CN102784788A - Liquid level controlling and liquid supplementing device of silicon wafer cleaning tank - Google Patents
Liquid level controlling and liquid supplementing device of silicon wafer cleaning tank Download PDFInfo
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- CN102784788A CN102784788A CN2012103096469A CN201210309646A CN102784788A CN 102784788 A CN102784788 A CN 102784788A CN 2012103096469 A CN2012103096469 A CN 2012103096469A CN 201210309646 A CN201210309646 A CN 201210309646A CN 102784788 A CN102784788 A CN 102784788A
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Abstract
The invention discloses a liquid level controlling and liquid supplementing device of a silicon wafer cleaning tank. The liquid level controlling and liquid supplementing device comprises a tank body (1), a liquid supplementing guide tube (2), a first detector (3), a second detector (4) and a liquid supplementing device (5), the liquid supplementing tube (2) extends into the tank body, the first detector (3) is used for detecting supplemented liquid, the second detector (4) is used for detecting the lowest liquid level of the tank body, the liquid supplementing device comprises a liquid supplementing barrel (51) and a guide tube (52) connected with the liquid supplementing guide tube (2), and a plurality of control valves (53 and 54) which are connected in parallel are arranged between the liquid supplementing barrel and the guide tube. By the aid of the liquid level controlling and liquid supplementing device, the volume of liquid medicine in the tank body can be accurately detected, errors between the actual supplementing quantity and a theoretical value can be reduced, and liquid supplementing precision is improved.
Description
Technical field
The present invention relates at solar energy cleaning equipment and wet processing apparatus, be specifically related to a kind of control of solar silicon wafers rinse bath liquid level and liquid supply device of being used for.
Background technology
In the cleaning equipment and wet processing apparatus of solar silicon wafers; Especially in chain type solar energy cleaning equipment and the wet processing apparatus; The production technology that the liquid level control of cell body and fluid infusion precision directly influence complete machine when equipment carries out dosing, is mended the actual value of the amount of liquid medicine of going into and the uniformity of theoretical value in the cell body; With the service life of corrosive effect that has a strong impact on silicon chip and soup, reduce the processing performance of product.Existing liquid supply device generally is directly through conduit cleaning fluid to be imported in the cell body, can't accomplish the accurate control of liquid level.
Summary of the invention
The present invention proposes a kind of solar silicon wafers rinse bath liquid level control and liquid supply device.
The technical scheme that the present invention adopts is; Design a kind of silicon chip rinse bath liquid level control and liquid supply device; Comprise: cell body, stretch into fluid infusion conduit in the cell body, be used to detect feeding-in liquid first detector, be used to detect second detector of cell body minimum liquid level, and liquid supply device, described liquid supply device comprises fluid infusion bucket and the conduit that is connected with the fluid infusion conduit; Wherein, be provided with the control valve of a plurality of parallel connections between described fluid infusion bucket and the conduit.
In a preferred embodiment, described first detector adopts supersonic reflectoscope, and described second detector adopts the ball float detector.
Compared with prior art; The present invention can detect the medicine liquid volume in the groove accurately; Can dwindle actual benefit and go into the error of amount and theoretical value, improve the fluid infusion precision, improve the corrosive effect of silicon chip and the service life of soup; Can also the log history amount infused in programming, play a role for the control of cost.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the present invention is further described, wherein:
Fig. 1 is a structural representation of the present invention.
The specific embodiment
As shown in Figure 1; Control of silicon chip rinse bath liquid level and liquid supply device that the present invention proposes comprise: cell body 1, stretch into fluid infusion conduit 2 in the cell body, be used to detect feeding-in liquid first detector 3, be used to detect second detector 4 and the liquid supply device 5 of cell body minimum liquid level.Liquid supply device comprises the conduit 52 that fluid infusion bucket 51 is connected with fluid infusion conduit 2, is provided with the control valve 53 and 54 of two parallel connections between fluid infusion bucket and the conduit, also can parallelly connected plural control valve, and the control valve flow on the control valve flow-rate ratio main road of bypass is little.Among this embodiment, first detector 3 adopts supersonic reflectoscope, and second detector adopts ball float detector 4.
During work,, let liquid mend in the groove through fluid infusion conduit 52 along pipeline from fluid infusion bucket 51 through the conducting of operating desk adjusting control valve.In fluid infusion, the volume of the actual feeding-in liquid of the online detection of supersonic reflectoscope, ball float detector detect minimum liquid level (this minimum liquid level is the protection liquid level).Control of silicon chip rinse bath liquid level and liquid supply device that the present invention proposes can detect the medicine liquid volume in the groove accurately; Can dwindle actual benefit and go into the error of amount and theoretical value; Improve the fluid infusion precision, can also the log history amount infused in programming, play good effect for the control of cost.
Claims (2)
1. a silicon chip rinse bath liquid level is controlled and liquid supply device; Comprise: cell body (1), stretch into fluid infusion conduit (2) in the cell body, be used to detect feeding-in liquid first detector (3), be used to detect second detector (4) of cell body minimum liquid level; And liquid supply device (5); Described liquid supply device comprises fluid infusion bucket (51) and the conduit (52) that is connected with fluid infusion conduit (2), it is characterized in that, is provided with the control valve (53,54) of a plurality of parallel connections between described fluid infusion bucket and the conduit.
2. device as claimed in claim 1 is characterized in that: described first detector adopts supersonic reflectoscope, and described second detector adopts the ball float detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103096469A CN102784788A (en) | 2012-08-28 | 2012-08-28 | Liquid level controlling and liquid supplementing device of silicon wafer cleaning tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103096469A CN102784788A (en) | 2012-08-28 | 2012-08-28 | Liquid level controlling and liquid supplementing device of silicon wafer cleaning tank |
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| CN102784788A true CN102784788A (en) | 2012-11-21 |
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| CN2012103096469A Pending CN102784788A (en) | 2012-08-28 | 2012-08-28 | Liquid level controlling and liquid supplementing device of silicon wafer cleaning tank |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104084410A (en) * | 2014-07-04 | 2014-10-08 | 深圳市华星光电技术有限公司 | Liquid feeding system and liquid feeding method thereof |
| CN105700574A (en) * | 2016-03-08 | 2016-06-22 | 苏州瑞日纺织科技有限公司 | Liquid level control and liquid supplementing device for slurry tank of circular screen printer |
| CN107919299A (en) * | 2016-10-11 | 2018-04-17 | 盟立自动化股份有限公司 | Tank level control system and method |
| CN108172533A (en) * | 2017-12-25 | 2018-06-15 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | control system, method and wafer cleaning device |
| CN109465126A (en) * | 2018-12-29 | 2019-03-15 | 佛山市山高峰包装材料科技有限公司 | A kind of stable-pressure device of auto-supply |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104084410A (en) * | 2014-07-04 | 2014-10-08 | 深圳市华星光电技术有限公司 | Liquid feeding system and liquid feeding method thereof |
| CN104084410B (en) * | 2014-07-04 | 2017-01-11 | 深圳市华星光电技术有限公司 | Liquid feeding system and liquid feeding method thereof |
| CN105700574A (en) * | 2016-03-08 | 2016-06-22 | 苏州瑞日纺织科技有限公司 | Liquid level control and liquid supplementing device for slurry tank of circular screen printer |
| CN107919299A (en) * | 2016-10-11 | 2018-04-17 | 盟立自动化股份有限公司 | Tank level control system and method |
| CN107919299B (en) * | 2016-10-11 | 2021-01-26 | 盟立自动化股份有限公司 | Liquid level control system and method |
| CN108172533A (en) * | 2017-12-25 | 2018-06-15 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | control system, method and wafer cleaning device |
| CN109465126A (en) * | 2018-12-29 | 2019-03-15 | 佛山市山高峰包装材料科技有限公司 | A kind of stable-pressure device of auto-supply |
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Application publication date: 20121121 |