CN102693888A - Preparation method of ceramic soft X ray tube - Google Patents

Preparation method of ceramic soft X ray tube Download PDF

Info

Publication number
CN102693888A
CN102693888A CN2011100713518A CN201110071351A CN102693888A CN 102693888 A CN102693888 A CN 102693888A CN 2011100713518 A CN2011100713518 A CN 2011100713518A CN 201110071351 A CN201110071351 A CN 201110071351A CN 102693888 A CN102693888 A CN 102693888A
Authority
CN
China
Prior art keywords
ceramic
tube
earthenware
adopt
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011100713518A
Other languages
Chinese (zh)
Inventor
方钢群
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN2011100713518A priority Critical patent/CN102693888A/en
Publication of CN102693888A publication Critical patent/CN102693888A/en
Pending legal-status Critical Current

Links

Images

Abstract

The present invention relates to the field of nondestructive testing X ray imaging, and provides a preparation method of a ceramic soft X ray tube. The ceramic soft X ray tube is composed of a ceramic tube, an anode kovar ring, a side window, a cathode shielding tube, a cathode filament, a cathodic shielding cylinder lead column and a cathode filament lead column. Especially, 90%-95% alumina containing ceramic is subjected to hot die casting to make the ceramic tube, in a hydrogen brazing furnace, the ceramic tube is subjected to Mo-Mn method metalization, and then nickel plating and nickel burning protection are carried out on a metalized ceramic surface. By using a low expansion alloy 4J33, the anode kovar ring is welded on an end face of a metalized ceramic pipe. The cathode filament is made through adopting tungsten filament winding and burning hydrogen typing, and spot welding of tantalum and niobium sheets outside of a cathode heat shielder is carried out to make a support. Titanium sheets are employed to be a material of the side window. In a vacuum high frequency furnace, a two-vortex-sheet type mechanical pump and a turbine molecular pump are employed to carry out high vacuum exhaustion, the titanium sheets are welded on the anode kovar ring by using AgCu solder, and sealing is carried out. The present invention provides the preparation method of the ceramic soft X ray tube.

Description

A kind of preparation method of ceramic grenz tube
(1) technical field: the preparation method who the present invention relates to Non-Destructive Testing x-ray imaging system, particularly a kind of ceramic grenz tube.
(2) background technology: the grenz tube that is applied in the Non-Destructive Testing x-ray imaging system in the present same industry at home mostly adopts the glass grenz tube; Problems such as that the glass grenz tube exists is frangible, processing sealing-in difficulty, rate of finished products are low cause that the grenz tube production cost is high, useful life is short.
(3) summary of the invention: the object of the invention just provides a kind of preparation method of ceramic grenz tube.
The inventive method comprises the steps:
1. ceramics injection is cast type and make earthenware; Coated with metal coating on the earthenware shell is put into hydrogen brazing furnace and is heated to 1350-1550 ℃ again, is incubated 30-60 minute, and natural cooling makes ceramic surface have metalline then; Carry out nickel plating on the metallized ceramic surface again,, be incubated 10-20 minute, then natural cooling in 950-1050 ℃ of burning nickel.
2. anode can be cut down ring, in hydrogen brazing furnace, adopt low-expansion alloy 4J33 to be welded on the metallized earthenware end face.
3. cathode filament adopts the coiling of 0.02-0.05 tungsten filament, is incubated 10-20 minute down at 1150-1250 ℃, the annealing in hydrogen atmosphere typing, and spot welding tantalum niobium skin is done support outside the negative electrode heat shielding.
4. adopt 0.01mm-0.02mm titanium skin as the end window material, in the vacuum coreless induction furnace, adopt two rotary vane mechanical pumps and turbomolecular pump high vacuum exhaustion, adopt the AgCu scolder that the titanium skin is welded on anode and can cut down on the ring, carry out sealing-in; Promptly make ceramic grenz tube.
Described earthenware adopts and contains the making of 90%-95% aluminium oxide ceramics.
Described earthenware adopts Mo-Mn method metalized.
Described sealing-in vacuum degree reaches 1 * 10 -5Pa-1 * 10 -6Pa.
The present invention has following characteristics:
1. adopt ceramic cartridge to replace the glass shell, solve the problem that the glass grenz tube is frangible, useful life is short that adopts.
2. adopt the Mo-Mn method to the earthenware metalized and carry out nickel plating, burn nickel, nickel coating has improved the flowability of scolder, helps AgCu wets metal layer and stops metal layer to be corroded by brazing alloy, with the protection metal layer.
3. adopt the titanium skin as the end window material.
(4) description of drawings:
Fig. 1 is a general structure sketch map of the present invention;
Among the figure: 1, end window 2, anode can cut down ring 3, ceramic cartridge 4, cathode filament
5, cathode screen tube 6, heater lead post 7, shielding cylinder stem
(5) embodiment:
1. adopt and contain 95% aluminium oxide ceramics hot die-casting molding making earthenware; Coated with metal coating on the earthenware shell is put into hydrogen brazing furnace and is heated to 1550 ℃ again, is incubated 45 minutes, and natural cooling makes ceramic surface have metalline then; Carry out nickel plating on the metallized ceramic surface again,, be incubated 15 minutes, then natural cooling in 1050 ℃ of burning nickel.
2. anode can be cut down ring, in hydrogen brazing furnace, adopt low-expansion alloy 4J33 to be welded on the metallized earthenware end face.
3. cathode filament adopts 0.02 tungsten filament coiling, is incubated 15 minutes down at 1200 ℃, the annealing in hydrogen atmosphere typing, and spot welding tantalum niobium skin is done support outside the negative electrode heat shielding.
4. adopt 0.01mm titanium skin as the end window material, in the vacuum coreless induction furnace, adopt two rotary vane mechanical pumps and turbomolecular pump high vacuum exhaustion, adopt the AgCu28 scolder that the titanium skin is welded on anode and can cut down on the ring, carry out sealing-in; Promptly make ceramic grenz tube.

Claims (4)

1. the preparation method of a ceramic grenz tube is characterized in that may further comprise the steps:
(1) ceramics injection is cast type and make earthenware; Coated with metal coating on the earthenware shell is put into hydrogen brazing furnace and is heated to 1350-1550 ℃ again, is incubated 30-60 minute, and natural cooling makes ceramic surface have metalline then; Carry out nickel plating on the metallized ceramic surface again,, be incubated 10-20 minute, then natural cooling in 950-1050 ℃ of burning nickel.
(2) anode can be cut down ring, in hydrogen brazing furnace, adopt low-expansion alloy 4J33 to be welded on the metallized earthenware end face.
(3) cathode filament adopts the coiling of 0.02-0.05 tungsten filament, is incubated 10-20 minute down at 1150-1250 ℃, the annealing in hydrogen atmosphere typing, and spot welding tantalum niobium skin is done support outside the negative electrode heat shielding.
(4) adopt 0.01mm-0.02mm titanium skin as the end window material, in the vacuum coreless induction furnace, adopt two rotary vane mechanical pumps and turbomolecular pump high vacuum exhaustion, adopt the AgCu scolder that the titanium skin is welded on anode and can cut down on the ring, carry out sealing-in; Promptly make ceramic grenz tube.
2. earthenware according to claim 1 adopts and contains the making of 90%-95% aluminium oxide ceramics.
3. earthenware according to claim 1 adopts Mo-Mn method metalized.
4. sealing-in vacuum degree according to claim 1 reaches 1 * 10 -5Pa-1 * 10 -6Pa.
CN2011100713518A 2011-03-24 2011-03-24 Preparation method of ceramic soft X ray tube Pending CN102693888A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011100713518A CN102693888A (en) 2011-03-24 2011-03-24 Preparation method of ceramic soft X ray tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011100713518A CN102693888A (en) 2011-03-24 2011-03-24 Preparation method of ceramic soft X ray tube

Publications (1)

Publication Number Publication Date
CN102693888A true CN102693888A (en) 2012-09-26

Family

ID=46859254

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011100713518A Pending CN102693888A (en) 2011-03-24 2011-03-24 Preparation method of ceramic soft X ray tube

Country Status (1)

Country Link
CN (1) CN102693888A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103794431A (en) * 2014-01-17 2014-05-14 杭州凯龙医疗器械有限公司 X-ray tube lamp filament shaping device and shaping method
CN104889519A (en) * 2015-04-24 2015-09-09 黄石上方检测设备有限公司 Highly-efficient, energy-saving and environmentally-friendly manufacturing method of metal ceramic X ray tube
CN106583924A (en) * 2016-12-23 2017-04-26 苏州大学 Laser sealing method of glass and kovar alloy and sealing body
CN108218463A (en) * 2018-02-01 2018-06-29 深圳市宏钢机械设备有限公司 A kind of AlN ceramic and the method for oxygen-free copper sealing-in
CN108851461A (en) * 2017-05-10 2018-11-23 戴森技术有限公司 heater
CN113000963A (en) * 2021-03-29 2021-06-22 杭州凯龙医疗器械有限公司 Welding method for titanium window of CT tube
CN113543448A (en) * 2021-07-16 2021-10-22 西安冠能中子探测技术有限公司 High-yield self-targeting D-D neutron tube and manufacturing method thereof
US11589661B2 (en) 2017-01-12 2023-02-28 Dyson Technology Limited Hand held appliance

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0723281A1 (en) * 1995-01-19 1996-07-24 Hamamatsu Photonics K.K. Method of bonding amorphous carbon material with metal material or ceramic material and electron tube device
US6015325A (en) * 1995-12-25 2000-01-18 Hamamatsu Photonics K.K. Method for manufacturing transmission type X-ray tube
US6044130A (en) * 1995-12-25 2000-03-28 Hamamatsu Photonics K.K. Transmission type X-ray tube
EP1037247A1 (en) * 1997-12-04 2000-09-20 Hamamatsu Photonics K. K. X-ray tube manufacturing method
US6487272B1 (en) * 1999-02-19 2002-11-26 Kabushiki Kaisha Toshiba Penetrating type X-ray tube and manufacturing method thereof
CN1619759A (en) * 2003-11-17 2005-05-25 釜山科技园财团法人 Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes
CN2746516Y (en) * 2004-10-26 2005-12-14 *** Firmed environmental protection fixed anode X-ray tube

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0723281A1 (en) * 1995-01-19 1996-07-24 Hamamatsu Photonics K.K. Method of bonding amorphous carbon material with metal material or ceramic material and electron tube device
US6015325A (en) * 1995-12-25 2000-01-18 Hamamatsu Photonics K.K. Method for manufacturing transmission type X-ray tube
US6044130A (en) * 1995-12-25 2000-03-28 Hamamatsu Photonics K.K. Transmission type X-ray tube
EP1037247A1 (en) * 1997-12-04 2000-09-20 Hamamatsu Photonics K. K. X-ray tube manufacturing method
US6487272B1 (en) * 1999-02-19 2002-11-26 Kabushiki Kaisha Toshiba Penetrating type X-ray tube and manufacturing method thereof
CN1619759A (en) * 2003-11-17 2005-05-25 釜山科技园财团法人 Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes
CN2746516Y (en) * 2004-10-26 2005-12-14 *** Firmed environmental protection fixed anode X-ray tube

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
华中一 等: "《高真空技术与设备》", 30 April 1959, 上海科学技术出版社 *
孙大明 等: "钨丝烧氢定型温度对白炽灯寿命的影响", 《安徽大学学报(自然科学版)》 *
邓德标 等: "卤钨灯灯丝设计与加工", 《中国照明电器》 *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103794431A (en) * 2014-01-17 2014-05-14 杭州凯龙医疗器械有限公司 X-ray tube lamp filament shaping device and shaping method
CN103794431B (en) * 2014-01-17 2016-04-13 杭州凯龙医疗器械有限公司 A kind of X-ray tube filament shaping device and method for shaping thereof
CN104889519A (en) * 2015-04-24 2015-09-09 黄石上方检测设备有限公司 Highly-efficient, energy-saving and environmentally-friendly manufacturing method of metal ceramic X ray tube
CN106583924A (en) * 2016-12-23 2017-04-26 苏州大学 Laser sealing method of glass and kovar alloy and sealing body
CN106583924B (en) * 2016-12-23 2018-06-29 苏州大学 A kind of glass and the laser method for sealing of kovar alloy and sealing-in body
US11589661B2 (en) 2017-01-12 2023-02-28 Dyson Technology Limited Hand held appliance
US11712098B2 (en) 2017-01-12 2023-08-01 Dyson Technology Limited Hand held appliance
CN108851461A (en) * 2017-05-10 2018-11-23 戴森技术有限公司 heater
CN108218463A (en) * 2018-02-01 2018-06-29 深圳市宏钢机械设备有限公司 A kind of AlN ceramic and the method for oxygen-free copper sealing-in
CN113000963A (en) * 2021-03-29 2021-06-22 杭州凯龙医疗器械有限公司 Welding method for titanium window of CT tube
CN113000963B (en) * 2021-03-29 2022-07-22 杭州凯龙医疗器械有限公司 Welding method for titanium window of CT tube
CN113543448A (en) * 2021-07-16 2021-10-22 西安冠能中子探测技术有限公司 High-yield self-targeting D-D neutron tube and manufacturing method thereof

Similar Documents

Publication Publication Date Title
CN102693888A (en) Preparation method of ceramic soft X ray tube
JP6480806B2 (en) Method for bonding ceramic and metal and sealing structure thereof
US3531853A (en) Method of making a ceramic-to-metal seal
JPS594825B2 (en) X-ray tube anode and its manufacturing method
CN101789534B (en) High power box-shaped window
CN108907630B (en) Manufacturing method of W/Mo/graphite composite anode target material for X-ray tube of CT machine
CN104973879B (en) A kind of Al2O3The method for sealing of ceramics and ceramic sealing alloy
CN109926748A (en) A kind of vacuum observation window of brazing metal sealing-in and preparation method thereof
CN106986650A (en) A kind of microwave of aluminium silicon carbide material and the preparation method of hybrid circuit shell
US5580670A (en) Heavily thermally stressable component
CN106225962A (en) The capacitive pressure transducer that galvanic electricity pole plate is gold-plated
CN104607878A (en) Method for manufacturing W/Cu/CuCrZr composite component
CN104409304B (en) Transmission target for X-ray tube of industrial CT (Computed Tomography) machine and preparation method thereof
JP4258309B2 (en) Susceptor for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus equipped with the same
CN217809209U (en) Aluminum oxide ceramic and metal seal welding piece with coaxial structure
CN206161203U (en) Capacitive pressure sensor with graded seal ring
CN106353014A (en) Capacitive pressure transducer with transition welding ring
CN111229058B (en) Preparation process of ceramic composite membrane with metal protective layer
CN209626638U (en) A kind of 400W laser list pumping source ceramic package shell
EP1686614B1 (en) Ceramic discharge vessel having tungsten alloy feedthrough
CN206271657U (en) For the ceramic material and solder bonding metal component of X-ray tube
US3866280A (en) Method of manufacturing high pressure sodium arc discharge lamp
US3202493A (en) Art of sealing quartz to metal
CN203071040U (en) Electron gun shell structure resistant to temperature shock
RU2760320C1 (en) Method for manufacturing a vacuum-tight beryllium outlet window

Legal Events

Date Code Title Description
DD01 Delivery of document by public notice

Addressee: Fang Gangqun

Document name: Notification of Passing Preliminary Examination of the Application for Invention

C06 Publication
PB01 Publication
DD01 Delivery of document by public notice

Addressee: Fang Gangqun

Document name: Notification that Application Deemed not to be Proposed

C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
DD01 Delivery of document by public notice

Addressee: Fang Gangqun

Document name: Notification of Publication and of Entering the Substantive Examination Stage of the Application for Invention

C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20120926