CN102759775A - Photonic crystal groove waveguide structure capable of generating slow light of broadband - Google Patents
Photonic crystal groove waveguide structure capable of generating slow light of broadband Download PDFInfo
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- CN102759775A CN102759775A CN201210236687XA CN201210236687A CN102759775A CN 102759775 A CN102759775 A CN 102759775A CN 201210236687X A CN201210236687X A CN 201210236687XA CN 201210236687 A CN201210236687 A CN 201210236687A CN 102759775 A CN102759775 A CN 102759775A
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Abstract
The invention provides a photonic crystal groove waveguide structure capable of generating slow light of a broadband. According to the photonic crystal groove waveguide structure, a photonic crystal structure is a triangular lattice structure with the lattice constant being a and the air hole radius being r; and a middle row of air holes are removed to form photonic crystal waveguide with a W1 structure, and air grooves with width w of 0.3a is placed at a defect centre, thereby forming a photonic crystal waveguide groove. According to the photonic crystal groove waveguide structure, the lattice constant in the waveguide direction is increased to 1.06a, thus forming photonic crystal groove waveguide with an italic structure; and a first row of air holes close to the air grooves are moved by 0.05a in the direction far from the air grooves, and a second row of air holes close to the air grooves are moved by 0.13a in the direction far from the air grooves. As a simulating result shown, the broadband with the slow light reaches 2.85nm under group velocity c/100 by virtue of the photonic crystal groove waveguide structure provided by the invention.
Description
Technical field
The present invention relates to a kind of photonic crystal slot wave guide structure that can produce the broadband slower rays, belong to the microoptoelectronic device design field.
Background technology
In recent years, the photonic crystal and the device thereof that are of a size of the optical wavelength magnitude have received extensive studies.Wherein, caused people's extensive concern especially based on the slower rays generating technique of photon crystal wave-guide.Compare traditional slower rays production method; The photonic crystal slow optical wave guide has littler device volume; Can at room temperature produce the slower rays of any wavelength; Advantage (document 1.T.Baba. " Slow light in photonic crystals. " Nature Photonics, 2008,2 (8): 465-473.) such as the slower rays characteristic that produces is controlled.At present photonic crystal mostly is that (Silicon-on-insulator SOI) processes on the material, semiconductor fabrication that can compatible current main-stream at silicon-on-insulator.Yet in common photon crystal wave-guide, light is limited in the high-index material, and this has just limited the application of photon crystal wave-guide.It is a kind of new structure (the document 2.A.Di Falco that proposed in 2008 that the photonic crystal slot wave is led; L. O ' Faolain, T.F. Krauss. " Photonic crystal slotted slab waveguides. " Photonics and Nnostructures-Fundamentals and Applications, 2008; 6:38-41.); It has combined the advantage of photon crystal wave-guide and regular troughs waveguide, can fill electric light or low-refraction detected materials in the air groove, and slower rays is bound in the very narrow low refractive index dielectric groove; Increased the intensity of signal on the space; Further strengthen the interaction of low-refraction material in slower rays and the groove, can be used for realizing small size, highly sensitive various full optical devices (document 3.J.D.Ryckman, S.M.Weiss. " Localized field enhancements in guided and defect modes of a periodic slot waveguide. " IEEE Photonics Journal; 2011,3 (6): 986-995.).
Yet in the preparation material that the photonic crystal slot wave is led, silicon has thermo-optic effect and thermal expansion effects, and the group index that causes the photonic crystal slot wave to be led can be drifted about with temperature.Simultaneously, because in conventional photonic crystal slot wave was led, group index can change with wavelength change, slower rays is given birth in the artificial delivery of photonic crystal slot wave will exist very strong GVD phenomenon, cause the light pulse signal broadening, and waveform distorts.Therefore, design a kind of photonic crystal slot wave guide structure that can produce the broadband slower rays and have crucial meaning, it can reduce the influence of temperature and GVD.2011; Iran scholar (document 4.H.Aghababaeian, M.H.Vadjed-Samiei, N.Granpayeh. " Temperature stabilization of group index in silicon photonic crystal waveguides. " Journal of the Optical Society of Korea; 2011; 15 (4): 398-402.) lead the airport radius of hollow air drain both sides through changing the photonic crystal slot wave, group velocity is brought up at 40 o'clock, bandwidth can reach 10nm.The same year, French scholar (document 5.C.Caer, X.L. Roux; V. K.Do, M.M.Delphine, N.Izard; L. Vivien, D.S.Gao and E.Cassan. " Dispersion engineering of wide slot photonic crystal waveguides by Bragg-like corrugation of the slot. " IEEE Photonics Technology Letters, 2011; 23 (18): 1298-1300.) proposed a kind of air groove of Bragg-grating structure; Simulation result shows that it is 140 that this photonic crystal slot wave guide structure can produce group velocity, and bandwidth is the slower rays phenomenon of 1.5nm.But because the hole shape of photonic crystal and size are difficult to accurately control (document 6.J.Li; T.P. White; L. O ' Faolain, A.Gomez-Iglesias, T.F.Krauss. " Systematic design of flat band slow light in photonic crystal waveguides. " OpticalExpress; 2008; 16 (9): 6227-6232.), though more than two kinds of methods improved the slower rays characteristic that the photonic crystal slot wave is led to a certain extent, increased the complicacy of preparation.
Summary of the invention
The technical matters that (one) will solve
The objective of the invention is to overcome the deficiency of existing photonic crystal slot wave guide structure optimization method, propose a kind of simple in structure, photonic crystal slot wave guide structure of being easy to prepare and can produce the broadband slower rays.
(2) technical scheme
In order to achieve the above object, the present invention proposes a kind of photonic crystal slot wave guide structure that can produce the broadband slower rays, has studied the slower rays characteristic of this New-type photon crystal slot wave guide structure.This slow optical wave guide structure is to lead on the basis at the photonic crystal slot wave of ordinary silicon medium background airport structure to introduce italic structure and adjustment near two emptying pore positions of air groove; Thereby effectively improve the dispersion curve that the photonic crystal slot wave is led, to realize the slower rays effect of broadband, low group velocity.
In the such scheme; Described photonic crystal slot wave guide structure can (Silicon On Insulator, the photonic crystal slot wave that utilizes on SOI) technology such as mask, electron beam exposure, ion etching, dry etching, wet etching to form air bridge structures be led at the semiconductor material substrate silicon-on-insulator.
In the such scheme; What described photon crystal structure adopted is the triangular crystal lattice structure; (wherein a is the grating constant of photonic crystal to the radius r=0.32a of airport; Be the spacing between the adjacent vacant pore), be operated in the smaller 1550nm wave band of loss for guaranteeing photon crystal device, general grating constant a gets about 400nm.
In the such scheme, in the described photonic crystal slot wave guide structure, background media adopts pure silicon, refractive index n=3.48, silicon thickness h=400nm; All are air in all airports, refractive index is n
0=1.
In the such scheme; Described photonic crystal slot wave is led; Be meant that on the basis of common silicon medium background airport structure photonic crystal the emptying pore in the middle of removing forms the photon crystal wave-guide of W1 structure, place the air groove that width is ω=0.3a at the place, defect center again.
In the such scheme; Described italic photonic crystal slot wave is led, and is meant that three figures that airport constituted are equilateral triangle in the airport structure that the script triangular crystal lattice is arranged; The leg-of-mutton length of side is equal to grating constant a; But in the italic photon crystal structure, will increase to 1.06a along the grating constant of wave guide direction, and make it to become isosceles triangle, wherein to lead direction parallel with the base of isosceles triangle for slot wave.
In the such scheme, described change airport position is that the first emptying pore near air groove is moved 0.05a along the direction away from air groove, will move 0.13a along the direction away from air groove near the second emptying pore of air groove simultaneously.
(3) beneficial effect
Can find out that from technique scheme the present invention has following beneficial effect:
1) utilize photon crystal wave-guide to realize that slower rays has bigger bandwidth, littler volume, better realizability than other slower rays production methods, and structural parameters are various, the slower rays of generation is controlled, more is applicable to practical application.
2) the living slower rays of photonic crystal slot wave artificial delivery can be bound in the very narrow low refractive index dielectric groove; Increase the intensity of signal on the space; Further strengthen the interaction of low-refraction material in slower rays and the groove, can be used for realizing small size, highly sensitive various full optical devices.
3) the photonic crystal slot wave guide structure of this generation provided by the invention broadband slower rays; Method through introducing italic structure and adjustment airport position, air groove both sides is adjusted the slower rays characteristic that the photonic crystal slot wave is led; In the time of can producing group velocity and reduce to c/100, bandwidth can reach the slower rays of 2.85nm.Solved the optical device of leading owing to receive the influence of temperature, GVD, caused the limited problem of its range of application based on the photonic crystal slot wave.
4) the photonic crystal slot wave guide structure of this generation provided by the invention broadband slower rays, more simplify with traditional implementation method structure compared the position that only needs to move airport in the whole design process, has reduced technology and explored difficulty.
Description of drawings
Below each photonic crystal slot wave of being got of figure structural parameters of leading all with embodiment in identical.
Structural representation that Fig. 1 leads for italic two dimension triangular crystal lattice photonic crystal slot wave, wherein P1, P2 have represented the mobile size and Orientation near two emptying pores of air groove;
Dispersion curve that Fig. 2 (a) leads for the photonic crystal slot wave and the relation between the P1; Dispersion curve that Fig. 2 (b) leads for the photonic crystal slot wave and the relation between the P2;
Fig. 3 leads the dispersion curve comparison diagram of leading with italic photonic crystal slot wave for common photonic crystal slot wave;
Fig. 4 leads through the group index curve after the Optimal Structure Designing for the photonic crystal slot wave.
Embodiment
For making the object of the invention, technical scheme and advantage clearer,, and, concrete structure of the present invention, principle and structure optimization process are done further to specify with reference to accompanying drawing below in conjunction with specific embodiment.
The present invention proposes a kind of photonic crystal slot wave guide structure that can produce the broadband slower rays; Be illustrated in figure 1 as the two-dimentional triangular crystal lattice photonic crystal slot wave guide structure synoptic diagram of italic structure, it forms through introducing air groove and italic structure in common triangular crystal lattice photonic crystal.In common triangular crystal lattice photonic crystal; Change a middle emptying pore into air groove that width is 0.3a, form photonic crystal slot wave guide structure, (promptly simultaneously the grating constant of wave guide direction; The airport spacing) increases to 1.06a, form italic photonic crystal slot wave guide structure.
In structure shown in Figure 1, a is a grating constant, and the radius of airport is r=0.32a, is 1.06a along the grating constant of wave guide direction.The refractive index of all airports is 1, and the medium background adopts pure silicon, and refractive index is n=3.48, and silicon thickness is h=400nm, and the air groove width is ω=0.3a.Red dotted line is near the line of centres of two emptying pores of air groove among the figure; Wherein P1 and P2 represent respectively near first row of air groove and the displacement of the second emptying pore center; And with the direction of arrow in scheming is positive dirction; Promptly when the displacement of airport is consistent with arrow, be designated as positive displacement, otherwise be negative displacement, the size of P1 and P2 has been represented the size of amount of movement.
According to the defined formula of group velocity, be ω for a centre frequency
0Light wave, group velocity is:
In the formula, ω is the light wave angular frequency; K is a wave vector; n
gBe the slower rays group index, reacted the degree that slower rays slows down.
Slower rays phenomenon in the photon crystal wave-guide forms through the Bragg reflection phenomenon constantly takes place between guided mode and the periodic lattice.The core concept of photon crystal wave-guide slower rays is exactly the structure through the adjustment photon crystal wave-guide, obtains more smooth defect mode dispersion curve.Fig. 2 is that the photonic crystal slot wave that utilizes the MPB software emulation of Massachusetts Institute of Technology (MIT) to obtain is led the relation between dispersion curve and P1, the P2.Can it is evident that along with the increase of P1, it is smooth that dispersion curve is tending towards gradually gradually when the low frequency direction moves.And along with the increase of P2, dispersion curve moved to the low frequency direction before this, was that turning point moves to high frequency direction then with P2=0.1a.According to formula (1), the guided mode dispersion curve that the photonic crystal slot wave is led carries out differentiate, can obtain the variation relation of group index with frequency.If design increases the dispersion curve slope that P1 reduces afterbody, select suitable P2 to reduce the slope of center section dispersion curve simultaneously, so just can in very big bandwidth range, improve group index, also can reduce GVD simultaneously.
Shown in Figure 3ly lead the dispersion curve comparison diagram of leading with italic structure photonic crystal slot wave for common photonic crystal slot wave.As can be seen from the figure, photonic crystal can be divided into leaded light pattern and the leading leaded light pattern of forbidden photon band effect that index of refraction effects is taken as the leading factor with curve.And the group index of usually said slower rays obtains under the forbidden photon band effect.The present invention introduces the italic structure in photonic crystal slot wave guide structure; Promptly on the basis that primary photon crystal slot wave is led, only increase the grating constant of leading direction along slot wave; So just, also will increase by the leading leaded light pattern of forbidden photon band effect the energy of the waveguide mode photonic crystal lattice zone, both sides that is expressed to as much as possible.But, when introducing the italic structure, can cause and can move toward the top of light cone line with the point of crossing of curve, can cause bigger loss like this.So, taking all factors into consideration the influence of this two aspect, the present invention selects for use 1.06a as the grating constant of leading direction along slot wave.
According to above analysis, regulate italic photonic crystal slot wave and lead the airport position of air groove both sides and make P1=0.05a, P2=0.13a, it is as shown in Figure 4 to obtain the group index curve that italic photonic crystal slot wave leads.For guaranteeing that slower rays is operated in the 1550nm wave band, utilize normalized frequency to release grating constant a=1550 * 0.2443=378.665nm.Definition according to the slower rays bandwidth; Set group index up and down undulate quantity in bandwidth range, be no more than central value 10% and be the bandwidth of slower rays; This New-type photon crystal slot wave that then the present invention designed lead can normalized frequency from 0.24405 ω a/2 π c to 0.2445 ω a/2 π c scope in (promptly in bandwidth is the wavelength coverage of 2.85nm), the slower rays group index is brought up to 100 (be about to the light group velocity and slow to c/100).
Claims (3)
1. photonic crystal slot wave guide structure that can produce the broadband slower rays; It is characterized in that: this photonic crystal slot wave guide structure is to lead the basis at the photonic crystal slot wave of common silicon medium background (refractive index is 3.48) airport (refractive index is 1) structure go up to introduce italic structure and adjustment near two emptying pore positions of air groove; Thereby effectively improve the dispersion curve that the photonic crystal slot wave is led, realize the slower rays effect of broadband, low group velocity.
2. a kind of photonic crystal slot wave guide structure that can produce the broadband slower rays as claimed in claim 1; It is characterized in that: what photon crystal structure adopted is the triangular crystal lattice structure; (wherein a is the grating constant of photonic crystal to the radius r=0.32a of airport; Be the spacing between the adjacent vacant pore), background media adopts pure silicon material, silicon thickness h=400nm; All air in all airports.
3. a kind of photonic crystal slot wave guide structure that can produce the broadband slower rays as claimed in claim 1; It is characterized in that: on the basis of common silicon medium background airport structure photonic crystal; Emptying pore in the middle of removing forms the photon crystal wave-guide of W1 structure; And to place width at defect center place be the air groove of ω=0.3a, forms the photonic crystal slot wave and lead; To increase to 1.06a along the grating constant of wave guide direction simultaneously, lead with the photonic crystal slot wave that forms the italic structure; To move 0.05a along direction near the first emptying pore of air groove again away from air groove; To move 0.13a along direction near the second emptying pore of air groove simultaneously, finally realize a kind of photonic crystal slot wave guide structure that can produce the broadband slower rays away from air groove.
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Cited By (6)
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CN103091268A (en) * | 2013-01-12 | 2013-05-08 | 东北大学 | Multi-component gas concentration measurement method based on photonic crystal groove waveguide |
CN103267997A (en) * | 2013-05-23 | 2013-08-28 | 东北大学 | Method for producing bandwidth tunable slow light in polymer filling photonic crystal slot waveguide |
CN104062267A (en) * | 2014-06-27 | 2014-09-24 | 东北大学 | Refractive index measuring method based on slow light and photonic crystal micro-cavity |
CN104570404A (en) * | 2014-12-22 | 2015-04-29 | 中国电子科技集团公司第三十八研究所 | Optical wave beam forming network chip based on thermal optical modulation and preparing method thereof |
JP2018132726A (en) * | 2017-02-17 | 2018-08-23 | 日本電信電話株式会社 | Photonic Crystal Optical Resonator |
CN110543058A (en) * | 2019-07-19 | 2019-12-06 | 华南理工大学 | Method for controlling slow light rainbow based on magneto-optical photonic crystal waveguide |
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CN101963736A (en) * | 2010-08-11 | 2011-02-02 | 中国科学院半导体研究所 | Slow light waveguide structure based on photonic crystal air bridge structure |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103091268A (en) * | 2013-01-12 | 2013-05-08 | 东北大学 | Multi-component gas concentration measurement method based on photonic crystal groove waveguide |
CN103091268B (en) * | 2013-01-12 | 2014-11-05 | 东北大学 | Multi-component gas concentration measurement method based on photonic crystal groove waveguide |
CN103267997A (en) * | 2013-05-23 | 2013-08-28 | 东北大学 | Method for producing bandwidth tunable slow light in polymer filling photonic crystal slot waveguide |
CN104062267A (en) * | 2014-06-27 | 2014-09-24 | 东北大学 | Refractive index measuring method based on slow light and photonic crystal micro-cavity |
CN104570404A (en) * | 2014-12-22 | 2015-04-29 | 中国电子科技集团公司第三十八研究所 | Optical wave beam forming network chip based on thermal optical modulation and preparing method thereof |
JP2018132726A (en) * | 2017-02-17 | 2018-08-23 | 日本電信電話株式会社 | Photonic Crystal Optical Resonator |
CN110543058A (en) * | 2019-07-19 | 2019-12-06 | 华南理工大学 | Method for controlling slow light rainbow based on magneto-optical photonic crystal waveguide |
CN110543058B (en) * | 2019-07-19 | 2020-11-24 | 华南理工大学 | Method for controlling slow light rainbow based on magneto-optical photonic crystal waveguide |
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