CN102788888A - Probe inserting device of scanning probe microscope and method thereof - Google Patents
Probe inserting device of scanning probe microscope and method thereof Download PDFInfo
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- CN102788888A CN102788888A CN2012102655494A CN201210265549A CN102788888A CN 102788888 A CN102788888 A CN 102788888A CN 2012102655494 A CN2012102655494 A CN 2012102655494A CN 201210265549 A CN201210265549 A CN 201210265549A CN 102788888 A CN102788888 A CN 102788888A
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Abstract
The invention discloses a probe inserting device of a scanning probe microscope. A stepping motor (8) is fixed on a base of the probe inserting device of the scanning probe microscope in a direction perpendicular to a horizontal direction, wherein the stepping motor (8) is connected with a piezoelectric ceramic scanner (7); a sample platform (11) is arranged on the piezoelectric ceramic scanner (7); the tip of a probe (2) is downward and the probe (2) is positioned rightly over the sample platform (11); a laser source (9) is installed above the probe (2); a photoelectric sensor (10) is positioned above the probe and is used for receiving a position signal of a light spot reflected by the probe (2), converting the position signal of the light spot into a voltage signal and sending the voltage signal into a controller (4); the stepping motor (8) is controlled by the controller (4) to drive a sample to approach the probe (2); the probe inserting device of the scanning probe microscope further comprises a dual-channel reflective optical fiber displacement sensor; and the distance between the probe and the surface of the sample is detected by the dual-channel reflective optical fiber displacement sensor. Under the control of the controller, the thick probe inserting speed is increased; and in combination with thin probe insertion control, the probe inserting device realizes quick probe insertion.
Description
Technical field
The present invention relates to a kind of scanning probe microscopy (SPM) inserting needle device and inserting needle method.
Background technology
Scanning probe microscopy (SPM) is as a kind of high-resolution three-dimensional appearance detecting instrument; Not only obtained widespread use in field of biology; Great attention (T.Ando, " High-speed atomic force microscopy coming ofage ", the Nanotechnology of semiconductor product industry have been obtained simultaneously; 2012,23:06200-062028.).When SPM scanned at sample surfaces, probe on the micro-cantilever and sample interacted, and cause micro-cantilever deflection, and this defection signal is used to characterize the morphology change of sample surfaces, and can reach the atom level high resolving power.Different according to probe and the sample surfaces mode of action, SPM can realize many information measurements such as Surface field, carrier concentration profile, surface capacitance.Along with processing live width in the semi-conductor industry constantly reduce a large amount of uses with high dielectric constant material, optical detection and scanning electron microscope detection method have all run into technology barrier.Advantages such as the high resolving power of SPM, many information measurements, three-dimensional imaging will be in semiconductor detection range performance significant role.
At a high speed, high-throughout detection be a kind of detection technique can be in semi-conductor industry the key of practicability.The speed of detection speed will directly influence the detection efficiency of industry spot, and the slow disadvantage of SPM exactly of measuring speed.Influence the SPM measuring speed and mainly comprise two aspect factors: one of which; The inserting needle time; Just probe by away from the sample surfaces position (1 ~ 2mm), approach to the required time of sample surfaces scanning imagery position through feed mechanism (like stepper motor), be generally tens seconds to several minutes; Its two, imaging time after just inserting needle is accomplished, shows the required time from beginning first spot scan until accomplishing piece image, is generally a few minutes to tens of minutes.
At present, the imaging time for shortening SPM has had a lot of research institutions to carry out correlative study work (B.J.Kenton; A.J.Fleming; K.K.Leang, " Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed ", Review of Scientific Instruments; 2011,82 (12): 123703-123711.; C.Richter, M.Burri, T.Sulzbach; C.Penzkofer, B.Irmer, " Ultrashort cantilever probes for high speed atomic force microscopy "; SPIE, 2011.), and have company to develop Related product (Bruker Ltd.; " Dimension fastscan:the world ' s fastest AFM ", 2011.
Http:// www.bruker-axs.com).For the inserting needle time that shortens SPM; The general method that adopts the segmentation inserting needle; Be about to the inserting needle process and be divided into two parts: first is thick inserting needle fast, and from approaching fast to closer locations (20um to 200um) than distant positions (more than the 1mm) from sample surfaces, approximate procedure adopts laser interferometer, laser limit switch, capacitive transducer or passes through the judgement of camera automatic focus completing place stepper motor with probe; Chinese patent 200910220156.X adopts the laser limit switch; United States Patent (USP) U.S.Pat.No.7,770,231B2. adopts the camera auto focusing method; Second portion is thin inserting needle, accomplishes first's inserting needle to after the sample surfaces closer locations, the stepper motor stop motion; High-speed response motor or piezoelectric ceramic tube are as driver, like United States Patent (USP) U.S.Pat.No.5,614; 712 and U.S.Pat.No.2006/0230474A1., cooperate certain control method to accomplish the inserting needle process, this process can accurately be controlled the distance of probe and sample surfaces; Prevent to damage, consuming time longer.
For thick inserting needle part, introduce the risk that laser interferometer or camera automatic focus technology can be avoided probe and sample bump, but its complex structure, cost is high.Capacitive transducer is responsive to electromagnetic signal, operating environment is required high.The horizontal direction laser limit switch of Chinese patent 200910220156.X invention has characteristics such as simple in structure, that cost is low, but its each change limit switch threshold value all needs manual adjustment laser instrument initial position.
Summary of the invention
The objective of the invention is to overcome that existing SPM quick needle insertion apparatus structure is complicated, cost is high, adaptive capacity to environment is low, the deficiency of inconvenient operation; A kind of novel quick needle insertion apparatus and method are provided; The present invention can not only realize quick needle insertion; And have simple in structure, cost is low, adaptability is strong, characteristics such as easy and simple to handle, can easily be integrated in different SPM structures, be applicable to that semi-conductor industry is on-the-spot to detect automatically.
Scanning probe microscopy inserting needle device of the present invention comprises controller, stepper motor, piezoelectric scanner, LASER Light Source, photoelectric sensor and probe, also comprises binary channels reflection formula optical fibre displacement sensor.Said controller is electrically connected with laser instrument, receiver that stepper motor, piezoelectric scanner, LASER Light Source, photoelectric sensor and binary channels reflect in the formula optical fibre displacement sensor.The controller core control module adopts embedded main board, cooperates host computer to accomplish data communication, instruction control; The AD data acquisition, DA output, step motor control; Photoelectric sensor information detects, scanner FEEDBACK CONTROL, binary channels reflection formula optical fibre displacement sensor control etc.Described controller mainly comprises the PC104 embedded main board, step motor control module, photoelectric sensor information detection module, scanner feedback control module and binary channels reflection formula optical fibre displacement sensor control module.Wherein, The PC104 embedded main board is the core of control, communicates by letter with host computer through network, realizes the step motor control module through the PC104 bus; Photoelectric sensor information detection module, the control of scanner feedback control module and binary channels reflection formula optical fibre displacement sensor control module; Step motor control module controls stepper motor, stepper motor drive sample to be detected and carry out approaching and away from action, be used for realizing fast thick inserting needle probe; Photoelectric sensor information detection module is used to detect the output signal of photoelectric sensor, judges that probe also provides input signal for the scanner feedback control module with the situation that contacts of sample surfaces; The scanner feedback control module is used to control that piezoelectric scanner is quick, high precision is flexible, thereby accurately controls the interaction of probe and sample surfaces, realizes can't harm the thin inserting needle of formula; Binary channels reflection formula optical fibre displacement sensor control module is used to control the laser instrument emission of lasering beam, is the digital signal that control program can be discerned through the laser of receiver reception reflected back and through analog to digital conversion.
Said stepper motor is to be fixed on the base of scanning probe microscopy inserting needle device perpendicular to the surface level direction, stepper motor connects piezoelectric scanner through screw rod.Described piezoelectric scanner can carry out X, Y, the motion of Z three direction of principal axis micrometric displacements, fixedly mounts sample stage on the piezoelectric scanner, and horizontal fixed is placed sample on the sample stage.Probe is installed on the probe base and with scanning probe microscopy and is rigidly connected, and probe tip is in position directly over the sample stage down.The probe upper fixed is installed LASER Light Source; LASER Light Source with perpendicular to surface level direction emission of lasering beam through probe reflection to the photoelectric sensor that is positioned at the probe oblique upper; Photoelectric sensor is adjusted to the position that receives the probe reflection hot spot through micro-adjusting mechanism; Photoelectric sensor receives the light spot position signal of probe reflection, and converts light spot position signal into voltage signal and send into controller, and controller is through light spot position signal control inserting needle process and judge whether inserting needle is accomplished.Binary channels reflection formula optical fibre displacement sensor is used for the distance between detection probe and the sample surface, and binary channels reflection formula optical fibre displacement sensor is made up of probe, optical fiber, laser instrument and receiver.Described probe tip has three circular holes, and one is laser emission port, and two other is respectively laser pick-off hole one and laser pick-off hole two.Described probe is fixed on scan probe microscopic probe seat side; The top of probe is downward; Perpendicular to sample surfaces to be detected; Probe is H ' with the vertical range of probe, and Hmin-h0 H ' and Hmax-h0, wherein Hmin is that binary channels reflection formula optical fibre displacement sensor can the detected probe minor increment surperficial with sample; Hmax is that binary channels reflection formula optical fibre displacement sensor can detected probe and the ultimate range on sample surface, the distance of probe and sample surfaces when h0 is thick inserting needle end.Described optical fiber has three, and one is launching fiber, and other two are respectively the first reception optical fiber and the second reception optical fiber.One end of launching fiber is fixedly connected laser emission port, and the other end of launching fiber is fixedly connected laser instrument.The end that the first reception optical fiber and second receives optical fiber is fixedly connected the first laser pick-off hole and the second laser pick-off hole respectively, and the other end that the first reception optical fiber and second receives optical fiber is fixedly connected receiver.Laser instrument and receiver are electrically connected with controller respectively.The binary channels reflection formula optical fibre displacement sensor control module control laser instrument emission of lasering beam of controller; This laser beam conducts to the laser emission port on the probe through described launching fiber; Laser beam from the laser emission port vertical irradiation behind sample surfaces to be detected; Reflex to two laser pick-off holes of probe; The light signal that two laser pick-off holes receive conducts to receiver through two root receiving fibers respectively; Receiver converts two ways of optical signals into two-way analog voltage signal Vs1 and Vs2, and binary channels reflection formula optical fibre displacement sensor control module converts two-way analog voltage signal Vs1 and Vs2 into two-way digital voltage signal Vd1 and Vd2 respectively, and two-way digital voltage signal Vd2 and Vd1 be divided by draw nondimensional digital quantity Vd; < < dullness is consistent in the Hmax scope, sets up digital quantity Vd and H look-up table one to one for H at Hmin with the sample surfaces distance H with probe for digital quantity Vd.Controller binary channels reflection formula optical fibre displacement sensor control module utilizes look-up table to pass through Vd judgement probe and sample surfaces distance H; Because H=h+H '; Wherein h is the current distance of probe and sample surfaces; And the distance H of probe and probe ' fix, then can judge the distance h of probe and sample surfaces.
Inserting needle method of the present invention comprises thick fast inserting needle and thin inserting needle at a slow speed, is specially:
Said thick inserting needle method comprises the steps:
A. before the inserting needle first time; The distance h 0 of probe and sample surfaces when setting thick inserting needle and finish through controller; It is the position of h0 that step motor control module controls stepper motor in the controller drives the distance that sample to be detected moves to sample surfaces and probe; The binary channels reflection formula optical fibre displacement sensor control module record of controller reflects the digital quantity Vd that the formula optical fibre displacement sensor collects through binary channels, and this digital quantity Vd is recorded as constant VD;
B. controller through step motor control module controls stepper motor drive sample away from probe to 1mm ~ 2mm safe distance, begin thick inserting needle.
C. controller drives the sample stage rising through step motor control module controls stepper motor with 50um/s ~ 100um/s speed; Detect binary channels reflection formula optical fibre displacement sensor output digital quantity Vd through binary channels reflection formula optical fibre displacement sensor control module simultaneously; When digital quantity Vd is less than or equal to the constant VD of step a setting; Controller step motor control module stops the stepper motor motion, and thick inserting needle is accomplished;
Said thin inserting needle method comprises the steps:
D. the scanner feedback control module of controller control piezoelectric scanner approaches probe to the elongation of Z direction, and the photoelectric sensor information detection module of controller detects on the photoelectric sensor location deflection signal by the probe reflection laser facula simultaneously; When piezoelectric scanner reaches Z direction maximum displacement 1um ~ 8um; Do not export 200mV ~ 500mV mutation voltage signal like photoelectric sensor; Then scanner feedback control module control piezoelectric scanner shortens to least displacement 0um position in the Z direction; Drive sample through controller step motor control module controls stepper motor simultaneously and approach to probe, approaching displacement is piezoelectric scanner Z direction maximum displacement;
E. repeating step d, till photoelectric sensor produced 200mV ~ 500mV mutation voltage signal, thin inserting needle was accomplished.
The principle of work and the course of work of binary channels reflection formula optical fibre displacement sensor are following: the laser instrument emission of lasering beam conducts to the laser emission port of probe tip through launching fiber; Laser beam from the laser emission port vertical irradiation behind sample surfaces to be detected; Reflex to two laser pick-off holes of probe; The aperture in laser emission port and laser pick-off hole equates that the center distance in laser emission port and laser pick-off hole is respectively p1 and p2, p1 < p2.The light signal that two laser pick-off holes receive conducts to receiver through two root receiving fibers respectively, and receiver converts two ways of optical signals into the two-way analog voltage signal.The binary channels reflection formula optical fibre displacement sensor control module of two-way analog voltage signal via controller is handled and is drawn nondimensional digital quantity; This digital quantity changes dull consistent with the relative displacement of probe sample surfaces within the specific limits; Set up the look-up table that this digital quantity and said relative displacement change, can draw current digit amount corresponding probe and sample surface distance through look-up table.
The present invention is reflected the distance on direct measuring sonde of formula optical fibre displacement sensor and sample surface through binary channels, thereby records the distance on probe and sample surface.Because probe is fixed with the relative position of probe, therefore can guarantee the accurate of measurement result.Binary channels reflection formula optical fibre displacement sensor adopts the principle of laser-bounce, can avoid the influence of external environments such as temperature, electromagnetism to measurement effect.Binary channels reflection formula optical fibre displacement sensor also has characteristics simple in structure, that cost is low, adaptability is strong, easy and simple to handle, can be integrated into advantages such as SPM structure easily.The present invention sets thick inserting needle position through controller, can change thick inserting needle position flexibly through control program.The Combined application of thick, the thin inserting needle mode of the present invention can improve inserting needle speed, can prevent the damage of inserting needle process probe and sample again.These characteristics makes the present invention can be widely used in dissimilar SPM, is particularly useful for the on-the-spot detection of semi-conductor industry and waits the complicated SPM of working environment.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
The structured flowchart of Fig. 1 inserting needle device of the present invention;
Fig. 2 controller architecture sketch;
Fig. 3 binary channels reflection formula optical fibre displacement sensor structural drawing
Fig. 4 binary channels reflection formula optical fibre displacement sensor probe is mounted to the vertical view of SPM probe base position;
Fig. 5 is the side view of Fig. 4;
The schematic diagram of Fig. 6 binary channels reflection formula optical fibre displacement sensor;
" distance-digital voltage signal " curve of Fig. 7 two-way receiver hole;
" distance-digital quantity Vd " curve after Fig. 8 two-way digital voltage signal is divided by;
Among the figure: 1 binary channels reflection formula optical fibre displacement sensor, 2 probes, 3 probe bases, 4 controllers, 5 switches; 6 feedback controllers, 7 scanners, 8 stepper motors, 9 LASER Light Sources, 10 photoelectric sensors; 11 sample stage, 12 receive optical fiber, 13 launching fibers, 14 receive optical fiber, 15 laser instruments; 16 receivers, 17 receiver holes, 18 transmitting apertures, 19 receiver holes, 20 probes.
Embodiment
As shown in Figure 1, the inventive system comprises controller 4, stepper motor 8, piezoelectric scanner 7, LASER Light Source 9, photoelectric sensor 10, probe 2 and binary channels reflection formula optical fibre displacement sensor 1.Said controller 4 is electrically connected with stepper motor 8, piezoelectric scanner 7, LASER Light Source 9, photoelectric sensor 10 and binary channels reflection formula optical fibre displacement sensor 1.Said stepper motor 8 is fixed on the base of scanning probe microscopy inserting needle device with the direction perpendicular to surface level, and stepper motor 8 connects piezoelectric scanner 7 through screw rod.Described piezoelectric scanner 7 can carry out X, Y, the motion of Z three direction of principal axis micrometric displacements.Sample stage 11 is set on the piezoelectric scanner 7.Probe 2 is installed on the probe base 3 and with scanning probe microscopy and is rigidly connected.Probe 2 needle points be positioned at down sample stage 11 directly over.Probe 2 upper fixed are installed LASER Light Source 9.LASER Light Source 9 is with perpendicular to surface level direction emission of lasering beam, and laser beam reflexes to the photoelectric sensor 10 that is positioned at probe 2 oblique uppers through probe 2.Photoelectric sensor 10 is adjusted to the position that receives probe 2 flares through micro-adjusting mechanism; Photoelectric sensor 10 receives the light spot position signal of probe 2 reflections; And convert light spot position signal into voltage signal and send into controller, controller is through light spot position signal control inserting needle process and judge whether inserting needle is accomplished.
As shown in Figure 2, controller 4 mainly comprises the PC104 embedded main board, step motor control module, photoelectric sensor information detection module, scanner feedback control module and binary channels reflection formula optical fibre displacement sensor control module.Wherein, The PC104 embedded main board is the core of control; Communicate by letter with host computer through network; Receive the instruction of host computer transmission and give host computer, utilize the PC104 bus to realize control step motor control module, photoelectric sensor information detection module, scanner feedback control module and binary channels reflection formula optical fibre displacement sensor control module with the returning data of gathering.Step motor control module controls stepper motor 8 drives sample to be detected and carries out approaching and away from action, be used for realizing fast thick inserting needle probe 2.Photoelectric sensor information detection module is used to detect the output signal of photoelectric sensor 10, judges that probe 2 also provides input signal for the scanner feedback control module with the situation that contacts of sample surfaces.The scanner feedback control module is used to control piezoelectric scanner 7 quick, high-precision micro displacement motions, thereby accurately controls the interaction of probe 2 and sample, realizes the harmless thin inserting needle of formula; Binary channels reflection formula optical fibre displacement sensor control module is used to control laser instrument 15 emission of lasering beam, is the digital signal that control program can be discerned through the laser of receiver 16 reception reflected backs and through analog to digital conversion.
As shown in Figure 3, binary channels reflection formula optical fibre displacement sensor 1 is made up of probe 20, launching fiber 13, reception optical fiber 12,14, laser instrument 15 and receiver 16.There are three circular holes on the top of described probe 20, and one is laser emission port 18, and two other is laser pick-off hole 17,19.One end of launching fiber 13 is fixedly connected laser emission port 18, and the other end of launching fiber 13 is fixedly connected laser instrument 15.First receive optical fiber 12 an end be fixedly connected a end that the first laser pick-off hole 17, the second receives optical fiber 14 and be fixedly connected the other end that the second laser pick-off hole 19, the first receives the optical fiber 12 and the second reception optical fiber 14 and be fixedly connected receiver 16.Laser instrument 15 is electrically connected with controller 4 respectively with receiver 16.Probe 20 is fixed on the side of scan probe microscopic probe seat 3, and is as shown in Figure 4.The top of probe 20 is downward, and is perpendicular to the sample surface, with vertical range H '=600 (um) of probe 2, as shown in Figure 5.Controller 4 binary channels reflection formula optical fibre displacement sensor control module control laser instrument 15 emission of lasering beam; This laser beam conducts to the laser emission port 18 on the probe through launching fiber 13; Laser from laser emission port 18 vertical irradiations behind sample surfaces; Reflex to two laser pick- off holes 17,19 of probe 20, as shown in Figure 6.The light signal that two laser pick-off holes receive conducts to receiver 16 through two root receiving fibers 12 and 14 respectively; Receiver 16 converts two ways of optical signals into two-way analog voltage signal Vs1 and Vs2; Controller 4 binary channels reflection formula optical fibre displacement sensor control module converts two-way analog voltage signal Vs1 and Vs2 into two-way digital voltage signal Vd1 and Vd2 respectively; As shown in Figure 7, and two-way digital voltage signal Vd2 and Vd1 be divided by obtain digital quantity Vd, < H is < dull consistent in the Hmax scope at Hmin with the sample surfaces distance H with probe for digital quantity Vd; And Hmin=520um; Hmax=850um, as shown in Figure 8, set up the digital quantity Vd and the sample surfaces distance H look-up table one to one of popping one's head in; Binary channels reflection formula optical fibre displacement sensor control module in the controller 4 utilizes look-up table to pass through digital quantity Vd judgement probe 20 and sample surfaces distance H; Because the distance H of probe 20 and probe 2 '=600um, and then the distance h=H-600 of judgement probe 2 and sample surfaces.
Inserting needle method of the present invention comprises thick fast inserting needle and thin inserting needle at a slow speed, and the method for operating of embodiment is:
A. before the inserting needle first time; The distance h 0=60um of probe 2 and sample surfaces when finishing through the thick inserting needle of controller 4 settings; Controller 4 step motor control module controls stepper motors, 8 drives sample to be detected moves to distance probes 2 and is the 60um position, the digital quantity Vd=Vd2/Vd1=0.65/2.23=0.29 that controller 4 binary channels reflection formula optical fibre displacement sensor control module record collects through binary channels reflection formula optical fibre displacement sensor 1;
D. begin thin inserting needle; The scanner feedback control module of controller 4 control piezoelectric scanner 7 approaches probe 2 to the elongation of Z direction, and the photoelectric sensor information detection module of controller 4 detects on the photoelectric sensor 10 the location deflection signal by probe 2 reflected laser light spot simultaneously; When piezoelectric scanner 7 reaches Z direction maximum displacement 4um; Still do not export the mutation voltage signal of variable quantity like photoelectric sensor 10 greater than 200mV; Then scanner feedback control module control piezoelectric scanner 7 shortens to least displacement 0um position in the Z direction; Step motor control module controls stepper motor drive sample through controller 4 approaches to probe simultaneously, and approaching displacement is piezoelectric scanner Z direction maximum displacement 4um;
E. repeating step d, till the mutation voltage signal that photoelectric sensor 10 produces greater than 200mV, thin inserting needle is accomplished about 14 seconds consuming time.
In the aforesaid operations method, controller 4 receives controlled variable and the instruction that host computer sends through network, and scanning probe microscopy inserting needle device inserting needle process of the present invention is controlled.
Claims (5)
1. scanning probe microscopy inserting needle device; It is characterized in that described inserting needle device comprises controller (4), stepper motor (8), piezoelectric scanner (7), LASER Light Source (9), photoelectric sensor (10), probe (2) and binary channels reflection formula optical fibre displacement sensor (1); Said controller (4) is electrically connected with laser instrument (15), receiver (16) that stepper motor (8), piezoelectric scanner (7), LASER Light Source (9), photoelectric sensor (10) and binary channels reflect in the formula optical fibre displacement sensor (1); Said stepper motor (8) is to be fixed on the base of scanning probe microscopy inserting needle device perpendicular to the surface level direction, stepper motor (8) connects piezoelectric scanner (7); Sample stage (11) is set on the piezoelectric scanner (7); Probe (2) needle point down, be positioned at sample stage (11) directly over; The top of probe (2) is equipped with LASER Light Source (9); Photoelectric sensor (10) is positioned at the probe oblique upper; The position signalling of the hot spot that reception probe (2) is reflected; And convert light spot position signal into voltage signal and send into controller (4), controller (4) is through light spot position signal control inserting needle process and judge whether inserting needle is accomplished.
2. according to the described scanning probe microscopy inserting needle of claim 1 device; It is characterized in that described binary channels reflection formula optical fibre displacement sensor (1) is made up of probe (20), launching fiber (13), reception optical fiber (12,14), laser instrument (15) and receiver (16); The top of described probe (20) has laser emission port (18) and two laser pick-off holes (17,19); Described probe (20) is fixed on the side of scan probe microscopic probe seat (3); The top of probe (20) is downward, perpendicular to sample surfaces to be detected; Probe (20) is H ' with the vertical range of probe (2); And Hmin-h0 H ' < Hmax-h0; Wherein Hmin is minor increment that binary channels reflection formula optical fibre displacement sensor (1) can detectedly be popped one's head in (20) and sample is surperficial; Hmax is can detectedly the pop one's head in ultimate range on (20) and sample surface of binary channels reflection formula optical fibre displacement sensor (1), and h0 is the distance of thick inserting needle probe (2) and sample surfaces when finishing; One end of described launching fiber (13) connects laser emission port (18), and the other end of launching fiber (13) connects laser instrument (15); One end of the first reception optical fiber (12) connects the first laser pick-off hole (17), and first receives the other end connection receiver (16) of optical fiber (12); One end of the second reception optical fiber (14) connects the second laser pick-off hole (19), and second receives the other end connection receiver (16) of optical fiber (14).
3. according to the described scanning probe microscopy inserting needle of claim 1 device; It is characterized in that described controller (4) comprises PC104 embedded main board, step motor control module, photoelectric sensor information detection module, scanner feedback control module and binary channels reflection formula optical fibre displacement sensor control module; Described PC104 embedded main board is communicated by letter with host computer through network; Receive the instruction of host computer transmission and give host computer, utilize the PC104 bus to realize control step motor control module, photoelectric sensor information detection module, scanner feedback control module and binary channels reflection formula optical fibre displacement sensor control module with the returning data of gathering; Step motor control module controls stepper motor drive sample to be detected carry out to probe approach and away from action; Photoelectric sensor information detection module detects the output signal of photoelectric sensor (10), judges that probe (2) also provides input signal for the scanner feedback control module with the situation that contacts of sample surfaces; The scanner feedback control module is used to control the micrometric displacement motion of piezoelectric scanner (7); Binary channels reflection formula optical fibre displacement sensor control module is used to control the laser instrument emission of lasering beam, is the digital signal that control program can be discerned through the laser of receiver reception reflected back and through analog to digital conversion.
4. according to claim 2 or 3 described scanning probe microscopy inserting needle devices; It is characterized in that; Described binary channels reflection formula optical fibre displacement sensor control module control laser instrument (15) emission of lasering beam, this laser beam conducts to the laser emission port (18) on the probe (20) through launching fiber (13); Laser beam from laser emission port (18) vertical irradiation behind sample surfaces to be detected; Reflex to two laser pick-off holes (17,19) of probe (20); The light signal that two laser pick-off holes (17,19) receive conducts to receiver (16) through two root receiving fibers (12,14) respectively, and the two ways of optical signals that receiver (16) will receive optical fiber (12) and reception optical fiber (14) converts analog voltage signal Vs1 and Vs2 respectively into; Described binary channels reflection formula optical fibre displacement sensor control module converts two-way analog voltage signal Vs1 and Vs2 into two-way digital voltage signal Vd1 and Vd2 respectively; And described two-way digital voltage signal Vd2 and Vd1 be divided by obtain digital quantity Vd; < < dullness is consistent in the Hmax scope, sets up digital quantity Vd and probe (20) and sample surfaces distance H look-up table one to one for H at Hmin with the sample surfaces distance H with probe for digital quantity Vd; Described binary channels reflection formula optical fibre displacement sensor control module utilizes look-up table to pass through digital quantity Vd judgement probe (20) and sample surfaces distance H; According to formula H=h+H '; Wherein h is the distance of probe (2) and sample surfaces; H ' is the distance of probe (20) with probe (2), then can judge the distance h of probe (2) and sample surfaces.
5. adopt the inserting needle method of the described scanning probe microscopy inserting needle of claim 1 device, it is characterized in that, described inserting needle method comprises thick inserting needle and thin inserting needle, and the concrete operations step is:
A. before the inserting needle first time; The distance h 0 of probe (2) and sample surfaces when finishing through the thick inserting needle of controller (4) setting; The distance that step motor control module controls stepper motor (8) the drive sample to be detected of controller (4) moves to sample surfaces and probe (2) is the position of h0; The binary channels reflection formula optical fibre displacement sensor control module record of controller (4) reflects the digital quantity Vd that formula optical fibre displacement sensor (1) collects through binary channels, and this digital quantity Vd is recorded as constant VD;
B. controller (4) through step motor control module controls stepper motor (8) drive sample away from probe to 1mm ~ 2mm safe distance, begin thick inserting needle;
C. controller (4) drives sample stage (11) rising through step motor control module controls stepper motor (8) with 50um/s～100um/s speed; Detect binary channels reflection formula optical fibre displacement sensor (1) output digital quantity Vd through binary channels reflection formula optical fibre displacement sensor control module simultaneously; When Vd≤VD; Controller step motor control module stops the stepper motor motion, and thick inserting needle is accomplished;
D. begin thin inserting needle; The scanner feedback control module control piezoelectric scanner (7) of controller (4) approaches probe (2) to the elongation of Z direction, and the photoelectric sensor information detection module of controller (4) detects photoelectric sensor (10) and goes up the location deflection signal by probe (2) reflected laser light spot simultaneously; When piezoelectric scanner (7) reaches Z direction maximum displacement 1um ~ 8um; Do not export 200mV ~ 500mV mutation voltage signal like photoelectric sensor (10); Then scanner feedback control module control piezoelectric scanner (7) shortens to least displacement 0um position in the Z direction; Step motor control module controls stepper motor (8) drive sample through controller (4) approaches to probe (2) simultaneously, and approaching displacement is piezoelectric scanner Z direction maximum displacement;
E. repeating step d, till photoelectric sensor (10) produced 200mV ~ 500mV mutation voltage signal, thin inserting needle was accomplished.
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| CN110082568A (en) * | 2019-04-28 | 2019-08-02 | 广州大学 | A kind of scan-type electrochemical microscope and its bearing calibration |
| CN110389238A (en) * | 2018-04-16 | 2019-10-29 | 株式会社岛津制作所 | Scanning type probe microscope and cantilever moving method |
| CN110736715A (en) * | 2019-10-25 | 2020-01-31 | 深圳市太赫兹科技创新研究院有限公司 | Method, device and system for preventing false touch of probe |
| CN111044803A (en) * | 2019-12-12 | 2020-04-21 | 佛山市卓膜科技有限公司 | Piezoelectric coefficient measuring method for piezoelectric material |
| CN111566488A (en) * | 2018-01-18 | 2020-08-21 | 艾克斯塞拉公司 | Test pin, test probe, and flying probe tester for testing printed circuit board |
| US11016139B2 (en) | 2018-09-14 | 2021-05-25 | Chongqing Hkc Optoelectronics Technology Co., Ltd. | Test assembly and test device |
| CN113848349A (en) * | 2021-09-09 | 2021-12-28 | 国仪量子(合肥)技术有限公司 | Automatic probe needle inserting device and automatic probe needle inserting method |
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| CN104374954A (en) * | 2014-11-24 | 2015-02-25 | 苏州飞时曼精密仪器有限公司 | Probe and sample approaching device and method for scanning probe microscope |
| US11774495B2 (en) | 2018-01-18 | 2023-10-03 | Atg Luther & Maelzer Gmbh | Capacitive test needle for measuring electrically conductive layers in printed circuit board holes |
| CN111566488A (en) * | 2018-01-18 | 2020-08-21 | 艾克斯塞拉公司 | Test pin, test probe, and flying probe tester for testing printed circuit board |
| CN110389238A (en) * | 2018-04-16 | 2019-10-29 | 株式会社岛津制作所 | Scanning type probe microscope and cantilever moving method |
| CN110389238B (en) * | 2018-04-16 | 2022-03-29 | 株式会社岛津制作所 | Scanning probe microscope and cantilever moving method |
| CN108803680A (en) * | 2018-07-25 | 2018-11-13 | 方焕辉 | A kind of control device and method of MEMS sensor |
| CN109298274A (en) * | 2018-09-14 | 2019-02-01 | 重庆惠科金渝光电科技有限公司 | Testing element component and test equipment |
| US11016139B2 (en) | 2018-09-14 | 2021-05-25 | Chongqing Hkc Optoelectronics Technology Co., Ltd. | Test assembly and test device |
| CN109916971A (en) * | 2019-04-25 | 2019-06-21 | 云南中烟工业有限责任公司 | A kind of fast non-destructive detection method of the fresh tobacco leaves moisture based on capacitor |
| CN109916971B (en) * | 2019-04-25 | 2022-05-17 | 云南中烟工业有限责任公司 | Rapid nondestructive testing method for fresh tobacco moisture based on capacitor |
| CN110082568A (en) * | 2019-04-28 | 2019-08-02 | 广州大学 | A kind of scan-type electrochemical microscope and its bearing calibration |
| CN110736715A (en) * | 2019-10-25 | 2020-01-31 | 深圳市太赫兹科技创新研究院有限公司 | Method, device and system for preventing false touch of probe |
| CN111044803A (en) * | 2019-12-12 | 2020-04-21 | 佛山市卓膜科技有限公司 | Piezoelectric coefficient measuring method for piezoelectric material |
| CN113848349A (en) * | 2021-09-09 | 2021-12-28 | 国仪量子(合肥)技术有限公司 | Automatic probe needle inserting device and automatic probe needle inserting method |
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