CN102718221B - 多晶硅自封堵浇铸装置 - Google Patents
多晶硅自封堵浇铸装置 Download PDFInfo
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- CN102718221B CN102718221B CN201210225750.XA CN201210225750A CN102718221B CN 102718221 B CN102718221 B CN 102718221B CN 201210225750 A CN201210225750 A CN 201210225750A CN 102718221 B CN102718221 B CN 102718221B
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- heating system
- casting
- plugging
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- smelting
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 27
- 238000005266 casting Methods 0.000 title abstract description 31
- 238000010438 heat treatment Methods 0.000 claims abstract description 42
- 238000003723 Smelting Methods 0.000 claims abstract description 39
- 229920005591 polysilicon Polymers 0.000 claims description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 43
- 229910052710 silicon Inorganic materials 0.000 abstract description 43
- 239000010703 silicon Substances 0.000 abstract description 43
- 238000002844 melting Methods 0.000 abstract description 25
- 230000008018 melting Effects 0.000 abstract description 24
- 238000000034 method Methods 0.000 abstract description 20
- 238000000746 purification Methods 0.000 abstract description 3
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 238000005273 aeration Methods 0.000 abstract 1
- 238000010924 continuous production Methods 0.000 abstract 1
- 238000007711 solidification Methods 0.000 abstract 1
- 230000008023 solidification Effects 0.000 abstract 1
- 239000007788 liquid Substances 0.000 description 25
- 239000002893 slag Substances 0.000 description 14
- 230000006698 induction Effects 0.000 description 5
- 230000007306 turnover Effects 0.000 description 5
- 238000007499 fusion processing Methods 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 238000005272 metallurgy Methods 0.000 description 2
- 239000006187 pill Substances 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000282693 Cercopithecidae Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- XJKVPKYVPCWHFO-UHFFFAOYSA-N silicon;hydrate Chemical compound O.[Si] XJKVPKYVPCWHFO-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
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Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210225750.XA CN102718221B (zh) | 2012-06-28 | 2012-06-28 | 多晶硅自封堵浇铸装置 |
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CN201210225750.XA CN102718221B (zh) | 2012-06-28 | 2012-06-28 | 多晶硅自封堵浇铸装置 |
Publications (2)
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CN102718221A CN102718221A (zh) | 2012-10-10 |
CN102718221B true CN102718221B (zh) | 2014-06-11 |
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CN201210225750.XA Active CN102718221B (zh) | 2012-06-28 | 2012-06-28 | 多晶硅自封堵浇铸装置 |
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CN (1) | CN102718221B (zh) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101006205A (zh) * | 2004-06-18 | 2007-07-25 | Memc电子材料有限公司 | 向晶体形成装置装载熔融源材料的熔化器组件和方法 |
CN101850976A (zh) * | 2009-04-01 | 2010-10-06 | 高文秀 | 在转运包中去除金属硅中硼的方法 |
CN102060298A (zh) * | 2010-11-23 | 2011-05-18 | 合肥飞帆等离子科技有限公司 | 一种多晶硅生产装置及多晶硅生产方法 |
CN102459077A (zh) * | 2009-04-17 | 2012-05-16 | 西利梅尔特公司 | 硅基原料的提纯方法和设备 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3767637B2 (ja) * | 1995-08-21 | 2006-04-19 | 旭硝子株式会社 | 高温溶融物用導管の支持構造体 |
JPH09301709A (ja) * | 1996-05-13 | 1997-11-25 | Sumitomo Sitix Corp | シリコン鋳造方法 |
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2012
- 2012-06-28 CN CN201210225750.XA patent/CN102718221B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101006205A (zh) * | 2004-06-18 | 2007-07-25 | Memc电子材料有限公司 | 向晶体形成装置装载熔融源材料的熔化器组件和方法 |
CN101850976A (zh) * | 2009-04-01 | 2010-10-06 | 高文秀 | 在转运包中去除金属硅中硼的方法 |
CN102459077A (zh) * | 2009-04-17 | 2012-05-16 | 西利梅尔特公司 | 硅基原料的提纯方法和设备 |
CN102060298A (zh) * | 2010-11-23 | 2011-05-18 | 合肥飞帆等离子科技有限公司 | 一种多晶硅生产装置及多晶硅生产方法 |
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Effective date of registration: 20160920 Address after: Siming District of Xiamen city in Fujian Province, 361005 South Siming Road No. 422 South Building 2, Xiamen University Patentee after: Xiamen University Asset Management Co.,Ltd. Address before: Xiamen City, Fujian Province, 361005 South Siming Road No. 422 Patentee before: Xiamen University |
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Effective date of registration: 20170125 Address after: Longchang Jin Zhen Changtai County Industrial Park 363900 Fujian city of Zhangzhou province Chen Hong Kong Industrial Park Building No. 1 Patentee after: Changtai Cheung innovation Mstar Technology Ltd. Address before: Siming District of Xiamen city in Fujian Province, 361005 South Siming Road No. 422 South Building 2, Xiamen University Patentee before: Xiamen University Asset Management Co.,Ltd. |
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Effective date of registration: 20210602 Address after: 361000 School of energy and wooden building B211, Xiang'an campus, Xiamen University, Xiang'an District, Xiamen City, Fujian Province Patentee after: Zheng Songsheng Address before: 363900 Building 1, jinlongchang Industrial Park, Gangyuan Industrial Park, Chenxiang Town, Changtai County, Zhangzhou City, Fujian Province Patentee before: Changtai Cheung innovation Mstar Technology Ltd. |
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Effective date of registration: 20240429 Address after: Room 304-13, Xinye Building, Entrepreneurship Park, Xiamen Torch High tech Zone, Xiamen, Fujian Province, 361000 Patentee after: Xiamen Fumeng Technology Co.,Ltd. Country or region after: China Address before: 361000 School of energy and wooden building B211, Xiang'an campus, Xiamen University, Xiang'an District, Xiamen City, Fujian Province Patentee before: Zheng Songsheng Country or region before: China |