CN102731068A - 一种低密度ito蒸镀靶材的制备方法 - Google Patents
一种低密度ito蒸镀靶材的制备方法 Download PDFInfo
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105294073A (zh) * | 2015-11-10 | 2016-02-03 | 广西晶联光电材料有限责任公司 | 一种烧结ito低密度圆柱颗粒的制备方法 |
CN110483033A (zh) * | 2019-08-21 | 2019-11-22 | 韶关市欧莱高新材料有限公司 | 一种低密度ito靶材的制备方法 |
CN110655387A (zh) * | 2019-11-08 | 2020-01-07 | 先导薄膜材料(广东)有限公司 | 一种低密度ito靶材及其制备方法 |
CN115893988A (zh) * | 2022-12-07 | 2023-04-04 | 洛阳晶联光电材料有限责任公司 | 一种太阳能电池用蒸镀靶材及其制备方法 |
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US6080341A (en) * | 1998-05-20 | 2000-06-27 | W.C. Heraeus Gmbh & Co. Kg | Process for making an indium-tin-oxide shaped body |
CN101786885A (zh) * | 2009-12-24 | 2010-07-28 | 中国船舶重工集团公司第七二五研究所 | 一种控制晶粒度制造ito靶材的方法 |
CN101812665A (zh) * | 2010-03-26 | 2010-08-25 | 北京化工大学 | 单相结构-高密度铟锡氧化物靶材的制备方法 |
TW201215695A (en) * | 2010-10-08 | 2012-04-16 | chong-ren Lin | Preparation method of low-density ITO target |
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Patent Citations (4)
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US6080341A (en) * | 1998-05-20 | 2000-06-27 | W.C. Heraeus Gmbh & Co. Kg | Process for making an indium-tin-oxide shaped body |
CN101786885A (zh) * | 2009-12-24 | 2010-07-28 | 中国船舶重工集团公司第七二五研究所 | 一种控制晶粒度制造ito靶材的方法 |
CN101812665A (zh) * | 2010-03-26 | 2010-08-25 | 北京化工大学 | 单相结构-高密度铟锡氧化物靶材的制备方法 |
TW201215695A (en) * | 2010-10-08 | 2012-04-16 | chong-ren Lin | Preparation method of low-density ITO target |
Non-Patent Citations (2)
Title |
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何小虎 等: "铟锡氧化物及其应用", 《稀有金属与硬质合金》 * |
李晶 等: "冷等静压-烧结法制备ITO磁控溅射靶材的工艺研究", 《稀有金属与硬质合金》 * |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105294073A (zh) * | 2015-11-10 | 2016-02-03 | 广西晶联光电材料有限责任公司 | 一种烧结ito低密度圆柱颗粒的制备方法 |
CN110483033A (zh) * | 2019-08-21 | 2019-11-22 | 韶关市欧莱高新材料有限公司 | 一种低密度ito靶材的制备方法 |
CN110483033B (zh) * | 2019-08-21 | 2022-02-08 | 广东欧莱高新材料股份有限公司 | 一种低密度ito靶材的制备方法 |
CN110655387A (zh) * | 2019-11-08 | 2020-01-07 | 先导薄膜材料(广东)有限公司 | 一种低密度ito靶材及其制备方法 |
CN110655387B (zh) * | 2019-11-08 | 2022-05-10 | 先导薄膜材料(广东)有限公司 | 一种低密度ito靶材及其制备方法 |
CN115893988A (zh) * | 2022-12-07 | 2023-04-04 | 洛阳晶联光电材料有限责任公司 | 一种太阳能电池用蒸镀靶材及其制备方法 |
CN115893988B (zh) * | 2022-12-07 | 2023-09-08 | 洛阳晶联光电材料有限责任公司 | 一种太阳能电池用蒸镀靶材及其制备方法 |
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Inventor after: Zhou Xianjie Inventor after: Zheng Zitao Inventor after: Xu Hongxing Inventor after: Wu Bin Inventor after: Gan Zhijian Inventor before: Zhou Xianjie Inventor before: Zheng Zitao Inventor before: Xu Jiwen Inventor before: Su Zhonghua |
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Effective date of registration: 20170822 Address after: 558200, Guizhou Qiannan Buyi and Miao Autonomous Prefecture Dushan Economic Development Zone, duck plots, machinery Park Patentee after: Guizhou sigma nanometer material Co., Ltd. Address before: Mu Creek Industrial Park in Guangdong province Shaoguan city 512030 Xilian town Wujiang District Patentee before: Shaoguan Sigma Technology Co., Ltd. |
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Effective date of registration: 20200722 Address after: Lalin Industrial Park, Mawan Town Economic Development Zone, Dushan County, Qiannan Buyi and Miao Autonomous Prefecture, Guizhou Province Patentee after: Guizhou Faraday magnetoelectric Technology Co., Ltd Address before: 558200 Guizhou province Qiannan Buyi and Miao Autonomous Prefecture Dushan Economic Development Zone Mun Mun Li Shun Machinery park. Patentee before: GUIZHOU SIGMA NANO MATERIALS Co.,Ltd. |
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