CN102784592A - Device and method for improving vacuum obtaining and maintenance - Google Patents
Device and method for improving vacuum obtaining and maintenance Download PDFInfo
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- CN102784592A CN102784592A CN2011101286182A CN201110128618A CN102784592A CN 102784592 A CN102784592 A CN 102784592A CN 2011101286182 A CN2011101286182 A CN 2011101286182A CN 201110128618 A CN201110128618 A CN 201110128618A CN 102784592 A CN102784592 A CN 102784592A
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Abstract
The invention discloses a device for improving the vacuum obtaining and maintenance. The device comprises a reaction chamber (300), a flashboard gate (200) and a sample introduction chamber (100), wherein the reaction chamber (300) is connected with the sample introduction chamber (100) through the flashboard gate (200). The invention simultaneously discloses a method for improving the vacuum obtaining and maintenance. According to the invention, the sample introduction chamber is connected with the reaction chamber through the flashboard gate by improving the design of the sample introduction chamber, and the sample introduction chamber is sealed by a rubber ring, so a vacuum chamber can be sealed by the flashboard gate without mounting vent valves, thereby the time of the contact of the inner wall of the reaction chamber to air is minimized, the possibility of the adsorption of the air to the wall of the reaction chamber is reduced, a high vacuum of the reaction chamber can be reached within a short period of time, the internal of the reaction chamber is effectively protected from the interference of an extraneous atmosphere, the time required by production experiments is reduced, and the product quality is improved.
Description
Technical field
The present invention relates to improving one's methods of high-vacuum apparatus, particularly relate to a kind of device and method that vacuum obtains and keeps that improves.
Background technology
High-vacuum apparatus all has a wide range of applications in production and scientific experimentation, and the purpose that high-vacuum apparatus exists is in order to obtain high vacuum, not receive the influence of external environment to guarantee reaction.How reaching high vacuum fast is exactly the key issue that will consider in the vacuum equipment design.
Connect at present between vacuum equipment and the atmosphere the most reliably that method is to adopt the high vacuum lock gate hatch to be connected, but there is following problem in this connection.The air pressure that lock gate hatch needs both sides near the time just can open; Therefore before opening lock gate hatch, need in reaction chamber, inflate; But near atmospheric pressure the time, employed resistance silicon of vacuum equipment and diaphragm pressure appearance etc. can't be measured the pressure in the reaction chamber accurately.Therefore; Most vacuum equipment has all been installed the vent valve that links to each other with atmosphere at reaction chamber; Before opening lock gate hatch, use vent valve to the reaction interacvity air-filling, guarantee that external and internal pressure equates, but this method keeps always the cavity under the high vacuum state to touch air suddenly; Increased and be adsorbed on the possibility in the cavity in the air, also increased the time that cavity exposes atmosphere.
Perhaps adopt the rubber sealing reaction chamber, through in reaction chamber, feeding inert gas reaction chamber is opened naturally, itself does not have good sealing property single rubber sealing.Use this two kinds of methods all to prolong the time that vacuum equipment reaches high vacuum.
Summary of the invention
The technical problem that (one) will solve
In view of this, main purpose of the present invention is to provide a kind of apparatus and method that vacuum obtains and keeps of improving, and reaches the required time of predetermined vacuum level to reduce vacuum equipment, and reduces the pollution of air to reaction chamber as far as possible.
(2) technical scheme
For achieving the above object, the invention provides a kind of device that vacuum obtains and keeps that improves, this device comprises reaction chamber 300, lock gate hatch 200 and Sample Room 100, wherein, reaction chamber 300 is connected through lock gate hatch 200 with Sample Room 100.
In the such scheme, said Sample Room 100 adopts the blind plate 120 and the isolated from atmosphere of rubber sealing.Said blind plate 120 has the two ends that are tightly connected with Sample Room 100, and wherein an end adopts non-removable axle, and the other end adopts dismountable hand valve 110.
In the such scheme; Said reaction chamber 300 further is connected with extract system 310 and charge valve 320, when the reaction in reaction chamber 300 finishes needs replacing sample, with extract system 310 reaction chamber 300 is evacuated to vacuum state earlier; Open lock gate hatch 200 then; Close extract system 310, unclamp the hand valve 110 of Sample Room 100, the blind plate 120 of Sample Room 100 still is in closed condition under the atmospheric pressure effect; Open charge valve 320; In reaction chamber 300 and Sample Room 100, charge into inert gas; The blind plate 120 of Sample Room 100 is opened automatically when the air pressure of reaction chamber 300 and Sample Room 100 equals atmospheric pressure; Continue to feed inert gas and makes reaction chamber 300 and Sample Room 100 keep malleations, reduce the possibility that gas that airborne oxygen and steam etc. exert an influence to experiment gets into reaction chamber 300.
In the such scheme, said continuation feeding inert gas also comprises: change sample after making reaction chamber 300 and Sample Room 100 keep malleations; Close charge valve 320 then, close the hand valve 110 of Sample Room 100, open extract system 310; Sample Room 100 and reaction chamber 300 are vacuumized simultaneously; When vacuum is difficult to descend, close lock gate hatch 200, reaction chamber 300 is evacuated to high vacuum separately.
For achieving the above object, the present invention also provides a kind of method that vacuum obtains and keeps of improving, and this method comprises:
When the reaction in reaction chamber 300 finishes needs replacing sample; Earlier reaction chamber 300 is evacuated to vacuum state with extract system 310; Open lock gate hatch 200 then; Close extract system 310, unclamp the hand valve 110 of Sample Room 100, the blind plate 120 of Sample Room 100 still is in closed condition under the atmospheric pressure effect; And
Open charge valve 320; In reaction chamber 300 and Sample Room 100, charge into inert gas; The blind plate 120 of Sample Room 100 is opened automatically when the air pressure of reaction chamber 300 and Sample Room 100 equals atmospheric pressure; Continue to feed inert gas and makes reaction chamber 300 and Sample Room 100 keep malleations, reduce the possibility that gas that airborne oxygen and steam etc. exert an influence to experiment gets into reaction chamber 300.
In the such scheme, said continuation feeding inert gas also comprises: change sample after making reaction chamber 300 and Sample Room 100 keep malleations; Close charge valve 320 then, close the hand valve 110 of Sample Room 100, open extract system 310; Sample Room 100 and reaction chamber 300 are vacuumized simultaneously; When vacuum is difficult to descend, close lock gate hatch 200, reaction chamber 300 is evacuated to high vacuum separately.
(3) beneficial effect
Can find out that from technique scheme the present invention has following beneficial effect:
1, utilizes the present invention; Through improving the design of Sample Room, Sample Room is connected with lock gate hatch with reaction chamber, again Sample Room is used rubber sealing; Vacuum chamber can be implemented under the situation that vent valve need not be installed all to be sealed by lock gate hatch; Reduced the time that cavity inner wall touches air, reduced air and be adsorbed onto the possibility on the cavity wall, made the reaction chamber can reach high vacuum in the short period of time; In reaction, do not receive simultaneously the interference of extraneous atmosphere effectively in the protective reaction chamber, reduced and produced the required time of experiment and improved the quality of product.
2, utilize the present invention; Through the design that improves Sample Room vacuum equipment can effectively have been reduced and reach the required time of high vacuum; Improved the efficient of equipment, and reduced airborne gas and stick to the possibility in the vacuum equipment cavity, played a protective role for the reaction in vacuum chamber.
Description of drawings
Fig. 1 is the structural representation of the device that improves the vacuum acquisition and keep provided by the invention;
Fig. 2 is the front view of Sample Room in the device that improves the vacuum acquisition and keep provided by the invention.
Fig. 3 is the vertical view of Sample Room in the device that improves the vacuum acquisition and keep provided by the invention.
Fig. 4 is that vacuum obtains and the device and method of maintenance is verified the vacuum attenuation curve that obtains to improving according to the embodiment of the invention.
[Reference numeral]
100 Sample Rooms, 110 hand valves, 120 blind plates
200 lock gate hatches
300 reaction chambers, 310 extract systems, 320 charge valves
The specific embodiment
For making the object of the invention, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, to further explain of the present invention.
As shown in Figure 1, Fig. 1 is the structural representation of the device that improves the vacuum acquisition and keep provided by the invention, and this device comprises reaction chamber 300, lock gate hatch 200 and Sample Room 100, and wherein, reaction chamber 300 is connected through lock gate hatch 200 with Sample Room 100.
As shown in Figures 2 and 3, Sample Room 100 adopts the blind plate 120 and the isolated from atmosphere of rubber sealing.Blind plate 120 has the two ends that are tightly connected with Sample Room 100, and wherein an end adopts non-removable axle, and the other end adopts dismountable hand valve 110.
Refer again to Fig. 1; Reaction chamber 300 further is connected with extract system 310 and charge valve 320, when the reaction in reaction chamber 300 finishes needs replacing sample, with extract system 310 reaction chamber 300 is evacuated to vacuum state earlier; Open lock gate hatch 200 then; Close extract system 310, unclamp the hand valve 110 of Sample Room 100, the blind plate 120 of Sample Room 100 still is in closed condition under the atmospheric pressure effect; Open charge valve 320; In reaction chamber 300 and Sample Room 100, charge into inert gas; The blind plate 120 of Sample Room 100 is opened automatically when the air pressure of reaction chamber 300 and Sample Room 100 equals atmospheric pressure; Continue to feed inert gas and makes reaction chamber 300 and Sample Room 100 keep malleations, reduce the possibility that gas that airborne oxygen and steam etc. exert an influence to experiment gets into reaction chamber 300.Change sample, close charge valve 320 then, close the hand valve 110 of Sample Room 100, open extract system 310, Sample Room 100 and reaction chamber 300 are vacuumized simultaneously, when vacuum is difficult to descend, close lock gate hatch 200, reaction chamber 300 is evacuated to high vacuum separately.
Based on Fig. 1, the device that improves the vacuum acquisition and keep shown in 2 and 3, the present invention also provides a kind of method that vacuum obtains and keeps of improving, and this method comprises:
When the reaction in reaction chamber 300 finishes needs replacing sample; Earlier reaction chamber 300 is evacuated to vacuum state with extract system 310; Open lock gate hatch 200 then; Close extract system 310, unclamp the hand valve 110 of Sample Room 100, the blind plate 120 of Sample Room 100 still is in closed condition under the atmospheric pressure effect;
Open charge valve 320; In reaction chamber 300 and Sample Room 100, charge into inert gas; The blind plate 120 of Sample Room 100 is opened automatically when the air pressure of reaction chamber 300 and Sample Room 100 equals atmospheric pressure; Continue to feed inert gas and makes reaction chamber 300 and Sample Room 100 keep malleations, reduce the possibility that gas that airborne oxygen and steam etc. exert an influence to experiment gets into reaction chamber 300; And
Change sample, close charge valve 320 then, close the hand valve 110 of Sample Room 100, open extract system 310, Sample Room 100 and reaction chamber 300 are vacuumized simultaneously, when vacuum is difficult to descend, close lock gate hatch 200, reaction chamber 300 is evacuated to high vacuum separately.
Below in conjunction with concrete example the device and method that improves the vacuum acquisition and keep provided by the invention is verified.As shown in Figure 4, with volume 0.18m
3Reaction chamber reaction be evacuated to vacuum after finishing, and the lock gate hatch that links to each other with extract system of off-response chamber is opened charge valve and Sample Room hand valve, the Sample Room blind plate is opened replacing sample afterwards automatically.Close the Sample Room blind plate and close the hand valve, open the extract system slide valve, open fore pump mechanical pump 2XZ-8 pumping speed 8L/s, open molecular pump FB600 600Hz when vacuum reaches 10Pa, reached 5.0 * 10 in 7 minutes
-4Pa closes the Sample Room lock gate hatch, is evacuated to 8.0 * 10 in 30 minutes
-5Closing extract system lock gate hatch final vacuum degree is 1.2 * 10
-4Pa.20 hours vacuum is 6.2 * 10 behind the pump of shutdown pass
-3Pa.Therefore; Reduced the time that cavity inner wall touches air effectively; Reduce air and be adsorbed onto the possibility on the cavity wall; Make reaction chamber can reach high vacuum in the short period of time, in reaction, do not receive simultaneously the interference of extraneous atmosphere effectively in the protective reaction chamber, reduced and produced the required time of experiment and improved the quality of product.
Above-described specific embodiment; The object of the invention, technical scheme and beneficial effect have been carried out further explain, and institute it should be understood that the above is merely specific embodiment of the present invention; Be not limited to the present invention; All within spirit of the present invention and principle, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (7)
1. one kind is improved the device that vacuum obtains and keeps, and it is characterized in that this device comprises reaction chamber (300), lock gate hatch (200) and Sample Room (100), and wherein, reaction chamber (300) is connected through lock gate hatch (200) with Sample Room (100).
2. the device that improves the vacuum acquisition and keep according to claim 1 is characterized in that said Sample Room (100) adopts the blind plate (120) and the isolated from atmosphere of rubber sealing.
3. the device that improves the vacuum acquisition and keep according to claim 2 is characterized in that said blind plate (120) has the two ends that are tightly connected with Sample Room (100), and wherein an end adopts non-removable axle, and the other end adopts dismountable hand valve (110).
4. the device that improves the vacuum acquisition and keep according to claim 3 is characterized in that said reaction chamber (300) further is connected with extract system (310) and charge valve (320),
When the reaction in reaction chamber (300) finishes needs replacing sample; Earlier reaction chamber (300) is evacuated to vacuum state with extract system (310); Open lock gate hatch (200) then; Close extract system (310), unclamp the hand valve (110) of Sample Room (100), the blind plate (120) of Sample Room (100) still is in closed condition under the atmospheric pressure effect;
Open charge valve (320); In reaction chamber (300) and Sample Room (100), charge into inert gas; The blind plate (120) of Sample Room (100) is opened automatically when the air pressure of reaction chamber (300) and Sample Room (100) equals atmospheric pressure; Continue to feed inert gas and makes reaction chamber (300) and Sample Room (100) keep malleation, reduce the possibility of the gas entering reaction chamber (300) that airborne oxygen and steam etc. exert an influence to experiment.
5. the device that improves the vacuum acquisition and keep according to claim 4 is characterized in that, after said continuation feeding inert gas makes reaction chamber (300) and Sample Room (100) keep malleation, also comprises:
Change sample, close charge valve (320) then, close the hand valve (110) of Sample Room (100); Open extract system (310), Sample Room (100) and reaction chamber (300) are vacuumized simultaneously, when vacuum is difficult to descend; Close lock gate hatch (200), reaction chamber (300) is evacuated to high vacuum separately.
6. one kind is improved the method that vacuum obtains and keeps, and is applied to the described device of claim 1, it is characterized in that this method comprises:
When the reaction in reaction chamber (300) finishes needs replacing sample; Earlier reaction chamber (300) is evacuated to vacuum state with extract system (310); Open lock gate hatch (200) then; Close extract system (310), unclamp the hand valve (110) of Sample Room (100), the blind plate (120) of Sample Room (100) still is in closed condition under the atmospheric pressure effect; And
Open charge valve (320); In reaction chamber (300) and Sample Room (100), charge into inert gas; The blind plate (120) of Sample Room (100) is opened automatically when the air pressure of reaction chamber (300) and Sample Room (100) equals atmospheric pressure; Continue to feed inert gas and makes reaction chamber (300) and Sample Room (100) keep malleation, reduce the possibility of the gas entering reaction chamber (300) that airborne oxygen and steam etc. exert an influence to experiment.
7. the method for improving the vacuum acquisition and keeping according to claim 6 is characterized in that, after said continuation feeding inert gas makes reaction chamber (300) and Sample Room (100) keep malleation, also comprises:
Change sample, close charge valve (320) then, close the hand valve (110) of Sample Room (100); Open extract system (310), Sample Room (100) and reaction chamber (300) are vacuumized simultaneously, when vacuum is difficult to descend; Close lock gate hatch (200), reaction chamber (300) is evacuated to high vacuum separately.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101286182A CN102784592A (en) | 2011-05-18 | 2011-05-18 | Device and method for improving vacuum obtaining and maintenance |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101286182A CN102784592A (en) | 2011-05-18 | 2011-05-18 | Device and method for improving vacuum obtaining and maintenance |
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| CN102784592A true CN102784592A (en) | 2012-11-21 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110630747A (en) * | 2018-06-01 | 2019-12-31 | 宜兴凡远光电科技有限公司 | Vacuum separation sealing structure and equipment provided with same |
| CN111208163A (en) * | 2018-11-21 | 2020-05-29 | 中国科学院化学研究所 | Inflatable/air-pumping type XPS (extruded polystyrene) freezing-quasi-in-situ sample transfer device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2399402Y (en) * | 1999-12-22 | 2000-10-04 | 中国科学院沈阳科学仪器研制中心 | Super-high vacuum multifunctional magnetic controlled sputtering appts. |
| CN2723423Y (en) * | 2004-03-15 | 2005-09-07 | 西安交通大学 | Plasma reinforced photo-thermal chemical gas phase depositing device for preparing carbon nano tube film |
-
2011
- 2011-05-18 CN CN2011101286182A patent/CN102784592A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2399402Y (en) * | 1999-12-22 | 2000-10-04 | 中国科学院沈阳科学仪器研制中心 | Super-high vacuum multifunctional magnetic controlled sputtering appts. |
| CN2723423Y (en) * | 2004-03-15 | 2005-09-07 | 西安交通大学 | Plasma reinforced photo-thermal chemical gas phase depositing device for preparing carbon nano tube film |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110630747A (en) * | 2018-06-01 | 2019-12-31 | 宜兴凡远光电科技有限公司 | Vacuum separation sealing structure and equipment provided with same |
| CN110630747B (en) * | 2018-06-01 | 2024-02-20 | 无锡凡远光电科技有限公司 | Vacuum barrier sealing structure and equipment provided with same |
| CN111208163A (en) * | 2018-11-21 | 2020-05-29 | 中国科学院化学研究所 | Inflatable/air-pumping type XPS (extruded polystyrene) freezing-quasi-in-situ sample transfer device |
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Application publication date: 20121121 |