CN102710167A - Bent oscillator stimulated rotary ultrasonic motor and electric excitation mode thereof - Google Patents

Bent oscillator stimulated rotary ultrasonic motor and electric excitation mode thereof Download PDF

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Publication number
CN102710167A
CN102710167A CN2012101616971A CN201210161697A CN102710167A CN 102710167 A CN102710167 A CN 102710167A CN 2012101616971 A CN2012101616971 A CN 2012101616971A CN 201210161697 A CN201210161697 A CN 201210161697A CN 102710167 A CN102710167 A CN 102710167A
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curved
oscillator
ultrasonic motor
piezoelectricity
rotary ultrasonic
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CN102710167B (en
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胡俊辉
芦小龙
杨淋
赵淳生
万龙飞
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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Abstract

The invention discloses a bent oscillator stimulated rotary ultrasonic motor and an electric excitation mode thereof. The rotary ultrasonic motor comprises a stator assembly, a rotor assembly and a rotation shaft arranged along the axial direction of the stator assembly, wherein the stator assembly and the rotor assembly are coaxially arranged; the stator assembly comprises a metal ring body and four piezoelectric bent oscillators; the metal ring body comprises an upper circular ring; four connecting feet are evenly distributed on the circumferential direction of an upper circular ring and are correspondingly connected with the four piezoelectric bent oscillators one by one; the four piezoelectric bent oscillators are evenly distributed at 90 degrees in a rotating mode around the center shaft of the metal ring body; and meanwhile, the length direction of each piezoelectric bent oscillator is tangent with the circumferential direction of the upper circular ring. Therefore, according to the invention, the rotary ultrasonic motor can realize forward and reverse rotation motion, and has high-power output characteristic and an electric excitation mode. The bent oscillator stimulated rotary ultrasonic motor has the characteristics of stable performance, high output power, compact structure, single requirement on a ceramic chip and low processing and assembling requirement.

Description

The rotary ultrasonic motor and the electric excitation mode thereof of curved oscillator excitation
Technical field
The present invention relates to a kind of rotary ultrasonic motor and electric excitation mode thereof of curved oscillator excitation, belong to the ultrasound electric machine field.
Background technology
Ultrasound electric machine is the inverse piezoelectric effect excitation ultrasound vibration that utilizes piezoelectric ceramic, relies on the novel actuator of frictional force drives.Rotary-type ultrasound electric machine belongs to a kind of of ultrasound electric machine.Compare with the traditional electrical magneto, ultrasound electric machine has big torque mass ratio, fast response, precision positioning and do not have advantage such as electromagnetic interference, is with a wide range of applications in fields such as biologic medical, accurate driving, optics and Aero-Space.
The rotary ultrasonic motor patent of the expert ripple of the existing face of retrieval finds that the mode of the expert ripple of realization face mainly contains two kinds: adopt SMD piezoelectric ceramic excitation and adopt sandwich oscillator mode to encourage.SMD excitation need mill out the plane in the becket surface, is unfavorable for expert formation of ripple of symmetrical profile and having relatively high expectations to barbola work like this; Sandwich vibrator type excitation extensively adopts longitudinal vibration to excite the in plane vibration of stator, and the normal direction mounting means of oscillator has taken more space, is unfavorable for design of miniization.The novel rotary ultrasonic motor that adopts longitudinal vibration and the curved two kinds of special-shaped mode actings in conjunction of shaking to excite the expert ripple of face is arranged at present.Application number is that 200910212678.5 disclosed a kind of interior traveling wave rotary ultrasonic motors adopt the oscillator of the vertical curved two kinds of vibration shapes of coupling to excite the capable wave motion of in-plane bending of annulus; The advantage of this electric machine structure is simple in structure; Processing technology is good, but the normal direction layout of oscillator is unfavorable for the microminiaturization of motor and the installation and the method for clamping of stator its mode of oscillation is had considerable influence.To be that 200910072818.3 disclosed a kind of vertical curved combined type cylindrical shape rotary ultrasonic motors are same adopt a sandwich transducer with buckling composite mode to excite the expert wave motion of face of cylinder to application number; Be characterized in that sandwich oscillator is positioned at the tangential position of cylinder; Adopt two cantilever designs to link to each other with cylinder; The advantage of this motor is a compact conformation, but higher to the machining accuracy and the matching requirements at cantilever position.In addition, the design of two kinds of special-shaped mode of single oscillator coupling is comparatively complicated, require to adopt dissimilar potsherds, and two kinds of mode is difficult to reach the amplitude unanimity under identical excitation situation.
Summary of the invention
The present invention is directed to the deficiency of prior art; Purpose is to provide a kind of can realize forward and reverse ultrasound electric machine and electric excitation mode that rotatablely moves and have high-power output characteristic; Motor body has stable performance, and power output is big, compact conformation; Requirement to potsherd is more single, processing and the lower characteristics of matching requirements.
For realizing above technical purpose, the present invention will take following technical scheme:
A kind of rotary ultrasonic motor of curved oscillator excitation comprises stator module, rotor assembly and the rotation axis of axially placing along stator module, and stator module and the coaxial setting of rotor assembly; Said stator module comprises round metal ring body and four curved oscillators of piezoelectricity; Said round metal ring body comprises the top annulus; The outer wall of top annulus circumferentially is uniformly distributed with four and connects foot; These four connect foot and connect one to one with the curved oscillator of four piezoelectricity; And the curved oscillator of these four piezoelectricity is 90 ° of rotations around the central shaft of round metal ring body and is uniformly distributed with, and the length direction of the curved oscillator of each piezoelectricity and top annulus is circumferentially tangent simultaneously.
The inner chamber of said top annulus is the biconical surface structure of opposing setting; And the equal equidistance of two conical surfaces of this biconical surface structure is offered teeth groove; Said rotor assembly comprises upper rotor part and the lower rotor part that split is provided with; Upper rotor part, lower rotor part touch with two conical surfaces of biconical surface structure respectively mutually, and the contact-making surface of upper rotor part, lower rotor part and biconical surface structure all is conical surface setting; Said upper rotor part is installed on the rotation axis through the Flexible Connector of pretension setting, and lower rotor part is then fixed with rotation axis.
Said round metal ring body also comprises the bottom clamping rings, and this bottom clamping rings is connected with the top annulus through the middle part supporting walls.
The curved oscillator of said piezoelectricity comprises front end housing, curved shake piezoelectric element, tail balancing weight piece and threaded fastener; The curved piezoelectric element that shakes tightens up through threaded fastener and front end housing, and the tail balancing weight piece is pressed between the nut of curved shake piezoelectric element and threaded fastener; The curved piezoelectric element that shakes is two subregion incentive structures, comprises curved shake piezoelectric ceramic piece and electrode slice; Said curved piezoelectric ceramic piece and the electrode slice of shaking is the even number sheet, and the curved alternate setting with electrode slice of piezoelectric ceramic piece of shaking, the polarization border coordination setting of each curved piezoelectric ceramic piece that shakes, simultaneously adjacent two bend the piezoelectric ceramic pieces that shake positive and negative polarized area arranged alternate.
Another technical purpose of the present invention provides a kind of electric excitation mode of rotary ultrasonic motor of above-mentioned curved oscillator excitation; Respectively the curved oscillator of four piezoelectricity is divided into two phases: wherein the curved oscillator of the piezoelectricity of two alternate settings is a phase; Under the effect of one road driving voltage signal, be inspired flexural vibration mode in the A profile; And the curved oscillator of the piezoelectricity of remaining two alternate settings is another phase, under the effect of another road driving voltage signal, is inspired Type B in-plane bending vibration mode; The two-way driving voltage signal that is applied is the same sinusoidal signal frequently of the two-way of pi/2 phase difference; Flexural vibration mode has identical or approaching resonance frequency with Type B in-plane bending vibration mode in the A profile; Impel the conical surface of the biconical surface structure of top annulus to produce the row wave motion; Cause the particle on this conical surface to have oval-shaped movement locus, promote rotor assembly and rotate.
According to above technical scheme, can realize following beneficial effect:
1, the present invention adopts curved oscillator to excite the in-plane bending vibration of top annulus; And the length direction of the curved oscillator of piezoelectricity and the excircle side of metal ring are tangent; Simultaneously the quantity of the curved oscillator of piezoelectricity is four, and the central shaft of annulus is 90 degree rotations and is uniformly distributed with this compact layout and structure around top; The Mode Shape that excites is identical, and helps to improve power output;
2, have one section middle part between the top annulus of round metal ring body and the bottom retainer ring and support thin-wall construction, thisly be designed with installation and the clamping that helps stator, and less to its mode of oscillation influence;
3, the present invention will be changed into the in-plane bending vibration that curved oscillator excites by the in-plane bending vibration that longitudinal vibration excites; The transformation of the mode of oscillation of sandwich oscillator mainly is because the transformation of oscillator mounting arrangement determines: through FEM calculation; The in-plane bending vibration of the more easy excitated stator metal ring of its bending vibration modes of the oscillator of tangential layout; And model frequency is lower, and the amplitude that harmonic response is calculated is higher, helps to improve the output speed and the moment of torsion of motor.Compare with the design of two kinds of mode of coupling, the single mode design of sandwich oscillator makes that the structural design of stator is comparatively flexible, and is convenient, and helps many oscillators under same mode of oscillation, to excite the in-plane bending vibration of round metal ring body.
4, the rotary ultrasonic motor of curved oscillator excitation of the present invention is except that the general characteristic with ultrasound electric machine; Adopt the supporting construction of metal thin-wall; Help the installation and the clamping of stator; And this design does not need to install in addition bearing, and the function of automatic centering is played in the inboard cone structure of metal ring and the two-spool design of taper, so motor can be operated in limit low temperature and vacuum environment etc. to the lubricated occasion that specific (special) requirements is arranged.
Description of drawings
Fig. 1. be the structural representation of curved oscillator: wherein, Fig. 1-1 is a cutaway view, and Fig. 1-2 is a decomposition view.
Fig. 2 is the structural representation of stator: wherein, Fig. 2-1 is a front view, wherein comprises the broken section that thin-walled is supported at the middle part, and Fig. 2-2 is a stereogram.
Fig. 3. be the rotary ultrasonic motor structural representation of curved oscillator excitation: wherein, Fig. 3-1 is a front view, wherein comprises the broken section of upper rotor part, lower rotor part and stator annulus, and Fig. 3-2 is a stereogram.
Fig. 4. be the rotary ultrasonic motor operation principle sketch map of curved oscillator excitation: wherein, Fig. 4-1 is three rank flexural vibration mode bending vibation mode picture in the A profile, and Fig. 4-2 is three rank flexural vibration mode bending vibation mode picture in the Type B face.
Label title among the figure: 1, round metal ring body; 2-1, the first curved oscillator; 2-2, the second curved oscillator; 3-1, the 3rd curved oscillator; 3-2, the 4th curved oscillator; 4, the first bipyramid face; 5, the second bipyramid face; 6, front end housing; 7, the curved piezoelectric ceramic piece that shakes; 8, tail balancing weight piece; 9, fastening bolt; 10, electrode slice; 11, first connects foot; 12, second connects foot; 13, the 3rd connects foot; 14, the 4th connects foot; 15, top annulus; 16, middle part supporting walls; 17, bottom retainer ring; 18, rotating shaft; 19, clamp nut; 20, spring leaf; 21, upper rotor part; 22, lower rotor part; 23, the first-order bending vibration mode of the first curved oscillator; 24, the first-order bending vibration mode of the second curved oscillator; 25, three rank flexural vibration modes in the A profile of top annulus; 26,27,28 be piezoelectricity pottery driving signal input; 29, the first-order bending vibration mode of the 3rd curved oscillator; 30, the first-order bending vibration mode of the 4th curved oscillator; 31, three rank flexural vibration modes in the Type B face of top annulus; 32,33,34 be piezoelectricity pottery driving signal input.
Embodiment
Accompanying drawing discloses the structural representation of preferred embodiment involved in the present invention without limitation; Below will combine accompanying drawing that technical scheme of the present invention at length is described.
Shown in Fig. 1 to 4, the rotary ultrasonic motor of curved oscillator excitation according to the invention comprises stator module, rotor assembly and the rotation axis of axially placing along stator module, and stator module and the coaxial setting of rotor assembly; Said stator module comprises round metal ring body and four curved oscillators of piezoelectricity; Said round metal ring body comprises the top annulus; The outer wall of top annulus circumferentially is uniformly distributed with four and connects foot: promptly the first connection foot, 11, the second connection foot the 12, the 3rd connects the sufficient the 13 and the 4th and connects sufficient 14; These four connection foots connect one to one with the curved oscillators of four piezoelectricity, and the curved oscillator of described four piezoelectricity is: first bends oscillator 2-1, the second curved oscillator 2-2, the 3rd curved oscillator 3-1, the 4th curved oscillator 3-2; And the curved oscillator of these four piezoelectricity is 90 ° of rotations around the central shaft of round metal ring body and is uniformly distributed with, and the length direction of the curved oscillator of each piezoelectricity and top annulus is circumferentially tangent simultaneously.
Shown in Fig. 2-1,2-2; The inner chamber of top according to the invention annulus is the biconical surface structure of opposing setting; And the equal equidistance of two conical surfaces of this biconical surface structure is offered teeth groove, and said rotor assembly comprises upper rotor part and the lower rotor part that split is provided with, and upper rotor part, lower rotor part touch with two conical surfaces of biconical surface structure respectively mutually; And the contact-making surface of upper rotor part, lower rotor part and biconical surface structure all is conical surface setting, and the main body of upper rotor part 21 promptly according to the invention and lower rotor part 22 is a circular cone structure; Said upper rotor part is installed on the rotation axis through the Flexible Connector of pretension setting; Impel upper rotor part to move up and down along rotation axis; The Flexible Connector that the present invention adopted is a spring leaf, and this spring leaf 20 is installed in the upper surface of upper rotor part 21, and strain takes place under the effect of clamp nut 19; The contact that its component in the axial direction is rotor provides pretightning force, and the size of pretightning force is regulated by the relative position on axial between clamp nut 19 and the rotation axis 18; Lower rotor part is then fixed with rotation axis; The present invention is for the ease of the installation and the clamping of stator module, and the lower surface of said top annulus is connected with the bottom clamping rings through the middle part supporting walls.
Shown in Fig. 1-1,1-2, the curved oscillator of piezoelectricity according to the invention comprises front end housing, curved shake piezoelectric element, tail balancing weight piece and threaded fastener; The curved piezoelectric element that shakes tightens up through threaded fastener and front end housing, and the tail balancing weight piece is pressed between the nut of curved shake piezoelectric element and threaded fastener; The curved piezoelectric element that shakes is two subregion incentive structures, comprises four curved shake piezoelectric ceramic piece and four plate electrode sheets; The said curved alternate setting of piezoelectric ceramic piece of shaking, and the polarization border coordination setting of each curved piezoelectric ceramic piece that shakes with electrode slice, the positive and negative polarized area arranged alternate of the two simultaneously adjacent curved piezoelectric ceramic pieces that shake.
The present invention is divided into two phases with the curved oscillator of four piezoelectricity respectively: wherein the curved oscillator of the piezoelectricity of two alternate settings is a phase; Under the effect of one road driving voltage signal, be inspired flexural vibration mode in the A profile; And the curved oscillator of the piezoelectricity of remaining two alternate settings is another phase, under the effect of another road driving voltage signal, is inspired Type B in-plane bending vibration mode; The two-way driving voltage signal that is applied is the same sinusoidal signal frequently of the two-way of pi/2 phase difference; Flexural vibration mode has identical or approaching resonance frequency with Type B in-plane bending vibration mode in the A profile; Impel the conical surface of the biconical surface structure of top annulus to produce the row wave motion; Cause the particle on this conical surface to have oval-shaped movement locus, promote rotor assembly and rotate.
The rotary ultrasonic motor of said curved oscillator excitation is as shown in Figure 3, mainly by rotor 21 and 22 and stator form.Its stator is as shown in Figure 2.Upper rotor part 21 is a circular cone structure with lower rotor part 22 main bodys; Be processed into the conical surface with the stator contact-making surface, lower rotor part 22 is fixing with rotation axis 18, upper rotor part 21 can be on rotation axis 18 slide relative; Spring leaf 20 is installed in the upper surface of upper rotor part 21; Strain takes place under the effect of clamp nut 19, and the contact that its component in the axial direction is rotor provides pretightning force, and the size of pretightning force is regulated by the relative position on axial between clamp nut 19 and the rotation axis 18.
Stator shown in Figure 2 is made up of round metal ring body 1 and four curved oscillator 2-1,2-2,3-1,3-2 linking to each other with round metal ring body 1; The 1 integrated processing of round metal ring body; Comprise top annulus 15, middle part supporting walls 16 and bottom retainer ring 17, wherein, top annulus drive surface is bipyramid face 4 and 5; And have teeth groove; Lateral surface is uniformly distributed with four and connects foot 12,14,11,13, and the end with four curved oscillator 2-1,2-2,3-1,3-2 links to each other respectively, and four curved oscillators are 90 degree around the central shaft of round metal ring body and rotate and be uniformly distributed with; And length direction and top annulus is circumferentially tangent, forms four driver elements in upper and lower, left and right; The upper surface of middle part supporting walls 16 links to each other with the lower surface of top annulus 15, and thin-walled position diametrically is between teeth groove and connection foot; The upper surface of bottom retainer ring 17 links to each other with the lower surface of middle part supporting walls 16, and the lower surface of bottom retainer ring 17 is the installed surface of motor.
Operation principle of the present invention below is detailed:
The effective operation mode of stator of this ultrasound electric machine design is an in-plane bending vibration mode because four curved oscillators evenly distribute, and adjacent two oscillators to be 90 degree vertical, so suitable operation mode is B 03, B 05And B 09Three kinds, B representes flexural vibrations, is designated as the pitch circle number of vibration first time, is designated as the pitch diameter number of vibration second time.The hereinafter control mode is with B 03Operation mode is an example.Shown in Fig. 4-1, driving signal input 26 ground connection, input 27 applies the A+ phase signals , input 28 applies the A-phase signals
Figure 2012101616971100002DEST_PATH_IMAGE004
, can excite the local buckling of illustrated curved oscillator 2-1 and 2-2 to vibrate B 2Mode has 2 nodes, connects foot 12 in the drive and is connected 14 motions enough down, excites the B of top annulus 15 03Three rank flexural vibration modes 25 in the face are defined as A pattern attitude with it; Shown in Fig. 4-2, driving signal input 32 ground connection, input 33 applies the B+ phase signals
Figure 2012101616971100002DEST_PATH_IMAGE006
, input 34 applies the B-phase signals
Figure 2012101616971100002DEST_PATH_IMAGE008
, can excite the local buckling of illustrated curved oscillator 3-1 and 3-2 to vibrate B 2Mode has 2 nodes, drives left side connection foot 11 and is connected foot 13 motions with the right side, excites the B of top annulus 15 03Three rank flexural vibration modes 31 in the face are defined as Type B mode with it; Because structural symmetry, A pattern attitude and Type B mode are homotype frequency mode together in theory, but the vibration shape promptly differs pi/2 at the phase difference of pi that makes progress in week/4 bending wave wavelength on space phase.As four signals ,
Figure 2012101616971100002DEST_PATH_IMAGE012
,
Figure 2012101616971100002DEST_PATH_IMAGE014
and
Figure 2012101616971100002DEST_PATH_IMAGE016
when applying simultaneously; The stack of two mode 25,31 can make the expert wave motion of top annulus 15 generation faces; Inboard bipyramid face 4 is done elliptic motion with 5 tooth tip particle retinue ripple, rotates in the x-y plane through rubbing action promotion rotor 21 and 22.The positive and negative direction of rotor rotation can be definite by the phase difference of A, B two phase sinusoidal signals, i.e. pi/2 phase official post electric mover positive movement ,-counter motion of pi/2 phase official post electric mover.

Claims (5)

1. the rotary ultrasonic motor of a curved oscillator excitation comprises stator module, rotor assembly and the rotation axis of axially placing along stator module, and stator module and the coaxial setting of rotor assembly; It is characterized in that: said stator module comprises round metal ring body and four curved oscillators of piezoelectricity; Said round metal ring body comprises the top annulus; The outer wall of top annulus circumferentially is uniformly distributed with four and connects foot; These four connect foot and connect one to one with the curved oscillator of four piezoelectricity; And the curved oscillator of these four piezoelectricity is 90 ° of rotations around the central shaft of round metal ring body and is uniformly distributed with, and the length direction of the curved oscillator of each piezoelectricity and top annulus is circumferentially tangent simultaneously.
2. the rotary ultrasonic motor that encourages according to the said curved oscillator of claim 1; It is characterized in that: the inner chamber of said top annulus is the biconical surface structure of opposing setting; And the equal equidistance of two conical surfaces of this biconical surface structure is offered teeth groove; Said rotor assembly comprises upper rotor part and the lower rotor part that split is provided with, and upper rotor part, lower rotor part touch with two conical surfaces of biconical surface structure respectively mutually, and the contact-making surface of upper rotor part, lower rotor part and biconical surface structure all is conical surface setting; Said upper rotor part is installed on the rotation axis through the Flexible Connector of pretension setting, and lower rotor part is then fixed with rotation axis.
3. according to the rotary ultrasonic motor of the said curved oscillator excitation of claim 1, it is characterized in that: said round metal ring body also comprises the bottom clamping rings, and this bottom clamping rings is connected with the top annulus through the middle part supporting walls.
4. according to the rotary ultrasonic motor of the said curved oscillator excitation of claim 1, it is characterized in that: the curved oscillator of said piezoelectricity comprises front end housing, curved shake piezoelectric element, tail balancing weight piece and threaded fastener; The curved piezoelectric element that shakes tightens up through threaded fastener and front end housing, and the tail balancing weight piece is pressed between the nut of curved shake piezoelectric element and threaded fastener; The curved piezoelectric element that shakes is two subregion incentive structures, comprises curved shake piezoelectric ceramic piece and electrode slice; Said curved piezoelectric ceramic piece and the electrode slice of shaking is the even number sheet, and the curved alternate setting with electrode slice of piezoelectric ceramic piece of shaking, the polarization border coordination setting of each curved piezoelectric ceramic piece that shakes, simultaneously adjacent two bend the piezoelectric ceramic pieces that shake positive and negative polarized area arranged alternate.
5. the electric excitation mode of the rotary ultrasonic motor of the said curved oscillator excitation of a claim 1; It is characterized in that; Respectively the curved oscillator of four piezoelectricity is divided into two phases: wherein the curved oscillator of the piezoelectricity of two alternate settings is a phase; Under the effect of one road driving voltage signal, be inspired flexural vibration mode in the A profile, and the curved oscillator of the piezoelectricity of remaining two alternate settings is another phase, under the effect of another road driving voltage signal, is inspired Type B in-plane bending vibration mode; The two-way driving voltage signal that is applied is the same sinusoidal signal frequently of the two-way of pi/2 phase difference; Flexural vibration mode has identical or approaching resonance frequency with Type B in-plane bending vibration mode in the A profile; Impel the conical surface of the biconical surface structure of top annulus to produce the row wave motion; Cause the particle on this conical surface to have oval-shaped movement locus, promote rotor assembly and rotate.
CN201210161697.1A 2012-05-22 2012-05-22 The rotary ultrasonic motor of bending vibration excitation and electric excitation mode thereof Expired - Fee Related CN102710167B (en)

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Cited By (7)

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CN103916045A (en) * 2014-02-21 2014-07-09 西安交通大学 Stepping type rotation driving device and method on basis of piezoelectric ceramics
CN106160566A (en) * 2016-07-11 2016-11-23 南京航空航天大学 A kind of traveling wave type ultrasonic motor based on piezoelectric stack type of drive
CN107592029A (en) * 2017-10-25 2018-01-16 南昌航空大学 Plane ultrasonic motor and its operation mode based on the driving of ability to speak shape piezoelectric vibrator
CN108270369A (en) * 2018-02-28 2018-07-10 华侨大学 A kind of differential rotary piezoelectric stepper motor and electric excitation mode
CN110661445A (en) * 2019-09-12 2020-01-07 重庆邮电大学 Parallel three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof
CN112217415A (en) * 2019-07-09 2021-01-12 重庆邮电大学 Frame type three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof
CN113852293A (en) * 2021-09-27 2021-12-28 安徽见行科技有限公司 Rotary traveling wave ultrasonic motor

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CN101707444A (en) * 2009-11-12 2010-05-12 南京航空航天大学 In-plane traveling wave rotary ultrasonic motor and control method
CN202663321U (en) * 2012-05-22 2013-01-09 南京航空航天大学 Rotary ultrasonic motor excited by bending oscillators

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JPH1080165A (en) * 1996-09-05 1998-03-24 Minolta Co Ltd Rotary type driving equipment using electro-mechanical transducer
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Publication number Priority date Publication date Assignee Title
CN103916045A (en) * 2014-02-21 2014-07-09 西安交通大学 Stepping type rotation driving device and method on basis of piezoelectric ceramics
CN103916045B (en) * 2014-02-21 2015-02-25 西安交通大学 Stepping type rotation driving device and method on basis of piezoelectric ceramics
CN106160566A (en) * 2016-07-11 2016-11-23 南京航空航天大学 A kind of traveling wave type ultrasonic motor based on piezoelectric stack type of drive
CN106160566B (en) * 2016-07-11 2019-01-29 南京航空航天大学 A kind of traveling wave type ultrasonic motor based on piezoelectric stack driving method
CN107592029A (en) * 2017-10-25 2018-01-16 南昌航空大学 Plane ultrasonic motor and its operation mode based on the driving of ability to speak shape piezoelectric vibrator
CN107592029B (en) * 2017-10-25 2023-06-23 南昌航空大学 Planar ultrasonic motor driven by tooth-shaped piezoelectric vibrator and working mode thereof
CN108270369A (en) * 2018-02-28 2018-07-10 华侨大学 A kind of differential rotary piezoelectric stepper motor and electric excitation mode
CN108270369B (en) * 2018-02-28 2023-06-20 华侨大学 Differential rotation piezoelectric stepping motor and electric excitation mode
CN112217415A (en) * 2019-07-09 2021-01-12 重庆邮电大学 Frame type three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof
CN110661445A (en) * 2019-09-12 2020-01-07 重庆邮电大学 Parallel three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof
CN113852293A (en) * 2021-09-27 2021-12-28 安徽见行科技有限公司 Rotary traveling wave ultrasonic motor

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