CN102790168A - Piezoelectric ceramic actuator with flexible electrode - Google Patents
Piezoelectric ceramic actuator with flexible electrode Download PDFInfo
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- CN102790168A CN102790168A CN2012102816119A CN201210281611A CN102790168A CN 102790168 A CN102790168 A CN 102790168A CN 2012102816119 A CN2012102816119 A CN 2012102816119A CN 201210281611 A CN201210281611 A CN 201210281611A CN 102790168 A CN102790168 A CN 102790168A
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- piezoelectric ceramic
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- ceramic actuator
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- flexible
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Abstract
The invention discloses a piezoelectric ceramic actuator with a flexible electrode, which comprises a plurality of piezoelectric ceramic layers, wherein each of the piezoelectric ceramic layers is provided with inner electrodes; the inner electrodes in odd and even arrays respectively extend outward along two opposite sides of the piezoelectric ceramic layers; the inner electrodes in the odd and even arrays are respectively in parallel connection with two outer electrodes; and flexible conducting layers are attached to the two outer electrodes. Pressure-sensitive glued cloth of the piezoelectric ceramic actuator has higher electrical conductivity and higher toughness, can be tightly glued to the outer electrodes, can carry out a corresponding extending action synchronous with the work of the inner electrodes during the working process of the inner electrodes, and can ensure the excellent conduction between the outer electrodes and the inner electrodes, so as to ensure the normal work during the period. Besides, the pressure-sensitive glued cloth is used, so that the operation is simple and the automatic production is easily performed.
Description
Technical field
The present invention relates to the piezoelectric ceramic field, particularly a kind of piezoelectric ceramic actuator with flexible electrode.
Background technology
The making of piezoelectric ceramic actuator is a known technology; The manufacture method of piezoelectric ceramic actuator derives from the making of monolithic capacitor; It is to utilize a plurality of diaphragms with interior electrode to stack according to certain mode, through waiting static pressure compacting, cuts into required size back then and burns altogether; Also can adopt and process the piezoelectric ceramic monolithic earlier, utilize its silver electrode only cubic meter of stone method of vacation bonding or that the employing adhesive is bonding when increasing temperature again.
In traditional piezoelectric ceramic actuator, the metal level of two sides of electrode through being coated in stacking connects and draws in two groups.Under the alive outside effect of piezoelectric ceramic actuator, constantly elongate or shorten; These metal coatings receive the effect of bigger alternate stress; Very easyly cause external electrode to crack, this crackle can cause the resistance of external electrode to become big and produce electric arc, and electric arc ruptures external electrode very soon.External electrode fracture causes the blocking-up of electric current, thereby can not work normally, and these all are the existing problems of manufacture method of traditional piezoelectric ceramic actuator.
What traditional device used in the process of producing is some conductive and flexible glue or metal film and other some external electrode materials.It mainly is that drawback is a complicated operation, is difficult for realizing automated production, and the deformation of metal film is little, in the actuator course of work, is prone to throw off with device, causes the external electrode poor flow of device, causes device not worked.
Summary of the invention
In order to overcome above-mentioned defective, the invention provides a kind of piezoelectric ceramic actuator with flexible electrode of good conduction.
The present invention for the technical scheme that solves its technical problem and adopt is: 1, a kind of piezoelectric ceramic actuator of flexible electrode; Comprise a plurality of piezoceramics layers; Each piezoceramics layer is provided with interior electrode; Interior electrode stretches out along the piezoceramics layer two opposite sides respectively according to strange, even number, and the interior electrode of said odd column and even column two external electrodes that are connected in parallel respectively are covered with a compliant conductive layer on said two external electrodes.
As further improvement of the present invention, said compliant conductive layer is to have flexible pressure-sensitively by adhesive plaster, and pressure-sensitive surface by adhesive plaster scribbles the high-conductive metal coating, and pressure-sensitive had the characteristic of very high stretch-proof by adhesive plaster, the stretch capability of antifatigue.
As further improvement of the present invention, said external electrode adopts wherein a kind of method of chemical deposition or vapour deposition or printing to process.
As further improvement of the present invention, said dispatch from foreign news agency is at least a material in copper, nickel, palladium, the aluminium very.
As further improvement of the present invention, said high-conductive metal coating comprises at least a material of copper, nickel, palladium, aluminium.
The invention has the beneficial effects as follows: piezoelectric ceramic actuator is to have the device that is arranged in a plurality of piezoceramics layer structures in the heap, and each layer has the structure of a relatively independent electrode, and interior electrode need stretch out; Form the structure of the overall operation of a parallel connection, a plurality of interior electrodes must contact with external electrode well, and electrode and electrode can produce a relative displacement in work; Relative displacement meeting forms the crack on external electrode; Bring hidden danger can for the connection of external electrode, of the present invention pressure-sensitively had high conductivity and very high pliability by adhesive plaster, can guarantee to fit tightly on external electrode; And in interior electrode work, produce corresponding elongation action; The work of electrode in being synchronized with, the good conduction of assurance external electrode and each interior electrode, thereby the operate as normal of guaranty period; Pressure-sensitive cloth among the present invention also has high-strength adhesiveness, and assurance is tight with the device applying; Device because cloth material has the ability of good stretch-proof, adds that the ftractureing if any external electrode when having guaranteed device work of fitting closely also can guarantee its connectedness, thereby has guaranteed the overall operation of device in work; In addition owing to be pressure-sensitive by adhesive plaster, simple to operate, and be easy to the production of automation.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the end view of Fig. 1.
Embodiment
In order to deepen to understanding of the present invention, will combine embodiment and accompanying drawing that the present invention is made further detailed description below, this embodiment only is used to explain the present invention, does not constitute the qualification to protection range of the present invention.
Fig. 1-2 has shown a kind of execution mode of the piezoelectric ceramic actuator of a kind of flexible electrode of the present invention, comprises a plurality of piezoceramics layers 1, and each piezoceramics layer 1 is provided with interior electrode 2; Interior electrode 2 stretches out along piezoceramics layer 1 two opposite sides respectively according to strange, even number; The interior electrode 2 of said odd column and even column two external electrodes 3 that are connected in parallel respectively are covered with a compliant conductive layer 4 on said two external electrodes 3, and said compliant conductive layer 4 is flexible pressure-sensitive by adhesive plaster for having; And pressure-sensitive surface by adhesive plaster scribbles the high-conductive metal coating; Said external electrode 3 employingization printings are processed, and external electrode 3 is a copper product, said high-conductive metal coated copper material; During making that the external electrode surface clean of actuator is clean; Then pressure-sensitive adhesive plaster is pasted built in device external electrode surface, add that certain pressure compacting a period of time gets final product, operate very simple.
Claims (5)
1. piezoelectric ceramic actuator with flexible electrode; Comprise a plurality of piezoceramics layers (1); Each piezoceramics layer (1) is provided with interior electrode (2); Interior electrode (2) stretches out along piezoceramics layer (1) two opposite sides respectively according to strange, even number, and the interior electrode (2) of said odd column and even column two external electrodes (3) that are connected in parallel respectively is characterized in that: be covered with a compliant conductive layer (4) on said two external electrodes (3).
2. the piezoelectric ceramic actuator of flexible electrode according to claim 1 is characterized in that: said compliant conductive layer (4) is flexible pressure-sensitive by adhesive plaster for having, and pressure-sensitive surface by adhesive plaster scribbles the high-conductive metal coating.
3. the piezoelectric ceramic actuator of flexible electrode according to claim 1 is characterized in that: said external electrode (3) adopts wherein a kind of method of chemical deposition or vapour deposition or printing to process.
4. according to the piezoelectric ceramic actuator of claim 1 or 3 described flexible electrodes, it is characterized in that: said external electrode (3) is at least a material of copper, nickel, palladium, aluminium.
5. the piezoelectric ceramic actuator of flexible electrode according to claim 2, it is characterized in that: said high-conductive metal coating comprises at least a material of copper, nickel, palladium, aluminium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102816119A CN102790168A (en) | 2012-08-09 | 2012-08-09 | Piezoelectric ceramic actuator with flexible electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102816119A CN102790168A (en) | 2012-08-09 | 2012-08-09 | Piezoelectric ceramic actuator with flexible electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102790168A true CN102790168A (en) | 2012-11-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012102816119A Pending CN102790168A (en) | 2012-08-09 | 2012-08-09 | Piezoelectric ceramic actuator with flexible electrode |
Country Status (1)
| Country | Link |
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| CN (1) | CN102790168A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105339098A (en) * | 2013-06-20 | 2016-02-17 | 罗伯特·博世有限公司 | Method for electrically contacting a piezoceramic |
| CN108139281A (en) * | 2015-10-08 | 2018-06-08 | 埃普科斯股份有限公司 | For measuring the sensor of pressure and method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010026114A1 (en) * | 2000-03-29 | 2001-10-04 | Tokin Ceramics Corporation | Multilayer piezoelectric actuator with electrodes reinforced in conductivity |
| CN1382307A (en) * | 1999-09-21 | 2002-11-27 | 罗伯特·博施有限公司 | Method for applying flat outer electrodes to piezoceramic multi-layer actuator |
| JP4737799B2 (en) * | 2000-04-28 | 2011-08-03 | 京セラ株式会社 | Multilayer piezoelectric actuator and injection device |
| CN202855808U (en) * | 2012-08-09 | 2013-04-03 | 昆山攀特电陶科技有限公司 | Piezoelectric ceramic performer with flexible electrode |
-
2012
- 2012-08-09 CN CN2012102816119A patent/CN102790168A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1382307A (en) * | 1999-09-21 | 2002-11-27 | 罗伯特·博施有限公司 | Method for applying flat outer electrodes to piezoceramic multi-layer actuator |
| US20010026114A1 (en) * | 2000-03-29 | 2001-10-04 | Tokin Ceramics Corporation | Multilayer piezoelectric actuator with electrodes reinforced in conductivity |
| JP4737799B2 (en) * | 2000-04-28 | 2011-08-03 | 京セラ株式会社 | Multilayer piezoelectric actuator and injection device |
| CN202855808U (en) * | 2012-08-09 | 2013-04-03 | 昆山攀特电陶科技有限公司 | Piezoelectric ceramic performer with flexible electrode |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105339098A (en) * | 2013-06-20 | 2016-02-17 | 罗伯特·博世有限公司 | Method for electrically contacting a piezoceramic |
| US10074797B2 (en) | 2013-06-20 | 2018-09-11 | Robert Bosch Gmbh | Method for electrically contacting a piezoelectric ceramic |
| CN108139281A (en) * | 2015-10-08 | 2018-06-08 | 埃普科斯股份有限公司 | For measuring the sensor of pressure and method |
| US10677668B2 (en) | 2015-10-08 | 2020-06-09 | Robert Bosch Gmbh | Pressure sensor and method for measuring a pressure |
| US10928257B2 (en) | 2015-10-08 | 2021-02-23 | Tdk Electronics Ag | Sensor and method for measuring a pressure |
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Application publication date: 20121121 |