output voltage of the improved charge pump configuration of applied clock amplitude doubling techniques is:
Figure 318115DEST_PATH_IMAGE003
(1)
After applied clock amplitude doubling techniques it can be seen from (1) formula, as long as
Figure 283797DEST_PATH_IMAGE004
, the voltage gain of improved charge pump configuration is greater than traditional Dickson booster circuits.The approximate expression of improved charge pump configuration conversion efficiency is:
Figure 397203DEST_PATH_IMAGE005
(2)
By the approximate expression of the conversion efficiency of traditional Dickson charge pump structure:
Figure 586876DEST_PATH_IMAGE006
(3)
Compare (2) formula to can be found that with (3) formula, in the case of as remaining item, (2) formula Section 2 is more than (3) formula Section 2, therefore the conversion efficiency of improved charge pump configuration is higher than traditional Dickson charge pump structure.
Low pass filter
Low pass filter is used for filtering out the high fdrequency component of charge pump circuit output voltage, reduces output voltage ripple, by output voltage stabilization in the scope required by MEMS microphone normal work.

Claims (2)

1. a kind of charge pump apparatus based on MEMS microphone biasing circuit, it is characterised in that including following part:It is made up of oscillator, reference voltage source, clock amplitude double circuit, Dickson charge pump and low pass filter etc., oscillator provides the two-phase non-overlapp-ing clock that dutycycle is 50%.
2. the charge pump apparatus according to claim 1 based on MEMS microphone biasing circuit, is characterised by:Charge pump apparatus is main by PMOS M0, M1, M4, M5, M6, M8;NMOS tube M2, M3, M7, M9, and electric capacity C1 and C2 composition, the non-overlapped initial clock ck1 of two-phase with
Figure 521855DEST_PATH_IMAGE001
It is the importation of clock amplitude double circuit, VrefIt is the reference voltage that reference voltage source is provided, the output of clock amplitude double circuit is that amplitude is 2VrefTwo-phase non-overlapp-ing clock ck with
Figure 87965DEST_PATH_IMAGE002
CN2012103164771A 2012-08-31 2012-08-31 Charge pump device on basis of MEMS (Micro Electro Mechanical System) microphone bias circuit Pending CN102790524A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104518767A (en) * 2014-07-18 2015-04-15 上海华虹宏力半导体制造有限公司 Clock amplitude doubling circuit
WO2015100631A1 (en) * 2013-12-31 2015-07-09 无锡华润矽科微电子有限公司 Silicon microphone and special integrated circuit therein
CN105376683A (en) * 2014-08-06 2016-03-02 北京卓锐微技术有限公司 Silicon microphone amplifier capable of eliminating noise of charge pump
CN112187042A (en) * 2020-09-28 2021-01-05 合肥恒烁半导体有限公司 Charge pump regulating circuit and application thereof
CN112788509A (en) * 2019-11-07 2021-05-11 美商楼氏电子有限公司 Microphone assembly, integrated circuit and method of operating audio circuit
CN113573221A (en) * 2021-06-29 2021-10-29 歌尔微电子股份有限公司 MEMS microphone bias circuit and MEMS microphone

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020041503A1 (en) * 2000-09-14 2002-04-11 Bob Roohparvar Low voltage charge pump employing distributed charge boosting
JP2005102375A (en) * 2003-09-24 2005-04-14 Sanyo Electric Co Ltd Charge pump circuit
CN1689216A (en) * 2002-10-25 2005-10-26 爱特梅尔股份有限公司 Variable charge pump circuit with dynamic load

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020041503A1 (en) * 2000-09-14 2002-04-11 Bob Roohparvar Low voltage charge pump employing distributed charge boosting
CN1689216A (en) * 2002-10-25 2005-10-26 爱特梅尔股份有限公司 Variable charge pump circuit with dynamic load
JP2005102375A (en) * 2003-09-24 2005-04-14 Sanyo Electric Co Ltd Charge pump circuit

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
周锋等: "一种应用于MEMS麦克风偏置电路的电荷泵设计", 《微电子学》 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015100631A1 (en) * 2013-12-31 2015-07-09 无锡华润矽科微电子有限公司 Silicon microphone and special integrated circuit therein
CN104518767A (en) * 2014-07-18 2015-04-15 上海华虹宏力半导体制造有限公司 Clock amplitude doubling circuit
CN104518767B (en) * 2014-07-18 2017-10-24 上海华虹宏力半导体制造有限公司 Clock amplitude double circuit
CN105376683A (en) * 2014-08-06 2016-03-02 北京卓锐微技术有限公司 Silicon microphone amplifier capable of eliminating noise of charge pump
CN105376683B (en) * 2014-08-06 2018-09-25 山东共达电声股份有限公司 A kind of silicon microphone amplifier for eliminating charge-pumped noise
CN112788509A (en) * 2019-11-07 2021-05-11 美商楼氏电子有限公司 Microphone assembly, integrated circuit and method of operating audio circuit
CN112187042A (en) * 2020-09-28 2021-01-05 合肥恒烁半导体有限公司 Charge pump regulating circuit and application thereof
CN112187042B (en) * 2020-09-28 2021-07-30 恒烁半导体(合肥)股份有限公司 Charge pump regulating circuit and application thereof
CN113573221A (en) * 2021-06-29 2021-10-29 歌尔微电子股份有限公司 MEMS microphone bias circuit and MEMS microphone

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Application publication date: 20121121