CN102778228B - Free beam vibration angle speed rate sensor - Google Patents
Free beam vibration angle speed rate sensor Download PDFInfo
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- CN102778228B CN102778228B CN201210296196.4A CN201210296196A CN102778228B CN 102778228 B CN102778228 B CN 102778228B CN 201210296196 A CN201210296196 A CN 201210296196A CN 102778228 B CN102778228 B CN 102778228B
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Abstract
The invention discloses a free beam vibration angle speed rate sensor. The free beam vibration angle speed rate sensor comprises a rectangle vibrating beam which is made of an elastic alloy material, wherein the vibrating beam is provided with a piezoelectric piece, the surface of the piezoelectric piece is provided with a binding post, and a vibration node of the vibrating beam is also provided with a structural support. The free beam vibration angle speed rate sensor is characterized in that the structural support comprises rod-shaped supporting beams which are perpendicularly arranged at the centre positions of four surfaces of the vibration node of the vibrating beam, and the four supporting beams form a cross-shaped support structure; and the position, at which the piezoelectric piece is arranged, on the vibrating beam is provided with an installation groove which is matched with the piezoelectric piece, the piezoelectric piece is inlaid and fixed in the installation groove, and the external surface of the piezoelectric piece and the surface of the vibrating beam are positioned in the same plane. The free beam vibration angle speed rate sensor disclosed by the invention has the advantages of small volume, low cost, high reliability and the like; and the system shock resistance and interference resistance are enhanced, and the system sensitivity is improved and the zero position stability is good.
Description
Technical field
The present invention relates to small inertial measuring unit field, be specifically related to a kind of vibration beam type angle of throw rate sensor.
Background technology
In recent years, along with the development and progress of society, obtain extensive concern for the micro volume oscillation gyro under particular surroundings.Such as, the attitude measurement aspect under down-hole or ground particular surroundings; In recent years along with mineral resources reduce day by day, the environment faced for exploitation of mineral resources aspect is more and more severe, its development difficulty is also increasing, this just requires will to get well for inertia measurement device (gyro and the accelerometer) sensitivity of exploitation of mineral resources, impact resistance and anti-interference want high, again such as, the aspects such as the directional drilling in mine or field, tunnel; Be applied to the trailer-mounted radar that real-time azimuthal under the complex environment of ground is aimed at, the aspects such as explosion or bomb disposal robot used; Can locate and adapt to that complex environment ability has higher requirement to inertia measurement device in described application accurately.Can meet for positioning precision aspect optical fibre gyro and magnetic flux technology, but it applies and is still restricted (anti shock and vibration and micro volume requirement etc.) in complex environment.Two in theory cantilever vibration beam type oscillation gyro because of its structure simple, cost is low, and volume is little, advantages such as reliability is high, strong interference immunity and highlight importance.
Existing free beam angle of throw rate sensor is a kind of local vibration device, one traditional support mode takes binode support structure designs, structure in a kind of asynchronous driving piezoelectric-vibration angular rate sensor such as disclosed in the patent No. 201020161061.3, it is zero that such design meets the instantaneous linear momentum of beam under fundamental vibration of shaking, fix at the desirable Nodes brace summer beam that will shake, reach good mechanics isolation effect thus, effectively reduce the interference effect that extraneous acceleration and ambient noise cause the beam vibration that shakes, thus make it have good anti-interference stability, also the deficiency of two aspects is there is: 1, be the point-supported advantage of reserve section while binodal point-supported angle of throw rate sensor exists above-mentioned advantage, usually Nodes install that the radius of brace summer does very little, so just the impact resistance of this structure gyro is weakened.2, there is asymmetry on the support structure because dual-gripper beam supports, after installing brace summer, the overall frequency interval when drive surface and sensitive area resonance of gyro expands, thus the optimal spacing frequency that theory analysis goes out can not be met, all can bring impact to gyro sensitivity, bandwidth, zero stability.
Another kind of traditional support mode is face supporting construction, the structure adopted in the walking beam gyro of the two cantilever-face bracing structure of a kind of vibration beam type such as disclosed in number of patent application 201010616509.0, although it can solve the low defect of the impact resistance of binode supporting construction well, but also bring a lot of deficiencies: 1 simultaneously, face supporting way limits the free degree of all nodal points of vibration of the beam that shakes in installation place, because the beam that shakes has thickness to exist, then face supporting construction limits the hard-over of installation place, and then affect the beam vibration amplitude that shakes, thus reduce system sensitivity.2, after face supporting construction is installed, overall gyro drive surface compare with sensitive area resonant frequency freely shake beam in either direction resonant frequency numerical value have greatly increased, this brings difficulty for finding appropriate drive frequency, and the raising of the overall intrinsic frequency of simultaneity factor will cause instability to the zero-bit of this type of gyro.3, face supporting construction is that the non-Liang Lixiangjiedianchu that shakes installs, and system will by supporting construction to matrix acceleration and external interference sensitivity thus, and this sensitivity adds metrical error and reduces certainty of measurement.4, face supporting construction produces vibration shaking in beam work, and shake beam sensitive area and drive surface are fixed by the same face (thin plate), will cause larger between centers mechanical couplings vibration thus, also demonstrate above-mentioned in ANSYS software emulation.The deficiency of above supporting way reduces the performance of free beam angle of throw rate sensor.
In addition, for the traditional free beam angle of throw rate sensor under above-mentioned two kinds of different supporting way, the vibrational power flow of its piezoelectric patches is all the surfaces being directly pasted onto the beam that shakes by glue, is subject to the impact of pasting error thus; Simultaneously along with the rising of temperature, the stickup coefficient of its glue reduces, easily aging, then the reliability of system and output sensitivity are all affected.
Summary of the invention
For prior art exist the problems referred to above, the present invention solve technical problem be: how to provide a kind of reliability and sensitivity higher, effectively can suppress the free beam angle of throw rate sensor of zero drift, its output accuracy is greatly enhanced.
In order to solve the problems of the technologies described above, present invention employs following technical scheme.
A kind of free beam angle of throw rate sensor, comprise the beam that shakes of the elastic alloy material of cuboid, shake beam length direction four sides centre position on be provided with piezoelectric patches, piezoelectric patches comprises a pair sensitive piezoelectric sheet and a pair driving piezoelectric patches that are oppositely arranged between two, piezoelectric patches surface is provided with the binding post for being connected with external circuit, the vibration nodal point in the described beam length direction that shakes also is provided with for the beam that shakes being supported on the supporting construction of shaking on the bracing frame of beam outside, its improvements are, described supporting construction is included in all vertically disposed bar-like support beam in centre position in beam vibration Nodes four faces that shake, form cross hang structure, the beam that shakes of described piezoelectric patches setting position has the mounting groove mated with piezoelectric patches, and described piezoelectric patches is inlayed and is fixed in mounting groove, and piezoelectric patches outer surface and the beam surface that shakes are for same plane.
When this sensor uses, drive circuit is connected with driving piezoelectric patches by driving the binding post on piezoelectric patches, provides and drives excitation to form drive circuit; Testing circuit is connected with sensitive piezoelectric sheet by the binding post on sensitive piezoelectric sheet, detects the quantity of electric charge under coriolis force effect on sensitive piezoelectric sheet, by drawing extraneous input angular velocity of rotation to the process of the signal of telecommunication.
In this programme, bar-like support beam preferably adopts the thin bar of cylinder or cuboid, can so that make and improve support effect.Brace summer preferably adopts the material identical with the beam that shakes, and can reduce installation thermal stress, improves stability of strutting system.The selection of the concrete size of brace summer is determined according to the requirement of system impact resistance, driving frequency and sensitive frequency.The piezoelectric patches adopted preferably adopts density parameter and Poisson's ratio parameter to obtain (described substantially identical finger parameter identical or immediate material) with this two seed ginsengs base identical material of beam alloy material of shaking; The impact that beam brings owing to increasing piezoelectric patches that can make further like this to shake drops to minimum, and then improves whole transducer sensitivity.
The feature that the present invention brings after improving is as follows.
In the present invention, piezoelectric patches is pasted to be coupled with the beam that shakes by the embedding groove on the beam surface that shakes and is installed, thus prevent traditional stickup error and colloid temperature influence, the zero drift that system reliability and sensitivity are improved, quadrature error and colloid temperature influence cause is inhibited, and output accuracy is improved greatly.
The parameter similar of its parameter such as density, Poisson's ratio of the piezoelectric patches adopted in the present invention and the beam alloy that shakes, adopt the inserted coupled structure installation of piezoelectric patches can offset the quality of beam fluting reduction of shaking, relatively traditional bonding method, this feature makes to shake vibration of beam node more near theoretical node, thus energy conversion efficiency when improving alloy beam vibration, improve the sensitivity of whole angular rate sensor.
Simultaneously, the present invention adopts the inserted coupled structure of piezoelectric patches to install, improve because the positive and negative piezoelectricity perpendicularity displacement errors that uncertain factor causes appears in conventional piezoelectric sheet stickup coupling, this structure improves the perpendicularity of positive and negative piezoelectric patches, thus the quadrature error in the angular speed detection well suppressing perpendicularity side-play amount to cause.
The present invention adopts cross hang structure, it is arranged on the desirable vibration nodal point place of the beam that shakes, this structural theory ensure that shake beam to external world acceleration and vibration interference insensitive, there is good mechanics isolation effect, while ensureing system sensitivity, improve system impact resistance and anti-external interference ability.
The present invention adopts cross hang structure, it adopts the beam type structure of the thin rod shape of cylinder or cuboid, this structure constraint is in the shape of the desirable vibration nodal point in beam surface that shakes, optimization structure designs to adopt this structure installment to ensure that in theory, less to beam corner restriction of shaking thus, namely less on beam vibration amplitude impact of shaking, systems axiol-ogy sensitivity is higher.
The present invention adopts cross hang structure, its support beam structure adopting 8 girder connection places that shake to install, to be symmetric and length, radius and material parameter are consistent, beam section size of reasonably shaking only is needed thus to during free beam angle of throw rate frequency matched design, avoid the somewhat complex design under conventional support structure and processing, thus reduce the centroid motion because processed complex and error cause and quadrature error.
The present invention adopts cross hang structure, and its mounting structure is symmetric, and system frequency interval is more stable thus, and namely system works bandwidth is guaranteed, and the system between centers mechanical couplings vibration interference error simultaneously under this supporting construction is less, and accuracy of detection is higher.
In sum, compared to prior art, present invention improves over the mounting means of piezoelectric patches, improve beam supporting construction form of shaking simultaneously, can effectively suppress zero drift phenomenon, effectively can improve reliability and the sensitivity of sensor, make its not temperature influence, output accuracy is greatly enhanced.Meanwhile, it is simple that the present invention also possesses structure, implements advantage easily.
Accompanying drawing explanation
Fig. 1 is the structural representation of free beam angle of throw rate sensor of the present invention, and in figure, piezoelectric patches is non-installment state.
Fig. 2 be in Fig. 1 piezoelectric patches install after from be positioned at piezoelectric patches position laterally cut open after sectional view, add the structural representation of the bracing frame being positioned at the beam outside that shakes in figure.
Fig. 3 is the profile after free beam angle of throw rate sensor of the present invention is cut open from the mounting groove position of piezoelectric patches when not installing piezoelectric patches.
Fig. 4 connects the structural representation after external circuit when being free beam angle of throw rate sensor of the present invention use.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
During concrete enforcement, as Figure 1-Figure 4, a kind of free beam angle of throw rate sensor, comprise the beam 1 that shakes of the elastic alloy material of cuboid, shake beam 1 length direction four sides centre position on be provided with piezoelectric patches 2, piezoelectric patches 2 comprises a pair sensitive piezoelectric sheet and a pair driving piezoelectric patches that are oppositely arranged between two, piezoelectric patches surface is provided with the binding post 4 for being connected with external circuit, the vibration nodal point in the described beam length direction that shakes also is provided with for the beam that shakes being supported on the supporting construction of shaking on the bracing frame of beam outside, wherein, described supporting construction is included in all vertically disposed bar-like support beam 3 in centre position in beam vibration Nodes four faces that shake, form cross hang structure, the beam that shakes of described piezoelectric patches setting position has the mounting groove 6 mated with piezoelectric patches, described piezoelectric patches is inlayed and is fixed in mounting groove, and piezoelectric patches outer surface and the beam surface that shakes are for same plane.
More particularly, mainly comprise the beam 1 that shakes of elastic alloy material during the invention process, four piezoelectric patches, 2, eight bar-like support beams 3 form two cross hang structures, four binding posts 4, for installing four mounting grooves 6 of piezoelectric patches; Its concrete connected mode is, mounting groove 6 is opened on the shake surface of beam 1, piezoelectric patches is inlayed to be fixed on by mounting groove 6 and is shaken on beam 1, the surface soldered of piezoelectric patches 2 has binding post 4 to link with external circuit, cross hang structure is by installing at the Nodes of the beam 1 that shakes, and overall structure is fixed by cross hang structure and extraneous matrix.
Wherein, mounting groove 6 is in the Surface Machining of beam 1 of shaking, and it is symmetric at beam 1 medium position that shakes, and the size of its mounting groove 6 is designated as length Lc respectively, degree of depth Dc, and width is Wc; The size of this size and piezoelectric patches 2 is suitable.
Wherein, the brace summer 3 of beam 1 of shaking is symmetric the plane of symmetry being arranged on the beam 1 that shakes, the section radius r length L of the selection brace summer of its size determines according to the size of system impact resistance and system resonance frequencies, and the material of its processing is consistent with the beam material that shakes, and avoids installing thermal stress.
As described in Figure 4, the present invention specifically installs and with operation principle is, extraneous drive circuit 10 is connected with driving piezoelectric patches 21,24 respectively by binding post 41,44, provides extraneous and drives driving source; Under inverse piezoelectric effect, drive piezoelectric patches 21,24 to produce deformation, drive and shake beam 1 at driving axial and x-axis resonant vibration upwards; Along z-axis to there being extraneous input angle speed
then produce coriolis force shaking on beam y face, beam 1 sensitive area that shakes under coriolis force effect produces vibration, sensitive piezoelectric sheet 22,23 is then driven to vibrate, under direct piezoelectric effect, sensitive piezoelectric sheet 22,23 produces electric charge, be connected to testing circuit 11 by binding post 42,43, extraneous input angle speed can be measured in testing circuit 11 detects
, closed loop feedback control circuit 12, realizes system by feedback signal modulation drive circuit signal and automatically controls, stable output.
below by theory deduction, the effect that the present invention two place improves is further illustrated.
one, piezoelectric patches inlays coupled modes
to shake girder construction:
Shake beam free vibration time, its vibration is exactly the elastic curve of a standard.Eliminating the elastic curve approximate formula rotating item is:
（1）
be a constant, determine the position of node.Therefore the approximate solution of a mould is:
（2）
Because do not have outside alternating force to act on beam, the total vertical moment of beam must be zero.Namely exist
during the above and below area equation of axle, aggregated momentum is zero.So
actual value can be obtained by following formula:
（3）
Then node location is:
, namely
.
girder construction that what piezoelectric patches was inlayed shake:
Adopt piezoelectric patches to inlay the girder construction of shaking of coupled mode installation, determine that the node of beam is still fixed installation point, need clean momentum to be zero in mounting points, so the momentum that beam momentum adds piezoelectric patches should be zero, by following equation approximate representation:
（4）
Wherein
for the quality of cutouts on beam,
for the quality of piezoelectric patches,
Solve an equation and to ask
（5）
Node location is:
（6）
Can be calculated in conjunction with the 60mm beam that shakes:
Beam is of a size of 60mm × 4.4mm × 4.1mm; Elastic modelling quantity=2.1 × 10
11; Poisson's ratio: 0.3; Density: 7800.
Piezoelectric patches is of a size of 22.9mm × 1.9mm × 0.5mm; Amount of elasticity=6.3 × 10
10; Poisson's ratio: 0.3; Density: 7900.
Node change after table 1 modified node method
| Node location | Before pasting piezoelectric patches | After pasting piezoelectric patches | After inlaying coupling |
piezoelectric patches is adopted to inlay the girder construction Calculation of Sensitivity of shaking of coupled mode installation:
The motion of neutral axis of the beam can be expressed as:
（7）
On beam, certain point in the speed put sometime is
, both
（8）
Then on beam, certain any energy is:
（9）
Whole beam at the gross energy put sometime is:
（10）
Both:
（11）
Above-mentioned parameter is substituted into and can be calculated:
Before tradition does not paste piezoelectric patches:
.
Tradition pastes the node location after piezoelectric patches:
.
Node location after inserted coupling:
.
From the angle of power conversion, the coupled structure sensitivity of the remolding sensitivity adhesive type of inserted coupled structure improves 6.14%.Because the node of inserted coupled structure is closer to desirable node, so effectively zero drift can be suppressed.
two, cross hang frame mode
piezoelectric patches is adopted to inlay the girder construction of shaking of coupled mode installation:
Shake beam free vibration time, the resonant frequency of its drive surface and sensitive area is respectively:
（12）
Above formula is known
with
be respectively and drive resonant frequency and sensitive resonant frequency,
,
be respectively the rotary inertia of the beam that shakes.Then resonance frequency separation is:
（13）
To in system, ideal frequency interval affects one of parameter important in Gyroscope Design, and it affects the gain of gyro, zero stability and bandwidth.Kinetics equation known output vibration amplitude signal phase from the ideal of oscillation gyro simplifies:
（14）
In order to make this phase value reach minimum, getting maximum permission phase angle is
:
（15）
Show that ideal frequency is spaced apart:
（16）
In formula:
for drive surface intrinsic frequency;
for sensitive area intrinsic frequency.Equation shows that best frequency interval has maximum permission phase place and sensitive area
provide.
cross hang and piezoelectric patches inlay the system architecture that coupled mode is installed, accompanying drawing 4:
When there being brace summer to install, now system sensitive resonant frequency territory drives resonant frequency respectively:
（17）
Then resonance frequency separation or bandwidth are:
(18)
Get above formula approximation:
(19)
Get approximate explanation for formula (23-24), if design is shaken, beam is 50mm × 4.1mm × 4.12mm, bandwidth
=40HZ, free beam
=8585HZ,
=8545HZ; Get brace summer diameter d=0.5 × 10
-3m, length Ls=1 × 10
-3m, result of calculation is
=35.938HZ error
=4.062HZ; If Ls=1.5 × 10
-3time, error is
=1.269HZ.Along with its error of increase of Ls is lower; Known formula (24) is got rationally approximate.Cross hang structure thus ensures system frequency interval or bandwidth not by the impact of supporting construction size.
Computer sim-ulation contrast traditional support mode, such as, in formula
=1.25 °=2.2 × 10
-2rad;
=2500;
during=8600HZ, then desirable frequency interval is
≈ 78.2.Provide two groups of suitable sizes in emulation and learn simulation result:
System frequency and spacing frequency under the table 2 liang different supporting way of group
Visual in data is 79HZ to the beam design ideal frequency interval that shakes, but the difference of supporting construction has a great impact ideal frequency interval.Known from the change of supporting way different size: supporting way change in size on resonance frequency separation impact significantly, cross hang structure does not have an impact to desirable frequency interval, under adopting identical machining accuracy technique, the precision comparing other two kinds of conventional support structure is higher.
Still find in emulation, mechanical couplings vibration error that different supporting way causes is different, mainly considers drive surface when the beam that shakes when driving voltage is issued to the state of resonance to the mechanical couplings vibration error that sensitive area causes.Detected circuit detects by this vibration error, reduces certainty of measurement thus, and mechanical couplings vibration error signal is by the stability of the response limit and zero-bit that have influence on free beam angle of throw rate sensor in addition.Emulation is learnt: 1, brace summer length is 1mm, the mechanical couplings vibration error that cross hang frame mode causes only exceeds 1.151124957% of permission mechanical couplings vibration error, be only that face supporting way causes mechanical couplings vibration error 5%, opposite face supporting construction decreases the mechanical couplings vibration error of 95% simultaneously; But now face supports the mechanical couplings vibration error caused is can 16.7172 times more than of allowable error, far beyond allowable error scope, cause very large impact by entire system performance.2, brace summer length is 2mm, the mechanical couplings vibration error that cross hang frame mode causes only exceeds 0.466874351% of mechanical couplings vibration error, be only that face supporting way causes mechanical couplings vibration error 47.96543103% simultaneously, reduce the mechanical couplings vibration error of 52% on year-on-year basis nearly.The mechanical couplings vibration error that now face supporting way causes is can 2.094568 times of allowable error.Above-mentioned analysis is known, error may make moderate progress with the increase of brace summer length dimension, but its impact resistance also will increase with brace summer length and reduce, the size how balancing each performance parameter is called the key in design, and the size that cross hang structure is balance free beam angle of throw rate capability parameter highlights its distinctive advantage.
Claims (1)
1. a free beam angle of throw rate sensor, comprise the beam that shakes of the elastic alloy material of cuboid, shake beam length direction four sides centre position on be provided with piezoelectric patches, piezoelectric patches comprises a pair sensitive piezoelectric sheet and a pair driving piezoelectric patches that are oppositely arranged between two, piezoelectric patches surface is provided with the binding post for being connected with external circuit, the vibration nodal point in the described beam length direction that shakes also is provided with for the beam that shakes being supported on the supporting construction of shaking on the bracing frame of beam outside, it is characterized in that, described supporting construction is included in all vertically disposed bar-like support beam in centre position in beam vibration Nodes four faces that shake, four brace summers form cross hang structure, the beam that shakes of described piezoelectric patches setting position has the mounting groove mated with piezoelectric patches, and described piezoelectric patches is inlayed and is fixed in mounting groove, and piezoelectric patches outer surface and the beam surface that shakes are for same plane, the piezoelectric patches adopted adopts density parameter and Poisson's ratio parameter to obtain with this two seed ginsengs base identical material of beam alloy material of shaking, the identical or immediate material of described substantially identical finger parameter.
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| CN105973216A (en) * | 2016-05-03 | 2016-09-28 | 中国人民解放军国防科学技术大学 | Piezoelectric vibration gyroscope harmonic oscillator, making method thereof, and piezoelectric vibration gyroscope |
| CN113933538A (en) * | 2021-09-18 | 2022-01-14 | 重庆邮电大学 | Piezoresistive high-g-value accelerometer |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87101925A (en) * | 1987-03-20 | 1988-10-12 | 马鞍山钢铁公司 | Rate-measuring device |
| JP2004222377A (en) * | 2003-01-10 | 2004-08-05 | Seiko Epson Corp | Of resonance control unit and control method of resonance device |
| CN201689108U (en) * | 2010-04-16 | 2010-12-29 | 重庆仙通智能仪表有限公司 | Asynchronous driving piezoelectric-vibration angular rate sensor |
| CN102147253A (en) * | 2010-12-29 | 2011-08-10 | 重庆邮电大学 | Vibrating-beam gyro of vibrating-beam-type dual-cantilever-face bracing structure |
-
2012
- 2012-08-20 CN CN201210296196.4A patent/CN102778228B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87101925A (en) * | 1987-03-20 | 1988-10-12 | 马鞍山钢铁公司 | Rate-measuring device |
| JP2004222377A (en) * | 2003-01-10 | 2004-08-05 | Seiko Epson Corp | Of resonance control unit and control method of resonance device |
| CN201689108U (en) * | 2010-04-16 | 2010-12-29 | 重庆仙通智能仪表有限公司 | Asynchronous driving piezoelectric-vibration angular rate sensor |
| CN102147253A (en) * | 2010-12-29 | 2011-08-10 | 重庆邮电大学 | Vibrating-beam gyro of vibrating-beam-type dual-cantilever-face bracing structure |
Non-Patent Citations (1)
| Title |
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| 刘宇等.《固态振梁角速率传感器的动力学特性与误差分析》.《机械工程学报》.2011,第47卷(第4期),6-11. * |
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